CN219365829U

CN219365829U - Vacuum lifting and translation cover closing mechanism

Info

Publication number: CN219365829U
Application number: CN202320576470.7U
Authority: CN
Inventors: 雍晓龙; 张义颖; 何奇
Original assignee: Pico Semiconductor Suzhou Co ltd
Current assignee: Pico Semiconductor Suzhou Co ltd
Priority date: 2023-03-22
Filing date: 2023-03-22
Publication date: 2023-07-18
Anticipated expiration: 2033-03-22

Abstract

The utility model relates to a vacuum lifting and translation cover closing mechanism which comprises a bottom plate, wherein two vertical plates are fixedly connected to the top of the bottom plate, guide strips are fixedly connected to one sides of the two vertical plates, which are opposite, sliding sleeves are connected between the two guide strips in a sliding manner, lifting components are arranged on the bottom plate and the sliding sleeves, a door plate is fixedly connected to the top of the lifting component, and limiters are fixedly connected to one sides of the two vertical plates, which are opposite. This vacuum lift and translation close lid mechanism, when the cylinder upwards opens the stroke, the follower is pushing the connecting plate and upwards moving, because reset assembly is pulling the door plant, the door plant follows the upward movement this moment, and the horizontal direction does not move, and when the door plant risees to the stopper and blocks the position, the follower continues the upward movement, and the pulling force of reset assembly is overcome to follower thrust this moment, and the door plant is pushed by the level, realizes the horizontal action of closing the door, and overall structure has realized vacuum lift and translation and has closed the energy-conserving effect of lid mechanism.

Description

Vacuum lifting and translation cover closing mechanism

Technical Field

The utility model relates to the technical field of atomic layer deposition equipment, in particular to a vacuum lifting and translation cover closing mechanism.

Background

Atomic layer deposition is a process by which substances can be plated onto a substrate surface layer by layer in the form of monoatomic films.

The inner cavity of the atomic layer deposition equipment is required to be parallel to the cavity as much as possible when the cover is closed, in order to leave an operating space for a manipulator to get and put a piece, the whole in the height direction is required to be yielded when the door is opened, a certain horizontal pressure is required to compress a sealing ring so as to realize sealing, and the traditional atomic layer deposition equipment needs two driving sources to realize the height and horizontal movement of a door plate, so that the waste is relatively caused, and a vacuum lifting and translation cover closing mechanism is provided to solve the problems.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides a vacuum lifting and translation cover closing mechanism, which has the advantages of energy saving and the like, and solves the problems that an inner cavity of an atomic layer deposition device is required to be parallel to a cavity as much as possible when the cover is closed, a manipulator is required to leave an operating space for in and out to take and place a wafer, a height direction is required to be wholly yielded when a door is opened, a sealing ring is required to be compressed by a certain horizontal pressure in order to realize sealing, and the traditional atomic layer deposition device requires two driving sources to realize the height and horizontal movement of a door plate, so that the waste is relatively caused.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the vacuum lifting and translation cover closing mechanism comprises a bottom plate, two vertical plates are fixedly connected to the top of the bottom plate, guide bars are fixedly connected to one opposite sides of the two vertical plates, sliding sleeves are connected between the guide bars in a sliding mode, lifting assemblies are arranged on the bottom plate and the sliding sleeves, door plates are fixedly connected to the top of the lifting assemblies, and limiters are fixedly connected to one opposite sides of the two vertical plates.

The lifting assembly comprises an air cylinder embedded in the inner cavity of the bottom plate, an output shaft of the air cylinder is fixedly connected with a driving block, the left side and the right side of the driving block are fixedly connected with follower wheels, the outer surface of each follower wheel is slidably connected with a connecting plate fixedly connected with the bottom of the sliding sleeve, the inner cavity of the sliding sleeve is slidably connected with two sliding shafts, and reset assemblies are arranged on the sliding shafts and the sliding sleeve.

Further, the door plate is fixedly connected to the tops of the two sliding shafts.

Further, the bottom fixedly connected with connecting rod of drive piece, connecting rod fixed connection is in the surface of cylinder output shaft.

Further, the top fixedly connected with two connecting blocks of connecting rod, connecting block and corresponding gib block sliding connection.

Further, two rectangular spouts have all been seted up to two the opposite one side of gib block, connecting block and sliding sleeve all with rectangular spout looks adaptation.

