CN219336455U

CN219336455U - Matching structure of wafer cutting machine

Info

Publication number: CN219336455U
Application number: CN202223519129.2U
Authority: CN
Inventors: 董新立; 尚海锋; 董新霞; 赵虎旦
Original assignee: Jiangsu Alite Semiconductor Technology Co ltd
Current assignee: Jiangsu Alite Semiconductor Technology Co ltd
Priority date: 2022-12-28
Filing date: 2022-12-28
Publication date: 2023-07-14
Anticipated expiration: 2032-12-28

Abstract

The utility model discloses a matching structure of a wafer cutting machine, which comprises a wafer cutting machine body, a movable protective door, a vertical matching plate, a transverse matching plate, a power mechanism and an induction mechanism, wherein the movable protective door is connected to one side of the front surface of the wafer cutting machine body in a sliding manner, the vertical matching plate is arranged on the front surface of the movable protective door, the right side of the vertical matching plate is fixedly connected with the wafer cutting machine body, the transverse matching plate is fixedly connected to the right side of the front surface of the movable protective door, the power mechanism is fixedly connected to the front side of the inner wall of the vertical matching plate, and the induction mechanism is fixedly connected to the left side of the front surface of the transverse matching plate. The utility model solves the problems that the existing laser wafer cutting machine often has the condition of inaccurate closing of the cabinet door when in use, and the staff cannot find out in time at the moment, and the cabinet door with the inaccurate closing has potential safety hazard when cutting the wafer.

Description

Matching structure of wafer cutting machine

Technical Field

The utility model relates to the technical field of wafer cutting machines, in particular to a matching structure of a wafer cutting machine.

Background

The working principle of the wafer cutting machine is that the high-energy laser beam is irradiated on the surface of a workpiece to locally melt and gasify the irradiated area so as to realize the cutting of silicon materials, and the wafer cutting machine is mainly used for the cutting and cutting of metal materials, silicon, germanium, gallium arsenide and other semiconductor substrate materials, can process solar cell panels, silicon wafers, ceramic wafers, aluminum foils and the like, has fine and attractive workpiece, has smooth cut edges, and can greatly improve the processing efficiency and optimize the processing effect.

The problems of the prior art are: the existing laser wafer cutting machine is often in the condition of being not tight in closing of the cabinet door when in use, and at the moment, workers cannot find timely, potential safety hazards exist in the condition of being not tight in closing of the cabinet door when cutting wafers, and use of users is inconvenient.

Disclosure of Invention

In order to solve the problems in the prior art, the utility model aims to provide a matching structure of a wafer cutting machine, which has the advantage of reminding a worker when a cabinet door is not closed, and solves the problems that the cabinet door is often not tightly closed when the traditional laser wafer cutting machine is used, the worker cannot find out in time at the moment, and potential safety hazards exist in the cabinet door which is not tightly closed when the wafer is cut.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a cooperation structure of wafer cutting machine, includes wafer cutting machine body, removal guard gate, vertical cooperation board, horizontal cooperation board, power unit and induction system, remove guard gate sliding connection in the positive one side of wafer cutting machine body, vertical cooperation board sets up in the positive of removal guard gate, the right side and the wafer cutting machine body fixed connection of vertical cooperation board, horizontal cooperation board fixed connection is on the positive right side of removal guard gate, power unit fixed connection is in the front side of vertical cooperation board inner wall, induction system fixed connection is in the positive left side of horizontal cooperation board.

As the preferable power mechanism of the utility model, the power mechanism comprises a motor, the back of the motor is fixedly connected with a middle screw rod, the back of the middle screw rod is rotationally connected with the back side of the inner wall of the vertical matching plate, the surface of the middle screw rod is in threaded connection with a supporting plate, two sides of the supporting plate are fixedly connected with connecting plates, two sides of the back of the connecting plates are fixedly connected with plug boards, and the back of the plug boards penetrate into the transverse matching plate.

As the preferable mode of the utility model, the front sides of the two sides of the middle screw are fixedly connected with the extension frame, one side of the extension frame is fixedly connected with the extension plate, the surface of the extension plate is connected with the stabilizing plate in a sliding manner, and one side of the extension plate penetrates through the stabilizing plate and is connected with the inner wall of the vertical matching plate in a sliding manner.

As the preferable mode of the utility model, the sensing mechanism comprises a sensing lamp, a slope chute is formed on the right side of the front face of the transverse matching plate, and a pressure sensor is fixedly embedded in the back face of the vertical matching plate.

As the preferable mode of the utility model, the left side of the transverse matching plate is fixedly connected with a controller, the controller is positioned at the top of the induction lamp, and the controller is respectively and electrically connected with the motor, the induction lamp and the pressure sensor through leads.

As the preferable mode of the utility model, the top and the bottom of the back of the vertical matching plate are fixedly connected with clamping plates, the right sides of the top and the bottom of the horizontal matching plate are respectively provided with clamping grooves matched with the clamping plates, and the clamping plates are in clearance fit with the clamping grooves.

As preferable in the utility model, the surface of the middle screw rod is connected with a limiting plate in a sliding way, and the limiting plate is positioned at the front side of the supporting plate.

