CN219363876U - Single crystal furnace and cooling system - Google Patents
Single crystal furnace and cooling system Download PDFInfo
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- CN219363876U CN219363876U CN202320224517.3U CN202320224517U CN219363876U CN 219363876 U CN219363876 U CN 219363876U CN 202320224517 U CN202320224517 U CN 202320224517U CN 219363876 U CN219363876 U CN 219363876U
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- 239000013078 crystal Substances 0.000 title claims abstract description 56
- 238000001816 cooling Methods 0.000 title claims abstract description 49
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 133
- 230000001105 regulatory effect Effects 0.000 claims abstract description 35
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000005259 measurement Methods 0.000 claims abstract description 5
- 230000003247 decreasing effect Effects 0.000 claims 1
- 239000000498 cooling water Substances 0.000 abstract description 29
- 238000005265 energy consumption Methods 0.000 abstract description 11
- 238000004891 communication Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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Abstract
The utility model provides a single crystal furnace and a cooling system, wherein the cooling system of the single crystal furnace comprises: a water inlet pipeline and a water return pipeline; the first temperature detection device is arranged on the water inlet pipeline; the second temperature detection device is arranged on the water return pipeline; the regulating valve is arranged on the water inlet pipeline and/or the water return pipeline and is suitable for regulating the flow in the water inlet pipeline and the water return pipeline according to the measurement difference value of the second temperature detection device and the first temperature detection device. In the structure, the cooling system can adjust the flow of cooling water in real time according to the temperature of the single crystal furnace, control the consumption of the cooling water, and reduce the energy consumption of the single crystal furnace.
Description
Technical Field
The utility model relates to the technical field of monocrystalline silicon manufacturing equipment, in particular to a monocrystalline furnace and a cooling system.
Background
Single crystal furnaces are important production facilities in the semiconductor and solar industries. In order to ensure that the furnace body of the single crystal furnace is in a reasonable temperature interval in the production process, the single crystal furnace is generally provided with a water cooling pipeline, and cold water is continuously introduced into the water cooling pipeline when the single crystal furnace runs, so that the furnace body is cooled. In the prior art, water inlet of a water cooling pipeline is manually opened or closed, and water cooling flow is as large as possible for safety of high-temperature equipment. The cooling water consumption of the single crystal furnace is high, the heat loss of the furnace body is also high, and the energy consumption is high.
Disclosure of Invention
Therefore, the utility model aims to overcome the defects of large cooling water consumption and high energy consumption of the single crystal furnace in the prior art, thereby providing the single crystal furnace and the cooling system.
In order to solve the above problems, the present utility model provides a cooling system including: a water inlet pipeline and a water return pipeline; the first temperature detection device is arranged on the water inlet pipeline; the second temperature detection device is arranged on the water return pipeline; the regulating valve is arranged on the water inlet pipeline and/or the water return pipeline and is suitable for regulating the flow in the water inlet pipeline and the water return pipeline according to the measurement difference value of the second temperature detection device and the first temperature detection device.
Optionally, the adjusting valve is configured such that when the measured difference between the second temperature detecting device and the first temperature detecting device is greater than a first preset value, the opening of the adjusting valve increases, and when the measured difference between the second temperature detecting device and the first temperature detecting device is less than a second preset value, the opening of the adjusting valve decreases.
Optionally, the first temperature detecting device and the second temperature detecting device are both temperature sensors.
Optionally, the regulating valve is a pneumatic ball valve.
Optionally, a first flow sensor is arranged on the water inlet pipeline; and/or a second flow sensor is arranged on the water return pipeline.
Optionally, a first pressure sensor is arranged on the water inlet pipeline; and/or a second pressure sensor is arranged on the water return pipeline.
Optionally, the inlet of the water inlet pipeline is provided with a first switch valve, and the outlet of the water return pipeline is provided with a second switch valve.
Optionally, the first switch valve and the second switch valve are both manual ball valves.
The utility model also provides a single crystal furnace, which comprises a furnace body, a cooling pipeline arranged on the furnace body, and the cooling system, wherein the water inlet pipeline is connected with an inlet of the cooling pipeline, and the water return pipeline is connected with an outlet of the cooling pipeline.
