CN219282792U - Adjusting device capable of finely adjusting lens - Google Patents
Adjusting device capable of finely adjusting lens Download PDFInfo
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- CN219282792U CN219282792U CN202222797024.7U CN202222797024U CN219282792U CN 219282792 U CN219282792 U CN 219282792U CN 202222797024 U CN202222797024 U CN 202222797024U CN 219282792 U CN219282792 U CN 219282792U
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Abstract
The application provides an adjusting device of fine setting camera lens, include: the base body is provided with a first mounting surface; the first clamping assembly is arranged at one end of the base body, an observation assembly is clamped at the side, far away from the base body, of the first clamping assembly, and the lens is arranged at the bottom of the observation assembly; the first direction adjusting component is arranged on the first mounting surface and is used for driving the first clamping component to drive the observation component to move along a first direction; this scheme has realized observe the accurate removal of subassembly in the first direction, reduces the time of adjusting the camera lens, has improved observation efficiency.
Description
Technical Field
The application relates to the technical field of semiconductor testing, in particular to an adjusting device capable of fine adjusting a lens.
Background
Along with the rapid development of integrated circuit technology, the integrated circuit testing technology is also promoted to be continuously updated so as to improve the production benefit of the semiconductor industry, wherein the wafer test plays an important role in controlling the yield and the cost of the whole integrated circuit production process, and when the wafer test is carried out, the wafer is required to be observed by an observation lens for needle insertion and test conditions, and as the probe on the detection head is thin like hair, the lens is required to have a fine adjustment function so as to be convenient for observation in order to clearly observe the test conditions of the wafer.
The utility model discloses an adjusting device of straightness and interval between camera lens and imaging chip among the prior art, application number is CN201220722600.5, but can adjust the distance between camera lens and the chip, but can only highly adjust, can't adjust other directions, can't pinpoint.
Disclosure of Invention
In view of the foregoing drawbacks and disadvantages of the prior art, the present application is directed to an adjusting device for a fine-tuning lens, including:
the base body is provided with a first mounting surface;
the first clamping assembly is arranged at one end of the base body, an observation assembly is clamped at the side, far away from the base body, of the first clamping assembly, and the lens is arranged at the bottom of the observation assembly;
the first direction adjusting assembly is arranged on the first mounting surface and used for driving the first clamping assembly to drive the observation assembly to move along a first direction.
According to the technical scheme that this application embodiment provided, first installation face top is equipped with first platform, first platform keep away from the lens end with first clamping component is connected, first platform with form first space between the base body, be equipped with first bellying on the first installation face, the extending direction of first bellying is for first direction, first platform is close to first installation face side is equipped with first recess, first bellying can imbed in the first recess, and follow first recess is followed first direction removes, first platform keep away from first installation face side with first clamping component connects.
According to the technical scheme provided by the embodiment of the application, the first platform is provided with the first through hole, the axis of the first through hole is in the second direction, the second direction is perpendicular to the first direction, the first direction adjusting component comprises a first adjusting rod penetrating through the first through hole, a first gear sleeved outside the first adjusting rod is arranged in the first space, a first rack meshed with the first gear is further arranged in the first space, the extending direction of the first rack is in the first direction, and the bottom of the first rack is connected with the base body; when the first adjusting rod rotates, the first platform can be driven to move along the first direction.
According to the technical scheme provided by the embodiment of the application, the lens can be moved along the third direction by the second direction adjusting component; the first platform is provided with a second direction adjusting component, the first clamping component is far away from the lens end and is connected with the second direction adjusting component, and the second direction adjusting component is used for driving the first clamping component to drive the lens to move along a third direction; the third direction is perpendicular to the first direction and the second direction.
According to the technical scheme that this application embodiment provided, first platform top is equipped with the second platform, the second platform with form the second space between the first platform, first platform is close to the second platform side is equipped with the second bellying, the extending direction of second bellying is the third direction, the second platform is close to first platform side is equipped with the second recess, the second bellying can be embedded in the second recess, and follow the second recess is followed the third direction removes, the second platform is kept away from first platform side with first clamping assembly is connected.
