CN219260266U - Cooling device of single crystal furnace - Google Patents
Cooling device of single crystal furnace Download PDFInfo
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- CN219260266U CN219260266U CN202223301254.6U CN202223301254U CN219260266U CN 219260266 U CN219260266 U CN 219260266U CN 202223301254 U CN202223301254 U CN 202223301254U CN 219260266 U CN219260266 U CN 219260266U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
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Abstract
The utility model belongs to the technical field of cooling of single crystal furnaces, and particularly relates to a cooling device of a single crystal furnace, which comprises a lifting driving component arranged on a furnace cover, a lifting rod extending into a furnace barrel after penetrating through a furnace cover from the lifting driving component, and an argon cooling component; the lifting driving assembly lifts the thermal field assembly in the furnace barrel through the lifting rod, so that the thermal field assembly forms a heat dissipation gap in the vertical direction. The argon cooling assembly comprises an argon supply pipeline extending to the heat dissipation gap, and the argon supply pipeline supplies argon to the inner side of the thermal field assembly through the heat dissipation gap. In the cooling process of the single crystal furnace, the lifting driving assembly drives the lifting rod to lift the thermal field assembly, so that a heat dissipation gap is formed in the vertical direction of the thermal field assembly, argon is supplied to the inner side of the thermal field assembly through the argon supply pipeline by the argon cooling assembly, the argon can enter the thermal field assembly through the heat dissipation gap, and the heat dissipation speed of the thermal field assembly can be accelerated by utilizing the argon cooling assembly to cooperate with the heat dissipation gap.
Description
Technical Field
The disclosure belongs to the technical field of cooling of single crystal furnaces, and particularly relates to a cooling device of a single crystal furnace.
Background
After the crystal pulling of the single crystal furnace is finished, the furnace can be disassembled only after the furnace is stopped and cooled. Because the temperature of the single crystal furnace in the crystal pulling process is high, the heat preservation effect in the furnace is better, if the crystal pulling furnace is naturally cooled, the furnace can be stopped for too long, and the production efficiency is seriously affected.
For this reason prior art sets up hoisting device on single crystal growing furnace in order to accelerate the heat dissipation, hoisting device's lift drive assembly sets up on the stove lid, hoisting device's lifting rod stretches into stove section of thick bamboo inside and thermal field subassembly connection. In the cooling process of the single crystal furnace, the lifting driving assembly is used for driving the lifting rod to lift the thermal field assembly, so that a heat dissipation gap is formed in the vertical direction by the thermal field assembly, heat in the thermal field assembly can be dissipated outwards through the heat dissipation gap, the cooling speed of the thermal field assembly is increased, and the furnace stopping time is shortened.
But the means for accelerating heat dissipation is single by arranging the lifting device on the single crystal furnace, and the heat dissipation speed of the single crystal furnace is still slow.
Disclosure of Invention
In order to improve the heat dissipation speed of the single crystal furnace, the disclosure provides a cooling device of the single crystal furnace, wherein the cooling device is provided with an argon cooling assembly matched with a heat dissipation gap to cool a thermal field assembly, so that the problem of low heat dissipation speed of the single crystal furnace is solved.
The embodiment of the disclosure provides a cooling device of a single crystal furnace, which comprises a lifting driving component arranged on a furnace cover and a lifting rod extending into a furnace barrel after penetrating through the furnace cover from the lifting driving component;
the lifting driving assembly lifts the thermal field assembly in the furnace cylinder through the lifting rod, so that a heat dissipation gap is formed by the thermal field assembly in the vertical direction;
the device also comprises an argon cooling assembly; the argon cooling assembly comprises an argon supply pipeline extending to the heat dissipation gap, and the argon supply pipeline supplies argon to the inner side of the thermal field assembly through the heat dissipation gap.
In some embodiments, the argon cooling assembly further comprises a cooling switch disposed at an inlet end of the argon supply pipe, the cooling switch being turned on after the lift rod lifts the thermal field assembly.
In some embodiments, the thermal field assembly comprises a thermal insulation cylinder and a thermal insulation soft felt wrapped outside the thermal insulation cylinder, wherein the thermal insulation soft felt comprises at least two soft felt layers arranged up and down;
the lifting rod lifts one of the soft felt layers located at the upper portion.
In some embodiments, the outlet end of the argon gas supply pipe penetrates through the side wall of the heat preservation cylinder.
In some embodiments, the argon gas supply pipe penetrates the heat-insulating cylinder from the bottom of the heat-radiating gap.