Further, the inner cavity of the connecting plate is provided with a guide groove, and the guide groove is matched with the follower wheel.

Further, reset the subassembly including with sliding sleeve bottom fixed connection's first extension spring pin, the bottom fixedly connected with second extension spring pin of sliding shaft, be provided with extension spring on first extension spring pin and the second extension spring pin.

Compared with the prior art, the technical scheme of the application has the following beneficial effects:

1. this vacuum lift and translation close lid mechanism, when the cylinder upwards opens the stroke, the follower is pushing the connecting plate and upwards moving, because reset assembly is pulling the door plant, the door plant follows the upward movement this moment, and the horizontal direction does not move, and when the door plant risees to the stopper and blocks the position, the follower continues the upward movement, and the pulling force of reset assembly is overcome to follower thrust this moment, and the door plant is pushed by the level, realizes the horizontal action of closing the door, and overall structure has realized vacuum lift and translation and has closed the energy-conserving effect of lid mechanism.

2. This vacuum lift and translation close lid mechanism has played the guide effect to the output shaft of cylinder through the setting of connecting rod and connecting block, has improved overall structure's stability.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a left side view of the present utility model;

fig. 3 is an enlarged view of the portion a of fig. 2 in accordance with the present utility model.

In the figure: 1. a bottom plate; 2. a riser; 3. a guide bar; 4. a lifting assembly; 41. a cylinder; 42. a driving block; 43. a follower wheel; 44. a connecting plate; 441. a guide groove; 45. a sliding shaft; 46. a reset assembly; 461. a first tension spring pin; 462. a second tension spring pin; 463. a tension spring; 5. a sliding sleeve; 6. a door panel; 7. a limiter; 8. a connecting rod; 9. and (5) connecting a block.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Embodiment one: referring to fig. 1, 2 and 3, the vacuum lifting and translating cover closing mechanism in this embodiment includes a bottom plate 1, two risers 2 are fixedly connected to the top of the bottom plate 1, two guide strips 3 are fixedly connected to opposite sides of the two risers 2, a sliding sleeve 5 is slidably connected between the two guide strips 3, lifting assemblies 4 are arranged on the bottom plate 1 and the sliding sleeve 5, a door plate 6 is fixedly connected to the top of the lifting assemblies 4, and a limiter 7 is fixedly connected to opposite sides of the two risers 2.

The lifting assembly 4 comprises an air cylinder 41 embedded in the inner cavity of the bottom plate 1, an output shaft of the air cylinder 41 is fixedly connected with a driving block 42, the left side and the right side of the driving block 42 are fixedly connected with a follower 43, a guide groove 441 is formed in the inner cavity of a connecting plate 44, the guide groove 441 is matched with the follower 43, the guide groove 441 plays a guide role on the follower 43, after the upward movement of the connecting plate 44 is limited by the limiter 7, when the follower 43 moves upwards, the connecting plate 44 is pushed by the follower 43 to move horizontally; the surface sliding connection of follower 43 has the connecting plate 44 with sliding sleeve 5 bottom fixed connection, and sliding sleeve 5's inner chamber sliding connection has two sliding shafts 45, and door plant 6 fixed connection is provided with reset assembly 46 in the top of two sliding shafts 45, sliding shaft 45 and sliding sleeve 5.

The reset assembly 46 comprises a first tension spring pin 461 fixedly connected with the bottom of the sliding sleeve 5, a second tension spring pin 462 fixedly connected with the bottom of the sliding shaft 45, and tension springs 463 arranged on the first tension spring pin 461 and the second tension spring pin 462.

In this embodiment, the actuating cylinder 41 drives the driving block 42 to move upwards, the follower 43 pushes the connecting plate 44 to move upwards, the door plate 6 is pulled by the tensile force of the tension spring 463, the door plate 6 moves upwards at this time, the horizontal direction does not move, when the door plate 6 rises to the blocking position of the limiter 7, the follower 43 continues to move upwards, the thrust of the follower 43 overcomes the tensile force of the tension spring 463 at this time, and the door plate 6 is pushed horizontally, so as to realize the horizontal door closing action; the horizontal and vertical movement of the door panel 6 can be realized only by one driving source of the air cylinder 41, and the energy is saved.