According to the technical scheme provided by the embodiment of the application, the second direction adjusting assembly comprises a second adjusting rod sleeved outside the first adjusting rod, a second gear is sleeved outside the first adjusting rod, a second rack meshed with the second gear is arranged in the second space, the extending direction of the second rack is a third direction, and the side wall of the second rack is connected with the second platform; when the second adjusting rod rotates, the second platform can be driven to move along the third direction.
According to the technical scheme provided by the embodiment of the application, the end, far away from the base body, of the first clamping component is connected with a third direction-adjusting component, and the end, far away from the first clamping component, of the third direction-adjusting component is connected with the observation component; the third direction adjusting component is used for driving the observation component to drive the lens to move along the second direction.
According to the technical scheme that this application embodiment provided, the third is transferred to the subassembly and is included first supporting part, first supporting part is close to the base body end with first clamping assembly is connected, first supporting part is kept away from first clamping assembly end is equipped with first opening, runs through first opening is equipped with the third and adjusts the pole, the extending direction of third regulation pole is the third direction, the third is adjusted the pole overcoat and is equipped with the third gear, the gear is kept away from the base body end meshing has the third rack, the extending direction of third rack is the second direction, the third rack is kept away from the base body side with observe the subassembly and be connected, works as the third is adjusted the pole and is rotated the time can drive first supporting part edge the second direction removes.
According to the technical scheme provided by the embodiment of the application, the first supporting part is close to the side of the base body and is provided with the second through hole, the axis direction of the second through hole is the second direction, the first supporting column penetrates through the second through hole and is arranged, and the top end of the first supporting column is connected with the first clamping component.
According to the technical scheme provided by the embodiment of the application, the first supporting part is close to the base body end and is provided with a second opening communicated with the second through hole, a first fixing piece is arranged through the second opening, and the first fixing piece is used for fixing the first supporting part.
In summary, the present application provides an adjusting device capable of fine tuning a lens, wherein a first mounting surface for mounting a first direction adjusting component is provided on a base body, the base body is provided with a first clamping component, and an observation component is provided at one end of the first clamping component away from the base body; when the device is used, the first observation assembly is adjusted, and the first clamping assembly is driven to drive the observation assembly to move along a first direction; according to the scheme, the observation assembly moves in the first direction, the time for adjusting the lens is reduced, and the observation efficiency is improved.
Drawings
Fig. 1 is a schematic structural diagram of an adjusting device capable of fine-tuning a lens according to an embodiment of the present application;
fig. 2 is a schematic partial view of a first direction-adjusting component and a second direction-adjusting component according to an embodiment of the present application
Fig. 3 is a front view of an adjusting device capable of fine-tuning a lens according to an embodiment of the present application;
fig. 4 is a side view of an adjusting device for a fine-tuning lens according to an embodiment of the present application;
the text labels in the figures are expressed as:
1. a base body; 11. a first platform; 111. a first boss; 1111. a first guide rail; 1112. a second guide rail; 112. a second fixing member; 113. a first vertical plate; 12. a second platform; 121. a second protruding portion; 1211. a third guide rail; 1212. a fourth guide rail 122, a third fixing member; 2. a first clamping assembly; 3. a first steering assembly; 31. a first gear; 32. a first rack; 33. a first adjustment wheel; 4. a second steering assembly; 41. a second adjusting lever; 42. a second rack; 43. a second gear; 44. a second adjustment wheel; 5. a third steering assembly; 6. an observation assembly; 61. a lens; 62; a camera; 7. a first support portion; 71. a first support column; 72. a first fixing member; 73. and a fourth fixing member.
Detailed Description
The present application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting of the utility model. It should be noted that, for convenience of description, only the portions related to the utility model are shown in the drawings.
It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
As mentioned in the background art, aiming at the problems in the prior art, the application provides an adjusting device capable of fine adjusting a lens:
a base body 1, wherein the base body 1 is provided with a first mounting surface; wherein the first mounting surface is a rectangular plane;
the first clamping assembly 2, one end of the first clamping assembly 2 is arranged on the base body 1, an observation assembly 6 is clamped on the side, away from the base body 1, of the first clamping assembly 2, and the lens 61 is arranged at the bottom of the observation assembly 6; the wafer is placed horizontally, the observation assembly 6 is vertical to the wafer, the observation assembly 6 comprises a lens 61, the lens 61 is used for observing specific conditions of wafer testing, a camera 62 is arranged at the top of the lens 61, the camera 62 is used for shooting an observation picture of the lens 61, and the camera 62 is externally connected with display equipment and used for amplifying the shot picture and observing specific conditions of wafer testing.