In some embodiments, a charging barrel is arranged on the side wall of the furnace barrel, and a charging cover plate is arranged at the charging end of the charging barrel to seal the charging barrel; and the air inlet end of the argon gas supply pipeline is arranged on the feeding cover plate.
In some embodiments, the lifting drive assembly comprises a lifting slide and a motor for driving the slide to move; the sliding block is connected with the top of the lifting rod through a bracket so as to drive the lifting rod to move in the vertical direction.
In some embodiments, a through hole is formed in the furnace cover, and the lifting rod is vertically movably arranged in the through hole in a penetrating manner;
the part of the lifting rod above the furnace cover is sleeved with a corrugated pipe, the upper end of the corrugated pipe is connected with the bracket, and the lower end of the corrugated pipe is connected with the furnace cover; the through hole is positioned at the inner side of the corrugated pipe.
In some embodiments, a hook is provided at the bottom of the lifting bar, the hook lifting the soft felt layer from the bottom of the soft felt layer.
In some embodiments, the lifting rod is hollow for introducing a cooling fluid.
In the cooling process of the single crystal furnace, the lifting driving assembly drives the lifting rod to lift the thermal field assembly, so that a heat dissipation gap is formed in the vertical direction by the thermal field assembly, and heat in the thermal field assembly can be dissipated outwards through the heat dissipation gap, so that the cooling speed of the thermal field assembly is increased. After the lifting driving assembly lifts the thermal field assembly, the argon cooling assembly supplies argon to the inner side of the thermal field assembly through the argon supply pipeline, so that the argon can enter the thermal field assembly through the heat dissipation gap, and the heat dissipation speed of the thermal field assembly can be accelerated by utilizing the argon cooling assembly to be matched with the heat dissipation gap.
Drawings
FIG. 1 is a schematic cross-sectional view showing a cooling apparatus according to the present embodiment mounted on a single crystal furnace;
fig. 2 is a schematic diagram showing an assembly structure of the cooling device and the furnace cover according to the present embodiment.
In the drawings, a furnace vessel 10; a furnace cover 11; a lift drive assembly 20; a motor 21; a slider 22; a bracket 23; a bellows 24; a lifting lever 30; a hook 31; an argon gas supply line 40; a cooling switch 41; a thermal insulation cylinder 50; a heat-insulating soft felt 51; a soft felt layer 52; a charging barrel 60; a charging cover 61.
Detailed Description
In order to make the objects, technical solutions and advantages of the present disclosure more apparent, the present disclosure will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present disclosure.
It should be noted that the illustrations provided in the present embodiment are merely schematic illustrations of the basic idea of the present utility model.
The structures, proportions, sizes, etc. shown in the drawings attached hereto are for illustration purposes only and should not be construed as limiting the utility model to the extent that it can be practiced, since modifications, changes in the proportions, or otherwise, used in the practice of the utility model, are particularly adapted to the specific details of construction and the use of the utility model, without departing from the spirit or essential characteristics thereof, which fall within the scope of the utility model as defined by the appended claims.
References in this specification to orientations or positional relationships as "upper", "lower", "left", "right", "intermediate", "longitudinal", "transverse", "horizontal", "inner", "outer", "radial", "circumferential", etc., are based on the orientation or positional relationships shown in the drawings, are also for convenience of description only, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore are not to be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
As shown in fig. 1, the present disclosure provides a cooling device for a single crystal furnace, comprising a lifting driving assembly 20 arranged on a furnace cover 11, a lifting rod 30 extending into a furnace barrel 10 after penetrating through the furnace cover 11 from the lifting driving assembly 20, and an argon cooling assembly; the elevation driving assembly 20 lifts the thermal field assembly within the furnace vessel 10 by the lifting bar 30 such that the thermal field assembly forms a heat dissipation gap in the vertical direction. The argon cooling assembly includes an argon supply pipe 40 extending to the heat dissipation gap, and the argon supply pipe 40 supplies argon to the inside of the thermal field assembly through the heat dissipation gap.
In the cooling process of the single crystal furnace, the lifting driving assembly 20 drives the lifting rod 30 to lift the thermal field assembly, so that a heat dissipation gap is formed in the vertical direction by the thermal field assembly, and heat in the thermal field assembly can be dissipated outwards through the heat dissipation gap, so that the cooling speed of the thermal field assembly is increased. After the lifting driving assembly 20 lifts the thermal field assembly, the argon cooling assembly supplies argon to the inner side of the thermal field assembly through the argon supply pipeline 40, so that the argon can enter the thermal field assembly through the heat dissipation gap, and the heat dissipation speed of the thermal field assembly can be accelerated by utilizing the argon cooling assembly to cooperate with the heat dissipation gap.
