CN219363262U - External liquid supply device for chemical liquid - Google Patents

External liquid supply device for chemical liquid Download PDF

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Publication number
CN219363262U
CN219363262U CN202223373778.6U CN202223373778U CN219363262U CN 219363262 U CN219363262 U CN 219363262U CN 202223373778 U CN202223373778 U CN 202223373778U CN 219363262 U CN219363262 U CN 219363262U
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liquid
liquid level
cabinet body
liquid storage
supply device
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CN202223373778.6U
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Chinese (zh)
Inventor
刘传超
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Wuxi Huaying Microelectronics Technology Co Ltd
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Wuxi Huaying Microelectronics Technology Co Ltd
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/10—Energy storage using batteries

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Abstract

The utility model discloses an external liquid supply device for chemical liquid, which is characterized in that: the liquid storage device comprises a cabinet body with a liquid outlet hole, two groups of liquid storage barrels arranged in the cabinet body, and a pipeline for connecting the two groups of liquid storage barrels with the liquid outlet hole, wherein a control valve is arranged on the pipeline and controls the liquid outlet hole to be communicated with one group of liquid storage barrels; two groups of liquid level detection mechanisms are arranged in the cabinet body, each group of liquid level detection mechanisms is opposite to one group of liquid storage barrels, and the liquid level detection mechanisms detect the liquid level in the corresponding liquid storage barrels; the device is also provided with a controller, and the control valve and the liquid level detection mechanism are electrically connected with the controller. The chemical liquid can be quantitatively conveyed in a switchable manner, so that a large amount of leakage can be prevented, the chemical liquid is more environment-friendly and safer, and the cost is lower.

Description

External liquid supply device for chemical liquid
Technical Field
The utility model relates to liquid supply equipment, in particular to an external liquid supply device for chemical liquid.
Background
In the field of semiconductor (integrated circuit) production and processing, cleaning agents, etchants and the like are chemical liquid substances which are indispensable or particularly important in semiconductor manufacturing. Taking hydrofluoric acid as an example, hydrofluoric acid is an important chemical commonly used in semiconductor manufacturing, and is mainly applied to integrated circuits as a cleaning agent and a corrosive agent. In the prior art, when hydrofluoric acid is provided to equipment, the conventional industrial modes are: the device is communicated with a fixed raw material tank (filled with hydrofluoric acid raw material) by a pipeline, and then the device is directly supplied with liquid by the raw material tank. In this way, there are the following disadvantages: when leakage occurs (leakage occurs at the equipment or at the pipeline or at the joint of the pipeline and the raw material tank or at the joint of the pipeline and the equipment or at other places), particularly when leakage can not be found in time, hydrofluoric acid (or other chemical liquid) in the raw material tank can be caused to completely leak, and the raw material tank has larger potential safety hazard and pollutes the environment, and the amount of the hydrofluoric acid (chemical liquid) in the raw material tank is large, so that larger waste and higher cost can be caused if the hydrofluoric acid (chemical liquid) in the raw material tank is completely leaked.
Disclosure of Invention
The utility model aims to provide the chemical liquid external liquid supply device, by using the structure, leakage of products can be effectively reduced, the use safety is improved, the chemical liquid external liquid supply device is more environment-friendly, the cost can be reduced, and the use convenience is improved.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the chemical liquid external liquid supply device comprises a cabinet body with a liquid outlet hole, two groups of liquid storage barrels arranged in the cabinet body, and a pipeline for connecting the two groups of liquid storage barrels with the liquid outlet hole, wherein a control valve is arranged on the pipeline and controls the liquid outlet hole to be communicated with one group of liquid storage barrels;
two groups of liquid level detection mechanisms are arranged in the cabinet body, each group of liquid level detection mechanisms is opposite to one group of liquid storage barrels, and the liquid level detection mechanisms detect the liquid level in the corresponding liquid storage barrels;
the device is also provided with a controller, and the control valve and the liquid level detection mechanism are electrically connected with the controller.
In the above technical scheme, the liquid level detection mechanism comprises a vertical frame, a high liquid level sensor and a low liquid level sensor, wherein the high liquid level sensor and the low liquid level sensor are arranged above the low liquid level sensor, and the high liquid level sensor and the low liquid level sensor are opposite to a group of liquid storage barrels and are used for detecting the liquid level in the liquid storage barrels; when the liquid level in the liquid storage barrel is between the high liquid level sensor and the low liquid level sensor, the control valve can be used for communicating the liquid storage barrel with the liquid outlet.
In the above technical scheme, the cabinet body is also internally provided with two groups of weighing mechanisms electrically connected with the controller, each group of liquid storage barrels is placed on one group of weighing mechanisms, and the weighing mechanisms detect the weight of the liquid storage barrels and feed the weight data back into the controller.
In the above technical scheme, the weighing mechanism is an electronic scale.
In the above technical scheme, the cabinet body is also provided with a cabinet door for opening and closing the cabinet body, the cabinet door is provided with a door lock, and the door lock is electrically connected with the controller.
In the above technical scheme, the cabinet body is also provided with a liquid leakage sensor electrically connected with the controller, and the liquid leakage sensor detects whether the liquid in the liquid storage barrel leaks.
In the above technical scheme, the cabinet bottom still is equipped with multiunit support truckle, the cabinet body warp support the truckle can remove.
In the above technical scheme, the cabinet body is also provided with an air outlet, and the air outlet communicates the interior of the cabinet body with the exterior of the cabinet body.
In the above technical scheme, the cabinet body is provided with a touch display screen, an indicator light and a plurality of control buttons, wherein the touch display screen, the indicator light and the control buttons are connected with the controller.
Due to the application of the technical scheme, compared with the prior art, the utility model has the following advantages:
1. according to the utility model, the chemical liquid is supplied through the liquid storage barrel, so that even if leakage occurs, the leakage amount is small, the cost is reduced as much as possible, the safety is improved, and the environment is protected;
2. according to the utility model, the liquid storage barrel is arranged in the movable cabinet body, so that the liquid storage barrel is convenient to manually move to any position, and not only is the use convenient, but also the replacement of the liquid storage barrel in the interior is convenient;
3. according to the utility model, the leakage sensor is arranged in the cabinet body, so that the leakage sensor can be rapidly detected when leakage occurs, and a worker is reminded to process the leakage, so that the leakage is prevented as much as possible, the cost is reduced, and the safety is improved;
4. according to the utility model, two groups of liquid storage barrels are adopted for colloid liquid supply, after the chemical liquid in one group of liquid storage barrels is used, the other group of liquid storage barrels can be automatically and rapidly switched for liquid supply, so that the replacement frequency of operators is reduced, and the production efficiency of equipment is ensured;
5. according to the utility model, the liquid level in the liquid storage barrel is detected by the liquid level detection mechanism and is used for detecting whether the liquid in the liquid storage barrel can meet the normal liquid supply condition, so that the two groups of liquid storage barrels can be switched normally, the stability of liquid supply is ensured, the normal processing of subsequent equipment is ensured, and the processing stability and quality of the subsequent equipment on products are ensured;
6. the utility model is provided with the weighing mechanism for weighing the liquid storage barrel, so that on the basis of detecting the liquid level of the liquid storage barrel by the liquid level detecting mechanism, the weighing mechanism and the liquid level sensor are used for further detecting and judging, and then detecting and supplementing, or if the liquid level detecting mechanism has a problem, the weighing of the liquid storage barrel is used for further detecting whether the liquid level in the liquid storage barrel meets the liquid supply requirement or not so as to ensure the normal liquid supply of equipment, and the liquid level detecting mechanism is matched with the liquid level detecting mechanism to play a double protection role;