The first direction adjusting component 3 is arranged on the first mounting surface, and the first direction adjusting component 3 is used for driving the first clamping component 2 to drive the observation component 6 to move along a first direction; wherein the first direction is a horizontal direction and is parallel to the short side of the base body; the scheme realizes the accurate movement of the observation component 6 in the first direction, reduces the time for adjusting the lens 61, and improves the observation efficiency.
Further, a first platform 11 is arranged above the first mounting surface, the end, away from the lens 61, of the first platform 11 is connected with the first clamping assembly 2, a first space is formed between the first platform 11 and the base body 1, a first protruding portion 111 is arranged on the first mounting surface, the extending direction of the first protruding portion 111 is the first direction, a first groove is formed on the side, close to the first mounting surface, of the first platform 11, the first protruding portion 111 can be embedded into the first groove and move along the first groove along the first direction, and the side, away from the first mounting surface, of the first platform 11 is connected with the first clamping assembly 2; wherein, two ends of the first platform, which are close to the short sides of the first mounting surface, are provided with first vertical plates 113, and the extending direction of the first vertical plates is a first direction; the number of the first protruding parts 111 is two, the two protruding parts 111 are arranged at two ends of the first mounting surface along the first direction, the first protruding parts 111 comprise a first guide rail 1111 close to the lens 61, the side wall of the first guide rail 1111 is fixed on the first vertical plate 113, and a second guide rail 1112 far away from the first vertical plate 113 and fixed on the first mounting surface, a first sliding groove is arranged at the end, far away from the first vertical plate 113, of the first guide rail 1111, a first sliding block fixed on the side of the second guide rail 1112 is arranged at the end, close to the side wall of the first platform 11, of the second guide rail 1112, the first guide rail 1111 can slide along the first sliding block along the first direction in the first groove, and the first platform 11 can move along the first direction; the first groove is arranged above the second guide rail 1112 and can be used for embedding the second guide rail 1112; alternatively, the first slider may be plural.
Further, a first through hole is formed in the first platform 11, an axis of the first through hole is in a second direction, the second direction is perpendicular to the first direction, the first direction adjusting component 3 comprises a first adjusting rod penetrating through the first through hole, a first gear 31 sleeved outside the first adjusting rod is arranged in the first space, a first rack 32 meshed with the first gear 31 is further arranged in the first space, an extending direction of the first rack 32 is in the first direction, and the bottom of the first rack 32 is connected with the base body 1; when the first adjusting rod rotates, the first platform 11 can be driven to move along the first direction; the second direction is a vertical direction, a first adjusting wheel 33 is arranged at one end of the first adjusting rod, which is close to the first working platform, and the first adjusting wheel 33 is rotated to drive the first adjusting rod to rotate, the first gear 31 arranged outside the first adjusting rod is meshed with the first rack 32 along with the rotation of the first adjusting rod, and the first rack 32 is fixed on the first mounting surface, so that the first gear 31 drives the first platform 11 to move along the first direction; the first gear 31 and the first rack 32 are of a standard helical gear-rack structure, and have a modulus of 0.5, so that the observation assembly 6 can be controlled to perform accurate and rapid fine adjustment along the first direction.
Further, a second steering assembly 4 is further included, and the second steering assembly 4 can move the lens 61 along a third direction. The first platform 11 is provided with a second direction-adjusting component 4, the end, away from the lens 61, of the first clamping component 2 is connected with the second direction-adjusting component 4, and the second direction-adjusting component 4 is used for driving the first clamping component 2 to drive the lens 61 to move along a third direction; the third direction is perpendicular to the first direction and the second direction; the third direction is a horizontal direction and is parallel to the long side of the base body.
