CN219260269U - Graphite crucible and replaceable device for preventing quartz crucible from swelling and deforming - Google Patents
Graphite crucible and replaceable device for preventing quartz crucible from swelling and deforming Download PDFInfo
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- CN219260269U CN219260269U CN202320792005.7U CN202320792005U CN219260269U CN 219260269 U CN219260269 U CN 219260269U CN 202320792005 U CN202320792005 U CN 202320792005U CN 219260269 U CN219260269 U CN 219260269U
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Abstract
The application provides a graphite crucible and prevent interchangeable device of quartz crucible swell deformation relates to single crystal production facility field, and it includes a plurality of graphite replacement spare, and every graphite replacement spare all is equipped with the air vent, and a plurality of mounting grooves have been seted up to the pot body, and the mounting groove runs through the bottom of the pot body, and a plurality of graphite replacement spare one-to-one sets up in a plurality of mounting grooves, and the air vent is used for supplying impurity gas to escape from the pot body bottom. Through setting up graphite replacement spare and mounting groove, at graphite crucible bearing quartz crucible's in-process, impurity gas that produces between graphite crucible and the quartz crucible can escape through the air vent on the graphite replacement spare, and can not gather in the gap between quartz crucible and graphite crucible, lead to quartz crucible bulge, and because graphite replacement spare can dismantle in the mounting groove, then after graphite replacement spare is corroded to a certain extent, can directly change graphite replacement spare, need not to change whole graphite crucible, improves graphite crucible's life.
Description
Technical Field
The application relates to the field of single crystal production equipment, in particular to a graphite crucible and a replaceable device for preventing the quartz crucible from swelling and deforming.
Background
The graphite crucible commonly used in the current crystal pulling furnace is split and consists of at least two identical crucible wall assemblies and a crucible bottom assembly matched with the crucible wall assemblies. The graphite crucible has long service life and can be used as a supporting component of the quartz crucible. The seam between the two crucible walls is beneficial to the escape of gas generated by impurities in the process of heating the quartz crucible.
However, in the crystal pulling process, both the quartz crucible and the graphite crucible are in a high-temperature state, and particularly, the quartz crucible and the graphite crucible are in a close fit state when being contacted for the first time, when the quartz crucible is softened at a high temperature, impurity gases at other parts of a joint can not escape in time, deformation and bulge of the quartz crucible can be caused after accumulation, and the accumulated impurity gases seriously corrode the graphite crucible, so that the graphite crucible is damaged and needs to be replaced periodically.
Therefore, a new device for preventing the quartz crucible from swelling and deforming is needed, so that impurity gas can be discharged from a gap between the quartz crucible and the graphite crucible in time, the aggregation of the impurity gas is reduced, and the service life of the graphite crucible is prolonged.
Disclosure of Invention
In view of this, the embodiments of the present disclosure provide a graphite crucible and a replaceable device for preventing the quartz crucible from swelling and deforming, which can timely discharge impurity gas from a gap between the quartz crucible and the graphite crucible, reduce aggregation of the impurity gas, and improve the service life of the graphite crucible.
The embodiment of the specification provides the following technical scheme:
the embodiment of the specification provides a graphite crucible, including a plurality of graphite replacement spare, every the air vent has all been run through to be seted up to graphite replacement spare, a plurality of mounting grooves have been seted up to the bottom of the pot body, the mounting groove runs through the bottom of the pot body, a plurality of graphite replacement spare one-to-one sets up in a plurality of mounting grooves, the air vent is used for supplying impurity gas to follow the escape of pot body bottom.
Through above-mentioned technical scheme, set up graphite replacement spare and mounting groove, at graphite crucible bearing quartz crucible's in-process, impurity gas that produces between graphite crucible and the quartz crucible can escape through the air vent on the graphite replacement spare, and can not gather in the gap between quartz crucible and graphite crucible, lead to quartz crucible bulge, and because graphite replacement spare can dismantle in the mounting groove, then can directly change graphite replacement spare after the graphite replacement spare is corroded to a certain extent, need not to change whole graphite crucible, improve graphite crucible's life.
