CN219350173U - Wafer box latch mechanism and wafer box - Google Patents

Abstract

The application discloses a wafer box latch mechanism and a wafer box, and relates to the technical field of wafer boxes, wherein the wafer box latch mechanism is arranged in a door body and used for locking the door body to the box body, and comprises a rotating piece, a connecting piece and a latch piece, and the rotating piece is hinged to the door body; the first end of the connecting piece is hinged to the rotating piece, and the hinged position of the rotating piece and the hinged position of the first end of the connecting piece are arranged at intervals; the latch piece slides and sets up in the door body, and the second end of connecting piece articulates in the latch piece, and the articulated department of the second end of connecting piece and the articulated department of rotating the piece and the articulated department of the first end of connecting piece all set up at intervals. The rotating member in this embodiment is connected to the latch member through the connecting member, and the connecting member is hinged to both the rotating member and the latch member, and the rotating friction is less than the sliding friction to generate dust, so as to avoid the wafer from being polluted as much as possible.

Description

Wafer box latch mechanism and wafer box

Technical Field

The application relates to the technical field of wafer cassettes, in particular to a wafer cassette latch mechanism and a wafer cassette.

Background

Semiconductor wafers have many procedures or steps in the manufacturing process, and the wafers need to be placed in different locations and in different machines due to the procedures or steps, so that the wafers must be transported from one place to another during the process and even stored for a period of time to fit the necessary process. The wafer box mainly plays a role in storing and carrying wafers in semiconductor production, and the wafer box can effectively reduce the risk of pollution to the wafers.

The wafer box comprises a box body, a door body covered on the box body and a latch mechanism arranged on the door body, wherein the latch mechanism is used for locking the door body on the box body. In the related art, the cam of the latch mechanism is rotated to drive the latch member to slide, however, because the cam and the latch member are in sliding friction, more dust is generated when the latch mechanism is opened and closed, and therefore, the wafers placed in the box body are easily polluted.

Disclosure of Invention

The embodiment of the application provides a wafer box latch mechanism and a wafer box, which can improve the technical problem of excessive dust in the related art.

In a first aspect, an embodiment of the present application provides a wafer cassette latch mechanism, where the wafer cassette latch mechanism is disposed in a door body to lock the door body to a cassette body, and the wafer cassette latch mechanism includes a rotating member, a connecting member, and a latch member, where the rotating member is hinged to the door body; the first end of the connecting piece is hinged to the rotating piece, and the hinged position of the rotating piece is arranged at intervals with the hinged position of the first end of the connecting piece; the latch piece is arranged on the door body in a sliding manner, the second end of the connecting piece is hinged to the latch piece, and the hinge joint of the second end of the connecting piece, the hinge joint of the rotating piece and the hinge joint of the first end of the connecting piece are arranged at intervals; the wafer box latch mechanism is provided with a locking state and a releasing state, when the wafer box latch mechanism is in the locking state, the latch piece is inserted into the box body so as to lock the door body to the box body, and when the wafer box latch mechanism is in the releasing state, the latch piece retracts the door body so as to enable the door body to be separated from the box body; the rotating piece rotates to drive the latch piece to slide, so that the wafer box latch mechanism is switched between the locking state and the unlocking state.

In some exemplary embodiments, the rotating member is provided with a limiting portion, and the wafer box latch mechanism further includes a limiting member, where the limiting member is disposed on the door body, and the limiting portion is in locking engagement with the limiting member to limit rotation of the rotating member.

In some exemplary embodiments, the limiting part includes a first protrusion protruding from the rotating part along a radial direction of the rotating part, the limiting part includes an elastic arm surrounding the rotating part, and a recess adapted to the first protrusion is provided on the elastic arm.

In some exemplary embodiments, the limiting part further includes a first limiting groove disposed on the rotating member, the limiting member includes a second protrusion protruding from the door body, the limiting member and the limiting groove both extend along the rotation axis direction of the rotating member, and the second protrusion can be clamped with the first limiting groove, so that the rotating member is limited to rotate while being abutted against the door body along the rotation axis direction of the rotating member.

