CN219303631U

CN219303631U - Laminating equipment for flexible screen and printing opacity electrostatic chuck thereof

Info

Publication number: CN219303631U
Application number: CN202223397963.9U
Authority: CN
Inventors: 陈高龙; 奉洛阳; 范红强; 丁威
Original assignee: Shenzhen Junchuang Technology Co ltd
Current assignee: Shenzhen Junchuang Technology Co ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2023-07-04
Anticipated expiration: 2032-12-15

Abstract

The application relates to a laminating device for a flexible screen and a light-transmitting electrostatic chuck thereof, comprising an electrostatic suction piece and a base, wherein the electrostatic suction piece is attached to the base; the electrostatic absorption part is provided with at least one light transmission area, and the base is provided with light transmission holes corresponding to the light transmission area; the base is provided with a light transmission piece for supporting the light transmission area, and at least the part of the light transmission piece located between the light transmission area and the light transmission hole is suitable for light to pass through. The electrostatic chuck can transmit light, is convenient to position and has good product consistency.

Description

Laminating equipment for flexible screen and printing opacity electrostatic chuck thereof

Technical Field

The application relates to the technical field of processing, in particular to laminating equipment for a flexible screen and a light-transmitting electrostatic chuck thereof.

Background

In the industry of semiconductor or electronic components, it is necessary to attach a film material to a substrate. In general, the suction cup is used for sucking the film material, then the film material is moved to a film pasting working area corresponding to the substrate through the transmission mechanism, the film material is aligned with the substrate, and then the suction cup is used for loosening the film material to attach the film material to the surface of the substrate.

In order to ensure the precision and consistency of the flexible screen film, the electrostatic chuck mounting and film pasting process needs to be positioned and guided, for example, in the patent of the utility model with publication number of CN103419145A, a method for mounting or dismounting the electrostatic chuck by using a positioning device is disclosed, and a positioning rod is adopted for mounting and guiding positioning. Because the positioning structure has a mounting gap and can generate abrasion in the working process, the positioning precision is low, and the bonding consistency of the film material and the substrate is poor.

Disclosure of Invention

In order to solve the technical problem, the application provides laminating equipment for flexible screen and printing opacity electrostatic chuck thereof, is convenient for fix a position when laminating flexible screen, can promote the precision of laminating processing.

In a first aspect, the present application provides a light transmissive electrostatic chuck comprising an electrostatic chuck member and a base, the electrostatic chuck member attached to the base; the electrostatic absorption part is provided with at least one light transmission area, and the base is provided with light transmission holes corresponding to the light transmission area; the base is provided with a light transmission piece for supporting the light transmission area, and at least the part of the light transmission piece located between the light transmission area and the light transmission hole is suitable for light to pass through.

In order to ensure that the flexible piece is accurately attached to the position of the product in the process of attaching the flexible piece to the product, a positioning base point needs to be set for attaching and positioning, and the positioning base point is a marking point arranged on the electrostatic chuck. However, the accuracy of identifying the marked points is greatly affected by the light of the environment, and the marked points are worn out with the passage of time in the use process, so that the definition and the identification degree of the marked points are affected. Through adopting this technical scheme, the printing opacity spare supports and printing opacity to the static absorbing member, and light passes the light trap of base and passes out from the printing opacity district of static absorbing member and fix a position discernment, and definition is high, uniformity is good, can change the shape of location discernment in order to satisfy different location demands through changing the shape of printing opacity district. In addition, because the light-transmitting piece is arranged, the electrostatic absorption piece is not required to be perforated, the integrity of the electrostatic absorption piece is ensured, the effective absorption and the support of the flexible piece can be ensured, and the reliability of the attaching process is ensured.

Further, the electrostatic absorption member comprises a light-transmitting base layer and a light-impermeable electrode layer arranged in the base layer, wherein the electrode layer partially covers the base layer to form a coverage area and a light-transmitting area.

Further, the light-transmitting area is a circle or a polygon with the area smaller than or equal to the area of the light-transmitting hole.

