CN219359339U - Clamping tool and disassembly auxiliary tool - Google Patents
Clamping tool and disassembly auxiliary tool Download PDFInfo
- Publication number
- CN219359339U CN219359339U CN202223291285.8U CN202223291285U CN219359339U CN 219359339 U CN219359339 U CN 219359339U CN 202223291285 U CN202223291285 U CN 202223291285U CN 219359339 U CN219359339 U CN 219359339U
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- side plate
- pull rod
- clamping tool
- valve motor
- pendulum valve
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- 238000005530 etching Methods 0.000 claims abstract description 17
- 230000000149 penetrating effect Effects 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 229910000831 Steel Inorganic materials 0.000 claims description 3
- 239000010959 steel Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 20
- 230000008569 process Effects 0.000 abstract description 14
- 238000012423 maintenance Methods 0.000 abstract description 4
- 239000004065 semiconductor Substances 0.000 abstract description 3
- 230000009471 action Effects 0.000 description 3
- 230000004075 alteration Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model provides a clamping tool and a disassembly auxiliary tool, which are applied to the technical field of semiconductors. Specifically, the utility model provides a clamping tool, which aims at the existing pendulum valve motor fixed on an etching machine table, and provides an auxiliary tool for quickly and stably removing the pendulum valve motor by only one operator. According to the utility model, the pendulum valve motor can be conveniently, time-saving, accurate and stable through the upper chuck and the lower chuck of the clamping tool, and then the screw used for fixing the pendulum valve motor on the etching machine table is removed, so that the purpose of saving the maintenance cost of the pendulum valve motor is realized, the factors such as large weight of the pendulum valve motor, manual errors caused by manual disassembly and the like are avoided, the pendulum valve motor is easy to shake in the dismantling process, the problem of damaging the reference position of the screw hole used for fixing the pendulum valve motor is caused, and the efficiency of dismantling the pendulum valve motor is improved.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a clamping tool and a disassembly auxiliary tool.
Background
Conventionally, in a semiconductor process, an etching apparatus has a structure in which a chamber in which an etching process is performed and a vacuum pump for applying vacuum to the chamber or discharging residual gas in the chamber to the outside are connected, and a pendulum valve motor for driving the pendulum valve are generally required to be provided at a connection pipe connecting the chamber and the vacuum pump. In addition, in the daily maintenance process of the etching machine table, the pendulum valve motor needs to be replaced and maintained at regular time.
However, when the pendulum valve motor is detached, two operators are generally required to operate, and due to factors such as the large weight of the pendulum valve motor and the manual error caused by manual detachment, the pendulum valve motor is very easy to shake in the detaching process, the problem of damaging the reference position of the screw hole for fixing the pendulum valve motor is caused, and finally the risk of dropping the pendulum valve motor is increased.
Disclosure of Invention
The utility model aims to provide a clamping tool and a disassembly auxiliary tool, which are used for providing an independent clamp for fixing a pendulum valve motor when the pendulum valve motor fixed on an etching machine table is disassembled, so that the problems that the pendulum valve motor is easy to shake in the disassembly process and the reference position of a screw hole for fixing the pendulum valve motor is damaged and the efficiency of disassembling the pendulum valve motor is improved due to the factors of large weight of the pendulum valve motor, manual errors and the like caused by manual disassembly in the prior art are solved.
In order to solve the above-mentioned technical problems, the present utility model provides a clamping tool, including: an upper chuck (1), a lower chuck (2) and a pull rod (3); the upper chuck (1) can comprise a top plate (11) and a first side plate (12) vertically connected to one end of the top plate (11), a connecting cavity (13) is formed in the axial center line of the surface of the first side plate (12), the connecting cavity (13) also extends to open part of the top surface of the top plate (11), a first through hole (131) penetrating along the axial center line direction is formed in the end surface of the first side plate (12) exposed by the connecting cavity (13), and two symmetrically distributed connecting ports (14) are formed in the first side plate (12); the lower chuck (2) can comprise a second side plate (21) and two fixed inserting hands (22) which are respectively and vertically connected with the bottom surface of the second side plate (21), two connecting chucks (23) which are respectively matched with the connecting ports (14) are arranged on the top end surface of the second side plate (21), and a second through hole (211) is further formed in the second side plate (21) in the axial extending direction of the first through hole (131), so that the pull rod (3) is slidably arranged in the first through hole (131) and/or the second through hole (211) through the connecting cavity (13).
