CN219363784U - Coating support and coating machine - Google Patents

Abstract

The utility model discloses a coating bracket which comprises a coating bracket body arranged in a vacuum chamber of a coating machine, wherein the coating bracket body comprises a rotating body and a supporting sleeve fixed in the vacuum chamber, the rotating body is rotationally connected in the supporting sleeve through a bearing assembly, the upper end of the rotating body is connected with a driving device in the coating machine, the lower end of the rotating body extends to the outside of the supporting sleeve and is connected with a fixing disc for fixing a workpiece to be coated, and a shoulder part for transmitting vertical tensile force to the supporting sleeve is arranged on the rotating body. The utility model is used for improving the vertical bearing capacity of the coating bracket, so that the main shaft can bear a coating part with larger weight, simultaneously, partial vertical force is transmitted, the vertical force borne by the main shaft is reduced, the rotation flexibility of the fixed disc is ensured, and the coating quality and efficiency are improved.

Description

Coating support and coating machine

Technical Field

The utility model relates to the technical field of coating devices, in particular to a coating bracket and a coating machine.

Background

Sputtering is the use of energetic particles (e.g., ions) to bombard the surface of a sputtering target, causing the bombarded particles (e.g., atoms, ions, etc.) to deposit on the surface of the workpiece. Sputtering is widely used in industry because of its advantages of good deposition efficiency, precise control of components, and low manufacturing cost. The plating bracket is usually used for fixing the plating piece in the sputtering process.

The coating bracket comprises a main shaft and a fixed disc arranged at the lower end of the main shaft. One end of the main shaft is connected with the driving device. The fixed disk is opposite to the sputtering target and is used for fixing the plating piece. When sputtering, the main shaft rotates with the sputtering target as the center under the drive of the driving device, so that the plating piece fixed on the fixed disk is driven to rotate around the sputtering target, and the plating of the plating piece is realized.

However, the vertical force caused by the plating part of the existing coating bracket is all applied to the main shaft, so that the main shaft cannot bear certain plating parts with larger weight, and meanwhile, the main shaft bears larger vertical tension to influence the flexibility of the driving device to drive the fixed disc to rotate, so that the quality and efficiency of coating are influenced.

Disclosure of Invention

The utility model aims to provide a coating bracket and a coating machine, which are used for improving the vertical bearing capacity of the coating bracket, bearing a coating piece with larger weight, transmitting part of vertical force, reducing the vertical force born by a main shaft, ensuring the rotation flexibility of a fixed disc and improving the coating quality and efficiency.

In order to solve the technical problems, the utility model adopts the following scheme:

the utility model provides a coating film support, includes the coating film support body of installing in the coating film machine vacuum chamber, the coating film support body include the rotor and with fix the support sleeve in the vacuum chamber, the rotor passes through the bearing assembly rotation and connects in the support sleeve, the rotor upper end is connected with the drive arrangement in the coating film machine, the rotor lower extreme extends to support sleeve outside and is connected with the fixed disk that is used for the fixed work piece of waiting to plate, be equipped with on the rotor and be used for transmitting the shoulder on the support sleeve with vertical pulling force that receives.

By adopting the technical scheme, the supporting sleeve is fixed in the vacuum chamber, the rotating body is rotationally connected in the supporting sleeve, the upper end of the rotating body is connected with the driving device, the lower end of the rotating body is connected with the fixed disc, the fixed disc is used for fixing a workpiece to be plated, a sputtering target is correspondingly arranged below the fixed disc, after the workpiece with larger weight is fixed on the fixed disc, the gravity of the workpiece is the vertical tension to the fixed disc, the vertical tension is also applied to the rotating body, the rotating body can transmit the vertical tension to the supporting sleeve, the supporting sleeve bears the part of the vertical tension together, and the supporting sleeve transmits the vertical tension to the coating machine.

Optionally, the rotor includes main shaft and rotation seat, and the main shaft is connected through the round pin axle can be dismantled with the rotation seat, and the main shaft is located support sleeve upper portion, and the main shaft upper end is connected with drive arrangement, and the rotation seat is located support sleeve lower part, and the rotation seat lower extreme is connected with the fixed disk, and the bearing assembly cover is established in rotation seat circumference, and the shoulder setting is on rotation seat upper portion outer circumference, and the shoulder bottom surface is contacted with bearing assembly upper end.

Optionally, the bearing assembly includes upper bearing, lower bearing and support lantern ring, and upper bearing, lower bearing cover are established respectively and are gone up the lower extreme at the rotation seat, and the support lantern ring sets up between upper bearing, lower bearing, and the shoulder bottom surface contacts with upper bearing housing top surface, and lower bearing bottom surface contacts with the supporting protruding top surface on the supporting sleeve inner circumference.