Optionally, an overtemperature alarm is arranged on the cooling pipeline.
The utility model has the following advantages:
by utilizing the technical scheme of the utility model, when the cooling system cools the single crystal furnace, the first temperature detection device and the second temperature detection device can respectively detect the water inlet temperature and the water outlet temperature. When the measurement difference value of the two is larger, the temperature of the single crystal furnace is higher, the opening of the regulating valve is increased, the flow rate of cooling water in the water inlet pipeline and the water return pipeline is increased, and the temperature of the single crystal furnace is reduced. When the measurement difference value of the two is smaller, the temperature of the single crystal furnace is relatively lower, the opening of the regulating valve is reduced, the flow rate of cooling water in the water inlet pipeline and the water return pipeline is reduced, the cooling effect is reduced, the single crystal furnace is prevented from losing excessive heat, and therefore the energy consumption of the single crystal furnace is reduced. In the structure, the cooling system can adjust the flow of cooling water in real time according to the temperature of the single crystal furnace, control the consumption of the cooling water, and reduce the energy consumption of the single crystal furnace. Therefore, the technical scheme of the utility model solves the defects of large cooling water consumption and high energy consumption of the single crystal furnace in the prior art.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 shows a schematic structure of a cooling system of a single crystal furnace according to the present utility model.
Reference numerals illustrate:
10. a water inlet pipeline; 20. a water return line; 30. a first temperature detection device; 40. a second temperature detecting means; 50. a regulating valve; 60. a first flow sensor; 70. a second flow sensor; 80. a first pressure sensor; 90. a second pressure sensor; 100. a first switching valve; 110. a second switching valve; 120. a furnace body; 130. a cooling pipeline; 140. an overtemperature alarm.
Detailed Description
The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.
As shown in fig. 1, an embodiment of a cooling system of a single crystal furnace according to the present application includes a water inlet pipe 10, a water return pipe 20, a first temperature detecting device 30, a second temperature detecting device 40, and a regulating valve 50. Wherein, the first temperature detecting device 30 is arranged on the water inlet pipeline 10, and the second temperature detecting device 40 is arranged on the water return pipeline 20. A regulating valve 50 is provided on the water intake line 10 and/or the water return line 20, the regulating valve 50 being adapted to regulate the flow in the water intake line 10 and the water return line 20 based on the measured difference between the second temperature detecting means 40 and the first temperature detecting means 30.
By using the technical scheme of the embodiment, when the cooling system cools the single crystal furnace, the first temperature detecting device 30 and the second temperature detecting device 40 can detect the inlet water temperature and the outlet water temperature respectively. When the measured difference value of the two is larger, the temperature of the single crystal furnace is higher, the opening of the regulating valve 50 is increased, the cooling water flow in the water inlet pipeline 10 and the water return pipeline 20 is increased, and the temperature of the single crystal furnace is reduced. When the measured difference value of the two is smaller, the temperature of the single crystal furnace is relatively lower, at the moment, the opening degree of the regulating valve 50 is reduced, the flow rate of cooling water in the water inlet pipeline 10 and the water return pipeline 20 is reduced, the cooling effect is reduced, the single crystal furnace is prevented from losing excessive heat, and therefore the energy consumption of the single crystal furnace is reduced. In the structure, the cooling system can adjust the flow of cooling water in real time according to the temperature of the single crystal furnace, control the consumption of the cooling water, and reduce the energy consumption of the single crystal furnace. Therefore, the technical scheme of the embodiment solves the defects of large cooling water consumption and high energy consumption of the single crystal furnace in the prior art.
The cooling water in the water tank is introduced from the water inlet pipe 10 and enters the single crystal furnace for heat exchange. After heat exchange, the cooling water flows back to the water tank from the water return line 20. Since water absorbs part of the heat of the single crystal furnace during the flowing process, the water temperature in the water return line 20 is higher than the water temperature in the water inlet line 10, i.e. the measured value of the second temperature detecting means 40 is usually larger than the measured value of the first temperature detecting means 30. The difference between the measured value of the second temperature detecting device 40 and the measured value of the first temperature detecting device 30 can reflect the temperature difference between the inflow water and the return water of the cooling water of the single crystal furnace.
