CN219328327U

CN219328327U - Tail gas recycling device for annealing furnace

Info

Publication number: CN219328327U
Application number: CN202320084186.8U
Authority: CN
Inventors: 刘华; 刘春�; 曾超群
Original assignee: Suzhou Chennuo Gas Equipment Co ltd
Current assignee: Suzhou Chennuo Gas Equipment Co ltd
Priority date: 2023-01-29
Filing date: 2023-01-29
Publication date: 2023-07-11
Anticipated expiration: 2033-01-29

Abstract

The utility model discloses an annealing furnace tail gas recycling device which comprises an annealing furnace, a recovery box and a heat exchanger, wherein the annealing furnace comprises a tail gas pipe, the recovery box is arranged on one side of the annealing furnace, the tail gas pipe is communicated with the recovery box, a water tank is arranged at the top of the recovery box, a guide plate is arranged at the bottom of the water tank in the recovery box through a damping rotating shaft, lead screws are arranged at two sides in the water tank through bearings, the lead screws penetrate through the guide plate, corresponding wire blocks are arranged at the periphery of the lead screws, and a push plate for adjusting the flow direction of tail gas is connected to the bottoms of the wire blocks through bolts. The tail gas recycling device for the annealing furnace has the advantages of simple structure, easy operation, more flexible and stable use and higher practical value, and is suitable for being widely popularized and used.

Description

Tail gas recycling device for annealing furnace

Technical Field

The utility model relates to the technical field of annealing furnaces, in particular to a tail gas recycling device of an annealing furnace.

Background

The annealing furnace is a novel heat exchange device, is specially designed for heating semiconductor wafers, is an energy-saving periodic operation furnace, and high-temperature flue gas exhausted from the annealing furnace often takes away 20-50% of heat supply quantity of the furnace.

At present, the existing tail gas recycling device has the following defects when in use: lack tail gas flow distance adjusting device, tail gas heat recovery recycle device generally, at the in-process that tail gas circulate, retrieve heat wherein, but the use is fixed, is difficult to adjust the use according to actual annealing stove tail gas flow and velocity of flow, and the flexibility of use is relatively poor. Therefore, we propose an annealing furnace tail gas recycling device.

Disclosure of Invention

The utility model mainly aims to provide an annealing furnace tail gas recycling device which can effectively solve the problems in the background technology.

In order to achieve the above purpose, the technical scheme adopted by the utility model is as follows:

the utility model provides an annealing stove tail gas recycling device, includes annealing stove, collection box and heat exchanger, the annealing stove includes the tail gas pipe, one side of annealing stove is provided with the collection box, and tail gas pipe and collection box intercommunication, the top of collection box is provided with the water tank, the guide plate is installed through the damping pivot to the bottom that is located the water tank in the collection box, the lead screw is all installed through the bearing in the both sides in the water tank, and the lead screw runs through the guide plate, the periphery of lead screw is provided with corresponding silk piece, the bottom of silk piece is through bolted connection has the push pedal that is used for adjusting the tail gas flow direction.

Further, a heat exchanger is arranged on one side of the recovery box, an air outlet end of the recovery box is communicated with an air inlet end of the heat exchanger through a pipeline, a water outlet pipe is arranged at the top of the heat exchanger and is communicated with the water tank, and a water inlet pipe is arranged on one side of the heat exchanger.

Further, a servo motor is arranged on one side of the recovery box, the servo motor is connected with a screw rod through a driving shaft, and the recovery box is connected with the servo motor through a bolt.

Further, a spray tower is arranged at the back of the heat exchanger, and the air outlet end of the heat exchanger is communicated with the spray tower through a pipeline.

Further, a filter tank is arranged at the top in the recovery box.

Compared with the prior art, the utility model has the following beneficial effects:

1. through the collection box, water tank and the guide plate that set up, can utilize the waste heat in the tail gas to carry out the recycle processing to the water heating when retrieving annealing stove tail gas, through lead screw, silk piece and push pedal, can also be according to actual tail gas flow and velocity of flow, adjust its scope of removal, and then through the mode of adjusting the travel distance, improve tail gas heat recovery's utilization ratio.

2. Through the heat exchanger, inlet tube and the outlet pipe that set up, can also further carry out the heat secondary recovery processing in the tail gas, simple structure is compact, and low cost easily operates, has further improved the effect that the tail gas was retrieved and was recycled.

Drawings

FIG. 1 is a schematic diagram of the whole structure of an annealing furnace tail gas recycling device.

FIG. 2 is a schematic sectional view of a recovery tank of the tail gas recovery and reuse device of the annealing furnace.

In the figure: 1. annealing furnace; 2. a recovery box; 3. a tail gas pipe; 4. a water tank; 5. a deflector; 6. a screw rod; 7. a silk block; 8. a push plate; 9. a servo motor; 10. a heat exchanger; 11. a water outlet pipe; 12. a water inlet pipe; 13. a spray tower; 14. a filter tank.

Detailed Description

The utility model is further described in connection with the following detailed description, in order to make the technical means, the creation characteristics, the achievement of the purpose and the effect of the utility model easy to understand.

