CN219302870U

CN219302870U - Photoetching machine with adjustable prism angle

Info

Publication number: CN219302870U
Application number: CN202320051516.3U
Authority: CN
Inventors: 胡德立
Original assignee: Hangzhou Xinweiying Semiconductor Co ltd
Current assignee: Hangzhou Xinweiying Semiconductor Co ltd
Priority date: 2023-01-09
Filing date: 2023-01-09
Publication date: 2023-07-04
Anticipated expiration: 2033-01-09

Abstract

The utility model discloses a photoetching machine with an adjustable prism angle, which relates to the technical field of photoetching machines, wherein a prism placement box is arranged in the photoetching machine, an electric push rod is arranged on the inner side of the prism placement box through bolts, the output end of the electric push rod is connected with a moving plate in a sliding manner, the side surface of the moving plate is movably connected with a first rotating shaft and a second rotating shaft, the middle part of the first rotating shaft is connected with a first gear through a spline, the side end of the first rotating shaft is connected with a prismatic mounting plate through a spline, the middle part of the second rotating shaft is connected with a second gear through a spline, a stripe belt is meshed on the surface of the second gear, and the side end of the stripe belt is meshed with the first gear.

Description

Photoetching machine with adjustable prism angle

Technical Field

The utility model relates to the technical field of photoetching machines, in particular to a photoetching machine with an adjustable prism angle.

Background

The photoetching machine is a core device for manufacturing chips, and the prism is one of the component parts of the photoetching machine. The traditional photoetching machine has fixed prism position and cannot adjust the angle, so that the angle of a photoetching machine printed chip is single, and therefore, the photoetching machine with the adjustable prism angle is provided. Through searching, the patent with the Chinese patent number of CN216118390U is a photoetching machine with an adjustable prism angle, and adopts two driving modes, so that the direction of a light source can be flexibly adjusted. In the prior art, the angle of the prism of the photoetching machine can only be horizontally moved on a specific horizontal plane, so that the angle of the prism is inconvenient to rotate, and the use limitation is certain.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a photoetching machine with an adjustable prism angle, which solves the problems proposed by the background technology.

(II) technical scheme

In order to achieve the above purpose, the utility model is realized by the following technical scheme: the utility model provides a prism angularly adjustable lithography machine, includes places platform, lithography machine and prism and places the case, place platform top surface bolted connection lithography machine, be equipped with the prism in the lithography machine and place the case, the inboard bolt-up electric putter of case is placed to the prism, electric putter's output sliding connection moves the board, move board side sliding connection slide rail, move board side swing joint first pivot and second pivot, first pivot middle part spline connection first gear, first pivot side spline connection prismatic mounting panel, threaded connection prism in the prismatic mounting panel, second pivot middle part spline connection second gear, the stripe belt is connected to the meshing on the second gear surface, stripe belt side meshing is connected first gear.

Preferably, the side end of the moving plate is provided with vertical rods which are in a diagonal distribution mode, the middle of each vertical rod is movably connected with a third gear, the side end of each vertical rod is symmetrically provided with a baffle, and the bottom ends of the baffles are fixedly connected with the vertical rods.

Preferably, the third gear side end is meshed with the connecting stripe belt.

Preferably, the side end of the second rotating shaft is movably connected with a servo motor, the bottom end of the servo motor is connected with a bottom plate through a bolt, and the side end of the bottom plate is fixedly connected with a moving plate.

Preferably, sliding rails are symmetrically arranged on the inner side surface of the prism placing box.

(III) beneficial effects

The utility model provides a photoetching machine with an adjustable prism angle. The beneficial effects are as follows:

(1) According to the utility model, the electric push rod is used for enabling the prism of the photoetching machine to move in the horizontal plane, and the first gear, the second gear and the stripe belt are used for enabling the prism to rotate in an angle, so that the prism can be used in multiple positions and multiple angles, and the quality of the photoetching machine for printing chips through the prism can be improved.

(2) In the process of driving the prism to rotate by the first gear, the second gear and the strip belt, the utility model is also provided with a third gear and a baffle for preventing the strip belt from deviating, which is helpful for keeping the stable shape of the strip belt and further assisting the angle rotation of the prism.

Drawings

FIG. 1 is a schematic diagram of the overall utility model;

FIG. 2 is a schematic view of the structure of the prism placement case of the present utility model;

FIG. 3 is a schematic diagram of a connection structure of a second gear according to the present utility model;

FIG. 4 is a schematic view of the connection structure of the prismatic mounting plate and the prism of the present utility model;

fig. 5 is a schematic diagram of a connection structure of a third gear according to the present utility model.