Preferably, the pot body comprises a plurality of mutually spliced crucible walls, and the plurality of mounting grooves are distributed at specific angle intervals at the bottoms of the plurality of crucible walls.
Preferably, the pot body is formed by splicing two symmetrically distributed crucible walls, and the plurality of mounting grooves are uniformly distributed at intervals on the circumference at the bottoms of the two crucible walls.
Preferably, at least two mounting grooves are symmetrically distributed on a joint formed by splicing two crucible walls, and the mounting grooves positioned on the joint are formed by splicing half grooves positioned on two sides of the joint.
Through above-mentioned technical scheme, because graphite crucible in-service use, the overall dimension of seam is very little, if do not set up extra gas outlet, the impurity gas that mobility is stronger flows on the seam entirely, can cause the seam to corrode seriously, consequently set up mounting groove and graphite replacement in seam department, increase extra gas outlet, derive gas from the air vent on the graphite replacement, reduce impurity and pass through the seam and discharge to reduce the corruption of impurity gas to the seam, improve the holistic life of graphite crucible.
Preferably, the bottom of the pot body is provided with round corners, and the round corners of the bottom of the pot body of the plurality of mounting grooves are uniformly distributed at intervals in the circumferential direction.
Through above-mentioned technical scheme, evenly set up the mounting groove in fillet department to carry out the air guide to quartz crucible and the most serious position of graphite crucible impurity accumulation, reduce graphite crucible and quartz crucible and the damage emergence that leads to because of impurity gas accumulates, improve graphite crucible and quartz crucible's life.
Preferably, the whole installation groove is in a truncated cone shape or a prismatic table shape;
one end of the mounting groove, which is positioned in the pot body, is a notch with larger area, and one end of the mounting groove, which is positioned outside the pot body, is a notch with smaller area;
the shape of the graphite replacement piece is matched with the shape of the mounting groove.
Through above-mentioned technical scheme, all set up mounting groove and graphite replacement spare into that be close to the inside one end of pot body big, be close to the outside one end of pot body little to make graphite replacement spare install behind the mounting groove, thereby be difficult for the mounting groove to be close to the outside one end of pot body and deviate from.
Preferably, one end of the graphite replacement part, which is positioned in the pot body, is provided with a first cambered surface, and the radian of the first cambered surface is consistent with the radian of the inner wall of the pot body, which is positioned at the periphery of the graphite replacement part.
Through the technical scheme, the radian of the inner wall of the pot body is kept consistent, so that the pot body has better supporting stability in the process of supporting the quartz crucible.
Preferably, one end of the graphite replacement part, which is positioned outside the pot body, is provided with a second cambered surface, and the radian of the second cambered surface is consistent with that of the outer wall of the pot body, which is positioned at the periphery of the graphite replacement part.
Through above-mentioned technical scheme for the both ends of graphite replacement spare all can be with the better laminating of pot body, improve the structural stability after the installation of graphite replacement spare.
Preferably, the number of the mounting grooves is 8, the 8 mounting grooves are all positioned on the circumference of one concentric circle, and the interval between the adjacent mounting grooves is 45 degrees.
The embodiment of the specification also provides a replaceable device for preventing the quartz crucible from swelling and deforming, which comprises any one of the graphite crucible, wherein the quartz crucible is arranged in the pot body.
Compared with the prior art, the beneficial effects that above-mentioned at least one technical scheme that this description embodiment adopted can reach include at least:
through setting up graphite replacement spare and mounting groove, at graphite crucible bearing quartz crucible's in-process, impurity gas that produces between graphite crucible and the quartz crucible can escape through the air vent on the graphite replacement spare, and can not gather in the gap between quartz crucible and graphite crucible, lead to quartz crucible bulge, and because graphite replacement spare can dismantle in the mounting groove, then after graphite replacement spare is corroded to a certain extent, can directly change graphite replacement spare, need not to change whole graphite crucible, improves graphite crucible's life.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a three-view of a graphite replacement part in the present application;
FIG. 2 is a schematic view of the overall structure in an embodiment of the present application;
fig. 3 is a schematic view of the overall structure at another view angle in the embodiment of the present application.