Further, a second platform 12 is disposed above the first platform 11, a second space is formed between the second platform 12 and the first platform 11, a second protruding portion 121 is disposed on a side of the first platform 11 close to the second platform 12, an extending direction of the second protruding portion 121 is a third direction, a second groove is disposed on a side of the second platform 12 close to the first platform 11, the second protruding portion 121 can be embedded into the second groove, and moves along the second groove along the third direction, and a side of the second platform 12 away from the first platform 11 is connected with the first clamping assembly 2; wherein, the length of the first platform 11 along the first direction is greater than the length of the second platform 12, and in the second space, the second protruding portion 121 is disposed at two ends of the first platform 11 near the inner wall of the second platform 12; the second protruding portion 121 includes a third guide rail 1211 with a top fixed to the second platform 12 and a fourth guide rail 1212 fixed to the first platform 11, a second sliding groove is formed at a side wall end of the third guide rail 1211 away from the second platform 12, a second slider fixed to a side of the fourth guide rail 1212 is formed at a side wall end of the fourth guide rail 1212 near the second platform 12, the third guide rail 1211 can slide along the second slider in a third direction in the second groove, and the second platform 12 can move along the third direction; the second groove is arranged above the fourth guide rail 1212, and can be used for embedding the fourth guide rail 1212; alternatively, the second slider may be plural.
Further, the second direction adjusting component 4 includes a second adjusting rod 41 sleeved outside the first adjusting rod, a second gear 43 is sleeved outside the first adjusting rod, a second rack 42 meshed with the second gear 43 is arranged in the second space, the extending direction of the second rack 42 is a third direction, and the side wall of the second rack 42 is connected with the second platform 12; when the second adjusting lever 41 rotates, the second platform 12 is driven to move along the third direction; wherein, a second adjusting wheel 44 is arranged at the top of the second adjusting rod 41, and the second adjusting wheel 44 is arranged between the first adjusting wheel 33 and the first platform 11; the pipe diameter of the second adjusting rod 41 is larger than that of the first adjusting rod, the length of the second adjusting rod is smaller than that of the first adjusting rod, and a space is reserved between the first adjusting rod and the second adjusting rod 41 so as to ensure that the second adjusting rod 41 is kept fixed when the first adjusting rod rotates; the second adjusting rod 41 is sleeved with the second gear 43, the second adjusting wheel 44 is rotated, the second supporting rod and the second gear 43 rotate, the second gear 43 is meshed with the second rack 42, and the second rack 42 and the second platform 12 are driven to move along the third direction; a third through hole is formed in the first platform 11 near the first adjusting wheel 33, the axial direction of the third through hole is a second direction, a second fixing piece 112 is arranged through the third through hole, an internal thread is formed in the third through hole, the second fixing piece 112 is a second screw rod provided with an external thread, the second screw rod passes through the third through hole and is in threaded connection with the third through hole, and the first screw rod can move along the second direction when rotated, so that the second platform is locked; the second platform 12 is provided with a fourth through hole away from the first adjusting wheel 33, the axial direction of the fourth through hole is in a second direction, a third fixing part 122 is arranged through the fourth through hole, the fourth through hole is provided with internal threads, the third fixing part 122 is a third screw rod provided with external threads, the third screw rod passes through the fourth through hole and is in threaded connection with the fourth through hole, and the third screw rod can move along the third direction after rotating, so that the first platform is locked.
Further, a third direction adjusting component 5 is connected to the end, away from the base body 1, of the first clamping component 2, and the end, away from the first clamping component 2, of the third direction adjusting component 5 is connected with the observation component 6; the third direction adjusting component 5 is used for driving the observation component 6 to drive the lens 61 to move along the second direction; wherein, one end of the observation component 6 close to the base body 1 is connected with a second clamping component, and one end of the first supporting part 7 close to the observation component 6 is connected with the second clamping component;
further, the third direction adjusting component comprises a first supporting portion 7, the first supporting portion 7 is connected with the first clamping component 2 near the end of the base body 1, a first opening is formed in the end, away from the first clamping component 2, of the first supporting portion 7, a third adjusting rod penetrates through the first opening, the extending direction of the third adjusting rod is in the third direction, a third gear is sleeved outside the third adjusting rod, a third rack is meshed with the end, away from the base body 1, of the gear, the extending direction of the third rack is in the second direction, the third rack is connected with the observing component 6 far away from the side, away from the base body 1, and the first supporting portion 7 can be driven to move along the second direction when the third adjusting rod rotates; the two ends of the third adjusting rod are provided with third adjusting wheels, the third adjusting wheels are provided with accurate scales, the third adjusting wheels are adjusted according to the scales to drive the third adjusting rods to rotate, the third gears are driven to be meshed with the third racks, and the first supporting portions 7 are enabled to move along the second direction.