By adopting the technical scheme, light can be ensured to be completely transmitted from the light transmission area, the light transmission shape of the light transmission area is ensured to be complete, and the light focusing is convenient to improve the recognition precision when the marking patterns are arranged in the light transmission area. In addition, different shapes of the light-transmitting area can also meet different identification use requirements.

Further, the light source is arranged on one side of the base, which is away from the light-transmitting piece, and forms a sub-light pattern in the light-transmitting area.

Through adopting above-mentioned technical scheme, can fix a position through sub-light pattern, adjust different sub-light pattern through adjusting the light source, adjust more nimble convenience, can more satisfy diversified demand.

Further, the light beam emitted by the light source is common visible light, infrared light or ultraviolet light.

By adopting the technical scheme, different light sources can be adopted according to different recognition systems, and diversified use scenes can be met.

In a further scheme, at least two light sources are provided, and each light source respectively forms a sub-light pattern in the light transmission area.

By adopting the technical scheme, for some complicated positioning or identification of other requirements, different sub-light patterns can be adjusted to adjust the combined patterns, and the pattern adjustment is more flexible and diversified.

Further, each sub-light pattern is not overlapped in the light-transmitting area.

By adopting the technical scheme, non-overlapping sub-light patterns can be projected by different light sources so as to realize application occasions of different identification of multiple positioning base points.

Further, the device further comprises a probe unit, wherein the probe unit is arranged on one side, away from the light-transmitting piece, of the electrostatic absorption piece and is used for detecting the flatness of the flexible piece absorbed by the electrostatic absorption piece.

Through adopting above-mentioned technical scheme, can detect the roughness of flexible piece to guarantee the roughness of flexible piece and then guarantee the roughness of laminating, prevent the fold.

Further, each corner of the electrostatic absorption member is further provided with an adjusting unit for adjusting the flatness of the flexible member.

Through adopting above-mentioned technical scheme, guarantee the roughness before the flexible piece laminating, effectively avoid the production of fold and bubble in the laminating process, promote laminating quality, guarantee laminating quality's uniformity.

In a second aspect, the present application provides a conforming apparatus for a flexible screen comprising a light transmissive electrostatic chuck as described above.

Through adopting above-mentioned technical scheme, laminating equipment can promote the quality that the flexible piece laminated, guarantees the uniformity of laminating.

In summary, the present application has at least one of the following beneficial technical effects:

1. the light-transmitting electrostatic chuck has the advantages of simple and reliable structure, high positioning precision and better consistency of product quality.

2. This application printing opacity electrostatic chuck has changed traditional locate mode, and the location is adjusted more nimble, can satisfy diversified location demand.

3. This printing opacity electrostatic chuck of application, the processing of being convenient for has promoted the efficiency and the quality of flexible piece laminating.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the following brief description of the drawings of the embodiments will make it apparent that the drawings in the following description relate only to some embodiments of the present utility model and are not limiting of the present utility model.

Fig. 1 is a schematic structural view of a first embodiment of an electrostatic chuck of the present application.

Fig. 2 is a schematic exploded view of a first embodiment of an electrostatic chuck of the present application.

Fig. 3 is a top view of a first embodiment of an electrostatic chuck of the present application.

Fig. 4 is a schematic structural view of a second embodiment of an electrostatic chuck of the present application.

Fig. 5 is a schematic structural view of a third embodiment of an electrostatic chuck of the present application.

Fig. 6 is a schematic structural view of a fourth embodiment of an electrostatic chuck of the present application.

Reference numerals:

1. an electrostatic absorption member; 11. an upper base layer; 12. an electrode layer; 121. a coverage area; 122. a light transmission region; 13. a lower base layer; 2. a light transmitting member; 3. a base; 31. a light hole; 4. a light source; 5. a probe unit; 6. an adjusting unit.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the present utility model will be described in further detail with reference to the accompanying drawings. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

Unless defined otherwise, technical or scientific terms used in this patent document should be given the ordinary meaning as understood by one of ordinary skill in the art to which this utility model belongs. The terms "first," "second," and the like in the description and in the claims, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. Likewise, the terms "a," "an," or "the" and similar terms do not denote a limitation of quantity, but rather denote the presence of at least one. The words "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" and the like mean that the elements or objects appearing in front of "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" are covered by the elements or objects listed in back of "curved surface screen fitting tool includes" or "curved surface screen fitting tool contains" and equivalents thereof, and do not exclude other elements or objects. "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are used merely to denote relative positional relationships, which may be changed accordingly when the absolute position of the object being described is changed, merely to facilitate description of the present utility model and to simplify description, and not to indicate or imply that the apparatus or elements being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the utility model.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Some embodiments of the present utility model are described in detail below with reference to the accompanying drawings. Features of the embodiments described below may be combined with each other without conflict.