In some exemplary embodiments, the wafer cassette latch mechanism further includes a guide block and a limit protrusion disposed on the rotating member, the guide block and the limit protrusion being disposed at opposite ends of the first limit groove, respectively, the guide block having a guide surface for abutting the second protrusion to guide the second protrusion to slide to the first limit groove.

In some exemplary embodiments, the rotating member has a locking position and a releasing position, the number of the limiting members is plural, and the plurality of limiting members are respectively disposed on the door body corresponding to the locking position and the releasing position; when the rotating piece is positioned at the locking position, the wafer box latch mechanism is in the locking state, the limiting part is in locking fit with the limiting piece correspondingly arranged at the locking position, when the rotating piece is positioned at the unlocking position, the wafer box latch mechanism is in the unlocking state, and the limiting part is in locking fit with the limiting piece correspondingly arranged at the unlocking position.

In some exemplary embodiments, the box body has a containing space for placing a wafer and an opening communicated with the containing space, the door body is detachably arranged at the opening of the box body, the wafer box latch mechanism further comprises a propping piece, one end of the latching piece far away from the connecting piece is provided with an inclined abutting surface, and when the latching piece slides out of the door body, the inclined abutting surface abuts against the propping piece, so that one end of the latching piece far away from the connecting piece bends towards a direction away from the opening.

In some exemplary embodiments, a chute is provided on the door body, and the latch member abuts against a wall of the chute; the door body is provided with a limit column, the latch piece is provided with a second limit groove, and the limit column is slidably arranged in the second limit groove.

In some exemplary embodiments, the latch member is slidably disposed on the door body along a predetermined straight line, and the predetermined straight line has an intersection point with the rotation axis of the rotating member and the rotation axis of the second end of the connecting member.

In a second aspect, an embodiment of the present application provides a wafer cassette, including a cassette body, a door body, and a wafer cassette latch mechanism, where the wafer cassette latch mechanism is disposed on the door body.

The beneficial effects are that: the rotating member in this embodiment is connected to the latch member through the connecting member, and the connecting member is hinged to both the rotating member and the latch member, and the rotating friction is smaller than the sliding friction resistance, so that less dust is generated, and the wafer is prevented from being polluted as much as possible.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a door and wafer cassette latch mechanism according to one embodiment of the present disclosure;

FIG. 2 is a schematic view of an exploded structure of a door body according to an embodiment of the present application;

FIG. 3 is a schematic view of a portion of a wafer cassette latch mechanism according to one embodiment of the present disclosure;

FIG. 4 is a schematic structural view of a housing in one embodiment of the present application;

FIG. 5 is a schematic diagram of the housing and wafer cassette latch mechanism according to one embodiment of the present disclosure;

FIG. 6 is a schematic view of a portion of a wafer cassette latch mechanism according to another embodiment of the present disclosure;

FIG. 7 is a schematic view of a door and wafer cassette latch mechanism according to another embodiment of the present disclosure;

fig. 8 is a partially enlarged schematic view of fig. 7 of the present application.

Reference numerals illustrate: 100. a wafer cassette latch mechanism; 110. a rotating member; 110a, a first limit groove; 110b, key insertion holes; 110c, manual jack; 111. a first convex portion; 120. a connecting piece; 130. a latch member; 130a, a second limit groove; 130b, an inclined abutment surface; 131. reinforcing ribs; 141. an elastic arm; 1411. a concave portion; 142. a second convex portion; 150. a guide block; 160. a top support; 170. a limit protrusion; 200. a door body; 200a, a chute; 210. an inner shell, 220, an outer shell; 230. and a limit column.

Detailed Description

In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.

As shown in fig. 1-3, a first aspect of the present utility model provides a wafer cassette latch mechanism 100 disposed in a door 200 for locking the door 200 to a cassette (not shown), wherein the wafer cassette latch mechanism 100 includes a rotating member 110, a connecting member 120 and a latch member 130.