Further, a second through hole is formed in the side, close to the base body 1, of the first supporting portion 7, the axial direction of the second through hole is the second direction, a first supporting column 71 is arranged through the second through hole, and the top end of the first supporting column 71 is connected with the first clamping assembly 2; the top end of the first support column 71 is hinged to the first clamping assembly 2, a fourth fixing member 73 is arranged at a position where the first clamping assembly 2 is hinged to the first support column 71, and the fourth fixing member 73 is used for fixing positions of the first clamping assembly 2 and the first support column 71; in some specific cases, the first supporting column 71 may be turned 180 degrees, and its position is fixed by the fourth fixing member 73.
Further, the end of the first supporting part 7 near the base body 1 is provided with a second opening communicated with the second through hole, a first fixing piece 72 is arranged through the second opening, and the first fixing piece 72 is used for fixing the first supporting part 7; specifically, the second opening is provided with an internal thread, the first fixing member 72 is a first screw rod provided with an external thread, the first screw rod passes through the second opening and is in threaded connection with the second opening, and the first screw rod can move along the third direction by rotating, so that the first supporting portion is locked.
Specific examples are set forth herein to illustrate the principles and embodiments of the present application, and the description of the examples above is only intended to assist in understanding the methods of the present application and their core ideas. The foregoing is merely a preferred embodiment of the present application, and it should be noted that, due to the limited nature of text, there is an objectively infinite number of specific structures, and that, to those skilled in the art, several improvements, modifications or changes can be made, and the above technical features can be combined in a suitable manner, without departing from the principles of the present utility model; such modifications, variations and combinations, or the direct application of the concepts and aspects of the utility model in other applications without modification, are intended to be within the scope of this application.
Claims (10)
1. An adjusting device of a fine tuning lens for observing the testing condition of a wafer, comprising:
the base comprises a base body (1), wherein the base body (1) is provided with a first mounting surface;
the first clamping assembly (2), one end of the first clamping assembly (2) is arranged on the base body (1), an observation assembly (6) is clamped on the side, away from the base body (1), of the first clamping assembly (2), and the lens (61) is arranged at the bottom of the observation assembly (6);
the first direction adjusting component (3), the first direction adjusting component (3) is arranged on the first installation surface, and the first direction adjusting component (3) is used for driving the first clamping component (2) to drive the observation component (6) to move along the first direction.
2. The device for adjusting a fine-tuning lens according to claim 1, wherein: the lens is characterized in that a first platform (11) is arranged above the first mounting surface, the first platform (11) is far away from the end of the lens (61) and is connected with the first clamping component (2), a first space is formed between the first platform (11) and the base body (1), a first protruding portion (111) is arranged on the first mounting surface, the extending direction of the first protruding portion (111) is in the first direction, a first groove is formed in the first platform (11) close to the first mounting surface side, the first protruding portion (111) can be embedded into the first groove and moves along the first groove in the first direction, and the first platform (11) is far away from the first mounting surface side and is connected with the first clamping component (2).
3. The device for adjusting a fine-tuning lens according to claim 2, wherein: the first platform (11) is provided with a first through hole, the axis of the first through hole is in a second direction, the second direction is perpendicular to the first direction, the first direction adjusting component (3) comprises a first adjusting rod penetrating through the first through hole, a first gear (31) sleeved outside the first adjusting rod is arranged in the first space, a first rack (32) meshed with the first gear (31) is further arranged in the first space, the extending direction of the first rack (32) is in the first direction, and the bottom of the first rack (32) is connected with the base body (1); when the first adjusting rod rotates, the first platform (11) can be driven to move along the first direction.
4. A device for adjusting a fine-tuning lens according to claim 3, wherein: the lens comprises a first direction adjusting component (4), and the first direction adjusting component (4) can enable the lens to move along a first direction; the first platform (11) is provided with a second direction-adjusting component (4), the end, away from the lens (61), of the first clamping component (2) is connected with the second direction-adjusting component (4), and the second direction-adjusting component (4) is used for driving the first clamping component (2) to drive the lens (61) to move along a third direction; the third direction is perpendicular to the first direction and the second direction.