Example 1

Referring to fig. 1, a schematic structure of a first embodiment of a light-transmitting electrostatic chuck is shown, the electrostatic chuck comprises an electrostatic chuck member 1, a light-transmitting member 2 and a base 3. The electrostatic absorption part 1 is directly contacted with a product to provide electrostatic absorption force for the product, the electrostatic absorption part 1 is provided with a light transmission area 122, the light transmission area 122 can be designed into a round shape, a triangular shape or a quincuncial shape and the like as required, the electrostatic absorption part 1 is attached to the light transmission part 2 and fixedly connected with the light transmission part 2, the light transmission part 2 is a plate which has certain strength and can transmit light, the light transmission part 2 is made of transparent materials such as quartz and PVC, and the light transmission part 2 supports the electrostatic absorption part 1. One surface of the light-transmitting piece 2, which is away from the electrostatic absorption piece 1, is fixedly connected with the base 3 in a gluing mode, the base 3 is provided with a light-transmitting hole 31, the light-transmitting hole 31 corresponds to the light-transmitting area 122 so that light can penetrate out of the light-transmitting area 122 of the electrostatic absorption piece 1 through the light-transmitting hole 31 and the light-transmitting piece 2, and the light-transmitting area 122 is a circle or a polygon with the area smaller than or equal to the area of the light-transmitting hole 31. The base 3 provides support for the light-transmitting piece 2 and the electrostatic absorption piece 1, and the light-transmitting piece 2 and the electrostatic absorption piece 1 are fixedly connected with the machine through the base 3.

Referring to fig. 2, the electrostatic adsorbing member 1 includes a light-transmitting upper substrate 11, a lower substrate 13, and a light-impermeable high-voltage electrode layer 12 disposed between the upper substrate 11 and the lower substrate 13, the electrode layer 12 is light-impermeable, and the high-voltage electrode layer 12 partially covers the substrate to form a light-impermeable cover 121 and a light-permeable region 122. Direct-current high-voltage power is applied to the cover 121 to generate an adsorption force to the electrostatic adsorption member 1. Because the light-transmitting piece 2 is arranged below the static absorbing piece 1 for supporting, the thickness of the electrode layer 12 in the static absorbing piece 1 is very thin, the influence on the overall thickness of the static absorbing piece 1 is very small, a flexible product is placed on the upper base layer 11, and the upper base layer 11 and the lower base layer 13 can support the product, so that the purposes of light transmission and supporting are achieved.

Referring to fig. 3, the outer dimension of the base 3 is larger than the outer dimension of the electrostatic absorption member 1, and the light-transmitting regions 122 of the electrostatic absorption member 1 are disposed at four corners. In an actual production process, the number and positions of the light-transmitting regions 122 may be set according to the process requirements.

Example two

Referring to fig. 4, a second embodiment of the electrostatic chuck is shown, which is different from the first embodiment in that at least one light source 4 is disposed below each light transmission hole 31 of the base 3, the light beam emitted by the light source 4 is normal visible light, infrared light or ultraviolet light, and the light emitted by the light source 4 passes through the light transmission hole 31 and the light transmission member 2 and is emitted from the light transmission region 122 of the electrostatic chuck 1.

In one embodiment, the light-transmitting area 122 is provided with a mark point, and the light emitted by the light source 4 is transmitted out of the light-transmitting area 122, so that the mark point is easy to identify and locate.

