CN219359890U

CN219359890U - Linear guide rail for wafer cutting

Info

Publication number: CN219359890U
Application number: CN202320263799.8U
Authority: CN
Inventors: 张�浩; 郭静; 季春瑞; 许桂洋; 贾亚飞; 刘佳均
Original assignee: Anhui Xinxinwei Semiconductor Co ltd
Current assignee: Jingliang Beijing Electronic Technology Co ltd
Priority date: 2023-02-13
Filing date: 2023-02-13
Publication date: 2023-07-18
Anticipated expiration: 2033-02-13

Abstract

The application discloses a wafer cutting is with linear guide rail belongs to guide rail technical field. The novel sliding rail comprises a sliding rail body, wherein a sliding block is slidably connected to the sliding rail body, an arc-shaped hole is formed in the sliding rail body, a placing groove is formed in the lower portion of the arc-shaped hole, a connecting column is installed inside the placing groove body relatively, a fixing rod is movably connected to the inside of the connecting column, a ball is arranged in the arc-shaped hole, the upper end of the ball protrudes out of the arc-shaped hole, a movable shaft is movably connected to the inside of the ball and fixedly installed on the fixing rod, a foam-rubber cushion is arranged inside the placing groove and located at the lower end of the ball, the ball is extruded in the sliding rail body when the sliding block moves on the sliding rail body, the ball is driven to rotate in the sliding block moving direction, meanwhile the ball downwards extrudes the foam-rubber cushion, the lubricating oil inside the ball is adhered to the surface of the ball, and the lubricating oil is carried upwards when the ball rotates, so that the lubricating oil is prevented from overflowing greatly, and the sliding rail is cooled and lubricated slowly and evenly.

Description

Linear guide rail for wafer cutting

Technical Field

The application relates to the technical field of guide rails, in particular to a linear guide rail for wafer cutting.

Background

The wafer cutting mainly adopts a diamond grinding wheel blade, namely a hub type hard blade, and semiconductor practitioners continuously seek a method capable of improving the processing quality and the processing efficiency so as to achieve lower processing cost. In the wafer cutting process, the guide rail is often not separated from the use, the position of the cutting device can be adjusted through the guide rail, and after the service time is long, the guide rail is continuously rubbed, and certain heat can be generated.

According to the search, for example, in chinese patent publication No. CN205207429U, a linear guide rail is provided, in which a lubrication groove is provided at the connection between a slide rail and a slider, and a lubrication grease is filled in the lubrication groove to reduce friction force, but during use, the lubrication grease may slide out greatly, slow and uniform addition of the lubrication grease cannot be ensured, which may result in an increase in friction force of the slide rail due to lack of lubrication grease and an increase in heat quantity after the slide rail is used for too long, and further, the running quality is affected, so that it is necessary to provide a linear guide rail for wafer cutting to solve the above problems.

It should be noted that the above information disclosed in this background section is only for understanding the background of the inventive concept and, therefore, it may contain information that does not constitute prior art.

Disclosure of Invention

Based on the above-mentioned problems existing in the prior art, an object of an embodiment of the present application is to: the linear guide rail for wafer cutting has the advantages that the effect of slowly and uniformly cooling and lubricating the slide rail is achieved.

The technical scheme adopted for solving the technical problems is as follows: the linear guide rail for wafer cutting comprises a slide rail, wherein a slide block is connected onto the slide rail in a sliding manner, an arc-shaped hole is formed in the slide rail, a placing groove is formed below the arc-shaped hole, a connecting column is installed inside the placing groove relatively, and a fixing rod is movably connected inside the connecting column;

the ball is arranged in the arc hole, the upper end of the ball protrudes out of the arc hole, a movable shaft is movably connected to the ball, the movable shaft is fixedly arranged on the fixed rod, a sponge cushion is arranged in the placing groove, and the sponge cushion is arranged at the lower end of the ball.

When the sliding block moves on the sliding rail, the balls are extruded, the balls are driven to rotate towards the moving direction of the sliding block, the movable shaft is driven to move downwards when the balls are extruded, the balls are pressed in the arc-shaped holes when the sliding block slides, normal and operation between the sliding block and the sliding rail cannot be affected, meanwhile, the balls extrude the sponge cushion downwards, meanwhile, lubricating oil in the sponge cushion is extruded outwards, the balls are attached to the surfaces of the balls, the lubricating oil is attached upwards when the balls rotate, and accordingly the sliding rail is prevented from overflowing greatly, and cooling and lubricating are slowly and uniformly conducted on the sliding rail.