5. The device of claim 4, wherein: the utility model discloses a clamping device for the electronic equipment, including first platform (11), second platform (12), first platform (11) top is equipped with second platform (12), second platform (12) with form the second space between first platform (11), first platform (11) are close to second platform (12) side is equipped with second bellying (121), the extending direction of second bellying (121) is the third direction, second platform (12) are close to first platform (11) side is equipped with the second recess, second bellying (121) can imbed in the second recess, and follow the second recess is followed the third direction removes, second platform (12) are kept away from first platform (11) side with first clamping component (2) are connected.
6. The device of claim 5, wherein: the second direction adjusting assembly (4) comprises a second adjusting rod (41) sleeved outside the first adjusting rod, a second gear (43) is sleeved outside the first adjusting rod, a second rack (42) meshed with the second gear (43) is arranged in the second space, the extending direction of the second rack (42) is a third direction, and the side wall of the second rack (42) is connected with the second platform (12); when the second adjusting rod (41) rotates, the second platform (12) can be driven to move along the third direction.
7. The device of claim 5, wherein: the end, far away from the base body (1), of the first clamping component (2) is connected with a third direction-adjusting component (5), and the end, far away from the first clamping component (2), of the third direction-adjusting component (5) is connected with the observation component (6); the third direction adjusting component (5) is used for driving the observation component (6) to drive the lens (61) to move along the second direction.
8. The device of claim 7, wherein: the third steering assembly (5) comprises a first supporting portion (7), the first supporting portion (7) is close to the end of the base body (1) and is connected with the first clamping assembly (2), the first supporting portion (7) is far away from the end of the first clamping assembly (2) and is provided with a first opening, a third adjusting rod penetrates through the first opening and is arranged in the third direction, a third gear is sleeved outside the third adjusting rod, the gear is far away from the end of the base body (1) and is meshed with a third rack, the extending direction of the third rack is in the second direction, the third rack is far away from the side of the base body (1) and is connected with the observing assembly (6), and the first supporting portion (7) can be driven to move along the second direction when the third adjusting rod rotates.
9. The device of claim 8, wherein: the first supporting part (7) is close to the side of the base body (1) and is provided with a second through hole, the axial direction of the second through hole is the second direction, a first supporting column (71) penetrates through the second through hole, and the top end of the first supporting column (71) is connected with the first clamping assembly (2).
10. The device for adjusting a fine-tuning lens according to claim 9, wherein: the first support part (7) is close to the end of the base body (1) and is provided with a second opening communicated with the second through hole, a first fixing piece (72) is arranged through the second opening, and the first fixing piece (72) is used for fixing the first support part (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222797024.7U CN219282792U (en) | 2022-10-24 | 2022-10-24 | Adjusting device capable of finely adjusting lens |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222797024.7U CN219282792U (en) | 2022-10-24 | 2022-10-24 | Adjusting device capable of finely adjusting lens |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219282792U true CN219282792U (en) | 2023-06-30 |
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ID=86934217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222797024.7U Active CN219282792U (en) | 2022-10-24 | 2022-10-24 | Adjusting device capable of finely adjusting lens |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219282792U (en) |
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2022
- 2022-10-24 CN CN202222797024.7U patent/CN219282792U/en active Active
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Address after: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee after: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region after: Zhong Guo Address before: 100010 0146, Floor 3, Building 1, Yard 1, Shuangyu South Street, Shunyi District, Beijing Patentee before: Beijing Ketai optical core semiconductor equipment Technology Co.,Ltd. Country or region before: Zhong Guo |
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| TR01 | Transfer of patent right |
Effective date of registration: 20240321 Address after: 528248, No. 16 Guangming Avenue, New Light Source Industrial Base, Shishan Town, Nanhai District, Foshan City, Guangdong Province (Residence application, multiple photos for one address) Patentee after: Foshan Xince Technology Co.,Ltd. Country or region after: Zhong Guo Address before: 101399 North Wenhuaying Village, Shunyi District, Beijing (No. 1, Shunchuang 2nd Road) Patentee before: Beijing Ruihuayu Semiconductor Equipment Co.,Ltd. Country or region before: Zhong Guo |