Compared with the prior art, the utility model has the following beneficial effects:

1. the matching structure of the wafer cutting machine solves the problem that the cabinet door is often not tightly closed when the existing laser wafer cutting machine is used, and a worker cannot timely find that the cabinet door which is not tightly closed has potential safety hazards when the wafer is cut.

2. According to the utility model, the power mechanism is arranged, the motor is started, the motor drives the middle screw rod to rotate, the middle screw rod drives the supporting plate to move to the rear side, and the supporting plate drives the plugboard to move to the rear side through the connecting plate, so that the plugboard is counted into the transverse matching plate to fix the position of the movable protective door.

3. According to the utility model, the extending frame, the extending plate and the stabilizing plate are arranged, so that the limiting effect can be achieved when the connecting plate moves forwards and backwards, and the connecting plate can drive the plug board to move more stably.

4. According to the utility model, the induction mechanism is arranged, and the pressure sensor sends a signal to the controller when being pressed by the transverse matching plate, so that the controller starts the motor, and the vertical matching plate and the transverse matching plate are connected and fixed by the plugboard.

5. According to the utility model, the clamping plates and the clamping grooves are arranged, so that the clamping plates can be clamped on two sides of the transverse matching plates when the transverse matching plates and the vertical matching plates are in butt joint, and the clamping and fixing effects are achieved.

6. According to the utility model, the limiting plate is arranged, so that the fixing and protecting effects are achieved on the surface of the middle screw, the middle screw is supported and fixed when rotating, and the stability of the middle screw when rotating is maintained.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a perspective exploded view of the vertical and horizontal mating plates of the present utility model;

FIG. 3 is a side cross-sectional view of a vertical mating bar of the present utility model.

In the figure: 1. a wafer cutter body; 2. moving the protective door; 3. a vertical matching plate; 4. a transverse mating plate; 501. a motor; 502. a middle screw; 503. a support plate; 504. a connecting plate; 505. a plug board; 506. an extension frame; 507. an extension plate; 508. a stabilizing plate; 601. an induction lamp; 602. slope sliding grooves; 603. a pressure sensor; 604. a controller; 7. a clamping plate; 8. a clamping groove; 9. and a limiting plate.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1 to 3, the matching structure of the wafer cutter provided by the utility model comprises a wafer cutter body 1, a movable protective door 2, a vertical matching plate 3, a transverse matching plate 4, a power mechanism and an induction mechanism, wherein the movable protective door 2 is slidably connected to one side of the front surface of the wafer cutter body 1, the vertical matching plate 3 is arranged on the front surface of the movable protective door 2, the right side of the vertical matching plate 3 is fixedly connected with the wafer cutter body 1, the transverse matching plate 4 is fixedly connected to the right side of the front surface of the movable protective door 2, the power mechanism is fixedly connected to the front side of the inner wall of the vertical matching plate 3, and the induction mechanism is fixedly connected to the left side of the front surface of the transverse matching plate 4.

Referring to fig. 3, the power mechanism includes a motor 501, a middle screw 502 is fixedly connected to the back of the motor 501, the back of the middle screw 502 is rotationally connected to the back side of the inner wall of the vertical matching plate 3, a supporting plate 503 is in threaded connection with the surface of the middle screw 502, connecting plates 504 are fixedly connected to two sides of the supporting plate 503, a plug board 505 is fixedly connected to two sides of the back of the connecting plates 504, and the back of the plug board 505 penetrates into the transverse matching plate 4.

Referring to fig. 3, the front sides of the two sides of the middle screw 502 are fixedly connected with extension frames 506, one side of each extension frame 506 is fixedly connected with an extension plate 507, the surface of each extension plate 507 is slidably connected with a stabilizing plate 508, and one side of each extension plate 507 penetrates through each stabilizing plate 508 and is slidably connected with the inner wall of the vertical matching plate 3.

As a technical optimization scheme of the utility model, by arranging the power mechanism, starting the motor 501, driving the middle screw 502 to rotate by the motor 501, driving the supporting plate 503 to move to the rear side by the middle screw 502, driving the plugboard 505 to move to the rear side by the supporting plate 503 through the connecting plate 504, enabling the plugboard 505 to count into the inside of the transverse matching plate 4 to fix the position of the movable protective door 2, and by arranging the extension frame 506, the extension plate 507 and the stabilizing plate 508, the limiting effect can be achieved when the connecting plate 504 moves back and forth, and the plugboard 505 is more stable when being driven by the connecting plate 504.

Referring to fig. 2 and 3, the sensing mechanism includes a sensing lamp 601, a slope chute 602 is formed on the right side of the front face of the horizontal matching plate 4, and a pressure sensor 603 is fixedly embedded in the back face of the vertical matching plate 3.

Referring to fig. 2, a controller 604 is fixedly connected to the left side of the transverse matching plate 4, the controller 604 is located at the top of the induction lamp 601, and the controller 604 is electrically connected with the motor 501, the induction lamp 601 and the pressure sensor 603 through wires respectively.