Reference numerals: 1. a pot body; 2. a graphite replacement; 3. a vent hole; 4. round corners; 5. a mounting groove; 6. a crucible wall; 7. a joint; 8. a quartz crucible.
Detailed Description
Embodiments of the present application are described in detail below with reference to the accompanying drawings.
Other advantages and effects of the present application will become apparent to those skilled in the art from the present disclosure, when the following description of the embodiments is given by way of specific examples. It will be apparent that the described embodiments are only some, but not all, of the embodiments of the present application. The present application may be embodied or carried out in other specific embodiments, and the details of the present application may be modified or changed from various points of view and applications without departing from the spirit of the present application. It should be noted that the following embodiments and features in the embodiments may be combined with each other without conflict. All other embodiments, based on the embodiments herein, which would be apparent to one of ordinary skill in the art without making any inventive effort, are intended to be within the scope of the present application.
It is noted that various aspects of the embodiments are described below within the scope of the following claims. It should be apparent that the aspects described herein may be embodied in a wide variety of forms and that any specific structure and/or function described herein is merely illustrative. Based on the present application, one skilled in the art will appreciate that one aspect described herein may be implemented independently of any other aspect, and that two or more of these aspects may be combined in various ways. For example, apparatus may be implemented and/or methods practiced using any number and aspects set forth herein. In addition, such apparatus may be implemented and/or such methods practiced using other structure and/or functionality in addition to one or more of the aspects set forth herein.
It should also be noted that the illustrations provided in the following embodiments merely illustrate the basic concepts of the application by way of illustration, and only the components related to the application are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complicated.
In addition, in the following description, specific details are provided in order to provide a thorough understanding of the examples. However, it will be understood by those skilled in the art that the present utility model may be practiced without these specific details.
In the crystal pulling process, both the quartz crucible and the graphite crucible are in a high-temperature state, and particularly in a close fitting state between the quartz crucible and the graphite crucible under the first contact, when the quartz crucible is softened at a high temperature, impurity gas at other parts of a joint is removed, the impurity gas cannot escape timely, deformation and bulge of the quartz crucible can be caused after accumulation, the accumulated impurity gas can seriously corrode the graphite crucible, the graphite crucible is damaged, and periodic replacement is needed.
Based on this, the embodiment of the present specification proposes a processing scheme: through slotting on the crucible wall of the graphite crucible, arranging the replacement part of the graphite material in the slot, and punching on the replacement part of the graphite material, impurity gas generated in the heating process of the graphite crucible and the quartz crucible can escape from the holes formed on the replacement part of the graphite material, so that the accumulation of the impurity gas is reduced, the corrosion of the impurity gas to the graphite crucible is reduced, and the service life of the graphite crucible is prolonged.
The following describes the technical solutions provided by the embodiments of the present application with reference to the accompanying drawings.
As shown in fig. 1 to 3, the embodiment of the present specification provides a graphite crucible, which includes a pot body 1 and a plurality of graphite replacement pieces 2, each graphite replacement piece 2 is in a prismatic table shape, and ventilation holes 3 are provided through two ends of the graphite replacement piece 2 in the center line direction.
In other embodiments, the graphite replacement part 2 as a whole may also be frustoconical.
The bottom of the pot body 1 is provided with a round corner 4, a plurality of mounting grooves 5 are formed in the round corner 4 of the bottom of the pot body 1, and two ends of each mounting groove 5 penetrate through the inner wall of the pot body 1 and the outer wall of the pot body 1 respectively. The plurality of mounting grooves 5 are spaced apart at specific angles on the circumference of one concentric circle. The plurality of mounting grooves 5 are in one-to-one correspondence with the plurality of graphite substitutes 2, and the graphite substitutes 2 are embedded in the corresponding mounting grooves 5.
