CN219342274U - Flexible substrate vacuum coating equipment distribution drive winding system - Google Patents

Abstract

The utility model relates to a distributed driving winding system of a flexible substrate vacuum coating device, which comprises an unreeling roller, a pretreatment roller set, a coating system and a wind-up roller, and is characterized in that the coating system comprises at least one coating device unit, the coating device unit comprises a cooling roller set, the coating system comprises at least 4 cooling rollers, each cooling roller is driven by a respective independent distributed power device, any two adjacent cooling rollers in the advancing direction of a flexible substrate are respectively a front cooling roller and a rear cooling roller, and the rotation linear speed of the rear cooling roller is greater than or equal to that of the front cooling roller. The distributed driving winding system has good cooling effect, proper distributed driving tension control, and can plate thicker film layers on thinner flexible base materials and meet the plating film of single-sided and double-sided multiple film layers.

Description

Flexible substrate vacuum coating equipment distribution drive winding system

Technical Field

The utility model relates to the field of vacuum coating, in particular to a winding vacuum coating system driven in a distributed manner.

Background

The flexible film substrate materials are selected in various ways, PC, PI, PVC, PMMA, PET and the like are widely applied in the market, and can be influenced by temperature rise to generate thermal stress so as to change the shape of the flexible film substrate materials, and the deformation is aggravated along with the increase of the temperature rise, so that the thermal stress deformation of the thinner substrate film is more obvious. Since a large amount of heat energy is generated and gathered together in the vacuum coating process, the temperature of the flexible film substrate is reduced by adopting a cooling roller conventionally, the performance of the flexible film substrate is maintained, no breakage and other damaged sites occur in the winding coating process, 1-2 cooling rollers (as shown in fig. 1 and 2) are adopted in conventional vacuum coating equipment, fig. 1 is conventional single-sided vacuum coating equipment, and fig. 2 is conventional double-sided vacuum coating equipment, but the conventional vacuum coating equipment has a limited cooling area and a common cooling effect, so that the conventional winding coating machine can only coat conventional flexible base films with the thickness of 50-200 nm at present.

In recent years, with the rapid development of new energy power cells, there has been an increasing demand for the preparation of thicker film layers on ultra-thin flexible base films having a thickness of less than 10 microns. When the ultrathin flexible base film is subjected to evaporation coating, deformation and wrinkling can easily occur in a higher coating heating environment temperature, and even the base film of the film is broken due to excessive deformation, so that the production efficiency and the product quality are seriously affected, and the ultrathin flexible base film needs to be cooled by adopting a better cooling scheme; furthermore, the thickness of the conventional coating is from tens of nanometers to hundreds of nanometers, the current requirement on the thickness of the coating is gradually increased, the requirement on the thickness of the coating is increased to hundreds of nanometers to thousands of nanometers, the thickness of the coating is increased, the coating time is correspondingly increased, and the required cooling effect cannot be achieved by adopting a small number of cooling rollers (1-2).

Because the chill roll is the power roller, consequently if a plurality of chill rolls adopt the same speed motion, then can not start certain power effect, the transmission of flexible substrate can receive certain influence, if the flexible substrate is loose on the chill roll, then can not play better cooling effect, if the flexible substrate is tight on the chill roll, then fracture easily, therefore if the running state of control flexible substrate is very important.

Therefore, there is a need to find a driven winding system with good cooling effect and increased coating thickness that can meet the market demands to produce a product with thicker film coating on an ultra-thin flexible substrate.

Disclosure of Invention

The utility model aims to find a flexible substrate vacuum coating equipment distribution driving winding system capable of improving cooling effect and increasing coating thickness.

The utility model provides a distributed driving winding system of a flexible substrate vacuum coating device, which comprises an unreeling roller, a pretreatment roller set, a coating system and a wind-up roller, and is characterized in that the coating system comprises at least one coating device unit, the coating device unit comprises a cooling roller set, the coating system comprises at least 4 cooling rollers, each cooling roller is driven by a respective independent distributed power device, any two adjacent cooling rollers in the advancing direction of a flexible substrate are respectively a front cooling roller and a rear cooling roller, the rotation linear speed of the rear cooling roller is greater than or equal to the rotation linear speed of the front cooling roller, and the rotation linear speed of the rear cooling roller is used for driving the flexible substrate to advance, so that the flexible substrate can not be too loose and can be tightly wound on the cooling zone roller set, and a better cooling effect is achieved; the flexible substrate is not too tight and does not break.