Further, the upper end of the connecting column is provided with a movable groove, an elastic piece is fixedly arranged in the movable groove, and the upper end of the elastic piece is fixedly arranged at the lower end of the fixed rod.

Further, the surface of the foam-rubber cushion facing the balls is provided with an arc surface, and the balls are placed in the arc surface on the foam-rubber cushion.

Further, the arc-shaped holes are communicated with the placing grooves, and the length and the width of the placing grooves are larger than the diameter of the arc-shaped holes.

Further, a connecting groove is formed in the ball, and the movable shaft is movably connected in the connecting groove.

Further, the arc-shaped holes are arranged in a semicircular shape.

The beneficial effects of this application are: the utility model provides a pair of linear guide rail for wafer cutting through being provided with the ball, when the slider removes on the slide rail, can push down the ball, extrudees the spring through the fixed column simultaneously, outwards extrudes the inside lubricating oil of foam-rubber cushion again, adheres to the surface of ball for the pivoted of ball is upwards attached with lubricating oil, makes the slider drive lubricating oil to both sides when the activity, lubricates slide rail and slider, thereby prevents that lubricating oil from overflowing by a wide margin, and slowly and even cooling and lubrication the slide rail, improves running quality.

In addition to the objects, features and advantages described above, the present utility model has other objects, features and advantages. The present utility model will be described in further detail with reference to the drawings.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:

FIG. 1 is a schematic view of a linear guide rail for dicing a wafer;

FIG. 2 is a schematic view in partial cross-section of the unitary structure of FIG. 1;

FIG. 3 is an enlarged schematic view of area A of FIG. 2;

FIG. 4 is an enlarged schematic view of area B of FIG. 3;

wherein, each reference sign in the figure:

1. a slide rail; 11. a chute; 12. a slide block; 14. an arc-shaped hole; 15. a mounting hole; 2. a placement groove; 21. a connecting plate; 22. a connecting column; 23. a movable groove; 24. a fixed rod; 25. a spring; 26. a sponge cushion; 3. a ball; 31. a movable shaft.

Detailed Description

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other. The utility model will be described in detail below with reference to the drawings in connection with embodiments.

In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.

It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the terms so used are interchangeable under appropriate circumstances such that the embodiments of the utility model described herein are, for example, capable of operation in other environments. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.

As shown in fig. 1-4, the application provides a linear guide rail for wafer cutting, which comprises a slide rail 1, wherein the slide rail 1 is positioned on one side of a wafer to be cut, slide grooves 11 are formed in two sides of the slide rail 1, a slide block 12 is connected to the slide rail 1 in a sliding manner, the slide block 12 is connected with the slide grooves 11 in a sliding manner, a cutting device (not shown) is mounted on the slide block 12, the cutting device is used for cutting the wafer, and the slide block 12 slides on the slide rail 1 again, so that the position of the cutting device is adjusted.

The sliding rail 1 is evenly provided with a plurality of groups of arc holes 14, in the embodiment, the arc holes 14 are arranged in a semicircular shape, the lower part of the arc holes 14 is also provided with a placing groove 2, and it is understood that the placing groove 2 is provided with a square shape and is positioned below the arc holes 14, the placing grooves are communicated, and the length and the width of the placing groove 2 are both larger than the diameter of the arc holes 14.

The connecting plate 21 is fixedly arranged on two sides of the inside of the placing groove 2, the connecting post 22 is fixedly arranged at the upper end of the connecting plate 21, the movable groove 23 is formed at the upper end of the connecting post 22 as shown in fig. 3 and 4, the spring 25 is fixedly arranged in the movable groove 23, the fixing rod 24 is fixedly arranged at the upper end of the spring 25, the lower half part of the fixing rod 24 is positioned in the connecting post 22 as shown in fig. 4, and the fixing rod 24 is movably connected with the connecting post 22 and slides in the movable groove 23.

The ball 3 is arranged in the arc hole 14, as shown in fig. 3, a part of the upper end of the ball 3 is positioned above the arc hole 14, a connecting groove is formed in the center of the ball 3, a movable shaft 31 is movably connected in the connecting groove, and the movable shaft 31 is fixedly arranged on the fixed rod 24 to fix the ball 3.

In this embodiment, the spring force of the spring 25 supports the weight of the ball 3.

The inside of standing groove 2 has placed foam-rubber cushion 26, and foam-rubber cushion 26 is located the lower extreme of ball 3, and the foam-rubber cushion 26 is equipped with the cambered surface towards the one side of ball 3, and it can be understood that under ball 3 normal condition, place in the up end of foam-rubber cushion 26, drip and adsorb lubricating oil in the foam-rubber cushion 26.