Further, the opening direction of the connecting cavity (13) on the first side plate (12) and the opening direction of the connecting port (14) can be opposite.
Further, the top plate (11) and the first side plate (12) can be integrally formed; and/or the second side plate (21) and the two fixed inserting hands (22) can be integrally formed.
Further, the pull rod (3) may have a cylindrical structure with a circular cross-section in a shape of a "1", and the diameter of the cross-section of the pull rod (3) needs to be not greater than the diameters of the first through hole (131) and the second through hole (211).
Furthermore, a nut can be sleeved on the pull rod (3) so as to fix the pull rod (3) on the upper chuck (1) in a mode of left and right rotation and movement.
Further, a handle (4) can be movably connected to the top end of the pull rod (3), so that the pull rod (3) is driven to move up and down by pulling the handle (4).
Furthermore, the pull rod (3) and the handle (4) can be integrally formed to form a 7-shaped structure.
Furthermore, a baffle plate can be arranged at two sides of the top end of the connecting clamping head (23) respectively so as to fix the connecting port (14) and the connecting clamping head (23) which are connected in a penetrating way.
Further, the upper chuck (1), the lower chuck (2) and the pull rod (3) are made of steel materials.
In a second aspect, based on the same inventive concept, the utility model also provides a disassembly assisting tool suitable for assisting in disassembly of a pendulum valve motor fixed on an etching machine table, which specifically can comprise an upper chuck (1), a lower chuck (2), a pull rod (3) and other parts of the clamping tool.
Compared with the prior art, the utility model has at least the following technical effects:
the utility model provides a clamping tool, which is an auxiliary tool for quickly and stably dismantling a pendulum valve motor by only one operator aiming at the existing pendulum valve motor fixed on an etching machine table. According to the utility model, the pendulum valve motor can be conveniently, time-saving, accurate and stable through the upper chuck and the lower chuck of the clamping tool, and then the screw used for fixing the pendulum valve motor on the etching machine table is removed, so that the purpose of saving the maintenance cost of the pendulum valve motor is realized, the factors such as large weight of the pendulum valve motor, manual errors caused by manual disassembly and the like are avoided, the pendulum valve motor is easy to shake in the dismantling process, the problem of damaging the reference position of the screw hole used for fixing the pendulum valve motor is caused, and the efficiency of dismantling the pendulum valve motor is improved.
Drawings
Fig. 1 is a front view showing a structure of a clamping tool or a disassembly assistance tool according to an embodiment of the present utility model.
Fig. 2 is an enlarged schematic view of the upper chuck 1 in the structure of the holding tool or the removing auxiliary tool shown in fig. 1.
Fig. 3 is an enlarged schematic view of the lower chuck 2 in the structure of the holding tool or the removing auxiliary tool shown in fig. 1.
Fig. 4 is an enlarged schematic view of the structure of the clamping tool or the auxiliary tool shown in fig. 1, in which the pull rod 3 and the handle 4 are integrally formed.
In fig. 1 to 4, 1-upper chuck, 2-lower chuck, 3-pull rod, 4-handle, 11-top, 12-first side plate, 13-connecting cavity, 131-first through hole, 14-connecting port, 21-second side plate, 22-fixed plug, 23-connecting chuck, 211-second through hole, 31-nut, 231-baffle.
Detailed Description
As described in the background art, at present, two operators are generally required to operate when the pendulum valve motor is dismounted, and due to factors such as the large weight of the pendulum valve motor and the manual error caused by manual dismounting, the pendulum valve motor is very easy to shake in the dismounting process, so that the problem of damaging the reference position of the screw hole for fixing the pendulum valve motor is caused, and finally the risk of falling the pendulum valve motor is increased.
Therefore, the utility model provides a clamping tool and a disassembly auxiliary tool, which are used for providing an independent clamp for fixing the pendulum valve motor when the pendulum valve motor fixed on the etching machine table is disassembled, so that the problems that the pendulum valve motor is easy to shake in the disassembly process and the reference position of a screw hole for fixing the pendulum valve motor is damaged and the efficiency of disassembling the pendulum valve motor is improved due to the factors of large weight of the pendulum valve motor, manual errors and the like caused by manual disassembly in the prior art are solved.