7. the exhaust port arranged in the utility model can uniformly collect and treat a small amount of volatile chemical liquid, thereby preventing environmental pollution and injury to the body of staff.
Drawings
FIG. 1 is a schematic view of a first embodiment of the present utility model;
FIG. 2 is a side view of FIG. 1;
FIG. 3 is a top view of FIG. 1;
fig. 4 is a schematic structural view of the interior of the cabinet according to the first embodiment of the utility model.
Wherein: 1. a liquid outlet hole; 2. a cabinet body; 3. a liquid storage barrel; 4. a liquid level detection mechanism; 5. a touch display screen; 6. a control button; 7. a power interface; 8. a network interface; 9. a vertical frame; 10. a high level sensor; 11. a low level sensor; 12. a weighing mechanism; 13. a cabinet door; 14. a door lock; 15. a front cabinet door; 16. an upper cabinet door; 17. supporting casters; 18. and an air outlet.
Detailed Description
The utility model is further described below with reference to the accompanying drawings and examples:
embodiment one: referring to fig. 1 to 4, an external chemical liquid supply device comprises a cabinet body 2 with a liquid outlet hole 1, two groups of liquid storage barrels 3 arranged in the cabinet body, and a pipeline (not shown in a pipeline diagram) for connecting the two groups of liquid storage barrels with the liquid outlet hole, wherein a control valve (not shown in the control valve diagram) is arranged on the pipeline, and the liquid outlet hole is controlled to be communicated with one group of liquid storage barrels by the control valve;
two groups of liquid level detection mechanisms 4 are arranged in the cabinet body, each group of liquid level detection mechanisms is opposite to one group of liquid storage barrels, and the liquid level detection mechanisms detect the liquid level in the corresponding liquid storage barrels;
the device is also provided with a controller, and the control valve and the liquid level detection mechanism are electrically connected with the controller.
The cabinet body is provided with a touch display screen 5, an indicator light and a plurality of control buttons 6 which are connected with the controller.
In this embodiment, the hydrofluoric acid is taken as an example as the chemical liquid, and the hydrofluoric acid is stored in the liquid storage barrel, and when in actual use, the liquid outlet hole can be connected with equipment needing to use the hydrofluoric acid through a pipeline, and the liquid storage barrel supplies the hydrofluoric acid to the equipment. The liquid level detection mechanism is used for detecting the liquid level in the corresponding liquid storage barrel, when the liquid level in the liquid storage barrel reaches the lowest limit value, the data are fed back to the controller, the controller also controls the control valve, so that the liquid outlet is communicated with the other group of liquid storage barrels, and the other group of liquid storage barrels are used for supplying liquid to the equipment. Meanwhile, the touch display screen can display that one group of liquid storage barrels are empty barrels, hydrofluoric acid is absent, and the liquid storage barrels filled with the hydrofluoric acid need to be replaced, so that subsequent switching is facilitated. Further, there is a power interface 7 on the cabinet body for supplying power to the cabinet body, and there is a network interface 8 for connecting the cabinet body with a third party device, for example, giving the cabinet body a network connection through the network interface, and feeding data back to the third party device, which may be a server, or a mobile phone APP, or a processing device at the rear end, or others, so that a worker can remotely find a problem at the first time even if processing is performed.
In the utility model, if the chemical liquid in the liquid storage barrel leaks, even if the chemical liquid in the liquid storage barrel leaks completely, the leakage of the chemical liquid is less because the capacity of the liquid storage barrel is limited, the cost is low, the damage to the environment is reduced, the chemical liquid is harmful to the human body in a mode as much as possible, and the leaked chemical liquid is convenient to process rapidly because of the small leakage amount.
Referring to fig. 4, the liquid level detection mechanism includes a stand 9, a high liquid level sensor 10 and a low liquid level sensor 11 mounted on the stand, where the high liquid level sensor is disposed above the low liquid level sensor, and the high liquid level sensor and the low liquid level sensor are opposite to a group of liquid storage barrels, and are used for detecting the liquid level in the liquid storage barrels; when the liquid level in the liquid storage barrel is between the high liquid level sensor and the low liquid level sensor, the control valve can be used for communicating the liquid storage barrel with the liquid outlet.
In this embodiment, the liquid storage barrel filled with chemical liquid, the liquid level is generally located between the high liquid level sensor and the low liquid level sensor, if the page height is located above the high liquid level sensor, that indicates that the liquid level in the liquid storage barrel is too high, the leakage risk is higher, after the normal liquid storage barrel is put into the cabinet body, the normal liquid storage barrel is detected, an alarm is reminded to remind a worker to process, if the worker does not process, the control valve does not communicate the pipelines between the group of liquid storage barrels and the liquid outlet holes, and the group of liquid storage barrels cannot normally supply liquid. When the liquid storage barrel is used for normally supplying liquid, the liquid level can gradually drop, and when the liquid level is below the low liquid level sensor, the chemical liquid in the liquid storage barrel is completely pumped or is difficult to pump or can be intermittently pumped, so that the normal liquid supply of subsequent equipment is influenced, and the normal treatment of subsequent products is influenced. Therefore, the control valve can switch the closing of the communication pipeline between the group of liquid storage barrels and the liquid outlet hole, and the other group of liquid storage barrels with chemical liquid is switched, so that the other group of liquid storage barrels and the liquid outlet hole are communicated for supplying liquid, continuous liquid supply is ensured, the running stability of the rear-end equipment is ensured, and the processing stability and quality of products are ensured.
The liquid storage tank is characterized in that a liquid leakage sensor electrically connected with the controller is further arranged in the tank body, and the liquid leakage sensor detects whether liquid in the liquid storage tank leaks or not.