Optionally, the support sleeve includes sleeve and lower sleeve, and the main shaft is located the sleeve, and the seat of rotating is located the sleeve down, and upper sleeve lower extreme and lower sleeve top screw connection support protruding setting is on the inner circumference of sleeve lower extreme down.

Optionally, the bottom surface screw of lower sleeve is connected with the bottom, is equipped with the through-hole that allows the rotation seat to pass through on the bottom.

Optionally, the upper sleeve is in an inverted T-shaped structure, and the bottom surface of the upper sleeve is adjacent to and does not contact the top surface of the shoulder.

The vacuum chamber is arranged in the coating machine, the coating support comprises any one of the coating supports, the coating support body is positioned in the vacuum chamber, and a corresponding sputtering target is arranged below the coating support body.

The utility model has the beneficial effects that:

1. in the utility model, after a workpiece with larger weight is fixed on the fixed disc, the gravity of the workpiece is the vertical tension to the fixed disc, the vertical tension is also acted on the rotating body, the rotating body can transmit the vertical tension to the supporting sleeve, so that the supporting sleeve bears the part of the vertical tension together, the supporting sleeve transmits the vertical tension to the coating machine, the vertical load of the rotating body is greatly reduced, the rotating body can bear heavier workpieces, meanwhile, under the same power, the driving device can drive the rotating body to rotate more flexibly, the rotation of the workpiece is smoother, and the coating quality and efficiency of the workpiece are improved.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

fig. 2 is a schematic diagram of an assembly structure of the coating bracket body and the coating machine.

Reference numerals: 1-support sleeve, 101-upper sleeve, 102-lower sleeve, 2-rotor, 21-spindle, 22-rotating seat, 3-bearing assembly, 301-upper bearing, 302-lower bearing, 303-support collar, 4-fixed disk, 5-drive, 6-shoulder, 7-bottom cover, 8-screw, 9-support boss, 10-coater, 11-vacuum chamber, 12-sputtering target.

Detailed Description

The present utility model will be described in further detail with reference to examples and drawings, but embodiments of the present utility model are not limited thereto.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inner", "outer", "front", "rear", "top", "bottom", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and for simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present utility model.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "configured," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Example 1

The utility model provides a coating film support, including installing in the coating film machine 10 vacuum chamber 11 coating film support body, the coating film support body includes rotor 2 and with fix in the support sleeve 1 in vacuum chamber 11, rotor 2 passes through bearing assembly 3 rotation and connects in support sleeve 1, rotor 2 upper end is connected with the drive arrangement 5 in the coating film machine 10, rotor 2 lower extreme extends to support sleeve 1 outside and is connected with the fixed disk 4 that is used for the fixed work piece that waits to plate, be equipped with on the rotor 2 and be used for transmitting the shoulder 6 on the support sleeve 1 with vertical pulling force that receives.

In this embodiment, as shown in fig. 1 and 2, on the basis of the existing film plating machine 10, a vacuum chamber 11 is provided in the vacuum chamber 11, a sputtering target 12 is disposed in the vacuum chamber 11, the structure of the sputtering target 12 and the use principle thereof are also in the prior art, the supporting sleeve 1 is fixed in the vacuum chamber 11, the rotating body 2 is rotatably connected in the supporting sleeve 1, the upper end of the rotating body 2 is connected with the driving device 5, the lower end of the rotating body 2 is connected with the fixed disk 4, the fixed disk 4 is used for holding a workpiece to be plated, the sputtering target 12 is correspondingly disposed below the fixed disk 4, after the workpiece with larger weight is held on the fixed disk 4, the gravity of the workpiece is the vertical pulling force to the fixed disk 4, the vertical pulling force also acts on the rotating body 2, the rotating body 2 can transmit the vertical pulling force to the supporting sleeve 1, so that the supporting sleeve 1 jointly bears the vertical pulling force, and the supporting sleeve 1 transmits the vertical pulling force to the film plating machine 10, thus the vertical load of the rotating body 2 can bear a heavier workpiece, and simultaneously, the vertical load of the rotating body 2 is reduced, the driving device is more flexible and the workpiece is driven by the same power, and the rotating quality is more flexible and the workpiece is driven by the driving device.

Further, the rotator 2 includes a main shaft 21 and a rotating seat 22, the main shaft 21 and the rotating seat 22 are detachably connected through a pin shaft, the main shaft 21 is located at the upper part of the supporting sleeve 1, the upper end of the main shaft 21 is connected with the driving device 5, the rotating seat 22 is located at the lower part of the supporting sleeve 1, the lower end of the rotating seat 22 is connected with the fixed disc 4, the bearing assembly 3 is sleeved on the rotating seat 22 circumferentially, the shoulder 6 is arranged on the outer circumferential surface of the upper part of the rotating seat 22, and the bottom surface of the shoulder 6 is in contact with the upper end of the bearing assembly 3.