In another embodiment, two light sources 4 are disposed below each light hole 31, each light source 4 forms a sub-light pattern in the light-transmitting area 122, and each sub-light pattern may overlap, may not overlap, or may partially overlap in the light-transmitting area 122, so as to meet different positioning recognition or other application requirements. It is envisioned that the light source 4 may be more than two, and the sub-light patterns may be more than two, and each sub-light pattern may overlap, may not overlap, or may partially overlap in the light-transmitting region 122.

Example III

Referring to fig. 5, a third embodiment of the electrostatic chuck is shown, which is different from the second embodiment in that at least one probe unit 5 is disposed on a side of the electrostatic chuck 1 away from the transparent member 2, for detecting the flatness of the flexible member adsorbed by the electrostatic chuck 1.

Example IV

Referring to fig. 6, a fourth embodiment of the electrostatic chuck is shown, which is different from the third embodiment in that an adjusting unit 6 for adjusting the flatness of the flexible member is further provided at each corner of the electrostatic chuck 1.

Example five

The embodiment discloses laminating equipment for a flexible screen, which comprises a light-transmitting electrostatic chuck as in any one of the first to fourth embodiments. The laminating equipment also comprises a control device, and the electrostatic absorption part 1, the light source 4, the probe unit 5 and the adjusting unit 6 are respectively and electrically connected with the control device.

The working process and principle of the laminating equipment are as follows: the flexible piece is placed on the surface of the electrostatic absorption piece 1, static electricity is generated after the electrostatic absorption piece 1 is electrified to absorb the flexible piece, the probe unit 5 detects the flatness of the flexible piece and feeds signals back to the control device, the control device adjusts the flatness of the flexible piece through the control adjusting unit 6, and after the flatness of the flexible piece meets the requirement, the probe unit 5 feeds signals back to the control unit, and the adjusting unit 6 stops acting. The light emitted by the light source 4 after being electrified passes through the light transmission hole 31 and the light transmission piece 2 and passes out of the light transmission area 122, and mark points are formed in the light transmission area 122 and used for positioning and identifying the fitting of the flexible piece.

[ other embodiments ]

The light-transmitting member 2 and the base 3 may be combined into one large light-transmitting member 2 made of quartz material.

The probe unit 5 may also be replaced with a visual recognition system by which flatness recognition of the flexible member is performed.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present utility model should be included in the present utility model. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.

Claims

1. A light transmissive electrostatic chuck comprising an electrostatic chuck member and a base, the electrostatic chuck member being attached to the base; the method is characterized in that:

the electrostatic absorption part is provided with at least one light transmission area, and the base is provided with light transmission holes corresponding to the light transmission area;

the base is provided with a light transmission piece for supporting the light transmission area, and at least the part of the light transmission piece located between the light transmission area and the light transmission hole is suitable for light to pass through.

2. The light transmissive electrostatic chuck of claim 1, wherein the electrostatic chuck comprises a light transmissive base layer and an opaque electrode layer disposed within the base layer, the electrode layer partially covering the base layer to form a footprint and a light transmissive region.

3. The light transmissive electrostatic chuck of claim 1, wherein said light transmissive region is circular or polygonal having an area less than or equal to an area of said light transmissive aperture.

4. The light transmissive electrostatic chuck of claim 1, further comprising a light source disposed on a side of the base facing away from the light transmissive member and forming a sub-light pattern in the light transmissive region.

5. The light transmissive electrostatic chuck of claim 4, wherein the light source emits light in the form of normal visible, infrared or ultraviolet light.

6. The light transmissive electrostatic chuck of claim 4, wherein there are at least two of said light sources, each of said light sources forming a sub-light pattern in said light transmissive region.

7. The light transmissive electrostatic chuck of claim 6, wherein each of said sub-light patterns does not overlap in said light transmissive region.

8. The light-transmitting electrostatic chuck of claim 1, further comprising a probe unit disposed on a side of the electrostatic chuck facing away from the light-transmitting member for detecting flatness of the flexible member attracted by the electrostatic chuck.

9. The light-transmitting electrostatic chuck of claim 8, wherein an adjusting unit for adjusting flatness of the flexible member is further provided at each corner of the electrostatic chuck member.

10. A bonding apparatus for flexible screens, characterized by comprising a light-transmitting electrostatic chuck according to any one of claims 1 to 9.