When the difference between the measured value of the second temperature detecting device 40 and the measured value of the first temperature detecting device 30 is larger, it indicates that the temperature of the single crystal furnace is higher, and the cooling water absorbs more heat after passing through the single crystal furnace, so that the temperature rise is higher. When the difference between the measured value of the second temperature detecting device 40 and the measured value of the first temperature detecting device 30 is smaller, the temperature of the single crystal furnace is relatively lower, and the cooling water absorbs less heat after passing through the single crystal furnace, so that the temperature rise is smaller.
Thus in this embodiment, the regulator valve 50 is configured to:
when the measured difference between the second temperature detecting means 40 and the first temperature detecting means 30 is greater than the first preset value, the opening degree of the regulating valve 50 is increased. After the opening of the regulating valve 50 is increased, the flow rate of cooling water in the water inlet pipeline 10 and the water return pipeline 20 is increased, so that the temperature of the single crystal furnace is further reduced, and the temperature of the single crystal furnace is kept in a reasonable interval.
When the measured difference between the second temperature detecting means 40 and the first temperature detecting means 30 is smaller than the second preset value, the opening degree of the regulating valve 50 is reduced. After the opening of the regulating valve 50 is reduced, the flow of cooling water in the water inlet pipeline 10 and the water return pipeline 20 is reduced, so that excessive cooling water is prevented from taking away the heat of the single crystal furnace, and the energy consumption of the single crystal furnace is reduced.
The first preset value and the second preset value may be set by those skilled in the art according to actual needs, for example, the first preset value may be set to 10 ℃, and the second preset value may be set to 2 ℃.
In the above-mentioned scheme, the adjusting valve 50 adjusts the opening according to the measured difference between the second temperature detecting device 40 and the first temperature detecting device 30, so that the flow of the cooling water can be adjusted according to the actual needs, and the situation that the cooling water is always in a large flow is avoided.
As shown in fig. 1, in the technical solution of the present embodiment, a regulating valve 50 is provided on the water intake pipe 10, and the regulating valve 50 is located at a position upstream of the first temperature detecting device 30.
Since the water inlet line 10 and the water return line 20 are in communication, in some embodiments, not shown, the regulator valve 50 may be configured in other ways:
for example, a regulating valve 50 may also be provided on the return line 20;
for another example, the number of the regulating valves 50 may be two, wherein one regulating valve 50 is disposed on the water inlet pipe 10 and the other regulating valve 50 is disposed on the water return pipe.
Preferably, the first temperature detecting means 30 and the second temperature detecting means 40 in this example are both temperature sensors.
Preferably, the regulator valve 50 in this embodiment is a pneumatic ball valve.
Further, the first temperature detecting device 30, the second temperature detecting device 40 and the regulating valve 50 are all connected with a control system, and realize automatic control of the cooling water flow. Specifically, the measured value of the first temperature detecting device 30 and the measured value of the second temperature detecting device 40 are transmitted to the control device. The control device calculates the difference between the two measured values and compares the calculated result with a preset value in the control system. As described above, if the measured difference between the second temperature detecting means 40 and the first temperature detecting means 30 is greater than the first preset value, the control means controls the opening degree of the regulating valve 50 to be increased. If the measured difference between the second temperature detecting means 40 and the first temperature detecting means 30 is smaller than the second preset value, the control means controls the opening degree of the regulating valve 50 to be reduced.
As shown in fig. 1, in the technical solution of the present embodiment, a first flow sensor 60 is provided on the water intake pipe 10, and a second flow sensor 70 is provided on the water return pipe 20.
The first flow sensor 60 is connected to the control system for detecting the flow rate in the water inlet pipe 10, so as to determine whether there is an error in the flow rate adjustment of the water inlet pipe 10 and whether there is water leakage in the water inlet pipe 10.