In this embodiment, the weeping sensor can set up in the internal bottom of cabinet, when the weeping appears, liquid can flow down because the dead weight, flows the internal bottom of cabinet earlier, and the weeping sensor just can detect liquid, and the explanation appears the weeping phenomenon, and the controller can report to the police with the data feedback, touch-control display to in the transmission third party equipment, the rear end needs the equipment of chemical liquid can't normally absorb the chemical liquid, and the staff needs quick looking over, knows the condition, handles for prevent to continue revealing, safer, environmental protection.
Referring to fig. 4, two sets of weighing mechanisms 12 electrically connected to the controller are further provided in the cabinet, each set of liquid storage barrels is placed on one set of weighing mechanisms, and the weighing mechanisms detect the weight of the liquid storage barrels and feed the weight data back to the controller.
In this embodiment, taking a chemical solution as a hydrofluoric acid solution (or other chemical solutions of course) as an example, the upper and lower limit ranges (the weight of the full solution storage barrel and the weight after the hydrofluoric acid is extracted) of the solution storage barrel can be set in the controller in advance through the touch display screen according to the capacity of the solution storage barrel, when the solution level detection mechanism detects that the solution storage barrel needs to be switched to supply solution, if the deviation value is too large, the solution level detection mechanism gives a warning that a worker processes (can switch first) the solution, or if the solution level detection mechanism is abnormal, the weighing mechanism can detect the level in the solution storage barrel through the detection of the weight of the solution level detection mechanism, and judges, so that the solution level detection mechanism is convenient to switch, the setting of the weighing mechanism plays a double protection role, and also can feed back the use amount of the hydrofluoric acid in real time, so that the use amount of the hydrofluoric acid is convenient to manage and control.
Wherein, weighing machine constructs for the electronic scale. The electronic scale is adopted and connected with the controller, so that the detection precision is high and the cost is low.
Referring to fig. 1 to 4, a cabinet door 13 for opening and closing the cabinet body is further arranged on the cabinet body, a door lock 14 is arranged on the cabinet door, and the door lock is electrically connected with the controller.
In this embodiment, the cabinet door is regarded as the emergency exit, and when the cabinet door was closed, the lock was locked the cabinet door, prevents that the cabinet is inside to open, guarantees the security of use. Wherein, in this embodiment, control button has 4, is respectively opening the door button, closing the door button, stop button, reset button, and the button of opening the door is used for opening the lock for the cabinet door can normally open, changes the liquid bucket of depositing. The door closing button is used for controlling the closing of the door lock, locks the cabinet door, enables the cabinet door to be incapable of being opened, stops the button and is used for stopping the liquid supply of the chemical liquid, namely enables the control valve to be closed, enables the liquid outlet to be incapable of being communicated with the liquid storage barrel, and cannot supply the liquid. The reset button is used by releasing the abnormality after the abnormality processing is completed after the abnormality alarm of the equipment, so that the equipment can be normally used. In this embodiment, the cabinet door includes the preceding cabinet door 15 that is in cabinet body front side and is in the upper cabinet door 16 at cabinet body top, and the cabinet door can all adopt transparent material to make, and the condition of the inside liquid bucket of depositing of the audio-visual seeing of operating personnel of being convenient for.
When the device needs to be used normally and can normally supply liquid to the third party device, the following conditions are required to be met:
1. the liquid level in the liquid storage barrel is between the high liquid level sensor and the low liquid level sensor (so that the chemical liquid can be pumped normally);
2. the weighing mechanism weighs the liquid storage barrel within a preset upper and lower limit range;
3. the leakage sensor does not detect leakage;
4. the cabinet door is closed (door lock normal closed state).
When these several conditions all satisfy, control valve can open, with a set of liquid bucket of depositing and play liquid hole intercommunication, allow third party's equipment to suck the chemical liquid in the liquid bucket of depositing, when the condition is unsatisfied wherein, the equipment is reported to the police, wherein, can set up alarm lamp above the cabinet body, perhaps buzzing alarm, report to the police through it, then can show corresponding alarm code (every problem, all can have corresponding code) or direct text display above the touch-control display screen, control valve closes, the disconnection goes out liquid hole and deposits the intercommunication between the liquid bucket, even processing is needed to the staff.
The indicator lights can be arranged independently, and the corresponding colors are lightened to prompt what operation should be performed, so that the indicator lights serve as the most intuitive mode for guiding operators to perform correct operations.
Referring to fig. 1 to 4, the bottom of the cabinet body is also provided with a plurality of groups of supporting casters 17, and the cabinet body can move through the supporting casters. Through the setting of supporting the truckle, the cabinet body can be in subaerial removal, is convenient for improve the convenience of staff's operation, and which equipment needs to use moreover can both promote corresponding position, and it is also more convenient, laborsaving to deposit the liquid bucket to change. And the supporting truckle is the supporting truckle with the brake, after moving to the preset position, the supporting truckle is braked, and the cabinet body can not slide away.
Referring to fig. 1, 2 and 4, an air outlet 18 is further provided on the cabinet, and the air outlet communicates the interior of the cabinet with the exterior of the cabinet.
Because many types of chemical liquid (such as hydrofluoric acid) have stronger volatility and corrosivity, there is a small amount of volatilization in the suction process, thereby can cause the injury to the workman in the workshop, also can the environment cause the destruction, consequently, through the setting of air exit, utilize pipeline and outside treatment facility to connect, collect volatilized chemical liquid, unify the processing, reduce the destruction to the environment, more environmental protection prevents also that injury staff from reducing the potential safety hazard.
In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "top", "bottom", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.
In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; the two components can be directly connected or indirectly connected through an intermediate medium, for example, the two components can form a mechanical abutting or abutting connection mode through abutting, contact and the like, the two components can be directly connected or hung through the intermediate medium, and the two components can be communicated inside the two components or the interaction relationship of the two components. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