Further, the coating device unit is a magnetron sputtering coating device or an evaporation coating device or an electric arc coating device. That is, the coating device may comprise one or a combination of a magnetron sputtering coating device unit or an evaporation coating device unit or an arc coating device unit.

Further, a guide roller and/or a flattening roller is/are arranged between the cooling rollers in the cooling roller set, and the arrangement of the guide roller and/or the flattening roller can implement A-side single-sided coating or A, B double-sided coating of the flexible substrate. That is, when the flexible substrate needs to be coated with the A-side film, the guide roller and/or the flattening roller can not turn over the flexible substrate; when A, B double-sided coating is required to be carried out on the flexible substrate, the guide roller and/or the flattening roller can play a role in overturning the flexible substrate.

Further, when the A-side and B-side coating is performed on the flexible substrate, the flexible substrate is advanced along the advancing direction, the cooling roller, the guide roller and/or the flattening roller are utilized to perform one or more turn-over adjustment on the coated surface of the flexible substrate, the turn-over times are determined according to specific requirements of coating, the thickness of a coating film layer can be increased through multiple turn-over coating, and finally, the thicker film layer thickness is obtained.

Further, the flexible substrate is turned over after passing through at least one cooling roller, that is, the flexible substrate is turned over after passing along one or more cooling rollers, and the thickness of the plated film layer can be thicker as the number of the cooling rollers passing through is larger, the cooling effect is better.

Preferably, the flexible substrate is subjected to single or multiple alternating coating of the surface A and the surface B, namely the flexible substrate can be subjected to surface A coating through a cooling roller set, then the flexible substrate is subjected to surface turning through the guide roller and/or the flattening roller, and then the surface B is subjected to surface B coating through the cooling roller set, wherein the process can be single or multiple, namely the coating process is surface A-surface B and surface A-surface B-surface A-surface B … ….

Further, the distributed power device is a motor system capable of performing speed regulation control, and the motor system is provided with a speed reducing device, so that the speed control of the cooling roller is more accurate.

Preferably, the motor system has a torque measurement function or a driving current feedback function related to the torque, and the torque of the cooling roller can be judged through the measured value or the feedback value.

Preferably, the torque or the torque current safety control value is set as S, and the rotation speeds of the distributed power devices respectively corresponding to the front cooling roller and the rear cooling roller are adjusted so that the torque or the driving current related to the torque is controlled within the range of s±20%. Through the control means, the rotation linear speeds of the front cooling roller and the rear cooling roller can be adjusted, and under normal conditions, the rotation linear speed of the rear cooling roller is larger than or equal to the rotation linear speed of the front cooling roller, so that the advancing speed and the substrate tension of the flexible substrate are finally in a safe and effective operation range.

Preferably, the torque or the driving current related to the torque is controlled within the range of S+/-10%, the control range is more accurate, and the adaptability to the flexible substrate is better.

Further, the guide roller or the flattening roller is arranged at the inclined rear of the gap between the adjacent cooling rollers and far away from the evaporation target source or the sputtering target source or the arc target source of the film plating device unit, that is, particles emitted by the evaporation target source, the sputtering target source or the arc target source are not substantially generated on the guide roller or the flattening roller.

Preferably, each cooling roller in the cooling roller set can be arranged vertically, transversely or circularly in a circular arc shape, and the arrangement mode can be selectively adjusted according to the use requirement.

Further, the adjacent cooling rollers are spaced less than 50 millimeters apart.

Preferably, the adjacent cooling rollers are equally spaced.