The second flow sensor 70 is connected to the control system for detecting the flow rate in the water return line 20, so as to determine whether there is an error in the flow rate adjustment of the water return line 20 and whether there is water leakage in the water return line 20.
Since the water inlet line 10 and the water return line 20 are in communication, in some embodiments not shown, the first flow sensor 60 may be provided only on the water inlet line 10, or the second flow sensor 70 may be provided only on the water return line 20.
As shown in fig. 1, in the technical solution of the present embodiment, a first pressure sensor 80 is provided on the water intake pipe 10, and a second pressure sensor 90 is provided on the water return pipe 20.
The first pressure sensor 80 is connected to the control system described above, and detects the pressure in the water intake pipe 10, thereby determining whether there is an abnormality in the pressure in the water intake pipe 10. The control system gives an alarm when the pressure in the water inlet line 10 is detected to be too high or too low.
The second pressure sensor 90 is connected to the control system for detecting the pressure in the water return line 20, and determining whether the pressure in the water return line 20 is abnormal. The control system sounds an alarm when the pressure in the return line 20 is detected to be too high or too low.
Since the water intake line 10 and the water return line 20 are in communication, in some embodiments, which are not shown, it is also possible to provide only the first pressure sensor 80 on the water intake line 10, or to provide only the second pressure sensor 90 on the water return line 20.
As can be seen from fig. 1, the first flow sensor 60 is located at a position downstream of the regulator valve 50, the first temperature detecting means 30 is located at a position downstream of the first flow sensor 60, and the first pressure sensor 80 is located at a position downstream of the first temperature detecting means 30. The second temperature detecting means 40 is located at a position downstream of the second pressure sensor 90, and the second flow sensor 70 is located at a position downstream of the second temperature detecting means 40.
As shown in fig. 1, in the technical solution of the present embodiment, the inlet of the water inlet pipe 10 is provided with a first switch valve 100, and the outlet of the water return pipe 20 is provided with a second switch valve 110. The first switching valve 100 can disconnect or communicate the water intake pipe 10 with the waterway, and the second switching valve 110 can disconnect or communicate the water return pipe 20 with the waterway. When the single crystal furnace needs maintenance or transportation, the first and second switching valves 100 and 110 may be operated to disconnect the single crystal furnace from the waterway.
Preferably, the first switching valve 100 and the second switching valve 110 are manual ball valves, so that manual operations are facilitated.
As shown in fig. 1, the embodiment of the single crystal furnace according to the present application further provides a single crystal furnace, which includes a furnace body 120, a cooling pipeline 130 disposed on the furnace body 120, and the cooling system described above, where the water inlet pipeline 10 is connected to an inlet of the cooling pipeline 130, and the water return pipeline 20 is connected to an outlet of the cooling pipeline 130.
In the present embodiment, the cooling water enters the cooling line 130 from the water inlet line 10, exchanges heat with the furnace body 120 in the cooling line 130, and is discharged from the water return line 20. The first temperature detecting means 30 and the second temperature detecting means 40 are capable of detecting the inlet water temperature and the outlet water temperature, respectively. When the measured difference value of the two is larger, the temperature of the single crystal furnace is higher, the opening of the regulating valve 50 is increased, the cooling water flow in the water inlet pipeline 10 and the water return pipeline 20 is increased, and the temperature of the single crystal furnace is reduced. When the measured difference value of the two is smaller, the temperature of the single crystal furnace is relatively lower, at the moment, the opening degree of the regulating valve 50 is reduced, the flow rate of cooling water in the water inlet pipeline 10 and the water return pipeline 20 is reduced, the cooling effect is reduced, the single crystal furnace is prevented from losing excessive heat, and therefore the energy consumption of the single crystal furnace is reduced.
As shown in fig. 1, in the technical solution of the present embodiment, an overtemperature alarm 140 is provided on the cooling pipeline 130. The overtemperature alarm 140 is connected with the control device and is used for detecting the temperature of the cooling pipeline 130. When the temperature on the cooling line 130 is high, indicating that the furnace body 120 is high, the control system sounds an alarm.