The rotating member 110 is hinged to the door body 200, and the door body 200 includes an inner case 210 and an outer case 220, with the rotating member 110 disposed between the inner case 210 and the outer case 220. For example, the rotating member 110 is provided with a rotating hole, the door body 200 is provided with a pin shaft, and the pin shaft is rotatably arranged in the rotating hole, so that the rotating member 110 is hinged to the door body 200, and the rotating member 110 has a rotating axis. The specific shape of the rotating member 110 may be a circular turntable, which is a central symmetrical structure, so that centrifugal force during rotation of the rotating member 110 is reduced as much as possible, and the rotating member 110 rotates more stably. Of course, the rotating member 110 may be rod-shaped or have other shapes. It should be noted that, the turning piece 110 is provided with a key jack 110b and a manual jack 110c, the key jack 110b corresponds to a spring key of an external device, and after the spring key is inserted into the key jack 110b, the wafer box can be locked or unlocked by turning the spring key. The manual insertion hole 110c is used to manually rotate the rotator 110, thereby manually opening the wafer cassette.

The first end of the connecting member 120 is hinged to the rotating member 110, and the hinge of the rotating member 110 is spaced from the hinge of the first end of the connecting member 120. When the rotation member 110 rotates, the hinge of the first end of the connection member 120 rotates around the hinge of the rotation member 110.

The latch 130 is slidably disposed on the door body 200, the second end of the connecting member 120 is hinged to the latch 130, and the hinge of the second end of the connecting member 120 is spaced from the hinge of the rotating member 110 and the hinge of the first end of the connecting member 120. The rotary member 110, the connecting member 120, and the latch member 130 constitute a crank block mechanism, thereby converting the rotary motion of the rotary member 110 into the linear motion of the latch member 130.

The wafer cassette latch mechanism 100 has a locked state and an unlocked state, and when the wafer cassette latch mechanism 100 is in the locked state, the latch 130 is inserted into the cassette body so as to lock the door 200 to the cassette body; when the wafer cassette latch mechanism 100 is in the unlocked state, the latch 130 retracts the door 200 so that the door 200 can be separated from the cassette; the rotating member 110 rotates to drive the latch member 130 to slide, so that the wafer cassette latch mechanism 100 is switched between the locked state and the unlocked state. It will be appreciated that the cartridge may be provided with a slot to facilitate insertion of the latch 130 into the cartridge.

Compared with the sliding friction generated by the direct abutting of the rotating member 110 and the latch member 130, the rotating member 110 in the embodiment is connected with the latch member 130 through the connecting member 120, the connecting member 120 is hinged with the rotating member 110 and the latch member 130, and the sliding friction is smaller than the sliding friction, so that the generated dust is less, and the wafer is prevented from being polluted as much as possible.

In some embodiments, the rotating member 110 is provided with a limiting portion, and the latch mechanism further includes a limiting member disposed on the door body 200, where the limiting portion is in locking engagement with the limiting member to limit the rotation of the rotating member 110 in the locked state and the unlocked state. The wafer cassette latch mechanism 100 is switched between a locked state and an unlocked state, and the limiting member is provided to limit the rotation of the rotating member 110, so that the current state can be maintained unchanged when the wafer cassette latch mechanism 100 is in the locked state or the unlocked state.

As shown in fig. 3-5, in some embodiments, the limiting portion includes a first protrusion 111 protruding from the rotating member 110 along a radial direction of the rotating member 110, and the limiting member includes an elastic arm 141 located at a periphery of the rotating member 110, and a recess 1411 adapted to the first protrusion 111 is provided on the elastic arm 141. The elastic arm 141 is approximately arc-shaped, the elastic arm 141 has a certain elasticity, when the first protruding portion 111 of the rotating member 110 is abutted against the elastic arm 141, the elastic arm 141 is deformed, and when the rotating member 110 rotates to the unlocking position or the unlocking position, the elastic arm 141 is clamped with the first protruding portion 111, so that the rotating member 110 cannot rotate at will.

As shown in fig. 4 and fig. 6, in some embodiments, the limiting portion further includes a first limiting groove 110a disposed on the rotating member 110, the limiting member includes a second protruding portion 142 protruding from the door body 200, both the limiting member and the limiting groove extend along the rotation axis direction of the rotating member 110, and the second protruding portion 142 can be clamped with the first limiting groove 110a, so as to abut the rotating member 110 against the door body 200 along the rotation axis direction of the rotating member 110 while limiting the rotation of the rotating member 110.