According to the technical scheme, the flexible substrate vacuum coating equipment in the application distributes and drives the winding system, through setting up a plurality of cooling rollers to the linear velocity of each cooling roller of accurate control keeps flexible substrate to go forward safely, at uniform velocity, tension is stable, substrate and cooling roller in close contact with cooling effect are good, can carry out thicker coating film on ultra-thin flexible substrate surface, and the cooling effect that cooling capacity is insufficient when coating film thickness increases and flexible substrate's speed of travel control is poor when adopting a plurality of cooling rollers is poor or easy cracked problem, can satisfy flexible substrate single face, the coating film of two-sided multiple thick film layer.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a conventional single-sided vacuum coating apparatus;

FIG. 2 is a schematic diagram of a conventional double-sided vacuum coating apparatus;

FIG. 3 is a schematic diagram of a first embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus;

FIG. 4 is a schematic diagram of a second embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus;

FIG. 5 is a schematic diagram of a third embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus;

FIG. 6 is a schematic diagram of a fourth embodiment of a flexible substrate vacuum coating apparatus distribution drive winding system;

fig. 7 is a schematic diagram of a fifth embodiment of a flexible substrate vacuum coating apparatus distribution drive winding system.

In the figure, 01 is a conventional unreeling roller, 02 is a conventional reeling roller, 03 is an A-side conventional cooling roller (A0), 04 is a B-side conventional cooling roller (B0), 05 is a conventional guide roller or flattening roller, 06 is a conventional evaporation source, 1 is an unreeling roller, 2 is a reeling roller, 3 is a cooling roller, 31 is a first A-side cooling roller (A1), 32 is a second A-side cooling roller (A2), 33 is a third A-side cooling roller (A3), 34 is a fourth A-side cooling roller (A4), 41 is a first B-side cooling roller (B1), 42 is a second B-side cooling roller (B2), 43 is a third B-side cooling roller (B3), 44 is a fourth B-side cooling roller (B4), 5 is a guide roller or flattening roller, 6 is an evaporation source, 701 is a sputtering target, M is a first film coating device unit, and N is a second film coating device unit.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

At present, vacuum coating equipment on the market can be used for vacuum coating on a flexible substrate by adopting a winding system, the vacuum coating equipment is generally divided into two types, one type is single-sided coating, as shown in fig. 1, the flexible substrate is unreeled by a conventional unreeling roller 01, then enters a conventional cooling roller 03 through a conventional guide roller or a flattening roller 05, single-sided coating is completed on the conventional cooling roller 03, then is recycled to a conventional winding roller 02 through the conventional guide roller or the flattening roller 05, and cooling liquid is introduced into the conventional cooling roller 03, so that the flexible substrate is damaged irreparably due to extremely high temperature in the coating process and waste products are produced if the flexible substrate is not cooled in time; the other is double-sided coating, as shown in fig. 2, the flexible substrate is unreeled by a conventional unreeled roll 01, then enters into an A-side conventional cooling roll (A0) 03 by a conventional guide roll or a flattening roll 05, finishes A-side coating on the A-side conventional cooling roll (A0) 03, then turns over by the conventional guide roll or the flattening roll 05, enters into a B-side conventional cooling roll (B0) 04 after turning over, finishes B-side coating on the B-side conventional cooling roll (B0) 04, and then is recovered to the conventional wind-up roll 02 by the conventional guide roll or the flattening roll 05.

Along with the development in market, the industry is higher to the rete demand of coating film on the flexible substrate, and conventional coating equipment adopts the chill roll quantity less, and cooling capacity is not enough, and this application provides a flexible substrate vacuum coating equipment distributes drive winding system, can realize thicker rete thickness.

Embodiment one:

fig. 3 is a schematic diagram of a first embodiment of a flexible substrate vacuum coating apparatus distribution driving winding system, as shown in fig. 3, where the flexible substrate vacuum coating apparatus distribution driving winding system includes an unreeling roller 1, a pretreatment roller set, a coating system and a wind-up roller 2, and the sequence in which the flexible substrate passes through in the travelling direction is the unreeling roller 1, the pretreatment roller set, a coating device and the wind-up roller 2, and the pretreatment roller cleans the flexible substrate to avoid oil stains or dust existing on the flexible substrate, and the coating system is characterized in that the coating system includes at least one coating device unit, in this embodiment, the coating system includes one coating device unit, which is a magnetron sputtering coating device unit, an evaporation coating device unit or an arc coating device unit, and in this embodiment, is an evaporation coating device unit, where the coating device unit includes a cooling roller set, and the coating system includes at least 4 cooling rollers, as shown in fig. 3, and the cooling roller set includes 4 cooling rollers. The first A-surface cooling roller 31, the second A-surface cooling roller 32, the third A-surface cooling roller 33 and the fourth A-surface cooling roller 34 are driven by independent distributed power devices, any two adjacent cooling rollers in the advancing direction of the flexible substrate are respectively a front cooling roller and a rear cooling roller, the rotation linear speed of the rear cooling roller is greater than or equal to that of the front cooling roller, and the rear cooling roller is used for driving the flexible substrate to advance, so that the flexible substrate cannot be too loose and can be tightly surrounded on the cooling zone roller group, and a better cooling effect is achieved; the flexible substrate is not too tight and does not break. Preferably, each cooling roller in the cooling roller set may be arranged vertically, horizontally or in a circular arc shape, and the arrangement manner may be selectively adjusted according to the use requirement, and in this embodiment, the cooling roller set is arranged horizontally. And guide rollers and/or flattening rollers 5 are also arranged between the cooling rollers in the cooling roller set, and the arrangement of the guide rollers and/or the flattening rollers 5 can implement A-side single-sided coating or A, B double-sided coating of the flexible substrate. That is, when the flexible substrate needs to be coated with a single-sided film on the surface A, the guide roller and/or the flattening roller 5 can not turn over the flexible substrate; when the flexible substrate needs to be subjected to A, B double-sided coating, the guide roller and/or the flattening roller 5 can play a role in turning over the flexible substrate. The distributed power device is a motor system capable of performing speed regulation control, and preferably, the motor system is a variable frequency motor, a stepping motor or a servo motor system; typically, the motor system will include a reduction gear. Preferably, the motor system has a torque measurement function or a driving current feedback function related to the torque, and the torque of the cooling roller can be judged through the measured value or the feedback value. In the common case, the motor driving current has a monotonic corresponding relation with the motor output torque, so the magnitude of the feedback current can basically evaluate the output torque of the motor, and the motor is preferably controlled by using the driving current feedback because the feedback current value is very simple and convenient to obtain, low in cost and high in response speed. The user can judge the output torque of the cooling roller through the torque measurement value or the motor current feedback value. Setting the torque or the driving current safety control value corresponding to the torque as S, and adjusting the rotating speeds of the distributed power devices respectively corresponding to the front cooling roller and the rear cooling roller to control the torque or the driving current within the range of S+/-20% of a set value; preferably, the torque or the driving current corresponding to the torque may be controlled within a range of s±10% of a set value. The rotation speed of the distributed driving motor of each cooling roller is regulated and controlled, so that the torque of the motor system or the driving current corresponding to the torque is in a proper numerical range, the tension of the flexible substrate is ensured to be in a proper range, the flexible substrate and the cooling rollers can be well cooled in close contact, and the substrate can be prevented from being damaged by excessive tension. When a certain torque or driving current is larger or smaller, the rotating speed of the motor is correspondingly reduced or increased, so that the set value is stable. Further, in the case where the mechanical movement system is normal, the rear chill roll rotational linear speed is equal to or greater than the front chill roll rotational linear speed, thereby compensating for the elongation of the flexible substrate and ensuring close contact and good cooling of the substrate at each chill roll surface.

The spacing between adjacent cooling rolls is preferably less than 50mm, and further preferably the spacing is 20-30mm. The adjacent cooling rollers are arranged at equal intervals. The guide roller and/or the flattening roller 5 is/are positioned at the inclined rear part of the gap between the adjacent cooling rollers, and is far away from the evaporation target source, the sputtering target source or the electric arc target source of the coating device unit, so that direct vision with the evaporation, sputtering or electric arc source is avoided, pollution to the guide roller and/or the flattening roller 5 and the like in the coating process is prevented, and the coating material utilization rate is improved.

Example one flexible substrate coating process: the flexible substrate is unwound by the unwinding roller 1, passes through the guide roller and/or the flattening roller 5, and enters the coating system, in this embodiment, the coating system only includes one coating device unit, and in actual use, a plurality of coating device units with different material layers can be adopted, which is not described in detail in this embodiment. The flexible substrate is coated in a cooling roller set in a coating system, the travelling process of the flexible substrate is that a first A-side cooling roller 31, a second A-side cooling roller 32, a third A-side cooling roller 33, a fourth A-side cooling roller 34 and the guide roller and/or the flattening roller 5 between the adjacent cooling rollers are/is used for finally completing coating, and then the flexible substrate is wound up through the guide roller and/or the back of the flattening roller 5 and the winding roller.