In light of the above, the present patent application has the following advantages:
1. the flow of cooling water is controllable, the temperature of the equipment is properly increased in an allowable range, the heat loss is reduced, and the heat preservation heating power is reduced;
2. a temperature sensor is added in the water inlet and outlet paths to protect the temperature of equipment from abnormality, and the temperature abnormality of the water paths is directly alarmed;
3. the water inlet and outlet ways are additionally provided with flow sensors, errors exist in the water inlet and outlet flow of the monitoring equipment, and water leakage exists between the water ways of the monitoring equipment.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.
Claims (10)
1. A cooling system, comprising:
a water inlet pipeline (10) and a water return pipeline (20);
a first temperature detection device (30) arranged on the water inlet pipeline (10);
a second temperature detection device (40) provided on the water return line (20);
and the regulating valve (50) is arranged on the water inlet pipeline (10) and/or the water return pipeline (20), and the regulating valve (50) is suitable for regulating the flow in the water inlet pipeline (10) and the water return pipeline (20) according to the measurement difference value of the second temperature detection device (40) and the first temperature detection device (30).
2. The cooling system according to claim 1, wherein the regulating valve (50) is configured such that when a measured difference between the second temperature detecting means (40) and the first temperature detecting means (30) is larger than a first preset value, an opening degree of the regulating valve (50) is increased, and when a measured difference between the second temperature detecting means (40) and the first temperature detecting means (30) is smaller than a second preset value, the opening degree of the regulating valve (50) is decreased.
3. The cooling system according to claim 1, wherein the first temperature detecting means (30) and the second temperature detecting means (40) are both temperature sensors.
4. The cooling system according to claim 1, characterized in that the regulating valve (50) is a pneumatic ball valve.
5. The cooling system according to any one of claims 1 to 4, characterized in that a first flow sensor (60) is provided on the water inlet line (10); and/or a second flow sensor (70) is arranged on the water return pipeline (20).
6. The cooling system according to any one of claims 1 to 4, characterized in that a first pressure sensor (80) is provided on the water inlet line (10); and/or a second pressure sensor (90) is arranged on the water return pipeline (20).
7. A cooling system according to any one of claims 1-4, characterized in that the inlet of the water inlet line (10) is provided with a first on-off valve (100) and the outlet of the water return line (20) is provided with a second on-off valve (110).
8. The cooling system according to claim 7, wherein the first switching valve (100) and the second switching valve (110) are each manual ball valves.
9. A single crystal furnace, characterized by comprising a furnace body (120), a cooling pipeline (130) arranged on the furnace body (120), and a cooling system according to any one of claims 1 to 8, wherein the water inlet pipeline (10) is connected with an inlet of the cooling pipeline (130), and the water return pipeline (20) is connected with an outlet of the cooling pipeline (130).
10. The single crystal furnace according to claim 9, characterized in that an overtemperature alarm (140) is arranged on the cooling pipeline (130).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320224517.3U CN219363876U (en) | 2023-02-15 | 2023-02-15 | Single crystal furnace and cooling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320224517.3U CN219363876U (en) | 2023-02-15 | 2023-02-15 | Single crystal furnace and cooling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219363876U true CN219363876U (en) | 2023-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320224517.3U Active CN219363876U (en) | 2023-02-15 | 2023-02-15 | Single crystal furnace and cooling system |
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| Country | Link |
|---|---|
| CN (1) | CN219363876U (en) |
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2023
- 2023-02-15 CN CN202320224517.3U patent/CN219363876U/en active Active
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Effective date of registration: 20231212 Address after: 412000 South 1st span factory building on the southwest side of the intersection of Qingxia Road and Old Industrial Road, Tongtangwan Street, Shifeng District, Zhuzhou City, Hunan Province Patentee after: Zhuzhou Sany Silicon Energy Technology Co.,Ltd. Address before: Room 518-50, Building 1, Longxin International, No. 255, Tongxia Road, Tongtangwan Street, Zhuzhou City, Hunan Province, 412005 Patentee before: Sany Silicon Energy (Zhuzhou) Co.,Ltd. |