CN219348904U - Control panel and wafer resistivity measuring machine - Google Patents

Control panel and wafer resistivity measuring machine Download PDF

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Publication number
CN219348904U
CN219348904U CN202320719018.1U CN202320719018U CN219348904U CN 219348904 U CN219348904 U CN 219348904U CN 202320719018 U CN202320719018 U CN 202320719018U CN 219348904 U CN219348904 U CN 219348904U
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China
Prior art keywords
control panel
resistivity measuring
measuring machine
wafer resistivity
plate
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CN202320719018.1U
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Chinese (zh)
Inventor
方廷宇
游礼仲
王永震
宋汝明
苏方召
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Shandong Qiangmao Electronic Technology Co ltd
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Shandong Qiangmao Electronic Technology Co ltd
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

The utility model relates to the technical field of control panel installation, in particular to a control panel and wafer resistivity measuring machine, which comprises: the side surface of the wafer resistivity measuring machine main body is provided with a positioning plate, the side of the control panel is provided with a vertical plate, the side surface of the vertical plate is provided with a supporting plate, and a limiting rod is arranged in the supporting plate; the beneficial effects are as follows: the utility model provides a control panel and wafer resistivity measuring machine when needs install control panel in the wafer resistivity measuring machine main part, press the gag lever post at first and make the gag lever post shrink advance the standing groove in, then just can insert the backup pad in the sliding hole, then the gag lever post can insert the gag lever post in the limiting hole with the elasticity of spring just so can fix control panel in the wafer resistivity measuring machine main part, the installation of having avoided traditional control panel is generally fixed in control panel in the wafer resistivity measuring machine main part through fastener such as screw like this, the pleasing to the eye of control panel mounting structure has been influenced, and dismouting and maintenance are troublesome.

