CN219284059U

CN219284059U - Integrated liquid-separating heat-preserving device

Info

Publication number: CN219284059U
Application number: CN202320020235.1U
Authority: CN
Inventors: 周胤洲
Original assignee: Jiangsu Fengbo Equipment Technology Co ltd
Current assignee: Jiangsu Fengbo Equipment Technology Co ltd
Priority date: 2023-01-05
Filing date: 2023-01-05
Publication date: 2023-06-30
Anticipated expiration: 2033-01-05

Abstract

The utility model relates to the technical field of semiconductors, in particular to an integrated liquid-separating heat-preserving device which comprises a heat exchange circulating main body, wherein liquid-separating and converging blocks are fixedly arranged on the upper surface and the lower surface of the heat exchange circulating main body, the upper surface of each liquid-separating and converging block is communicated with a heat-preserving pipe sleeve, the heat-preserving pipe sleeve comprises an outer layer pipe and an inner layer pipe, a countersunk screw plug is arranged on one side of each liquid-separating and converging block, a sensor joint and an exhaust joint are respectively arranged at one end of the heat exchange circulating main body, and a temperature sensor is arranged at one end of each sensor joint. According to the utility model, the liquid separation and confluence block is arranged, so that the requirements of liquid medicine flow separation and heat preservation can be met, meanwhile, the whole structure is compact, on the premise of guaranteeing heat preservation, the liquid medicine is guaranteed to be free from leakage, the liquid medicine heat preservation and the heat preservation water are not mixed, and a plurality of groups of independent devices are not needed for combined use, so that the liquid medicine flow separation and heat preservation are realized, the space utilization rate is greatly improved, meanwhile, the disassembly and the maintenance are convenient, and the follow-up work of staff is convenient.

Description

Integrated liquid-separating heat-preserving device

Technical Field

The utility model relates to the technical field of semiconductors, in particular to an integrated liquid-separating heat-preserving device.

Background

In the processing process of the wafer, the wafer needs to be glued or developed, the temperature of the photoresist and the temperature of the developing solution directly influence the stability and uniformity of the process, so in the processing process, the constant temperature of the photoresist and the developing solution has strict requirements, at present, under the condition that one path of main liquid inlet needs to be split and insulated, the liquid medicine and the insulating water are usually split through a certain device, the main liquid medicine and the main insulating water are split through another independent device, and finally the split liquid medicine and the split insulating water are combined through another device, the whole process has large span of splitting and converging devices, the heat loss is large, the insulating effect is poor, meanwhile, the space utilization rate is low, the joints are multiple, the pipelines are complex, the leakage points are multiple, the disassembly and the maintenance are inconvenient, and the improvement is needed.

Disclosure of Invention

The utility model aims to solve the defects in the prior art and provides an integrated liquid-separating heat-preserving device.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the utility model provides an integrated form divides liquid heat preservation device, includes the heat transfer circulation main part, the equal fixed mounting of upper and lower surface of heat transfer circulation main part has divides liquid to converge the piece, the upper surface intercommunication that divides liquid to converge the piece has the insulating tube external member, the insulating tube external member includes inlayer pipe, one side that divides liquid to converge the piece is provided with countersunk head plug screw, sensor joint and exhaust coupling are installed respectively to the one end of heat transfer circulation main part, temperature sensor is installed to the one end that sensor connects.

In order to improve the connection and installation effects of the liquid separation and collection block and the heat preservation pipe sleeve, the utility model is improved in that a joint connecting flange is arranged at the joint of the liquid separation and collection block and the heat preservation pipe sleeve, and a joint nut is arranged on the upper surface of the joint connecting flange.

In order to facilitate connection and fixation between the inner layer pipe and the heat exchange circulation main body, the utility model is improved in that a quick-screwing joint is arranged at the joint of the inner layer pipe and the heat exchange circulation main body.

In order to further improve the installation effect of the heat-insulating pipe sleeve on the liquid-separating and converging block, the utility model is improved in that the pressing plate is arranged on the upper surface of the liquid-separating and converging block, and the heat-insulating pipe sleeve is arranged in the pressing plate in a penetrating way.

In order to improve the tightness of the whole device, the utility model is improved in that sealing rings are arranged at the joint of the heat exchange circulating main body and the liquid separation and collection block and at the joint of the pressing plate and the joint connecting flange.

In order to ensure the flow dividing effect, the utility model is improved in that the flow dividing and converging block is internally provided with a flow dividing channel, and the heat exchange circulation main body is internally provided with a parallel channel.

Compared with the prior art, the utility model has the advantages and positive effects that:

according to the utility model, the liquid separation and confluence block is arranged, so that the requirements of liquid medicine flow separation and heat preservation can be met, meanwhile, the whole structure is compact, on the premise of guaranteeing heat preservation, the liquid medicine is guaranteed to be free from leakage, the liquid medicine heat preservation and the heat preservation water are not mixed, and a plurality of groups of independent devices are not needed for combined use, so that the liquid medicine flow separation and heat preservation can be realized, the space utilization rate is greatly improved, meanwhile, the disassembly and the maintenance are convenient, and the follow-up work of staff is convenient.

Drawings

FIG. 1 is an isometric view of an integrated liquid separation and thermal insulation device according to the present utility model;

fig. 2 is a top view of an integrated liquid-separating and heat-preserving device according to the present utility model;

FIG. 3 is a side cross-sectional view of an integrated liquid-dividing and heat-preserving device according to the present utility model;

fig. 4 is a cross-sectional view of a heat exchange cycle main body in an integrated liquid separation heat preservation device according to the present utility model.

Legend description:

1. a heat exchange cycle main body; 2. a liquid separation and confluence block; 3. a countersunk head screw plug; 4. a sensor joint; 5. a temperature sensor; 6. an exhaust joint; 7. a joint nut; 8. a pressing plate; 9. a joint connection flange; 10. and (5) screwing the joint quickly.

Detailed Description

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

In the description of the present utility model, it should be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate describing the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, in the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

Example 1

Referring to fig. 1-4, the present utility model provides a technical solution: the utility model provides an integrated form divides liquid heat preservation device, including heat transfer circulation main part 1, the equal fixed mounting in upper and lower surface of heat transfer circulation main part 1 divides liquid to converge piece 2, the upper surface intercommunication of dividing liquid to converge piece 2 has the insulating tube external member, the insulating tube cover piece includes outer tube and inlayer pipe, one side of dividing liquid to converge piece 2 is provided with countersunk head spiral shell stopper 3, sensor connector 4 and exhaust connector 6 are installed respectively to the one end of heat transfer circulation main part 1, temperature sensor 5 is installed to the one end of sensor connector 4, through setting up this divide liquid to converge piece 2, can satisfy the demand that liquid medicine shunted and keep warm, overall structure is compact simultaneously, under the prerequisite of guaranteeing the heat preservation, can guarantee that liquid medicine does not leak, liquid medicine heat preservation and heat preservation water do not have the mixture, and no longer need the multiunit independent device to make up the use, the reposition of redundant personnel and the heat preservation to the liquid medicine are realized to space utilization, convenient dismantlement simultaneously, convenient maintenance, convenient staff carries out the follow-up work.

Referring to fig. 1-4, the junction of the liquid separation and collection block 2 and the heat preservation pipe sleeve member is provided with a joint connection flange 9, the upper surface of the joint connection flange 9 is provided with a joint nut 7, the joint connection flange 9 is matched with the upper joint nut 7, the connection installation effect of the liquid separation and collection block 2 and the heat preservation pipe sleeve member can be improved, the junction of the inner tube and the heat exchange circulation main body 1 is provided with a quick screwing joint 10, the quick screwing joint 10 can realize the quick fixed installation between the inner tube and the heat exchange circulation main body 1, the upper surface of the liquid separation and collection block 2 is provided with a pressing plate 8, the heat preservation pipe sleeve member penetrates through the inside of the pressing plate 8, the auxiliary fixing effect can be realized by the pressing plate 8, the connection effect of the heat preservation pipe sleeve member and the liquid separation and collection block 2 is fully ensured, the junction of the pressing plate 8 and the joint connection flange 9 is provided with a sealing ring, the sealing effect of the whole device can be fully ensured, the inside of the liquid separation and collection block 2 is provided with a diversion channel, the inside of the heat exchange circulation main body 1 is provided with a parallel channel, and the smooth operation of the diversion effect of the device can be ensured.

Working principle: when the device is in use, liquid medicine and heat preservation water can realize the reposition of redundant personnel after the reposition of redundant personnel collection piece to inside two parallel channels that are equipped with in heat transfer circulation main part 1 are flowed in respectively, one end at heat transfer circulation main part 1 is equipped with exhaust joint 6 and temperature sensor 5 simultaneously, exhaust joint 6 can discharge the air that exists in the passageway, and temperature sensor 5 detectable heat preservation water's temperature, heat preservation water, the liquid medicine flow can flow in the reposition of redundant personnel collection piece again after heat transfer circulation main part 1, the liquid medicine after the reposition of redundant personnel can enter into in the inlayer pipe, and the heat preservation water after the reposition of redundant personnel can enter into in the inlayer pipe after the reposition of redundant personnel collection passageway that is equipped with in the reposition of redundant personnel collection piece, finally realize the conflux of liquid medicine and heat preservation water, can satisfy the demand that the liquid medicine shunts and keep warm simultaneously, compact overall structure is compact, under the prerequisite of guaranteeing the heat preservation, can guarantee that the liquid medicine keeps warm and heat preservation water does not mix, and no longer need the multiunit independent device to make up and use, thereby realizing the reposition of redundant personnel and the heat preservation of liquid medicine, space utilization rate is greatly improved, and convenient for maintenance, and convenient for the follow-up work of staff.

The present utility model is not limited to the above embodiments, and any equivalent embodiments which can be changed or modified by the technical disclosure described above can be applied to other fields, but any simple modification, equivalent changes and modification made to the above embodiments according to the technical matter of the present utility model will still fall within the scope of the technical disclosure.

Claims

1. The utility model provides an integrated form divides liquid heat preservation device, includes heat transfer circulation main part (1), its characterized in that: the heat exchange circulation device is characterized in that the upper surface and the lower surface of the heat exchange circulation body (1) are fixedly provided with liquid separation and confluence blocks (2), the upper surface of each liquid separation and confluence block (2) is communicated with a heat preservation pipe sleeve, each heat preservation pipe sleeve comprises an outer layer pipe and an inner layer pipe, one side of each liquid separation and confluence block (2) is provided with a countersunk head screw plug (3), one end of each heat exchange circulation body (1) is provided with a sensor joint (4) and an exhaust joint (6) respectively, and one end of each sensor joint (4) is provided with a temperature sensor (5).

2. The integrated liquid separation and thermal insulation device according to claim 1, wherein: the joint of the liquid separation and collection block (2) and the heat preservation pipe sleeve member is provided with a joint connecting flange (9), and the upper surface of the joint connecting flange (9) is provided with a joint nut (7).

3. The integrated liquid separation and thermal insulation device according to claim 1, wherein: the connection part of the inner layer pipe and the heat exchange circulation main body (1) is provided with a quick-screwing joint (10).

4. The integrated liquid separation and thermal insulation device according to claim 1, wherein: the upper surface of the liquid separation and collection block (2) is provided with a pressing plate (8), and the heat preservation pipe sleeve member is arranged in the pressing plate (8) in a penetrating mode.

5. The integrated liquid separation and thermal insulation device according to claim 4, wherein: sealing rings are arranged at the joint of the heat exchange circulating main body (1) and the liquid separation and collection block (2) and the joint of the pressing plate (8) and the joint connecting flange (9).

6. The integrated liquid separation and thermal insulation device according to claim 1, wherein: the inside of branch liquid collection flow block (2) is provided with the reposition of redundant personnel passageway, the inside of heat transfer circulation main part (1) is provided with parallel channel.