CN219265523U - Temperature measuring device for vacuum physical deposition - Google Patents
Temperature measuring device for vacuum physical deposition Download PDFInfo
- Publication number
- CN219265523U CN219265523U CN202223438656.0U CN202223438656U CN219265523U CN 219265523 U CN219265523 U CN 219265523U CN 202223438656 U CN202223438656 U CN 202223438656U CN 219265523 U CN219265523 U CN 219265523U
- Authority
- CN
- China
- Prior art keywords
- temperature measuring
- sleeve
- conductive plate
- measuring device
- physical deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a temperature measuring device for vacuum physical deposition, and relates to the technical field of vacuum coating; the socket comprises a sleeve, a fixed seat, a plug, a socket, a first conductive plate and a second conductive plate; the fixed seat and the plug are fixedly arranged on the first conductive plate side by side, the bottom end of the sleeve is fixedly arranged on the fixed seat, and a temperature measuring component is arranged in the sleeve and is electrically connected with the first conductive plate; the socket is fixed on the second conductive plate, and the plug and the socket are connected in an inserting way to realize the electrical connection of the first conductive plate and the second conductive plate; the beneficial effects of the utility model are as follows: the device has small structure, can be quickly replaced, and is suitable for being applied to a vacuum coating environment.
Description
Technical Field
The utility model relates to the technical field of vacuum coating, in particular to a temperature measuring device for vacuum physical deposition.
Background
The temperature measuring device for vacuum physical deposition is a temperature measuring device applied to vacuum coating, and is used for measuring the temperature of an evaporation boat in the vacuum coating process, and the temperature of the evaporation boat is related to the thickness of metal coated on a film, so that the coating process can be better controlled by knowing the temperature of the evaporation boat, but the temperature measuring device applied to the vacuum coating is lacking currently.
Disclosure of Invention
In order to overcome the defects in the prior art, the utility model provides the temperature measuring device for vacuum physical deposition, which has a small structure, can be quickly replaced and is suitable for being applied to a vacuum coating environment.
The technical scheme adopted for solving the technical problems is as follows: in the temperature measuring device for vacuum physical deposition, the improvement is that the temperature measuring device comprises a sleeve, a fixed seat, a plug, a socket, a first conducting plate and a second conducting plate;
the fixed seat and the plug are fixedly arranged on the first conductive plate side by side, the bottom end of the sleeve is fixedly arranged on the fixed seat, and a temperature measuring component is arranged in the sleeve and is electrically connected with the first conductive plate;
the socket is fixed on the second conductive plate, and the plug and the socket are connected in an inserting mode to realize the electric connection between the first conductive plate and the second conductive plate.
In the structure, the length of the sleeve is 5-10cm, and the diameter of the sleeve is 0.5-1cm.
In the above structure, the sleeve is made of any one of stainless steel, heat-resistant steel, high-temperature alloy, corrosion-resistant alloy and ceramic.
In the above structure, the temperature measuring component is a thermocouple or a thermal resistor.
In the above structure, a connection hole is provided at an end of the second conductive plate far from the socket, and is connected with an external temperature display device through the connection hole.
In the above structure, the fixing seat comprises a connecting plate, a mounting fixing base and a mounting fixing tube, wherein the mounting fixing base is fixedly provided with the connecting plate, the mounting fixing tube is welded on the connecting plate, and a fixing hole for inserting the sleeve is reserved in the mounting fixing tube.
In the above structure, a sealing material is filled between the inner wall of the fixing hole and the sleeve.
In the above structure, the mounting and fixing tube and the connecting plate are made of any one of stainless steel, heat-resistant steel, high-temperature alloy and corrosion-resistant alloy, and the mounting and fixing base is made of ceramic.
In the structure, the connecting plate is fixedly arranged on the mounting and fixing base through screws.
In the above structure, the first conductive plate and the second conductive plate are both stainless steel plates.
The beneficial effects of the utility model are as follows: compared with the traditional temperature measuring device, the device is smaller and more exquisite, so that the device is suitable for the vacuum coating environment; it can be disassembled and thus can be quickly replaced.
Drawings
Fig. 1 is a schematic perspective view of a temperature measuring device for vacuum physical deposition according to the present utility model.
Detailed Description
The utility model will be further described with reference to the drawings and examples.
The conception, specific structure, and technical effects produced by the present utility model will be clearly and completely described below with reference to the embodiments and the drawings to fully understand the objects, features, and effects of the present utility model. It is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments, and that other embodiments obtained by those skilled in the art without inventive effort are within the scope of the present utility model based on the embodiments of the present utility model. In addition, all the coupling/connection relationships referred to in the patent are not direct connection of the single-finger members, but rather, it means that a better coupling structure can be formed by adding or subtracting coupling aids depending on the specific implementation. The technical features in the utility model can be interactively combined on the premise of no contradiction and conflict.