The thermal field assembly of this embodiment includes a thermal insulation cylinder 50 and a thermal insulation soft felt 51 wrapped outside the thermal insulation cylinder 50, and the thermal insulation soft felt 51 includes at least two soft felt layers 52 arranged up and down. The lifting bar 30 of the present embodiment lifts up the upper soft felt layer 52 so that the heat insulation soft felt 51 forms a heat dissipation gap. It should be noted that, the thermal insulation barrel 50 of the present embodiment is preferably a graphite thermal insulation barrel 50, the thermal field assembly of the present embodiment is not limited to the structure described in the present embodiment, the lifting rod 30 is not limited to lifting the thermal insulation soft felt 51 in the thermal field assembly, and the thermal insulation barrel 50 or other components of the thermal field assembly may be lifted, so that the thermal field assembly forms a heat dissipation gap in the vertical direction.
Since the lifting rod 30 of the present embodiment is used for lifting the soft felt layer 52, and the argon gas supply pipe 40 cannot directly supply argon gas to the inner side of the thermal field assembly, the air outlet end of the argon gas supply pipe 40 of the present embodiment penetrates through the side wall of the thermal insulation cylinder 50, so that the argon gas can be directly introduced into the thermal insulation cylinder 50. Specifically, the argon gas supply line 40 preferably extends through the insulation drum 50 from the bottom of the heat dissipation gap to avoid the argon gas cooling line from interfering with the lifting bar 30 to lift the soft felt layer 52.
When the argon gas cooling pipe can directly supply argon gas to the inner side of the thermal field assembly through the heat dissipation gap, the argon gas cooling pipe does not penetrate through parts of the thermal field assembly. For example, in some embodiments of the thermal field assembly, the thermal insulation barrel 50 is configured as a plurality of barrels layered up and down, and when the lift rod 30 is lifted up the barrels, the argon gas cooling line can supply argon gas directly to the inside of the thermal field assembly through the heat dissipation gap formed by the thermal insulation barrel 50.
The side wall of the furnace cylinder 10 of the embodiment is provided with a charging cylinder 60, and the charging end of the charging cylinder 60 is provided with a charging cover plate 61 for sealing the charging cylinder. The inlet end of the argon gas supply pipe 40 is arranged on the charging cover plate 61, so that the argon gas supply pipe 40 can extend into the furnace cylinder 10 along the charging cylinder 60, and holes on the furnace cylinder 10 are avoided. In some embodiments, the charging barrel 60 is not provided on the side wall of the furnace barrel 10, and optionally, the side wall of the furnace barrel 10 is directly perforated for the argon gas supply pipe 40 to extend to the heat dissipation gap.
As shown in fig. 2, in the present embodiment, the elevation driving assembly 20 includes an elevating slider 22 and a motor 21 driving the slider 22 to move; the slider 22 is connected to the top of the lift bar 30 through a bracket 23 to drive the lift bar 30 to move in the vertical direction. Specifically, the furnace cover 11 is provided with a through hole, and the lifting rod 30 is inserted into the through hole, so that the lifting rod 30 can move along the axial direction of the through hole relative to the furnace cover 11. The part of the lifting rod 30 above the furnace cover 11 is sleeved with a corrugated pipe 24, the upper end of the corrugated pipe 24 is connected with a bracket 23, and the lower end of the corrugated pipe 24 is connected with the furnace cover 11; the through holes are located inside the bellows 24 to prevent the inside of the furnace vessel 10 from communicating with the outside through the gap between the lifting rod 30 and the through holes, ensuring tightness. Since the means for driving the lifting rod 30 to lift the thermal field assembly by the lifting assembly is the prior art, the description of the embodiment is omitted.
The lifting rod 30 of the present embodiment is hollow for introducing the cooling liquid. The cooling liquid is introduced into the lift rod 30 to help increase the cooling rate of the interior of the furnace vessel 10. The bottom of the lifting rod 30 of the embodiment is provided with the hook 31, and the hook 31 supports the soft felt layer 52 from the bottom of the soft felt layer 52, so as to ensure that the lifting rod 30 can lift the soft felt layer 52, and further the heat insulation soft felt 51 forms a heat dissipation gap. In some embodiments, the brackets 23 may optionally be provided on the hooks 31 to connect with the side walls of the soft felt layer 52.