Example two

Fig. 4 is a schematic diagram of a second embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus. As shown in fig. 4, the flexible substrate vacuum coating equipment distribution driving winding system comprises an unreeling roller 1, a pretreatment roller set, a coating device and a reeling roller 2, and is characterized by comprising a first coating device unit M and a second coating device unit N, wherein the first coating device unit M is used for coating the A surface of the flexible substrate, and the second coating device unit N is used for coating the B surface of the flexible substrate. The first coating device unit M and the second coating device unit N are magnetron sputtering coating device units. When the coating system in this embodiment performs the coating on the surface a and the surface B of the flexible substrate, the flexible substrate is advanced along the advancing direction, and the cooling roller, the guide roller and/or the flattening roller 5 are used to perform one or more turn-over adjustment on the coated surface of the flexible substrate, the turn-over times are determined according to the specific requirement of the coating, and the thickness of the coating film layer can be increased by multiple turn-over coating, so that a thicker film layer thickness is finally obtained. In this embodiment, the flexible substrate is turned over after passing through a cooling roller, and the flexible substrate is subjected to alternating film plating on the a side and the B side for multiple times, that is, the flexible substrate may be first subjected to film plating on the a side by using a cooling roller set, then turned over by using the guide roller and/or the flattening roller, and then subjected to film plating on the B side by using the cooling roller set. The arrangement of the distributed power device in this embodiment is the same as that of the embodiment, that is, the rotational linear speed of the rear cooling roller is greater than or equal to the rotational linear speed of the front cooling roller by adjusting the rotational linear speeds of the front cooling roller and the rear cooling roller, so that the travelling speed of the flexible substrate is finally within a safe and effective operation range. Each cooling roller in the first coating device unit M is vertically arranged, each cooling roller in the second coating device unit N is vertically arranged, and the first coating device unit M and the second coating device unit N are oppositely arranged. The cooling rollers in the film plating device units are vertically arranged, so that the falling of sputtering particles can be effectively avoided.

Example two flexible substrate coating process:

the flexible substrate is unwound by the unwinding roller 1, passes through the guide roller and/or the flattening roller 5, and enters the coating system, in this embodiment, the coating system only includes two coating device units, a first coating device unit M and a second coating device unit N, and in actual use, the coating device units M and N may be coated with the same film layer, may also be coated with different film layers, and the thickness of the coating layers may also be different. The flexible substrate is coated in a cooling roller set in a coating system, the travelling process of the flexible substrate is that a first A-side cooling roller 31, a first B-side cooling roller 41, a second A-side cooling roller 32, a second B-side cooling roller 42, a third A-side cooling roller 33, a third B-side cooling roller 43, a fourth A-side cooling roller 34, a fourth B-side cooling roller 44 and the guide roller and/or the flattening roller 5 between the adjacent cooling rollers, the flexible substrate is coated on the coated surface of the flexible substrate by a plurality of sputtering targets 701 positioned on the outer side surface of the cooling roller set in the travelling process of the cooling roller set, namely, the coating process is that an A-side to B-side to A-side … … is finally completed, and then the coated film is wound by the guide roller and/or the flattening roller 5 and then wound by the winding roller. In this embodiment, the flexible substrate is passed through a cooling roller and then turned over on the surface to be plated. The flexible substrate advances along the advancing direction, the cooling roller, the guide roller and/or the flattening roller 5 are utilized to carry out multiple turn-over adjustment on the plated surface of the flexible substrate, the turn-over times are determined according to specific requirements of film plating, the thickness of a film coating layer can be increased through multiple turn-over film plating, and finally, the thicker film layer thickness is obtained.