Embodiment two: referring to fig. 1 and 2, a connecting rod 8 is fixedly connected to the bottom of the driving block 42 in the present embodiment, the connecting rod 8 is fixedly connected to the outer surface of the output shaft of the cylinder 41, two connecting blocks 9 are fixedly connected to the top of the connecting rod 8, and the connecting blocks 9 are slidably connected to the corresponding guide bars 3. The rectangular spout has all been seted up to the opposite one side of two gibs 3, and connecting block 9 and sliding sleeve 5 all with rectangular spout looks adaptation.

In this embodiment, the setting of connecting rod 8 and connecting block 9 plays the guide effect to the output shaft of cylinder 41 through the setting of connecting rod 8 and connecting block 9, has improved overall structure's stability.

Wherein, the front and the back of the sliding shaft 45 are fixedly connected with baffle plates to prevent the sliding shaft 45 from separating from the sliding sleeve 5.

The working principle of the embodiment is as follows:

when the door plate 6 needs to be closed, the actuating cylinder 41 drives the driving block 42 to move upwards, the follower 43 pushes the connecting plate 44 to move upwards, the door plate 6 is pulled by the tensile force of the extension spring 463 on the sliding shaft 45, the door plate 6 moves upwards along the horizontal direction, the door plate 6 does not move, when the door plate 6 rises to the blocking position of the limiter 7, the door plate 6 is limited to continue to move upwards, the follower 43 continues to move upwards, the tensile force of the extension spring 463 is overcome by the thrust of the follower 43, the connecting plate 44 moves horizontally along the guide groove 441, the door plate 6 is pushed horizontally through the sliding of the sliding shaft 45, the horizontal door closing action is achieved, and the whole structure achieves the functions of vacuum lifting and translational cover closing mechanism energy conservation.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. Vacuum lift and translation close lid mechanism, including bottom plate (1), its characterized in that: the top of the bottom plate (1) is fixedly connected with two vertical plates (2), one side, opposite to the vertical plates (2), of each vertical plate is fixedly connected with a guide strip (3), a sliding sleeve (5) is connected between the two guide strips (3) in a sliding mode, lifting assemblies (4) are arranged on the bottom plate (1) and the sliding sleeve (5), the top of each lifting assembly (4) is fixedly connected with a door plate (6), and one side, opposite to the vertical plates (2), of each vertical plate is fixedly connected with a limiter (7);

lifting assembly (4) are including inlaying in cylinder (41) of bottom plate (1) inner chamber, the output shaft fixedly connected with drive block (42) of cylinder (41), the equal fixedly connected with follower (43) in the left and right sides of drive block (42), the surface sliding connection of follower (43) has connecting plate (44) with sliding sleeve (5) bottom fixed connection, the inner chamber sliding connection of sliding sleeve (5) has two sliding shafts (45), be provided with reset assembly (46) on sliding shaft (45) and sliding sleeve (5).

2. The vacuum lift and translation cover closing mechanism of claim 1, wherein: the door plate (6) is fixedly connected to the tops of the two sliding shafts (45).

3. The vacuum lift and translation cover closing mechanism of claim 1, wherein: the bottom of the driving block (42) is fixedly connected with a connecting rod (8), and the connecting rod (8) is fixedly connected to the outer surface of the output shaft of the air cylinder (41).

4. A vacuum lifting and translating cover closing mechanism according to claim 3 wherein: the top fixedly connected with two connecting blocks (9) of connecting rod (8), connecting block (9) and corresponding gib block (3) sliding connection.

5. The vacuum lift and translation capping mechanism of claim 4, wherein: the strip sliding grooves are formed in one side, opposite to the guide strips (3), of each guide strip, and the connecting blocks (9) and the sliding sleeves (5) are matched with the strip sliding grooves.

6. The vacuum lift and translation cover closing mechanism of claim 1, wherein: the inner cavity of the connecting plate (44) is provided with a guide groove (441), and the guide groove (441) is matched with the follower wheel (43).

7. The vacuum lift and translation cover closing mechanism of claim 1, wherein: the reset assembly (46) comprises a first tension spring pin (461) fixedly connected with the bottom of the sliding sleeve (5), a second tension spring pin (462) is fixedly connected with the bottom of the sliding shaft (45), and tension springs (463) are arranged on the first tension spring pin (461) and the second tension spring pin (462).