In other embodiments, the mounting groove 5 may be further formed at a non-round corner 4 or other portions of the bottom of the pan body 1, specifically according to actual requirements, which is not limited herein.
Further, the pot body 1 is composed of two symmetrically distributed crucible walls 6 spliced with each other, and the plurality of mounting grooves 5 are uniformly divided into two groups and are respectively arranged on the bottoms of the two crucible walls 6.
In other embodiments, the pot 1 may also consist of three or other numbers of crucible walls 6.
Further, the number of the installation grooves 5 is 8, and two installation grooves 5 are symmetrically arranged on a joint 7 formed by splicing two crucible walls 6. Two half grooves are formed in the bottom of the crucible wall 6, close to the joint 7, along the extending direction of the joint 7, and the two half grooves are symmetrically distributed about the center of the joint 7. The mounting groove 5 at the joint 7 is formed by half grooves on both sides of the joint 7.
It should be noted that, in the actual use process, the two crucible walls 6 are spliced tightly, and the width dimension of the seam 7 is far smaller than the notch dimension of the installation groove 5.
The 8 mounting grooves 5 are uniformly distributed at intervals along the circumferential direction on the circumference of a concentric circle at the bottom of the pot body 1 formed by splicing the two crucible walls 6, and the interval between the adjacent mounting grooves 5 is 45 degrees.
In other embodiments, the number of the mounting grooves 5 may be 6, 10 or other, and the specific angles between the adjacent mounting grooves 5 may be adjusted according to the number or positions of the mounting grooves 5, and may be uniformly spaced or may be arbitrarily angularly spaced.
The whole mounting groove 5 is prismatic, and the specific size and shape of the mounting groove 5 are matched with the graphite replacement part 2 for embedding the graphite replacement part 2. One end of the installation groove 5 positioned in the pot body 1 is a notch with larger area, and one end of the installation groove 5 positioned outside the pot body 1 is a notch with smaller area. And when the graphite replacement part 2 is embedded into the mounting groove 5, the graphite replacement part 2 cannot be separated from the outside of the pot body 1, and the structure stability is good.
Further, one end of the graphite replacement part 2 positioned in the pot body 1 is provided with a first cambered surface, and the radian of the first cambered surface is consistent with that of the inner wall of the pot body 1 positioned at the periphery of the graphite replacement part 2. One end of the graphite replacement part 2 positioned outside the pot body 1 is provided with a second cambered surface, and the radian of the second cambered surface is consistent with that of the outer wall of the pot body 1 positioned at the periphery of the graphite replacement part 2. Therefore, after the graphite replacement part 2 is embedded into the mounting groove 5, the two ends of the graphite replacement part 2 are respectively flush with or attached to the inner wall and the outer wall of the pot body 1, so that the whole structure of the pot body 1 is smoother, and the quartz crucible 8 can be better supported.
In this embodiment, the vent hole 3 on the graphite substitute 2 has a cylindrical shape, and the axis of the vent hole 3 coincides with the center line of the graphite substitute 2.
In other embodiments, the vent holes 3 on the graphite replacement part 2 may also be truncated cone-shaped.
In the actual use, through setting up graphite replacement spare 2 and mounting groove 5, impurity gas that produces between the pot body 1 and the quartz crucible 8 can escape through the air vent 3 on the graphite replacement spare 2, and can not gather in the gap between quartz crucible 8 and the pot body 1, lead to quartz crucible 8 swell, and because graphite replacement spare 2 can dismantle in the mounting groove 5, then after graphite replacement spare 2 is corroded to a certain extent, can directly change graphite replacement spare 2, need not to change whole pot body 1, improve the holistic life of graphite crucible.