Example III

Fig. 5 is a schematic diagram of a third embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus. As shown in fig. 5, the difference from the second embodiment is that 1, each cooling roller in the first coating device unit M is vertically arranged, each cooling roller in the second coating device unit N is vertically arranged, and the first coating device unit M and the second coating device unit N are vertically arranged; 2. the flexible substrate is turned over on the plated surface after passing through a plurality of cooling rollers, and in this embodiment, two cooling rollers are used.

Example three flexible substrate film coating process:

the flexible substrate is unwound by the unwinding roller 1, enters the coating system through the guide roller and/or the flattening roller 5, and in this embodiment, the coating system only comprises two coating device units, and when in actual use, the two coating device units can be coated with the same film layer, can also be coated with different film layers, and can also be coated with different film layers. The flexible substrate is coated in a cooling roller set in a coating system, the travelling process of the flexible substrate is that a first A-side cooling roller 31, a second A-side cooling roller 32, a first B-side cooling roller 41, a second B-side cooling roller 42 and the guide roller and/or the flattening roller 5 between adjacent cooling rollers, the flexible substrate is coated on the coated surface of the flexible substrate by a plurality of sputtering targets 701 positioned on the outer side surface of the cooling roller set in the travelling process of the cooling roller set, namely, the coating process is that an A-side to a B-side … … is finally completed, and then the coated surface is rolled by the guide roller and/or the flattening roller 5 and then the rolling roller.

Example IV

Fig. 6 is a schematic diagram of a fourth embodiment of a distributed drive winding system for a flexible substrate vacuum coating apparatus. As shown in FIG. 6, the difference from the second embodiment is that 1, the coating device unit is an evaporation coating device unit; 2. each cooling roller in the first coating device unit M is transversely arranged, each cooling roller in the second coating device unit N is transversely arranged, and the first coating device unit M and the second coating device unit N are vertically arranged; 3. the flexible substrate is turned over on the plated surface after passing through a plurality of cooling rollers, in this embodiment, four cooling rollers are specifically used.

Example four flexible substrate film coating process:

the flexible substrate is unwound by the unwinding roller 1, enters the coating system through the guide roller and/or the flattening roller 5, and in this embodiment, the coating system only comprises two coating device units, and when in actual use, the two coating device units can be coated with the same film layer, can also be coated with different film layers, and can also be coated with different film layers. The flexible substrate is coated in a cooling roller set in a coating system, the travelling process of the flexible substrate is that a first A-side cooling roller 31, a second A-side cooling roller 32, a third A-side cooling roller 33, a fourth A-side cooling roller 34, a first B-side cooling roller 41, a second B-side cooling roller 42, a third B-side cooling roller 43, a fourth B-side cooling roller 44 and the guide roller and/or the flattening roller 5 between adjacent cooling rollers, namely, the coating process is that the coating is finished finally, and then the coating is rolled by the guide roller and/or the back of the flattening roller 5.

Compared with the fourth embodiment, the thickness of the film coating layer is thicker, and finally the film coating layer is selected according to the use requirement.

Example five

Fig. 7 is a schematic diagram of a fifth embodiment of a flexible substrate vacuum coating apparatus distribution drive winding system. As shown in fig. 7, the point different from the fourth embodiment is that each of the cooling rollers in the first coating device unit M is arranged in a circular arc shape, each of the cooling rollers in the second coating device unit N is arranged in a circular arc shape, and the first coating device unit M and the second coating device unit N are vertically arranged. When the cooling roller group is arranged in a circular arc shape (fig. 7), the target source of the film plating device unit is arranged near the circle center position where the circular arc shape is located. The target source is an evaporation target source, a sputtering target source or an electric arc target source, the target source is diffused from a position near the center of a circle to the periphery, the cooling roller set is arranged in a circular arc shape with a certain angle, and forms an enclosing structure for the target source, so that the flexible substrate can be more effectively received, waste of coating materials is reduced, and the economy is improved. Preferably, the central angle of the circular arc is larger than 120 degrees, so that the coating film of the material to be coated of the evaporation target source can be received in a large range. Further preferably, the number of the cooling rollers in the circular arc-shaped arrangement of cooling roller groups is not less than 3.

In the fifth embodiment, the flexible substrate coating process is the same as that in the fourth embodiment, and will not be described here again.