As shown in fig. 6, in some embodiments, the wafer cassette latch mechanism 100 further includes a guide block 150 and a limiting protrusion 170 protruding on the rotating member 110, where the guide block 150 and the limiting protrusion 170 are respectively disposed at opposite ends of the first limiting slot 110a. The guide block 150 has a guide surface for abutting against the second protrusion 142 to guide the second protrusion 142 to slide to the first limit groove 110a. The guide surface is preferably a curved surface so that the second protrusion 142 can smoothly slide on the guide surface. When the second protruding portion 142 slides to be clamped with the first limiting groove 110a, the guide block 150 and the limiting protrusion 170 can play a certain limiting role on the second protruding portion 142, so that the second protruding portion 142 is prevented from falling out of the limiting groove 110a to a certain extent.

As shown in fig. 4-6, in some embodiments, the rotating member 110 has a locking position and a releasing position, the number of the limiting members is plural, and the plurality of limiting members are disposed on the door body 200 corresponding to the locking position and the releasing position, respectively. For example, as shown in fig. 5, the number of the elastic arms 141 is 2, and as shown in fig. 6, the number of the first protrusions 111 is 4. As another example, as shown in fig. 4, the number of the second protruding portions 142 is 2, and as shown in fig. 6, the number of the first stopper grooves 110a is 4.

When the rotating member 110 is located at the locking position, the wafer box latch mechanism 100 is in a locking state, the limiting part is in locking fit with the limiting part correspondingly arranged at the locking position, and when the rotating member 110 is located at the unlocking position, the wafer box latch mechanism 100 is in a unlocking state, and the limiting part is in locking fit with the limiting part correspondingly arranged at the unlocking position.

As shown in fig. 6, the latch 130 is provided with a reinforcing rib 131, and the reinforcing rib 131 can improve the structural strength of the latch 130.

As shown in fig. 7 and 8, in some embodiments, the box body has a receiving space for placing a wafer and an opening in communication with the receiving space, the door 200 is detachably disposed in the opening of the box body, the wafer box latch mechanism 100 further includes a supporting member 160, an end of the latch member 130 away from the connecting member 120 is provided with an inclined abutment surface 130b, and when the latch member 130 slides out of the door 200, the inclined abutment surface 130b abuts against the supporting member 160, so that the end of the latch member 130 away from the connecting member 120 bends in a direction away from the opening. When the latch 130 is inserted into the box body, a component force perpendicular to the opening direction is generated on the cover body, so that the door body 200 is pressed against the box body, and the tightness between the door body 200 and the box body is better. It is to be understood that, in order to make the top support 160 slide smoothly with the inclined contact surface 130b, an inclined surface that contacts with the inclined contact surface 130b may be provided on the top support 160.

As shown in fig. 2 and 3, in some embodiments, a sliding slot 200a is provided on the door body 200, and the latch 130 abuts against a slot wall of the sliding slot 200 a; the door body 200 is provided with a limit post 230, the latch 130 is provided with a second limit groove 130a, and the limit post 230 is slidably disposed in the second limit groove 130a. The sliding direction of the latch 130 is limited by the sliding chute 200a and the limiting post 230, so that the latch 130 slides stably.

In some embodiments, the latch 130 is slidably disposed on the door 200 along a predetermined line, and the predetermined line has an intersection with the rotation axis of the rotating member 110 and the rotation axis of the second end of the connecting member 120. Namely, the rotating member 110, the connecting member 120 and the latch member 130 form a centering crank slider mechanism, so that the three operations are more stable, and the arrangement volume can be reduced.

The second aspect of the present application provides a wafer cassette, which includes a cassette body, a door body 200, and a latch mechanism disposed on the door body 200.

The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present application, it should be understood that, if there is an azimuth or positional relationship indicated by terms such as "upper", "lower", "left", "right", etc., based on the azimuth or positional relationship shown in the drawings, this is for convenience of description and simplification of the description, but does not indicate or imply that the apparatus or element to be referred must have a specific azimuth, be constructed and operated in a specific azimuth, and thus terms describing the positional relationship in the drawings are merely used for illustration and are not to be construed as limitations of the present application, and specific meanings of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances.