As a technical optimization scheme of the utility model, by arranging the sensing mechanism, when the pressure sensor 603 is pressed by the transverse matching plate 4, a signal is sent to the controller 604, so that the controller 604 starts the motor 501, and the plug board 505 connects and fixes the vertical matching plate 3 and the transverse matching plate 4.

Referring to fig. 2, the top and the bottom of the back of the vertical matching plate 3 are fixedly connected with clamping plates 7, and the right sides of the top and the bottom of the horizontal matching plate 4 are provided with clamping grooves 8 matched with the clamping plates 7, and the clamping plates 7 and the clamping grooves 8 are in clearance fit.

As a technical optimization scheme of the utility model, through the arrangement of the clamping plates 7 and the clamping grooves 8, the clamping plates 7 can be clamped on two sides of the transverse matching plate 4 when the transverse matching plate 4 and the vertical matching plate 3 are in butt joint, so that the clamping and fixing effects are achieved.

Referring to fig. 3, a limiting plate 9 is slidably coupled to a surface of the middle screw 502, and the limiting plate 9 is positioned at a front side of the supporting plate 503.

As a technical optimization scheme of the utility model, the surface of the middle screw 502 is provided with the limiting plate 9 to play a role in fixing and protecting, so that the middle screw 502 is supported and fixed when rotating, and the stability of the middle screw 502 when rotating is maintained.

The working principle and the using flow of the utility model are as follows: when the wafer cutter body 1 is used, a worker pushes the movable protective door 2, the contact of the pressure sensor 603 on the back surface of the vertical matching plate 3 is pushed by the slope chute 602 on one side of the horizontal matching plate 4 and is in contact with the vertical matching plate 3, at the moment, the contact of the pressure sensor 603 can be touched, then the pressure sensor 603 sends a signal to the controller 604, the controller 604 starts the motor 501, the motor 501 drives the middle screw 502 to rotate, the middle screw 502 drives the supporting plate 503 to move towards the rear side, the supporting plate 503 drives the plugboard 505 to move towards the rear side through the connecting plate 504, the plugboard 505 is enabled to count into the inside of the horizontal matching plate 4 to fix the position of the movable protective door 2, and meanwhile, the controller 604 sends a signal to the induction lamp 601 to enable the induction lamp 601 to be lightened, and at the moment, the worker can judge whether the movable protective door 2 is closed or not through whether the induction lamp 601 is lightened.

To sum up: this cooperation structure of wafer cutting machine through setting up the cooperation of wafer cutting machine body 1, removal guard gate 2, vertical cooperation board 3, horizontal cooperation board 4, power unit and induction system and use, has solved the current condition that the cabinet door often can appear closing inaccurately when the use of laser wafer cutting machine to the staff also can not in time discover this moment, and the problem that the cabinet door that the closure is not tight exists the potential safety hazard when cutting the wafer.

It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a cooperation structure of wafer cutting machine which characterized in that: including wafer cutting machine body, removal guard gate, vertical cooperation board, horizontal cooperation board, power unit and induction system, remove guard gate sliding connection in the positive one side of wafer cutting machine body, vertical cooperation board sets up in the positive of removing the guard gate, the right side and the wafer cutting machine body fixed connection of vertical cooperation board, horizontal cooperation board fixed connection is on the positive right side of removing the guard gate, power unit fixed connection is on the front side of vertical cooperation board inner wall, induction system fixed connection is on the positive left side of horizontal cooperation board.

2. The mating structure of a wafer cutter according to claim 1, wherein: the power mechanism comprises a motor, the back fixedly connected with middle part screw rod of motor, the back of middle part screw rod rotates with the rear side of vertical cooperation inboard wall and is connected, the surface threaded connection of middle part screw rod has the backup pad, the equal fixedly connected with connecting plate in both sides of backup pad, the equal fixedly connected with plugboard in both sides at connecting plate (504) back, the back of plugboard runs through to the inside of horizontal cooperation board (4).

3. The mating structure of a wafer cutter according to claim 2, wherein: the front sides of middle part screw rod both sides all fixedly connected with extension frame, one side fixedly connected with extension board of extension frame, the surface sliding connection of extension board has the stabilizer plate, one side of extension board runs through the stabilizer plate and with the inner wall sliding connection of vertical joining in marriage the board.

4. The mating structure of a wafer cutter according to claim 1, wherein: the sensing mechanism comprises a sensing lamp, a slope chute is formed in the right side of the front face of the transverse matching plate, and a pressure sensor is fixedly embedded in the back face of the vertical matching plate.

5. The mating structure of a wafer cutter of claim 4, wherein: the left side fixedly connected with controller of horizontal joining in marriage the board, the controller is located the top of response lamp, the controller passes through the wire respectively with motor, response lamp and pressure sensor electric connection.

6. The mating structure of a wafer cutter according to claim 1, wherein: the top and the bottom at vertical cooperation board back all fixedly connected with grip block, the centre gripping groove that cooperation grip block used has all been seted up on the right side of horizontal cooperation board top and bottom, grip block and centre gripping groove clearance fit.

7. The mating structure of a wafer cutter according to claim 2, wherein: the surface sliding connection of middle part screw rod has the limiting plate, the limiting plate is located the front side of backup pad.