The utility model provides a distribution drive winding system can realize plating thicker rete on thinner flexible substrate, the cooling effect is good, mainly forms the chill roll group through setting up a plurality of chill rolls, solve the not good problem of cooling effect, and then cooperate intelligent distribution drive winding system, realize that the linear velocity of back chill roll is greater than or equal to preceding chill roll, with the closely contact and the good cooling problem of solution chill roll and flexible substrate, effectively compensate substrate elongation simultaneously, ensure Zhang Liwen of substrate (especially ultra-thin flexible substrate) and decide not destroyed at the most suitable scope, ensure that the coating film technology normally goes on. The distributed driving winding system has a wider application range and can be used in magnetron sputtering, evaporation and arc coating equipment.

It should be noted that the control means of winding and unwinding, deviation rectifying, flattening, rapid film penetrating of the lead tape and the like in the conventional winding control system are all applicable to the utility model, and are not described in detail.

It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.

Claims (14)

1. The utility model provides a flexible substrate vacuum coating equipment distributes drive winding system, includes unreels roller, pretreatment roller group, coating film system and wind-up roll, its characterized in that, the coating film system includes at least one coating film device unit, the coating film device unit includes the chill roll group, the coating film system comprises 4 at least chill rolls, each the chill roll is driven by independent distributed power device, and arbitrary adjacent two chill rolls according to flexible substrate advancing direction are preceding chill roll and back chill roll respectively, the rotation linear velocity of back chill roll is greater than or equal to the rotation linear velocity of preceding chill roll.

2. The flexible substrate vacuum coating apparatus distribution drive winding system of claim 1, wherein the coating device unit is a magnetron sputtering coating device unit or an evaporation coating device unit or an arc coating device unit.

3. The distributed driving winding system of the vacuum coating equipment for the flexible substrate according to claim 1, wherein guide rollers and/or flattening rollers are further arranged among the cooling rollers in the cooling roller group, and the arrangement of the guide rollers and/or the flattening rollers can implement single-sided coating of the A surface or double-sided coating of the A surface and the B surface of the flexible substrate.

4. A flexible substrate vacuum coating apparatus distribution drive winding system according to claim 3, wherein when a-side and B-side coating is performed on the flexible substrate, the flexible substrate advances in a traveling direction, and the coated surface of the flexible substrate is subjected to one or more turn-over adjustment by using the cooling roller, the guide roller and/or the flattening roller.

5. The flexible substrate vacuum coating apparatus distribution drive winding system according to claim 4, wherein the flexible substrate is turned over by passing the flexible substrate over at least one chill roll.

6. The flexible substrate vacuum coating apparatus distribution drive winding system of claim 5, wherein the flexible substrate is coated alternately on a side and B side one or more times.

7. The distributed drive winding system of the flexible substrate vacuum coating equipment according to claim 1, wherein the distributed power device is a motor system capable of performing speed regulation control, and the motor system is provided with a speed reduction device.

8. The flexible substrate vacuum coating apparatus distribution drive winding system according to claim 7, wherein the motor system has a torque measurement function or a torque drive current feedback function.

9. The distributed drive winding system of the flexible substrate vacuum coating equipment according to claim 8, wherein the torque or the torque drive current safety control value is set as S, and the rotational speeds of the distributed power devices corresponding to the front cooling roller and the rear cooling roller are adjusted so that the torque or the torque drive current is controlled within a range of s±20%.

10. The flexible substrate vacuum coating apparatus distribution drive winding system according to claim 9, wherein the torque or the torque drive current is controlled within a range of s±10%.

11. A flexible substrate vacuum coating apparatus distribution drive winding system according to claim 3, wherein the guide roller or nip roller is disposed diagonally behind the gap between adjacent chill rollers, remote from the evaporation or sputtering or arc target source of the coating device unit.

12. A flexible substrate vacuum coating apparatus distribution drive winding system according to claim 1, wherein the cooling rolls in the set of cooling rolls are arranged vertically, laterally or in a circular arc.

13. A flexible substrate vacuum coating apparatus distribution drive winding system according to claim 1, wherein the spacing between adjacent chill rolls is less than 50 mm.

14. A flexible substrate vacuum coating apparatus distribution drive winding system according to claim 13, wherein the adjacent cooling rolls are equally spaced.

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