In the figure, 1, a placing table; 2. a photoetching machine; 3. a prism placement box; 31. a slide rail; 4. an electric push rod; 5. moving the plate; 6. a first rotating shaft; 7. a first gear; 8. a prismatic mounting plate; 9. a prism; 10. a bottom plate; 11. a second gear; 12. a servo motor; 13. a second rotating shaft; 14. a striped belt; 15. a third gear; 151. a vertical rod; 152. and a baffle.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-5, the embodiment of the present utility model provides a technical solution: the utility model provides a prism angularly adjustable photoetching machine, includes places platform 1, photoetching machine 2 and prism and places case 3, place platform 1 top surface bolted connection photoetching machine 2, be equipped with prism in the photoetching machine 2 and place case 3, prism places case 3 inboard bolt installation electric putter 4, electric putter 4's output sliding connection moves board 5, move board 5 side sliding connection slide rail 31, move board 5 side swing joint first pivot 6 and second pivot 13, first pivot 6 middle part spline connection first gear 7, first pivot 6 side spline connection prismatic mounting panel 8, threaded connection prism 9 in the prismatic mounting panel 8, second pivot 13 middle part spline connection second gear 11, second gear 11 on the surface meshing connection stripe belt 14, stripe belt 14 side meshing connection first gear 7, the photoetching machine 2 can be placed through the placing table 1, the movable plate 5 can be slid through the output end of the electric push rod 4 in the prism placing box 3 in the photoetching machine 2, the movable plate 5 slides to drive the prismatic mounting plate 8 and the prism 9 which are connected with the side end of the movable plate 5 through the first rotating shaft 6 to slide horizontally, then the prismatic mounting plate 8 can detach the prism 9 through the middle screw thread, so that the prism 9 is convenient to replace, later maintenance is facilitated, then the second rotating shaft 13 is driven to rotate through the servo motor 12, the second rotating shaft 13 drives the second gear 11 to rotate, the second gear 11 drives the surface to be meshed with the stripe belt 14 to rotate after rotating, then the stripe belt 14 drives the first gear 7 to rotate, at the moment, the first gear 7 drives the first rotating shaft 6 to rotate, and the prismatic mounting plate 8 connected with the side end of the first rotating shaft 6 rotates in an angle, after the prismatic mounting plate 8 rotates in an angle, while also turning the prism 9 attached in the prismatic mounting plate 8.

The side end of the moving plate 5 is provided with an upright rod 151, the upright rod 151 is in a diagonal distribution form, the middle part of the upright rod 151 is movably connected with a third gear 15, the side end of the upright rod 151 is symmetrically provided with a baffle 152, the bottom end of the baffle 152 is fixedly connected with the upright rod 151, the moving plate 5 is connected with the third gear 15 through the upright rod 151, and the baffle 152 prevents the stripe belt 14 from shifting.

The side end of the third gear 15 is meshed with the connecting stripe belt 14, and the side end of the third gear 15 is meshed with the connecting stripe belt 14, so that the belt can be prevented from deviating.

The side end of the second rotating shaft 13 is movably connected with the servo motor 12, the bottom end of the servo motor 12 is connected with the bottom plate 10 through a bolt, the side end of the bottom plate 10 is fixedly connected with the moving plate 5, the servo motor 12 can drive the second rotating shaft 13 to rotate, and the bottom plate 10 plays a role in supporting and connecting the servo motor 12.

The inner side surface of the prism placing box 3 is symmetrically provided with sliding rails 31, and the sliding rails 31 assist the horizontal sliding position of the moving plate 5.

It should be noted that: when the utility model is used, the prism placing box 3 in the photoetching machine 2 can slide the moving plate 5 through the output end of the electric push rod 4, the moving plate 5 slides and then drives the prismatic mounting plate 8 and the prism 9 connected with the side end of the moving plate 5 through the first rotating shaft 6 to horizontally slide, then the second rotating shaft 13 is driven to rotate through the servo motor 12, the second rotating shaft 13 drives the second gear 11 to rotate, the second gear 11 rotates and then drives the surface to be meshed with the stripe belt 14 to rotate, then the stripe belt 14 drives the first gear 7 to rotate, at the moment, the first gear 7 drives the first rotating shaft 6 to rotate and enables the prismatic mounting plate 8 connected with the side end of the first rotating shaft 6 to rotate by an angle, and when the prismatic mounting plate 8 rotates by an angle, the prism 9 connected with the prismatic mounting plate 8 also rotates by an angle.

While the fundamental and principal features of the utility model and advantages of the utility model have been shown and described, it will be apparent to those skilled in the art that the utility model is not limited to the details of the foregoing exemplary embodiments, but may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. A photoetching machine with an adjustable prism angle is characterized in that: including placing platform (1), lithograph (2) and prism and placing case (3), place platform (1) top surface bolted connection lithograph (2), be equipped with prism in lithograph (2) and place case (3), the inboard bolt installation electric putter (4) of case (3) are placed to the prism, the output sliding connection of electric putter (4) moves board (5), move board (5) side sliding connection slide rail (31), move board (5) side swing joint first pivot (6) and second pivot (13), first pivot (6) middle part splined connection first gear (7), first pivot (6) side splined connection prismatic mounting panel (8), threaded connection prism (9) in prismatic mounting panel (8), second pivot (13) middle part splined connection second gear (11).

2. The adjustable prism angle lithography machine of claim 1, wherein: the movable plate is characterized in that vertical rods (151) are arranged at the side ends of the movable plate (5), the vertical rods (151) are in a diagonal distribution mode, a third gear (15) is movably connected with the middle of each vertical rod (151), baffle plates (152) are symmetrically arranged at the side ends of the vertical rods (151), and the bottom ends of the baffle plates (152) are fixedly connected with the vertical rods (151).

3. The adjustable prism angle lithography machine of claim 2, wherein: the side end of the third gear (15) is meshed with the stripe belt (14).

4. The adjustable prism angle lithography machine of claim 1, wherein: the side end of the second rotating shaft (13) is movably connected with a servo motor (12), the bottom end of the servo motor (12) is connected with a bottom plate (10) through a bolt, and the side end of the bottom plate (10) is fixedly connected with a moving plate (5).

5. The adjustable prism angle lithography machine of claim 1, wherein: sliding rails (31) are symmetrically arranged on the inner side surface of the prism placing box (3).

6. The adjustable prism angle lithography machine of claim 1, wherein: the surface of the second gear (11) is in meshed connection with a striped belt (14), and the side end of the striped belt (14) is in meshed connection with the first gear (7).