Specifically, the rotor 2 mainly includes main shaft 21 and rotation seat 22, main shaft 21 is direct being connected with drive arrangement 5, drive arrangement 5 is the motor, the lower extreme of main shaft 21 adopts the detachable connection of round pin axle with the top surface of rotation seat 22, can drive rotation seat 22 when making main shaft 21 rotate, and then drive the fixed disk 4 rotation of lower extreme, make the work piece that holds on the rotation disk follow and rotate, realize the coating process, main shaft 21 is located the inside of support sleeve 1 upper portion, main shaft 21 upper end and support sleeve 1 upper end rotate and are connected, rotation seat 22 is located the inside of support sleeve 1 lower part, the bearing assembly 3 is established to the cover outside rotation seat 22, bearing assembly 3 card is established in support sleeve 1 lower part, integrated into one piece has outwards convex shoulder 6 on the outer periphery of rotation seat 22 upper end, this shoulder 6 bottom surface contacts with bearing assembly 3, when fixed disk 4 is last to hold heavier work piece, the vertical pulling force that rotation seat 22 will receive passes through shoulder 6 and transmits the work piece on bearing assembly 3, bearing assembly 3 is again with the power transmission to support sleeve 1, thereby on the support sleeve 1, thereby the transmission is to the inside of support sleeve 1 upper portion, in this way, the bearing assembly 3 is more smooth and easy to drive the work piece, the vertical load that can be greatly reduced by the main shaft 21, the work piece is more smooth and more than the work piece is driven by the work piece, the vertical load 21 is more smoothly because the drive quality of the main shaft 21 is more than can be driven simultaneously, and the work piece is more smooth and more convenient.

Further, the bearing assembly 3 includes an upper bearing 301, a lower bearing 302, and a supporting collar 303, the upper bearing 301 and the lower bearing 302 are respectively sleeved at the upper end and the lower end of the rotating seat 22, the supporting collar 303 is disposed between the upper bearing 301 and the lower bearing 302, the bottom surface of the shoulder 6 contacts with the top surface of the upper bearing 301, and the bottom surface of the lower bearing 302 contacts with the top surface of the supporting protrusion 9 on the inner circumferential surface of the supporting sleeve 1. Specifically, the bearing assembly 3 mainly comprises an upper bearing 301, a lower bearing 302 and a supporting collar 303, the upper bearing 301 and the lower bearing 302 are sleeved on the rotating seat 22, the outer ring is clamped in the supporting sleeve 1, so that the rotating seat 22 and the supporting sleeve 1 can rotate more flexibly, the supporting collar 303 is arranged outside the rotating seat 22, the supporting collar 303 pushes the two bearings into the supporting sleeve 1, the bottom surface of the shoulder 6 is contacted with the top surface of the upper bearing 301, the lower bearing 302 is contacted with the top surface of the supporting bulge 9 integrally formed on the inner circumferential surface of the supporting sleeve 1, and therefore, the tensile force borne by the rotating seat 22 can be well transmitted to the upper bearing 301, and is transmitted to the lower bearing 302 and then to the supporting sleeve 1 through the supporting collar 303.

Further, the support sleeve 1 includes an upper sleeve 101 and a lower sleeve 102, the main shaft 21 is located in the upper sleeve 101, the rotating seat 22 is located in the lower sleeve 102, the lower end of the upper sleeve 101 is connected with the top screw 8 of the lower sleeve 102, and the support protrusion 9 is disposed on the inner circumferential surface of the lower end of the lower sleeve 102.

Further, the bottom screw 8 of the lower sleeve 102 is connected with a bottom cover 7, and a through hole allowing the rotating seat 22 to pass through is arranged on the bottom cover 7.

Further, the upper sleeve 101 has an inverted T-shaped structure, and the bottom surface of the upper sleeve 101 is adjacent to and not in contact with the top surface of the shoulder 6.

Specifically, the support sleeve 1 comprises an upper sleeve 101 and a lower sleeve 102, the upper sleeve 101 is of an inverted T-shaped structure, the lower sleeve 102 is of a structure with two open ends, the upper sleeve 101 and the lower sleeve 102 are fixedly and adaptively connected through screws 8, a bottom cover 7 is connected to the bottom surface of the lower sleeve 102 through the screws 8, a rotating seat 22 penetrates through the bottom cover 7, a supporting bulge 9 is integrally formed on the inner circumferential surface of the lower end of the lower sleeve 102 and is used for supporting the bearing assembly 3, the bearing assembly 3 is clamped through the functions of the upper sleeve 101 and the supporting bulge 9, and the bearing assembly 3 is prevented from being displaced up and down.