The following describes in further detail a clamping tool and a removal aid tool for assisting in removing a pendulum valve motor attached to an etching tool in accordance with the present utility model, with reference to fig. 1-4 and the accompanying examples. The advantages and features of the present utility model will become more apparent from the following description. It should be noted that the drawings are in a very simplified form and are all to a non-precise scale, merely for convenience and clarity in aiding in the description of embodiments of the utility model. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model, but the present utility model may be practiced in other ways than as described herein, and therefore the present utility model is not limited to the specific embodiments disclosed below.
As used in this application and in the claims, the terms "a," "an," "the," and/or "the" are not specific to the singular, but may include the plural, unless the context clearly dictates otherwise. In general, the terms "comprises" and "comprising" merely indicate that the steps and elements are explicitly identified, and they do not constitute an exclusive list, as other steps or elements may be included in a method or apparatus. In describing embodiments of the present utility model in detail, the cross-sectional view of the device structure is not partially exaggerated to a general scale for convenience of explanation, and the schematic drawings are only examples and should not limit the scope of the present utility model herein. In addition, the three-dimensional dimensions of length, width and depth should be included in actual fabrication.
Because the structure included in the disassembly assisting tool for assisting in disassembling the pendulum valve motor fixed on the etching machine table at least comprises the clamping tool, the process of describing the clamping tool through the drawings and the embodiment is that the disassembly assisting tool comprising the clamping tool is simultaneously described, and therefore, the following embodiment of the utility model will not be tired on the specific structure of the disassembly assisting tool.
Referring to fig. 1 to 4, fig. 1 is a front view showing a structure of a clamping tool or a disassembly assistance tool according to an embodiment of the present utility model; fig. 2 is an enlarged schematic view of the upper chuck 1 in the structure of the holding tool or the dismounting auxiliary tool shown in fig. 1; fig. 3 is an enlarged schematic view of the lower chuck 2 in the structure of the holding tool or the dismounting auxiliary tool shown in fig. 1; fig. 4 is an enlarged schematic view of the structure of the clamping tool or the auxiliary tool shown in fig. 1, in which the pull rod 3 and the handle 4 are integrally formed.
Referring to fig. 1, the clamping tool or the disassembly assisting tool provided by the present utility model may specifically include: an upper chuck 1, a lower chuck 2, a pull rod 3 and a handle 4.
In this embodiment, a clamping structure similar to a U-shape may be formed by using the upper chuck 1 and the lower chuck 2 which are respectively of a double-folded structure, then, the top plate 11 of the upper chuck 1 is set up, the fixed spigot 22 of the lower chuck 2 is set down, and the upper chuck 1 and the lower chuck 2 after being connected are used as an auxiliary tool for clamping the pendulum valve motor; the pull rod 3 and the handle 4 can provide hand-held parts for supporting an operator and taking out the pendulum valve motor from the etching machine table.
In this embodiment, the vertical height of the upper chuck 1 and the lower chuck 2 after being connected may be adjusted according to the actual height of the pendulum valve motor fixed on the etching machine to be disassembled, so that the height of the clamping tool is matched with the pendulum valve motor, and the purpose of stably fixing the pendulum valve motor through the upper chuck 1 and the lower chuck 2 is achieved.
Referring to fig. 2, and referring to fig. 1, the upper chuck 1 may further include a top plate 11 and a first side plate 12 vertically connected to one end of the top plate 11, wherein a connecting cavity 13 is formed at an axial center line of a plate surface of the first side plate 12, the connecting cavity 13 further extends to open a part of a top surface of the top plate 11, a first through hole 131 penetrating along an axial center line direction is further formed in an end surface of the first side plate 12 exposed by the connecting cavity 13, and two symmetrically distributed connection ports 14 are further formed on the first side plate 12.
In this embodiment, the upper chuck 1 may be formed of two fixing plates vertically connected, and the two fixing plates may be exemplarily referred to as a top plate 11 and a first side plate 12, respectively, in order to increase the stability of the clamping tool provided by the present utility model, in this embodiment, the top plate 11 and the first side plate 12 are integrally formed into a single structure, and a connecting cavity 13, which may be rectangular in shape, is formed on a partial area of the top plate 11 and the first side plate 12 on the single structure, for exposing a partial inner end surface of the first side plate 12, so as to form a first through hole 131 on the connecting inner end surface, into which the pull rod 3 is slidably inserted.