The embodiment of the present specification also provides an alternative device for preventing the quartz crucible from swelling and deforming, which comprises any one of the graphite crucibles, and the quartz crucible 8 is arranged in the pot body 1.
In this specification, each embodiment is described in a progressive manner, and identical and similar parts of each embodiment are all referred to each other, and each embodiment focuses on differences from other embodiments.
The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present application should be covered in the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.
Claims (10)
1. The utility model provides a graphite crucible, its characterized in that, including the pot body (1) and a plurality of graphite replacement spare (2), every air vent (3) have all been run through to be seted up in graphite replacement spare (2), a plurality of mounting grooves (5) have been seted up to the bottom of the pot body (1), mounting groove (5) run through the bottom of the pot body (1), a plurality of graphite replacement spare (2) one-to-one sets up in a plurality of mounting grooves (5), air vent (3) are used for supplying impurity gas to follow the escape of pot body (1) bottom.
2. Graphite crucible according to claim 1, characterized in that the pot body (1) comprises a number of mutually joined crucible walls (6), and that the number of mounting grooves (5) are distributed at specific angular intervals at the bottom of the number of crucible walls (6).
3. Graphite crucible according to claim 2, characterized in that the pot body (1) is formed by splicing two symmetrically distributed crucible walls (6), and that several mounting grooves (5) are evenly distributed at intervals in the circumferential direction at the bottoms of the two crucible walls (6).
4. A graphite crucible according to claim 3, characterized in that at least two mounting grooves (5) are symmetrically distributed on a joint (7) formed by the joining of two crucible walls (6), and that the mounting grooves (5) located on the joint (7) are formed by joining half grooves located on both sides of the joint (7).
5. Graphite crucible according to any one of claims 1-4, characterized in that the bottom of the pot (1) is provided with rounded corners (4), and that the rounded corners (4) of the number of mounting grooves (5) at the bottom of the pot (1) are evenly spaced circumferentially.
6. Graphite crucible according to claim 5, characterized in that the installation groove (5) is entirely in the shape of a truncated cone or a truncated pyramid;
one end of the mounting groove (5) positioned in the pot body (1) is a notch with larger area, and one end of the mounting groove positioned outside the pot body (1) is a notch with smaller area;
the shape of the graphite replacement piece (2) is matched with the shape of the mounting groove (5).
7. The graphite crucible according to claim 6, wherein one end of the graphite replacing member (2) located inside the pot body (1) is provided with a first cambered surface, and the radian of the first cambered surface is consistent with the radian of the inner wall of the pot body (1) located at the periphery of the graphite replacing member (2).
8. The graphite crucible according to claim 7, wherein one end of the graphite replacing member (2) located outside the pot body (1) is provided with a second arc surface, and the arc of the second arc surface is consistent with the arc of the outer wall of the pot body (1) located at the periphery of the graphite replacing member (2).
9. Graphite crucible according to claim 4, characterized in that the mounting grooves (5) are provided with 8 in total, and that the 8 mounting grooves (5) are all located on the circumference of one concentric circle, the spacing between adjacent mounting grooves (5) being 45 degrees.
10. A replaceable device for preventing bulging deformation of a quartz crucible, characterized by comprising a graphite crucible as claimed in any one of the preceding claims 1-9, wherein the inside of the pot body (1) is provided with a quartz crucible (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320792005.7U CN219260269U (en) | 2023-04-10 | 2023-04-10 | Graphite crucible and replaceable device for preventing quartz crucible from swelling and deforming |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320792005.7U CN219260269U (en) | 2023-04-10 | 2023-04-10 | Graphite crucible and replaceable device for preventing quartz crucible from swelling and deforming |
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| Publication Number | Publication Date |
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| CN219260269U true CN219260269U (en) | 2023-06-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202320792005.7U Active CN219260269U (en) | 2023-04-10 | 2023-04-10 | Graphite crucible and replaceable device for preventing quartz crucible from swelling and deforming |
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| CN (1) | CN219260269U (en) |
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