Referring to fig. 1, the utility model discloses a temperature measuring device for vacuum physical deposition, specifically, the device comprises a sleeve 10, a fixing seat 20, a plug 30, a socket 40, a first conductive plate 50 and a second conductive plate 60; the fixed seat 20 and the plug 30 are fixedly arranged on the first conductive plate 50 side by side, the bottom end of the sleeve 10 is fixedly arranged on the fixed seat 20, and a temperature measuring component is arranged in the sleeve 10 and is electrically connected with the first conductive plate 50; in this embodiment, the length of the sleeve 10 is 8cm and the diameter is 0.8cm; however, in practical application, the length of the sleeve 10 is controlled to be 5-10cm, and the diameter of the sleeve 10 is controlled to be 0.5-1cm, which can meet the requirements, and only one preferred embodiment is provided in this example. By adopting the height, the temperature measuring device can be conveniently placed at the bottom of the evaporation boat to measure the temperature of the evaporation boat; therefore, the above-mentioned sleeve 10 is smaller and lighter due to the specific length and diameter, and is suitable for vacuum coating environment.
Further, the socket 40 is fixed on the second conductive plate 60, and the plug 30 is plugged with the socket 40 to electrically connect the first conductive plate 50 and the second conductive plate 60. In this embodiment, the plug 30 is plugged into the socket 40 to realize detachable connection with the socket 40, when the temperature measuring device needs to be replaced, the plug 30 is taken out of the socket 40, and the plug 30, the first conductive plate 50, the fixing seat 20 and the sleeve 10 are integrated into a structure, so that the part is replaced; therefore, the detachable structure can be quickly replaced.
In this embodiment, the temperature measuring component is a thermal resistor, and the thermal resistor is based on the thermal effect of the resistor to measure the temperature, that is, the characteristic that the resistance value of the resistor changes with the change of the temperature. Therefore, the temperature can be measured as long as the resistance change of the temperature-sensitive thermal resistor is measured. The metal thermal resistor and the semiconductor thermal resistor are mainly used. The resistance value and temperature of the metal thermal resistor can be generally expressed by the following approximate relation, namely, in the formula of Rt=Rt0 [ 1+alpha (t-t 0) ], rt is the resistance value at the temperature t; rt0 is a corresponding resistance value at a temperature t0 (normally t0=0 ℃); alpha is the temperature coefficient. The relation between the resistance value and the temperature of the semiconductor thermistor is Rt= AeB/t, wherein Rt is the resistance value when the temperature is t; A. b depends on the constants of the structure of the semiconductor material. In another embodiment, the temperature measuring component is a thermocouple; the working principle of the thermocouple is that one ends of two different homogeneous conductors (also called hot electrodes or thermocouple wires) are welded together, the other ends are connected with a ammeter to form a closed loop, and when the temperatures of the welded ends (also called measuring ends) and the ammeter ends (also called reference ends) are inconsistent, current passes through the loop, and the phenomenon is called Seebeck effect. In the above embodiment, the temperature measuring component is disposed in the sleeve 10, so as to avoid direct contact with high temperature, and has a certain protection effect on the temperature measuring component.
In addition, a connection hole 601 is provided at an end of the second conductive plate 60 remote from the socket 40, and is connected to an external temperature display device through the connection hole 601. Therefore, in the above-described embodiment, the temperature measurement of the evaporation boat can be performed by the temperature measuring assembly inside the sleeve 10, and in this process, the transmission of the electric signal is performed by the first conductive plate 50, the plug 30, the socket 40, and the second conductive plate 60, and the temperature of the vacuum coating can be displayed by the external temperature display device.
For the structure of the fixing base 20, the utility model provides a specific embodiment, the fixing base 20 comprises a connecting plate 203, a mounting fixing base 201 and a mounting fixing tube 202, and the connecting plate 203 is fixedly arranged on the mounting fixing base 201 through screws; the installation fixing tube 202 is welded on the connecting plate 203, and a fixing hole for inserting the sleeve 10 is reserved on the installation fixing tube 202; and a sealing material is filled between the inner wall of the fixing hole and the sleeve 10 to realize the sealing of the two.
In the above embodiment, the sleeve 10, the mounting and fixing tube 202, the connecting plate 203, the first conductive plate 50 and the second conductive plate 60 are all made of stainless steel. However, the material of the sleeve 10 may be any one of stainless steel, heat-resistant steel, high-temperature alloy, corrosion-resistant alloy, and ceramic; the material of the mounting fixing tube 202 and the connection plate 203 may be any one of stainless steel, heat-resistant steel, high-temperature alloy, and corrosion-resistant alloy. The mounting and fixing base 201 is made of ceramic, and the ceramic can withstand the high-temperature environment of vacuum coating.
Compared with the traditional temperature measuring device, the temperature measuring device for vacuum physical deposition is smaller, so that the temperature measuring device is suitable for a vacuum coating environment, and has lower price, thereby reducing cost; the ceramic structure is detachable, so that the ceramic structure can be quickly replaced, and is suitable for being applied to a vacuum coating environment.