Claims (9)

1. An external liquid supply device of chemical liquid, its characterized in that: the liquid storage device comprises a cabinet body with a liquid outlet hole, two groups of liquid storage barrels arranged in the cabinet body, and a pipeline for connecting the two groups of liquid storage barrels with the liquid outlet hole, wherein a control valve is arranged on the pipeline and controls the liquid outlet hole to be communicated with one group of liquid storage barrels;
two groups of liquid level detection mechanisms are arranged in the cabinet body, each group of liquid level detection mechanisms is opposite to one group of liquid storage barrels, and the liquid level detection mechanisms detect the liquid level in the corresponding liquid storage barrels;
the device is also provided with a controller, and the control valve and the liquid level detection mechanism are electrically connected with the controller.
2. The external chemical liquid supply device according to claim 1, wherein: the liquid level detection mechanism comprises a vertical frame, a high liquid level sensor and a low liquid level sensor which are arranged on the vertical frame, wherein the high liquid level sensor is arranged above the low liquid level sensor, and the high liquid level sensor and the low liquid level sensor are opposite to a group of liquid storage barrels and are used for detecting the liquid level in the liquid storage barrels; when the liquid level in the liquid storage barrel is between the high liquid level sensor and the low liquid level sensor, the control valve can be used for communicating the liquid storage barrel with the liquid outlet.
3. The external chemical liquid supply device according to claim 1, wherein: the cabinet body is also internally provided with two groups of weighing mechanisms electrically connected with the controller, each group of liquid storage barrels is placed on one group of weighing mechanisms, and the weighing mechanisms detect the weight of the liquid storage barrels and feed the weight data back into the controller.
4. The external chemical liquid supply device according to claim 3, wherein: the weighing mechanism is an electronic scale.
5. The external chemical liquid supply device according to claim 1, wherein: the cabinet body is also provided with a cabinet door for opening and closing the cabinet body, the cabinet door is provided with a door lock, and the door lock is electrically connected with the controller.
6. The external chemical liquid supply device according to claim 1, wherein: the liquid storage tank is characterized in that a liquid leakage sensor electrically connected with the controller is further arranged in the tank body, and the liquid leakage sensor detects whether liquid in the liquid storage tank leaks or not.
7. The external chemical liquid supply device according to claim 1, wherein: the bottom of the cabinet body is also provided with a plurality of groups of supporting casters, and the cabinet body can move through the supporting casters.
8. The external chemical liquid supply device according to claim 1, wherein: the cabinet body is also provided with an air outlet which communicates the interior of the cabinet body with the exterior of the cabinet body.
9. The external chemical liquid supply device according to claim 1, wherein: the cabinet body is provided with a touch display screen, an indicator light and a plurality of control buttons, wherein the touch display screen, the indicator light and the control buttons are connected with the controller.
CN202223373778.6U 2022-12-15 2022-12-15 External liquid supply device for chemical liquid Active CN219363262U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202223373778.6U CN219363262U (en) 2022-12-15 2022-12-15 External liquid supply device for chemical liquid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202223373778.6U CN219363262U (en) 2022-12-15 2022-12-15 External liquid supply device for chemical liquid

Publications (1)

Publication Number Publication Date
CN219363262U true CN219363262U (en) 2023-07-18

Family

ID=87140520

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202223373778.6U Active CN219363262U (en) 2022-12-15 2022-12-15 External liquid supply device for chemical liquid

Country Status (1)

Country Link
CN (1) CN219363262U (en)

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