Example 2

As shown in fig. 2, a vacuum chamber 11 is provided in the coating machine 10, including any one of the above coating brackets, a coating bracket body is located in the vacuum chamber 11, and a corresponding sputtering target 12 is provided below the coating bracket body.

The working principle of the utility model is as follows: the coating bracket is positioned in the vacuum chamber 11 of the coating machine 10, the mounting position of the coating bracket corresponds to the position of the sputtering target 12, so that the bombarded particles can be deposited on a workpiece, the workpiece is fixed on the fixed disc 4, the gravity (vertical pulling force) of the workpiece acts on the rotating seat 22 through the fixed disc 4 and also acts on the main shaft 21, the vertical pulling force born by the rotating seat 22 is transmitted to the upper bearing 301 through the supporting collar 303 and is transmitted to the lower bearing 302 and finally transmitted to the lower sleeve 102 and then transmitted to the upper sleeve 101 through the screw 8, and finally transmitted to the coating machine 10, thus the vertical load of the main shaft 21 can be greatly reduced, the main shaft 21 can bear heavier workpieces, meanwhile, the driving device 5 can drive the main shaft 21 to rotate more flexibly and the workpiece to rotate more smoothly under the same power, and the coating quality and efficiency of the workpieces are improved.

The foregoing description of the preferred embodiment of the utility model is not intended to limit the utility model in any way, but rather to cover all modifications, equivalents, improvements and alternatives falling within the spirit and principles of the utility model.

Claims (7)

1. The utility model provides a coating film support, a serial communication port, including installing the coating film support body in coating film machine (10) vacuum chamber (11), the coating film support body includes rotor (2) and with fix support sleeve (1) in vacuum chamber (11), rotor (2) are connected in support sleeve (1) through bearing assembly (3) rotation, rotor (2) upper end is connected with drive arrangement (5) in coating film machine (10), rotor (2) lower extreme extends to support sleeve (1) outside and is connected with fixed disk (4) that are used for the fixed work piece of waiting to plate, be equipped with on rotor (2) and be used for transmitting the shoulder (6) on support sleeve (1) with vertical pulling force that receives.

2. The coating bracket according to claim 1, wherein the rotating body (2) comprises a main shaft (21) and a rotating seat (22), the main shaft (21) and the rotating seat (22) are detachably connected through a pin shaft, the main shaft (21) is positioned at the upper part of the supporting sleeve (1), the upper end of the main shaft (21) is connected with the driving device (5), the rotating seat (22) is positioned at the lower part of the supporting sleeve (1), the lower end of the rotating seat (22) is connected with the fixed disc (4), the bearing assembly (3) is sleeved on the circumference of the rotating seat (22), the shoulder (6) is arranged on the outer circumferential surface of the upper part of the rotating seat (22), and the bottom surface of the shoulder (6) is contacted with the upper end of the bearing assembly (3).

3. The film plating bracket according to claim 2, wherein the bearing assembly (3) comprises an upper bearing (301), a lower bearing (302) and a supporting collar (303), the upper bearing (301) and the lower bearing (302) are respectively sleeved at the upper end and the lower end of the rotating seat (22), the supporting collar (303) is arranged between the upper bearing (301) and the lower bearing (302), the bottom surface of the shoulder part (6) is contacted with the top surface of the sleeve of the upper bearing (301), and the bottom surface of the lower bearing (302) is contacted with the top surface of the supporting protrusion (9) on the inner circumferential surface of the supporting sleeve (1).

4. A film plating rack according to claim 2, wherein the support sleeve (1) comprises an upper sleeve (101) and a lower sleeve (102), the main shaft (21) is located in the upper sleeve (101), the rotating seat (22) is located in the lower sleeve (102), the lower end of the upper sleeve (101) is connected with the top screw (8) of the lower sleeve (102), and the support protrusion (9) is disposed on the inner circumferential surface of the lower end of the lower sleeve (102).

5. The coating bracket according to claim 4, wherein the bottom screw (8) of the lower sleeve (102) is connected with a bottom cover (7), and a through hole allowing the rotating seat (22) to pass through is arranged on the bottom cover (7).

6. A coating bracket according to claim 4, wherein the upper sleeve (101) has an inverted T-shaped configuration, and the bottom surface of the upper sleeve (101) is adjacent to and not in contact with the top surface of the shoulder (6).

7. A vacuum chamber (11) is arranged in a coating machine (10), and the coating machine is characterized by comprising the coating support according to any one of claims 1-6, wherein a coating support body is positioned in the vacuum chamber (11), and a corresponding sputtering target (12) is arranged below the coating support body.