As shown in fig. 1 and 2, an annealing furnace tail gas recycling device comprises an annealing furnace 1, a recovery box 2 and a heat exchanger 10, wherein the annealing furnace 1 comprises a tail gas pipe 3, one side of the annealing furnace 1 is provided with the recovery box 2, the tail gas pipe 3 is communicated with the recovery box 2, the top of the recovery box 2 is provided with a water tank 4, a guide plate 5 is installed at the bottom of the recovery box 2, which is positioned at the bottom of the water tank 4, both sides in the water tank 4 are provided with a lead screw 6 through bearings, the lead screw 6 penetrates through the guide plate 5, a corresponding wire block 7 is arranged at the periphery of the lead screw 6, and a push plate 8 for adjusting the flow direction of tail gas is connected to the bottom of the wire block 7 through bolts.

An insulation board is laid on the inner surface of the recovery box 2.

Wherein, one side of the recovery tank 2 is provided with a heat exchanger 10, and the air outlet end of the recovery tank 2 is communicated with the air inlet end of the heat exchanger 10 through a pipeline, the top of the heat exchanger 10 is provided with a water outlet pipe 11, the water outlet pipe 11 is communicated with the water tank 4, and one side of the heat exchanger 10 is provided with a water inlet pipe 12.

In this embodiment, as shown in fig. 1, the heat exchanger 10 can perform secondary heat recovery treatment, so as to further improve the heat utilization rate in the tail gas.

One side of the recovery box 2 is provided with a servo motor 9, and the servo motor 9 is connected with the screw rod 6 through a driving shaft.

In this embodiment, as shown in fig. 2, the servo motor 9 is convenient to drive the screw rod 6 to rotate, the screw rod 6 screw block 7 is a ball screw, and the manufacturer is: lishile, model is: r150244085.

The back of the heat exchanger 10 is provided with a spray tower 13, and the air outlet end of the heat exchanger 10 is communicated with the spray tower 13 through a pipeline.

In this embodiment, as shown in fig. 1, the exhaust gas can be sprayed, filtered and cleaned by the spray tower 13 and then discharged to the outside.

Wherein, a filter tank 14 is arranged at the top in the recovery tank 2.

In this embodiment, as shown in fig. 1, a screen plate is provided in the filter tank 14.

During operation, firstly, the tail gas in the annealing furnace 1 enters the filter tank 14 in the recovery box 2 through the tail gas pipe 3, is subjected to preliminary filtration treatment through the sieve plate, is guided by the guide plate 5 and is repeatedly contacted with the bottom of the water tank 4, the water is heated by using heat in the water, meanwhile, according to actual use requirements, the servo motor 9 can be manually started to drive the screw rod 6 to rotate, the screw block 7 drives the push plate 8 to extrude the guide plate 5, so that the inclination of the guide plate 5 is generated, the moving distance of the tail gas in the recovery box 2 can be regulated, the heat recovery utilization rate is fully improved, then the tail gas enters the heat exchanger 10 through a pipeline, an external water pump is manually started to convey a water source into the water tank 4 through the heat exchanger 10 through the water inlet pipe 12, the secondary tail gas heat recovery treatment is performed, the tail gas heat utilization rate is greatly improved, finally, the tail gas enters the spray tower 13 through the air outlet end, is filtered and cleaned, and then is discharged, and the whole structure is simple and easy to operate, and the recovery effect is good.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides an annealing stove tail gas recycling device, includes annealing stove (1), collection box (2) and heat exchanger (10), its characterized in that: the annealing furnace (1) comprises a tail gas pipe (3), one side of the annealing furnace (1) is provided with a recovery box (2), the tail gas pipe (3) is communicated with the recovery box (2), the top of the recovery box (2) is provided with a water tank (4), a guide plate (5) is installed at the bottom of the water tank (4) in the recovery box (2) through a damping rotating shaft, a screw rod (6) is installed on two sides in the water tank (4) through bearings, the screw rod (6) penetrates through the guide plate (5), a corresponding wire block (7) is arranged on the periphery of the screw rod (6), and a push plate (8) for adjusting the flow direction of tail gas is connected to the bottom of the wire block (7) through bolts.

2. The annealing furnace tail gas recycling device according to claim 1, wherein: one side of the recovery box (2) is provided with a heat exchanger (10), and the air outlet end of the recovery box (2) is communicated with the air inlet end of the heat exchanger (10) through a pipeline, the top of the heat exchanger (10) is provided with a water outlet pipe (11), the water outlet pipe (11) is communicated with the water tank (4), and one side of the heat exchanger (10) is provided with a water inlet pipe (12).

3. The annealing furnace tail gas recycling device according to claim 1, wherein: one side of the recovery box (2) is provided with a servo motor (9), and the servo motor (9) is connected with a screw rod (6) through a driving shaft.

4. The annealing furnace tail gas recycling device according to claim 1, wherein: the back of the heat exchanger (10) is provided with a spray tower (13), and the air outlet end of the heat exchanger (10) is communicated with the spray tower (13) through a pipeline.

5. The annealing furnace tail gas recycling device according to claim 1, wherein: the top in the recovery box (2) is provided with a filter tank (14).