It should be noted that, since argon gas is required to be supplied by the argon gas supply device during the crystal pulling process, the argon gas of the argon gas cooling assembly of the embodiment may be selectively supplied by the argon gas supply device, and the argon gas cooling assembly of the embodiment further includes a cooling switch 41 disposed at the air inlet end of the argon gas supply pipe 40, and the cooling switch 41 is turned on after the lifting rod 30 lifts the thermal field assembly.
The technical features of the above embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The foregoing examples represent only a few embodiments of the present disclosure, which are described in more detail and are not to be construed as limiting the scope of the utility model. It should be noted that variations and modifications can be made by those skilled in the art without departing from the spirit of the disclosure, which are within the scope of the disclosure. Accordingly, the scope of protection of the present disclosure should be determined by the following claims.
Claims (10)
1. A cooling device of a single crystal furnace comprises a lifting driving assembly (20) arranged on a furnace cover (11), and a lifting rod (30) extending into a furnace cylinder (10) from the lifting driving assembly (20) penetrating through the furnace cover (11);
the lifting drive assembly (20) lifts the thermal field assembly in the furnace barrel (10) through the lifting rod (30) so that the thermal field assembly forms a heat dissipation gap in the vertical direction; the method is characterized in that: the device also comprises an argon cooling assembly;
the argon cooling assembly comprises an argon supply pipeline (40) extending to the heat dissipation gap, and the argon supply pipeline (40) supplies argon to the inner side of the thermal field assembly through the heat dissipation gap.
2. The cooling device of a single crystal furnace according to claim 1, wherein: the argon gas cooling assembly further comprises a cooling switch (41), the cooling switch (41) is arranged at the air inlet end of the argon gas supply pipeline (40), and the cooling switch (41) is started after the lifting rod (30) lifts the thermal field assembly.
3. The cooling device of a single crystal furnace according to claim 1 or 2, wherein: the thermal field assembly comprises a thermal insulation cylinder (50) and a thermal insulation soft felt (51) wrapped on the outer side of the thermal insulation cylinder (50), wherein the thermal insulation soft felt (51) comprises at least two soft felt layers (52) which are arranged up and down;
the lifting bar (30) lifts up one of the soft felt layers (52) located at the upper portion.
4. A cooling apparatus of a single crystal furnace according to claim 3, wherein: the air outlet end of the argon gas supply pipeline (40) penetrates through the side wall of the heat preservation cylinder (50).
5. The cooling device of a single crystal furnace according to claim 4, wherein: the argon gas supply pipeline (40) penetrates through the heat preservation cylinder (50) from the bottom of the heat dissipation gap.
6. The cooling device of a single crystal furnace according to claim 5, wherein: a charging barrel (60) is arranged on the side wall of the furnace barrel (10), and a charging cover plate (61) is arranged at the charging end of the charging barrel (60) to seal the charging barrel; the air inlet end of the argon gas supply pipeline (40) is arranged on the charging cover plate (61).
7. A cooling apparatus of a single crystal furnace according to claim 3, wherein: the lifting driving assembly (20) comprises a lifting sliding block (22) and a motor (21) for driving the sliding block (22) to move; the sliding block (22) is connected with the top of the lifting rod (30) through a bracket (23) so as to drive the lifting rod (30) to move in the vertical direction.
8. The cooling device of a single crystal furnace according to claim 7, wherein: the furnace cover (11) is provided with a through hole, and the lifting rod (30) can vertically move and penetrate through the through hole;
a corrugated pipe (24) is sleeved on the part of the lifting rod (30) above the furnace cover (11), the upper end of the corrugated pipe (24) is connected with the bracket (23), and the lower end of the corrugated pipe (24) is connected with the furnace cover (11); the through hole is located inside the bellows (24).
9. The cooling device of a single crystal furnace according to claim 8, wherein: the bottom of the lifting rod (30) is provided with a hook (31), and the hook (31) supports the soft felt layer (52) from the bottom of the soft felt layer (52).
10. The cooling device of a single crystal furnace according to claim 1, wherein: the lifting rod (30) is hollow and is used for introducing cooling liquid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223301254.6U CN219260266U (en) | 2022-12-09 | 2022-12-09 | Cooling device of single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223301254.6U CN219260266U (en) | 2022-12-09 | 2022-12-09 | Cooling device of single crystal furnace |
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| Publication Number | Publication Date |
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| CN219260266U true CN219260266U (en) | 2023-06-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202223301254.6U Active CN219260266U (en) | 2022-12-09 | 2022-12-09 | Cooling device of single crystal furnace |
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| CN (1) | CN219260266U (en) |
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- 2022-12-09 CN CN202223301254.6U patent/CN219260266U/en active Active
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