As an example, the first through hole 131 is specifically a hole-like structure penetrating the first side plate 12 exposed in the connection cavity 13, so as to facilitate the pull rod 3 to pass through the first side plate 12 through the first through hole 131 and enter the second through hole 211 formed on the second side plate 21 of the lower chuck 2.
In other embodiments, the pull rod 3 is used to facilitate the operator to hold the clamping tool, so if the pull rod 3 only needs to insert the first through hole 131 to stably lift the clamping tool, the first through hole 131 may be formed on only the first side plate 12, and the second through hole 211 may not be formed on the second side plate 21.
Also, in order to ensure that the tie rod 3 can be inserted into the first through hole 131 and/or the second through hole 211, it is necessary that the diameter of the lateral interface of the tie rod 3 is not greater than the diameters of the first through hole 131 and the second through hole 211. The pull rod 3 may be a cylindrical structure with a circular cross section in a shape like a "1", as shown in fig. 4.
Referring to fig. 3 to 4, and referring to fig. 1, the lower chuck 2 may include a second side plate 21 and two fixing pins 22 respectively perpendicularly connected to the bottom surface of the second side plate 21, two connection chucks 23 respectively matching with the connection ports 14 are disposed on the top end surface of the second side plate 21, and a second through hole 211 is further formed in the second side plate 21 in the axial extending direction of the first through hole 131, so that the pull rod 3 is slidably disposed in the first through hole 131 and/or the second through hole 211 through the connection cavity 13.
In this embodiment, the second side plate 21 of the lower chuck 2 is in the same plane with the first side plate 12 of the upper chuck 1, and the connection between the upper chuck 1 and the lower chuck 2 is achieved by the two symmetrically distributed connection ports 14 on the first side plate 12 and the connection chuck 23 on the second side plate 21 matching with the connection ports 14. For example, a baffle 231 may be further disposed at both sides of the top end of each of the connection clips 23, respectively, to fix the connection port 14 and the connection clip 23 connected by a penetration manner.
As shown in fig. 1, when the connection port 14 is an elongated cavity with an opening facing the direction of the connection chuck 23 and not closed, the connection chuck 23 is formed in an elongated structure capable of matching with the connection port 14, and in order to fix the connection port 14 and the connection chuck 23 connected by the penetrating manner, two elongated protruding structures, i.e., a baffle 231, are respectively provided at both ends of the connection chuck 23 in a direction perpendicular to the plate surfaces of the second side plate 21 and the first side plate 12, so that the connection port 14 and the connection chuck 23 connected by the penetrating manner can be prevented from moving along the direction perpendicular to the plate surfaces of the second side plate 21 and the first side plate 12, thereby causing the problem that the upper chuck 1 and the lower chuck 2 are not stably connected.
Further, a nut 31 may be further sleeved on the pull rod 3 to fix the pull rod 3 to the upper chuck 1 in a manner of being rotatable left and right.
In this embodiment, a nut 31 is further sleeved on the pull rod 3, so that the pull rod 3 is fixed on the upper chuck 1 in a manner of providing a screw type selection of the nut 31, wherein the nut 31 is positioned on the pull rod 3 above the first through hole 131 when the pull rod 3 is fixed on the upper chuck 1. In other embodiments, the pull rod 3 may be slidably disposed in the first through hole 131 and/or the second through hole 211 through the connection cavity 13 by providing multiple threads on the inner walls of the first through hole 131 and the second through hole 211 and at the end of the pull rod 3 where the handle 4 is not connected.
Further, a handle 4 is movably connected to the top end of the pull rod 3, so that the pull rod 3 is driven to move up and down by pulling the handle 4. Illustratively, the pull rod 3 and the handle 4 may be integrally formed to form a "7" shaped structure.
It will be appreciated that, in order to reduce the design cost of the clamping tool and the dismounting auxiliary tool provided by the present utility model, steel materials may be used as the materials of the upper chuck 1, the lower chuck 2 and the pull rod 3.