Description

Control panel and wafer resistivity measuring machine
Technical Field
The utility model relates to the technical field of control panel installation, in particular to a control panel and a wafer resistivity measuring machine.
Background
Along with the development of science and technology, equipment is also more and more intelligent, integrates and integrates, and control button on equipment and the electrical apparatus is unified through control panel arranges, not only makes things convenient for staff to operate equipment, has still improved production efficiency, and control panel is elegant appearance not only, and is with low costs, long service life, advantage such as small.
In the prior art, a control panel is arranged on the wafer resistivity measuring machine for convenience, so that a worker can operate equipment conveniently.
However, the control panel is generally fixed to the wafer resistivity measuring machine body by a fastener such as a screw, but when the surface of the wafer resistivity measuring machine body is screw-threaded or screwed, the mounting base is easily deformed, which affects the beauty of the control panel mounting structure and is troublesome to detach and maintain.
Disclosure of Invention
The present utility model is directed to a control panel and a wafer resistivity measuring machine, which solve the above-mentioned problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a control panel, the control panel comprising: the wafer resistivity measuring machine comprises a wafer resistivity measuring machine body, wherein a locating plate is arranged on the side face of the wafer resistivity measuring machine body, a limiting hole is formed in the surface of the locating plate, and a sliding hole is formed in the surface of the locating plate;
the control panel, the control panel side is provided with the riser, and the riser side is provided with the backup pad, and the standing groove has been seted up to the backup pad terminal surface, is provided with the gag lever post in the standing groove, and the gag lever post bottom is provided with the spring.
Preferably, the sliding hole is in a square plate structure, the supporting plate can be inserted into the sliding hole, and the supporting plate can slide in the sliding hole.
Preferably, the side of the limiting rod is provided with a pressing plate, the end face of the limiting rod is provided with guide holes, the limiting rod is provided with two groups, and the two groups of limiting rods are symmetrically distributed about the center line of the long side of the end face of the positioning plate.
Preferably, the surface of the placing groove is provided with a guide rod, the guide rod is inserted into the guide hole, the limit rod can slide on the guide rod, and one end of the guide rod is fixedly connected to the placing groove.
Preferably, one end of the spring is fixedly connected to the bottom of the placing groove, and the other end of the spring is fixedly connected to the end face of the limiting rod.
Preferably, a cover plate is arranged at one end of the supporting plate, and the cover plate is fixed on the end face of the supporting plate by bolts.
A wafer resistivity measuring machine comprises the control panel.
Compared with the prior art, the utility model has the beneficial effects that:
the utility model provides a control panel and wafer resistivity measuring machine when needs install control panel in the wafer resistivity measuring machine main part during the use, press the gag lever post at first and make the gag lever post shrink advance the standing groove in, then just can insert the backup pad in the sliding hole, then the gag lever post can insert the gag lever post in the limiting hole with the elasticity of spring, just so can fix control panel in the wafer resistivity measuring machine main part, the installation of having avoided traditional control panel is generally fixed in control panel in the wafer resistivity measuring machine main part through fastener such as screw, but when the installation is screwed up with screw to the screw in wafer resistivity measuring machine main part surface, lead to the installation base to take place to warp easily, control panel mounting structure's pleasing to the eye has been influenced, and dismouting and maintenance are troublesome.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a side view of the structure of the present utility model;
FIG. 3 is an enlarged schematic view of the structure of FIG. 2A;
fig. 4 is a top view of the structure of the present utility model.
In the figure: 1. a wafer resistivity measuring machine body; 2. a positioning plate; 3. a limiting hole; 4. a slide hole; 5. a control panel; 6. a vertical plate; 7. a support plate; 8. a placement groove; 9. a limit rod; 10. a spring; 11. pressing the plate; 12. a guide hole; 13. a guide rod; 14. a cover plate; 15. and (5) a bolt.
Detailed Description
In order to make the objects, technical solutions, and advantages of the present utility model more apparent, the embodiments of the present utility model will be further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are some, but not all, embodiments of the present utility model, are intended to be illustrative only and not limiting of the embodiments of the present utility model, and that all other embodiments obtained by persons of ordinary skill in the art without making any inventive effort are within the scope of the present utility model.
In the description of the present utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "a," an, "" the first, "" the second, "" the third, "" the fourth, "" the fifth, "and the sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
For purposes of brevity and description, the principles of the embodiments are described primarily by reference to examples. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one of ordinary skill in the art that the embodiments may be practiced without limitation to these specific details. In some instances, well-known methods and structures have not been described in detail so as not to unnecessarily obscure the embodiments. In addition, all embodiments may be used in combination with each other.
Example 1
Referring to fig. 1 to 4, the present utility model provides a technical solution: a control panel, the control panel comprising: the wafer resistivity measuring machine comprises a wafer resistivity measuring machine body 1, wherein a locating plate 2 is arranged on the side face of the wafer resistivity measuring machine body 1, a limiting hole 3 is formed in the surface of the locating plate 2, and a sliding hole 4 is formed in the surface of the locating plate 2; the control panel 5, the control panel 5 side is provided with the riser 6, the riser 6 side is provided with the backup pad 7, the backup pad 7 terminal surface has offered the standing groove 8, is provided with the gag lever post 9 in the standing groove 8, the gag lever post 9 bottom is provided with the spring 10;