The slide rail 1 is also provided with a mounting hole 15, the mounting hole 15 is arranged to be intersected with the arc-shaped hole 14, and the slide rail 1 is fixed through the mounting hole 15.

In this embodiment, the lower end of the placement groove 2 is provided with an opening plate (not shown), the opening plate is located at the bottom of the sliding rail 1, and a rubber gasket is provided therebetween for sealing, and the sponge cushion 26 can be replaced and the placement groove 2 can be cleaned by opening the opening plate.

Examples: when the cutting device needs to be moved, the sliding block 12 needs to be moved on the sliding rail 1, when the sliding block 12 moves on the sliding rail 1, the rolling balls 3 are extruded, meanwhile, the rolling balls 3 are driven to rotate towards the moving direction of the sliding block 12, when the rolling balls 3 are extruded, the movable shaft 31 is driven to move downwards, the fixed rod 24 is extruded downwards, the spring 25 is extruded downwards, and at the moment, the sliding block 12 is enabled to press the rolling balls 3 in the arc-shaped holes 14 during sliding, so that the normal operation and the running between the sliding block 12 and the sliding rail 1 are not affected.

Simultaneously, the balls 3 extrude the sponge cushion 26 downwards and simultaneously extrude the lubricating oil in the sponge cushion outwards, and the lubricating oil is adhered to the surfaces of the balls 3, so that the lubricating oil is attached upwards when the balls 3 rotate, the sliding block 12 drives the lubricating oil to two sides when moving, the sliding rail 1 and the sliding block 12 are lubricated, the lubricating oil is prevented from overflowing greatly, the sliding rail 1 is cooled and lubricated slowly and uniformly, and the running quality is improved.

When the sliding block 12 leaves the position of the ball 3, the spring 25 rebounds to push the fixing rod 24 upwards and drive the ball 3 to move upwards, so that the ball is reset, and the follow-up continuous use is facilitated.

The relative arrangement of the components and steps, numerical expressions and numerical values set forth in these embodiments do not limit the scope of the present utility model unless it is specifically stated otherwise. Meanwhile, it should be understood that the sizes of the respective parts shown in the drawings are not drawn in actual scale for convenience of description. Techniques, methods, and apparatus known to one of ordinary skill in the relevant art may not be discussed in detail, but should be considered part of the specification where appropriate. In all examples shown and discussed herein, any specific values should be construed as merely illustrative, and not a limitation. Thus, other examples of the exemplary embodiments may have different values. It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further discussion thereof is necessary in subsequent figures.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

In the description of the present utility model, it should be understood that the azimuth or positional relationships indicated by the azimuth terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal", and "top, bottom", etc., are generally based on the azimuth or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present utility model; the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. The utility model provides a linear guide, includes slide rail (1), sliding connection has slider (12), its characterized in that on slide rail (1): an arc-shaped hole (14) is formed in the sliding rail (1), a placing groove (2) is formed below the arc-shaped hole (14), a connecting column (22) is installed inside the placing groove (2) relatively, and a fixing rod (24) is movably connected inside the connecting column (22);

be equipped with ball (3) in arc hole (14), protruding arc hole (14) in the upper end of ball (3), the inside swing joint of ball (3) has loose axle (31), loose axle (31) fixed mounting is on dead lever (24), the inside of standing groove (2) is equipped with foam-rubber cushion (26), foam-rubber cushion (26) are located the lower extreme of ball (3).

2. A linear guide according to claim 1, characterized in that: the upper end of the connecting column (22) is provided with a movable groove (23), an elastic piece is fixedly arranged in the movable groove (23), and the upper end of the elastic piece is fixedly arranged at the lower end of the fixed rod (24).

3. A linear guide according to claim 1, characterized in that: the foam-rubber cushion is characterized in that an arc surface is arranged on one surface of the foam-rubber cushion (26) facing the ball (3), and the ball (3) is placed in the arc surface on the foam-rubber cushion (26).

4. A linear guide according to claim 1, characterized in that: the arc-shaped hole (14) is communicated with the placing groove (2), and the length and the width of the placing groove (2) are both larger than the diameter of the arc-shaped hole (14).

5. A linear guide according to claim 1, characterized in that: a connecting groove is formed in the ball (3), and the movable shaft (31) is movably connected in the connecting groove.

6. A linear guide according to claim 1, characterized in that: the arc-shaped holes (14) are arranged in a semicircular shape.