In summary, the present utility model provides a clamping tool, which is designed for an existing pendulum valve motor fixed on an etching machine, and is an auxiliary tool for quickly and stably removing the pendulum valve motor by only one operator. According to the utility model, the pendulum valve motor can be conveniently, time-saving, accurate and stable through the upper chuck and the lower chuck of the clamping tool, and then the screw used for fixing the pendulum valve motor on the etching machine table is removed, so that the purpose of saving the maintenance cost of the pendulum valve motor is realized, the factors such as large weight of the pendulum valve motor, manual errors caused by manual disassembly and the like are avoided, the pendulum valve motor is easy to shake in the dismantling process, the problem of damaging the reference position of the screw hole used for fixing the pendulum valve motor is caused, and the efficiency of dismantling the pendulum valve motor is improved.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element.
In this specification, each embodiment is described in a related manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment mainly describes differences from other embodiments. In particular, for apparatus, electronic devices, and computer-readable storage medium embodiments, the description is relatively simple, as it is substantially similar to method embodiments, with reference to portions of the description of method embodiments being relevant.
The foregoing description is only of the preferred embodiments of the present utility model and is not intended to limit the scope of the present utility model. Any modifications, equivalent substitutions, or alterations are intended to be within the spirit and principles of this disclosure.
Claims (10)
1. A clamping tool, comprising: the upper chuck (1), the lower chuck (2) and the pull rod (3), wherein the upper chuck (1) comprises a top plate (11) and a first side plate (12) vertically connected to one end of the top plate (11), a connecting cavity (13) is formed in the axial center line of the surface of the first side plate (12), the connecting cavity (13) also extends to open part of the top surface of the top plate (11), a first through hole (131) penetrating along the axial center line direction is formed in the end surface of the first side plate (12) exposed by the connecting cavity (13), and two symmetrically distributed connecting ports (14) are formed in the first side plate (12); the lower chuck (2) comprises a second side plate (21) and two fixed inserting hands (22) which are respectively and vertically connected with the bottom surface of the second side plate (21), two connecting chucks (23) which are respectively matched with the connecting ports (14) are arranged on the top end surface of the second side plate (21), and a second through hole (211) is further formed in the second side plate (21) in the direction of axial extension of the first through hole (131), so that the pull rod (3) is slidably arranged in the first through hole (131) and/or the second through hole (211) through the connecting cavity (13).
2. Clamping tool according to claim 1, characterized in that the opening direction of the connecting cavity (13) on the first side plate (12) is opposite to the opening direction of the connecting port (14).
3. Clamping tool according to claim 1, wherein the top plate (11) is integrally formed with the first side plate (12); and/or the second side plate (21) and the two fixed inserting hands (22) are integrally formed.
4. Clamping tool according to claim 1, wherein the pull rod (3) has a cylindrical structure with a circular cross-section in the shape of a "1", and the diameter of the cross-section of the pull rod (3) is not greater than the diameter of the first through hole (131) and the second through hole (211).
5. Clamping tool according to claim 4, characterized in that the pull rod (3) is further sleeved with a nut (31) to fix the pull rod (3) to the upper chuck (1) in a laterally rotatable manner.
6. The clamping tool according to claim 5, wherein the top end of the pull rod (3) is further movably connected with a handle (4), so that the pull rod (3) is driven to move up and down by pulling the handle (4).
7. Clamping tool according to claim 6, characterized in that the pull rod (3) is integrally formed with the handle (4) to form a "7" shaped structure.
8. Clamping tool according to claim 1, characterized in that the two sides of the top end of the connecting clamp (23) are respectively provided with a baffle plate (231) for fixing the connecting port (14) and the connecting clamp (23) which are connected in a penetrating manner.
9. Clamping tool according to claim 1, characterized in that the material of the upper chuck (1), the lower chuck (2) and the pull rod (3) comprises a steel material.
10. A disassembly aid adapted to aid in disassembly of a pendulum valve motor attached to an etching tool, the disassembly aid comprising a clamping tool according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223291285.8U CN219359339U (en) | 2022-12-08 | 2022-12-08 | Clamping tool and disassembly auxiliary tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223291285.8U CN219359339U (en) | 2022-12-08 | 2022-12-08 | Clamping tool and disassembly auxiliary tool |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219359339U true CN219359339U (en) | 2023-07-18 |
Family
ID=87139911
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223291285.8U Active CN219359339U (en) | 2022-12-08 | 2022-12-08 | Clamping tool and disassembly auxiliary tool |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219359339U (en) |
-
2022
- 2022-12-08 CN CN202223291285.8U patent/CN219359339U/en active Active
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