when the control panel 5 is required to be mounted on the wafer resistivity measuring machine body 1, the limiting rod 9 is pressed to enable the limiting rod 9 to be contracted into the placing groove 8, then the supporting plate 7 can be inserted into the sliding hole 4, and then the limiting rod 9 can be inserted into the limiting hole 3 by the limiting rod 9 through the elastic force of the spring 10, so that the control panel 5 can be fixed on the wafer resistivity measuring machine body 1.
Example two
The first embodiment is characterized in that a placing groove 8 is formed in the base of the first embodiment, a guide rod 13 is arranged on the surface of the placing groove 8, the guide rod 13 is inserted into the guide hole 12, the limiting rod 9 can slide on the guide rod 13, one end of the guide rod 13 is fixedly connected to the placing groove 8, the sliding hole 4 is of a square plate-shaped structure, the supporting plate 7 can be inserted into the sliding hole 4, and the supporting plate 7 can slide in the sliding hole 4;
when the control panel 5 is used, the guide rod 13 is inserted into the guide hole 12, and when the limit rod 9 moves up and down, the guide hole 12 formed in the surface of the limit rod 9 can enable the limit rod 9 to move on the guide rod 13, so that the problem that the limit rod 9 is offset during movement and the installation of the control panel 5 is possibly influenced is prevented.
Example III
The second embodiment is characterized in that a limiting rod 9 is arranged on the basis of the second embodiment, a pressing plate 11 is arranged on the side face of the limiting rod 9, guide holes 12 are formed in the end face of the limiting rod 9, two groups of limiting rods 9 are arranged, the two groups of limiting rods 9 are symmetrically distributed on the center line of the long side of the end face of the positioning plate 2, one end of a spring 10 is fixedly connected to the bottom of a placing groove 8, the other end of the spring 10 is fixedly connected to the end face of the limiting rod 9, a cover plate 14 is arranged at one end of a supporting plate 7, and the cover plate 14 is fixed on the end face of the supporting plate 7 through bolts 15;
when the control panel 5 is required to be taken out, the pressing plate 11 is pressed firstly to enable the limiting rod 9 to be contracted into the placing groove 8, the limiting rod 9 moves out of the limiting hole 3, then the control panel 5 can be taken out of the wafer resistivity measuring machine body 1, and the spring 10 can be set to conveniently reset automatically when the limiting rod 9 is pressed every time.
When the control panel 5 is required to be mounted on the wafer resistivity measuring machine body 1 in actual use, the limiting rod 9 is pressed firstly to enable the limiting rod 9 to be contracted into the placing groove 8, then the supporting plate 7 can be inserted into the sliding hole 4, then the limiting rod 9 can be inserted into the limiting hole 3 by the limiting rod 9 through the elastic force of the spring 10, so that the control panel 5 can be fixed on the wafer resistivity measuring machine body 1, the control panel 5 is generally fixed on the wafer resistivity measuring machine body 1 through fasteners such as screws in the conventional control panel 5 mounting, but deformation of a mounting base is easily caused when screw holes are formed in the surface of the wafer resistivity measuring machine body 1 or the screws are screwed for mounting, the mounting structure of the control panel 5 is influenced, and the mounting, dismounting and maintenance are troublesome.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. A control panel, characterized in that: the control panel includes: the wafer resistivity measuring device comprises a wafer resistivity measuring device body (1), wherein a locating plate (2) is arranged on the side face of the wafer resistivity measuring device body (1), a limiting hole (3) is formed in the surface of the locating plate (2), and a sliding hole (4) is formed in the surface of the locating plate (2);
control panel (5), control panel (5) side is provided with riser (6), and riser (6) side is provided with backup pad (7), and standing groove (8) have been seted up to backup pad (7) terminal surface, are provided with gag lever post (9) in standing groove (8), and gag lever post (9) bottom is provided with spring (10).
2. A control panel as claimed in claim 1, wherein: the sliding hole (4) is of a square plate-shaped structure, the supporting plate (7) can be inserted into the sliding hole (4), and the supporting plate (7) can slide in the sliding hole (4).
3. A control panel as claimed in claim 2, wherein: the side of the limiting rod (9) is provided with a pressing plate (11), the end face of the limiting rod (9) is provided with a guide hole (12), the limiting rod (9) is provided with two groups, and the two groups of limiting rods (9) are symmetrically distributed about the center line of the long side of the end face of the positioning plate (2).
4. A control panel according to claim 3, characterized in that: the surface of the placing groove (8) is provided with a guide rod (13), the guide rod (13) is inserted into the guide hole (12), the limit rod (9) can slide on the guide rod (13), and one end of the guide rod (13) is fixedly connected to the placing groove (8).
5. A control panel as claimed in claim 4, wherein: one end of the spring (10) is fixedly connected to the bottom of the placing groove (8), and the other end of the spring (10) is fixedly connected to the end face of the limiting rod (9).
6. A control panel as claimed in claim 5, wherein: one end of the supporting plate (7) is provided with a cover plate (14), and the cover plate (14) is fixed on the end face of the supporting plate (7) by bolts (15).
7. A wafer resistivity measuring machine is characterized in that: a control panel comprising any of the above claims 1-6.
CN202320719018.1U 2023-04-04 2023-04-04 Control panel and wafer resistivity measuring machine Active CN219348904U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320719018.1U CN219348904U (en) 2023-04-04 2023-04-04 Control panel and wafer resistivity measuring machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320719018.1U CN219348904U (en) 2023-04-04 2023-04-04 Control panel and wafer resistivity measuring machine

Publications (1)

Publication Number Publication Date
CN219348904U true CN219348904U (en) 2023-07-14

Family

ID=87076035

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320719018.1U Active CN219348904U (en) 2023-04-04 2023-04-04 Control panel and wafer resistivity measuring machine

Country Status (1)

Country Link
CN (1) CN219348904U (en)

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