CN219350169U

CN219350169U - Quartz boat for placing monocrystalline silicon piece

Info

Publication number: CN219350169U
Application number: CN202223493425.XU
Authority: CN
Inventors: 徐源; 徐煜清; 徐传龙; 冯维娥
Original assignee: Jiangsu Kaiyang Quartz Products Co ltd
Current assignee: Jiangsu Kaiyang Quartz Products Co ltd
Priority date: 2022-12-27
Filing date: 2022-12-27
Publication date: 2023-07-14
Anticipated expiration: 2032-12-27

Abstract

The utility model provides a quartz boat for placing monocrystalline silicon piece, includes left and right sides board, has the limiting plate at the relative internal surface fixed of two curb plates, and the vertical interval of limiting plate sets up, and limiting plate on two curb plates sets up relatively, constitutes monocrystalline silicon piece vertical draw-in groove between the adjacent limiting plate, is equipped with bottom spacing between two curb plates, and bottom spacing upwards is equipped with the separating groove for fixed monocrystalline silicon piece in vertical direction, the separating groove with the position of draw-in groove on the curb plate is corresponding to be set up, is connected through controlling the fastening crossbeam between two curb plates. The fastening beam comprises a male Liang Hemu beam, a transverse groove arranged along the length direction of the female beam is formed in the female beam, a sliding block which is arranged in the transverse groove of the female beam and can slide along the transverse groove of the female beam is arranged on the male beam, and a clamping bolt for fastening the sliding block is arranged at the free end of the female beam. The width of the whole device can be adjusted by moving the side plates at two sides so as to place monocrystalline silicon wafers with different sizes. The silicon wafer is fixed more stably and is not easy to shake.

Description

Quartz boat for placing monocrystalline silicon piece

Technical Field

The utility model relates to the technical field of production and processing of monocrystalline silicon wafers, in particular to a quartz boat for placing monocrystalline silicon wafers.

Background

In the production and processing process of monocrystalline silicon wafers, special cleaning agents are required to be used for cleaning the silicon wafers so as to ensure the cleanliness of the surfaces of the silicon wafers. The operation is as follows: and fixing and placing the silicon wafers on a quartz boat, and then immersing the whole quartz boat into a special cleaning agent for cleaning.

The existing silicon wafer quartz boat is of an integrally formed quartz structure. Generally, one quartz boat can only be used for placing silicon wafers of one size, and different quartz boats are needed for placing silicon wafers of different sizes, which is troublesome. In addition, the silicon wafer is placed on the quartz boat, so that the fixing effect is poor, the silicon wafer is easy to shake, the collision and friction of the silicon wafer are easy to cause, and the production quality of the silicon wafer and the subsequent procedures are affected.

Disclosure of Invention

Aiming at the defects of the prior art, the utility model provides a quartz boat which can be used for placing monocrystalline silicon wafers with different specifications and has a simple and reliable structure.

The technical problem to be solved by the utility model is realized by the following technical scheme, and the quartz boat for placing monocrystalline silicon wafers is characterized in that:

including controlling two curb plates, the internal surface fixed who is relative at two curb plates has the limiting plate, the vertical interval of limiting plate sets up, and the limiting plate on two curb plates sets up relatively, constitutes the vertical draw-in groove of monocrystalline silicon piece between the adjacent limiting plate, is equipped with bottom spacing between two curb plates, and bottom spacing upwards is equipped with the separating groove for fixed monocrystalline silicon piece in vertical direction, the separating groove with the position of draw-in groove on two curb plates is corresponding to be set up, is connected through controlling the fastening crossbeam between two curb plates.

The technical problem to be solved by the utility model can be further solved by the following technical scheme that the fastening beam comprises a male Liang Hemu beam, a transverse groove arranged along the length direction of the female beam is arranged on the female beam, a sliding block which is arranged in the transverse groove of the female beam and can slide along the transverse groove of the female beam is arranged on the male beam, a threaded hole extending to the transverse groove of the female beam is arranged at the free end of the female beam, and a clamping bolt for fastening the sliding block is arranged in the threaded hole.

The technical problem to be solved by the utility model can be further solved by the following technical scheme that two side plates are connected through four groups of fastening beams.

The technical problem to be solved by the utility model can be further solved by the following technical scheme that a rubber pad is arranged in the vertical clamping groove.

The technical problem to be solved by the utility model can be further solved by the following technical scheme that the bottom limiting strip is provided with two strips which are respectively fixed between two groups of fastening beams at the bottom.

The beneficial effects of the utility model are as follows: the width of the whole device can be adjusted by moving the side plates at two sides so as to place monocrystalline silicon wafers with different sizes. After the silicon wafer is placed by a worker, the two side plates are transversely moved, so that the two side plates clamp the two ends of the silicon wafer, and then the clamping bolts are screwed. The two ends of the silicon wafer are just clamped in the rubber pads in the limiting grooves, and under the action of screwing the bolts, the rubber pads tightly press the silicon wafer, so that the silicon wafer is fixed more stably and is not easy to shake.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a left side schematic view;

FIG. 3 is a right side schematic view;

FIG. 4 is a schematic view of a parent beam structure;

FIG. 5 is a schematic view of a male beam structure;

in the figure: 1. a left side plate; 2. a right side plate; 3. a limiting plate; 4. a bottom limit bar; 5. a parent beam; 6. a male beam; 7. and clamping the bolt.

Detailed Description

The following further describes the specific technical solutions of the present utility model, so that the purpose, technical solutions and advantages of the embodiments of the present utility model will be more apparent to those skilled in the art to further understand the present utility model, and the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments, but not limitations on the claims thereof. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

The utility model provides a quartz boat for placing monocrystalline silicon piece, includes two curb plates about, is fixed with the limiting plate at the relative internal surface of two curb plates, the vertical interval of limiting plate sets up, and the limiting plate on two curb plates sets up relatively, constitutes monocrystalline silicon piece vertical draw-in groove between the adjacent limiting plate, is equipped with bottom spacing between two curb plates, and bottom spacing upwards is equipped with the separating groove for fixed monocrystalline silicon piece in vertical direction, the separating groove with the position of draw-in groove on the curb plate is corresponding to be set up, is connected through controlling fastening crossbeam between two curb plates.

The fastening beam comprises a male Liang Hemu beam, a transverse groove arranged along the length direction of the female beam is formed in the female beam, a sliding block which is arranged in the transverse groove of the female beam and can slide along the transverse groove of the female beam is arranged on the male beam, a threaded hole extending to the transverse groove of the female beam is formed in the free end of the female beam, and a clamping bolt used for fastening the sliding block is arranged in the threaded hole.

The two side plates are connected through four groups of fastening beams.

The bottom limiting strips are arranged in two, and are respectively fixed between two groups of fastening beams at the bottom.

A rubber pad is arranged in the vertical clamping groove.

Referring to fig. 1-5, a quartz boat for placing monocrystalline silicon pieces, 1, left side plate; 2. a right side plate; 3. a limiting plate; 4. a bottom limit bar; 5. a parent beam; 6. a male beam; 7. and clamping the bolt. The left side plate and the right side plate are provided with limiting plates which are oppositely placed at the inner side of the left side plate and the right side plate, and the bottom of the left side plate and the right side plate is provided with limiting strips; the left side plate and the right side plate are movably connected through a female beam He Gong beam and can freely move in a groove arranged on the beam.

The limiting plates are oppositely arranged on the inner sides of the left side plate and the right side plate and used for fixing monocrystalline silicon wafers on two sides.

The number of the bottom limiting strips is two, and the bottom limiting strips are used for fixing monocrystalline silicon pieces in the vertical direction; the separation groove is correspondingly arranged with the clamping groove on the two side plates

The working principle of the utility model is as follows: before placing the silicon wafer, the distance between the side plates at the two sides is adjusted according to the actual size specification of the silicon wafer, so that the distance between the brackets at the two sides is consistent with the size of the silicon wafer, then placing the monocrystalline silicon wafer, and screwing the clamping bolts on the mother beam after the silicon wafer is placed preliminarily. Firmly fixing the monocrystalline silicon piece. Therefore, the device can be used for placing silicon wafers with different sizes, in addition, the two ends of the silicon wafer are just clamped in the rubber pads in the limiting grooves, and under the action of the clamping bolts, the rubber pads tightly press the silicon wafer, so that the silicon wafer is fixed more stably and is not easy to shake.

Example 1

In this embodiment, as shown in fig. 1, both side plates and bottom limit bars are provided with limit grooves adapted to monocrystalline silicon pieces. The distance between the side plates at the two sides is equal to the width of the monocrystalline silicon piece and can be adjusted. When the silicon wafer is large in size, the distance between the side plates at two sides can be pulled to be maximum, and when the silicon wafer is placed in the silicon wafer, the distance between the side plates is initially adjusted to be basically equal to the width of the silicon wafer; after all the silicon wafers are put in, further fixing the silicon wafers by screwing the clamping bolts, so that two sides of the silicon wafers are tightly clamped in the limiting grooves; when the silicon wafer size changes, the silicon wafer can be firmly clamped in the limiting groove by adjusting the structure and the clamping screw designed on the two beams.

The above examples are provided to further illustrate the present utility model and are not intended to limit the utility model to these specific embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be construed as being within the protection scope of the present utility model.

Claims

1. A quartz boat for holding monocrystalline silicon pieces, characterized by:

2. The quartz boat for holding monocrystalline silicon pieces as defined in claim 1, wherein: the fastening beam comprises a male Liang Hemu beam, a transverse groove arranged along the length direction of the female beam is formed in the female beam, a sliding block which is arranged in the transverse groove of the female beam and can slide along the transverse groove of the female beam is arranged on the male beam, a threaded hole extending to the transverse groove of the female beam is formed in the free end of the female beam, and a clamping bolt used for fastening the sliding block is arranged in the threaded hole.

3. The quartz boat for holding monocrystalline silicon pieces as defined in claim 1, wherein: the two side plates are connected through four groups of fastening beams.

4. A quartz boat for holding monocrystalline silicon pieces as defined in claim 3, wherein: the bottom limiting strips are arranged in two, and are respectively fixed between two groups of fastening beams at the bottom.

5. The quartz boat for holding monocrystalline silicon pieces as defined in claim 1, wherein: a rubber pad is arranged in the vertical clamping groove.