The foregoing description of the preferred embodiments of the present application is not intended to be limiting, but is intended to cover any and all modifications, equivalents, and alternatives falling within the spirit and principles of the present application.

Claims (10)

1. The utility model provides a wafer box latch mechanism, sets up in the door body be used for with the door body lock is in the box body, its characterized in that, wafer box latch mechanism includes:

the rotating piece is hinged to the door body;

the first end of the connecting piece is hinged to the rotating piece, and the hinged position of the rotating piece is arranged at intervals with the hinged position of the first end of the connecting piece;

the latch piece is arranged on the door body in a sliding manner, the second end of the connecting piece is hinged to the latch piece, and the hinge position of the second end of the connecting piece is arranged at intervals from the hinge position of the rotating piece and the hinge position of the first end of the connecting piece;

the wafer box latch mechanism is provided with a locking state and a releasing state, and when the wafer box latch mechanism is in the locking state, the latch piece is inserted into the box body so as to enable the door body to be locked to the box body; when the wafer cassette latch mechanism is in the lock release state, the latch is retracted to the door body so that the door body can be separated from the cassette body; the rotating piece rotates to drive the latch piece to slide, so that the wafer box latch mechanism is switched between the locking state and the unlocking state.

2. The wafer cassette latch mechanism of claim 1, wherein the rotating member is provided with a limiting portion, the wafer cassette latch mechanism further comprises a limiting member, the limiting member is disposed on the door body, and the limiting portion is in locking engagement with the limiting member to limit rotation of the rotating member.

3. The wafer cassette latch mechanism according to claim 2, wherein the limiting portion includes a first protrusion protruding from the rotating member in a radial direction of the rotating member, the limiting member includes an elastic arm surrounding the rotating member, and a recess adapted to the first protrusion is provided on the elastic arm.

4. The wafer cassette latch mechanism according to claim 3, wherein the limiting portion further comprises a first limiting groove provided on the rotating member, the limiting member comprises a second protruding portion protruding from the door body, the limiting member and the limiting groove both extend along the rotation axis direction of the rotating member, the second protruding portion can be engaged with the first limiting groove, and the rotating member is abutted against the door body along the rotation axis direction of the rotating member while the rotating member is limited to rotate.

5. The wafer cassette latch mechanism according to claim 4, further comprising a guide block and a limit protrusion disposed on the rotating member, the guide block and the limit protrusion being disposed at opposite ends of the first limit groove, respectively, the guide block having a guide surface for abutting against the second protrusion to guide the second protrusion to slide to the first limit groove.

6. The wafer cassette latch mechanism according to claim 2, wherein the rotating member has a locking position and a releasing position, the number of the limiting members is plural, and the plurality of limiting members are disposed on the door body corresponding to the locking position and the releasing position, respectively;

when the rotating piece is positioned at the locking position, the wafer box latch mechanism is in the locking state, and the limiting part is in locking fit with the limiting piece correspondingly arranged at the locking position; when the rotating piece is located at the lock releasing position, the wafer box latch mechanism is in the lock releasing state, and the limiting part is in locking fit with the limiting piece correspondingly arranged at the lock releasing position.

7. The wafer cassette latch mechanism of claim 1, wherein the cassette has a receiving space for receiving a wafer and an opening in communication with the receiving space, the door is detachably disposed in the opening of the cassette, the wafer cassette latch mechanism further comprises a top support, an end of the latch remote from the connector is provided with an inclined abutment surface, and when the latch slides out of the door, the inclined abutment surface abuts against the top support to bend an end of the latch remote from the connector in a direction away from the opening.

8. The wafer cassette latch mechanism according to claim 1, wherein a chute is provided on the door body, and the latch abuts against a wall of the chute; the door body is provided with a limit column, the latch piece is provided with a second limit groove, and the limit column is slidably arranged in the second limit groove.

9. The wafer cassette latch mechanism of claim 1, wherein the latch member is slidably disposed on the door along a predetermined line, and the predetermined line has an intersection with both the rotational axis of the rotational member and the rotational axis of the second end of the connector.

10. A wafer cassette, comprising:

a case body;

a door body; a kind of electronic device with high-pressure air-conditioning system

The cassette latch mechanism as defined in any one of claims 1-9, being disposed on the door.

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