While the preferred embodiment of the present utility model has been described in detail, the present utility model is not limited to the embodiments, and those skilled in the art can make various equivalent modifications or substitutions without departing from the spirit of the present utility model, and these equivalent modifications or substitutions are included in the scope of the present utility model as defined in the appended claims.
Claims (10)
1. The temperature measuring device for vacuum physical deposition is characterized by comprising a sleeve, a fixed seat, a plug, a socket, a first conducting plate and a second conducting plate;
the fixed seat and the plug are fixedly arranged on the first conductive plate side by side, the bottom end of the sleeve is fixedly arranged on the fixed seat, and a temperature measuring component is arranged in the sleeve and is electrically connected with the first conductive plate;
the socket is fixed on the second conductive plate, and the plug and the socket are connected in an inserting mode to realize the electric connection between the first conductive plate and the second conductive plate.
2. The temperature measuring device for vacuum physical deposition according to claim 1, wherein the length of the sleeve is 5-10cm, and the diameter of the sleeve is 0.5-1cm.
3. The temperature measuring device for vacuum physical deposition according to claim 1, wherein the sleeve is made of any one of stainless steel, heat-resistant steel, high-temperature alloy, corrosion-resistant alloy and ceramic.
4. The apparatus of claim 1, wherein the temperature measuring component is a thermocouple or a thermal resistor.
5. The temperature measuring device for vacuum physical deposition according to claim 1, wherein a connecting hole is provided at an end of the second conductive plate remote from the socket, and is connected to an external temperature display device through the connecting hole.
6. The temperature measuring device for vacuum physical deposition according to claim 1, wherein the fixing base comprises a connecting plate, a mounting fixing base and a mounting fixing tube, the connecting plate is fixedly arranged on the mounting fixing base, the mounting fixing tube is welded on the connecting plate, and a fixing hole for inserting a sleeve is reserved on the mounting fixing tube.
7. The apparatus according to claim 6, wherein a sealing material is filled between the inner wall of the fixing hole and the sleeve.
8. The temperature measuring device for vacuum physical deposition according to claim 6, wherein the mounting and fixing tube and the connecting plate are made of any one of stainless steel, heat-resistant steel, high-temperature alloy and corrosion-resistant alloy, and the mounting and fixing base is made of ceramic.
9. The temperature measuring device for vacuum physical deposition according to claim 6, wherein the connecting plate is fixedly mounted on the mounting and fixing base by screws.
10. The apparatus according to claim 1, wherein the first and second conductive plates are stainless steel plates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223438656.0U CN219265523U (en) | 2022-12-21 | 2022-12-21 | Temperature measuring device for vacuum physical deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223438656.0U CN219265523U (en) | 2022-12-21 | 2022-12-21 | Temperature measuring device for vacuum physical deposition |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219265523U true CN219265523U (en) | 2023-06-27 |
Family
ID=86864768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223438656.0U Active CN219265523U (en) | 2022-12-21 | 2022-12-21 | Temperature measuring device for vacuum physical deposition |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219265523U (en) |
-
2022
- 2022-12-21 CN CN202223438656.0U patent/CN219265523U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11802799B2 (en) | Temperature measuring device and method for determining temperature | |
| CN105371976A (en) | Thermal resistance temperature measuring device and temperature measuring method | |
| CN106768445B (en) | A kind of quick response temperature thermocouple | |
| CN103292861B (en) | For the preparation method of totally-enclosed pressure environment fluid level measuring gauge | |
| US2216375A (en) | Resistance thermometer | |
| CN219265523U (en) | Temperature measuring device for vacuum physical deposition | |
| CN113125048B (en) | Micro calorimeter capable of directly measuring thermocouple type power sensor and power reference system | |
| CN102507036A (en) | MMW (millimeter wave) power sensor and calorimeter provided with same | |
| US2849518A (en) | Temperature indicator | |
| CN203191029U (en) | Heating type thermocouple liquid level measurement sensor | |
| CN115701529A (en) | Temperature sensor assembly | |
| CN211347136U (en) | Thermal resistance sensor with cold end compensation function | |
| US4695793A (en) | Resistive sensing thermal device for current measurement | |
| CN215492121U (en) | Indirect temperature thermocouple | |
| CN112179943B (en) | Probe for measuring heat conductivity coefficient and preparation method thereof | |
| US1766148A (en) | Flow meter | |
| RU2700726C1 (en) | Heat flux sensor | |
| CN207664301U (en) | Platinum sensor private jack | |
| CN206709980U (en) | A kind of thermocouple temperature sensor of ceramic seal heads pipe built-in electrical insulation | |
| CN206353056U (en) | Thermocouple temperature measuring apparatus | |
| CN103162768A (en) | Preparation method of heating type thermocouple liquid level measurement sensor | |
| US20200378840A1 (en) | Sealing Device for a Cold-End Part of a Thermocouple Wire Arrangement with a Mineral-Insulated Cable and Thermocouple | |
| CN211504442U (en) | Protection device of thermal resistor | |
| CN220106984U (en) | Thermocouple sealing connector | |
| CN208860493U (en) | Simple type thermocouple |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |