CN219248147U

CN219248147U - Radio frequency power matching device

Info

Publication number: CN219248147U
Application number: CN202223177910.6U
Authority: CN
Inventors: 陈晓东
Original assignee: Changzhou Xinli Ion Technology Co ltd
Current assignee: Changzhou Xinli Ion Technology Co ltd
Priority date: 2022-11-28
Filing date: 2022-11-28
Publication date: 2023-06-23
Anticipated expiration: 2032-11-28

Abstract

The utility model relates to the technical field of radio frequency power matching, and discloses a radio frequency power matching device which comprises a support, an air capacitor, a motor and a radio frequency interface, wherein the two air capacitors are arranged on the inner wall of the top of the support, the two motors are arranged on the outer wall of one side of the support, the output end of the motor is provided with a coupler, the air capacitor is arranged at one end of the coupler, the outer wall of one side of the support is provided with a limiting chute, the inner wall of the limiting chute is slidingly connected with a limiting slide block, the outer wall of one side of the limiting slide block is fixedly connected with a connecting block, the outer wall of one side of the radio frequency interface is provided with a connecting bottom plate, one end of the connecting bottom plate is provided with a connecting mechanism, and the connecting block is movably connected with one end of the connecting bottom plate through the connecting mechanism. According to the utility model, the radio frequency interface can be conveniently installed and disassembled by the connecting mechanism, and the maintenance of the radio frequency interface is convenient.

Description

Radio frequency power matching device

Technical Field

The utility model relates to the technical field of radio frequency power matching, in particular to a radio frequency power matching device.

Background

In plasma cleaning equipment, a radio frequency power generator of 13.56MHz is generally adopted to provide radio frequency energy for a plasma cavity, process gas in the cavity is excited to generate plasma, the impedance of the radio frequency power generator is difficult to match with the load of the plasma cavity due to the nonlinearity of the load of the plasma cavity, so that the reflected power of the radio frequency power generator is overlarge, and therefore, the impedance matching is required to be carried out by adopting a radio frequency power matching device, so that the aim of transmitting the maximum power to the load of the plasma cavity by the radio frequency power generator is fulfilled.

The retrieved application number "cn201721715139.X" discloses a radio frequency power matching device comprising: a bracket; an air capacitor assembly comprising a first air capacitor and a second air capacitor, the first air capacitor and the second air capacitor being disposed on the bracket; a high voltage ceramic capacitor assembly including a first high voltage ceramic capacitor, a second high voltage ceramic capacitor, and a third high voltage ceramic capacitor; the first high-voltage ceramic capacitor is arranged at one end of the first air capacitor, which is close to the bracket, the second high-voltage ceramic capacitor is arranged at one end of the first air capacitor, which is far away from the bracket, and the third high-voltage ceramic capacitor is arranged at one end of the second air capacitor, which is far away from the bracket; a matching inductor disposed at an end of the first air capacitor remote from the bracket; the motor is respectively connected to the first air capacitor and the second air capacitor through a coupler; and the radio frequency interface is arranged on the bracket. Through the mode, the utility model has the advantages of simple structure, stable operation and reduced adjustment time.

The radio frequency interface on this technical scheme is connected with the support through the bolt, and this connected mode needs to consume a large amount of time of staff and installs and dismantle it, when the radio frequency interface needs to overhaul, can't dismantle it conveniently, and is very inconvenient.

To this end, we propose a radio frequency power matching device.

Disclosure of Invention

The utility model mainly solves the technical problems existing in the prior art and provides a radio frequency power matching device.

In order to achieve the above purpose, the utility model adopts the following technical scheme that the radio frequency power matching device comprises a bracket, an air capacitor, a motor and a radio frequency interface, wherein the two air capacitors are arranged on the inner wall of the top of the bracket, the two motors are arranged on the outer wall of one side of the bracket, the output end of the motor is provided with a coupler, the air capacitor is arranged at one end of the coupler, the outer wall of one side of the bracket is provided with a limiting chute, the inner wall of the limiting chute is slidably connected with a limiting slide block, the outer wall of one side of the limiting slide block is fixedly connected with a connecting block, the outer wall of one side of the radio frequency interface is provided with a connecting bottom plate, one end of the connecting bottom plate is provided with a connecting mechanism, and the connecting block is movably connected with one end of the connecting bottom plate through the connecting mechanism.

Further, be provided with main inserted bar and vice inserted bar in the coupling mechanism, and the slot has been seted up to connecting block one side outer wall, and a plurality of inserted cavities that are circumference arrangement have been seted up to the slot inner wall, and main inserted bar and slot looks adaptation, vice inserted bar and inserted cavity looks adaptation.

Further, the first rotation hole has been seted up to main inserted bar one side outer wall, and first rotation hole extends to connection bottom plate one side outer wall, and first rotation hole inner wall rotates and is connected with the connection bull stick, connects bull stick one end fixedly connected with knob two, and connects the bull stick other end rotation and connect in main inserted bar inner wall.

Further, the equal fixedly connected with spacing groove in main inserted bar one side outer wall both ends, and the stopper has been seted up at slot one side inner wall both ends, spacing groove and stopper looks adaptation, and spacing groove and stopper are isosceles trapezoid's round platform form in cross section.

Further, a plurality of fixed loop bars that are circumference arrangement of main inserted bar inner wall fixedly connected with, vice inserted bar sliding connection is in fixed loop bar inner wall, and fixed loop bar is close to and connects bull stick one end rotation and be connected with bevel gear two, connects bull stick outer wall fixedly connected with bevel gear one, and bevel gear two meshes in bevel gear one outer wall.

Further, a second screw rod is axially arranged on the second bevel gear, penetrates through the fixed sleeve rod and is connected to the inner wall of the auxiliary inserted link in a threaded mode.

Further, the second rotation hole has been seted up to spacing spout top inner wall, and the second rotation hole extends to the support top, and the rotation of second rotation hole inner wall is connected with first lead screw, first top fixedly connected with knob of lead screw, and first bottom of lead screw rotates to be connected in spacing spout inner wall, and threaded hole has been seted up to spacing slider inner wall, and first threaded connection of lead screw is in threaded hole inner wall.

Further, a fixed slot is formed in the inner wall of one side of the insertion cavity, and an elastic block is fixedly connected to the inner wall of the fixed slot.

Further, a plurality of buffer cavities which are arranged circumferentially are formed in the inner wall of the fixed groove, the inner wall of each buffer cavity is connected with a piston plate in a sliding mode, and inert gas is arranged at one end, away from the fixed groove, of each buffer cavity.

Advantageous effects

The utility model provides a radio frequency power matching device. The beneficial effects are as follows:

(1) This radio frequency power matching device, through the coupling mechanism who sets up, when needs are connected connecting block and connection bottom plate, insert the slot inner wall on the connecting block with the main inserted bar on the connection bottom plate, the spacing groove on the main inserted bar can insert in the stopper this moment, the stopper can be spacing to the main inserted bar through the spacing groove, immediately, rotate knob two, knob two rotates and drives bevel gear one on it through the connection bull stick and rotate, bevel gear one rotates and drives bevel gear two on it to rotate, bevel gear two rotates and can drive its axial lead screw two and rotate, the vice inserted bar on the lead screw two rotates and drives threaded connection is in fixed loop bar inner wall slip, vice inserted bar can slide out in the fixed loop bar and insert into the insert intracavity, can fix the main inserted bar, then can connect connecting block and connection bottom plate, when need dismantle, only need reverse rotation knob two, can drive vice inserted bar and slide back in the fixed loop bar, can remove the connection between the two, thereby can install and dismantle convenient radio frequency interface, the convenience is overhauld.

(2) This radio frequency power matching device, through knob one and screw rod one that sets up, when needs remove radio frequency interface, rotate knob one this moment, knob one rotates and slides in spacing spout through the spacing slider on screw rod one drive threaded connection screw rod one, can drive connecting plate and radio frequency interface through the connecting block and remove along spacing spout, then can be convenient remove radio frequency interface, makes things convenient for its to adjust to suitable height, makes things convenient for radio frequency interface to radio frequency signal reception.

(3) This radio frequency power matching device, through the elastic block and the piston board that set up, link into the chamber when vice inserted bar, the design of a plurality of vice inserted bars can carry out the pressure-bearing to external stress in a plurality of directions, avoid junction to produce under the external force and rock, influence the stability of connection, and when junction on the radio frequency interface produces and rocks, can extrude the elastic block through vice inserted bar, the elastic block receives the extrusion to produce deformation and gets into the buffer intracavity through deformation and extrudees the piston board, the piston board receives the inert gas of this moment in the buffer chamber and can cushion the stress through atmospheric pressure when the extrusion, further keep the stability of junction.

Drawings

FIG. 1 is a front view of the present utility model;

FIG. 2 is a cross-sectional view of the attachment mechanism of the present utility model;

FIG. 3 is an enlarged view of portion A of FIG. 2 in accordance with the present utility model;

FIG. 4 is an enlarged view of portion B of FIG. 3 in accordance with the present utility model;

fig. 5 is an enlarged view of section C of fig. 3 in accordance with the present utility model.

Legend description: 1. a bracket; 2. an air capacitor; 3. a motor; 4. a radio frequency interface; 5. limiting sliding grooves; 6. a first knob; 7. a first screw rod; 8. a limit sliding block; 9. a connecting block; 10. a connecting bottom plate; 11. a second knob; 12. a main plunger; 13. connecting a rotating rod; 14. bevel gears I; 15. bevel gears II; 16. a second screw rod; 17. fixing the loop bar; 18. an auxiliary inserted link; 19. a limit groove; 20. a limiting block; 21. a buffer chamber; 22. a piston plate; 23. an elastic block.

Detailed Description

Embodiment one: the utility model provides a radio frequency power matching device, as shown in fig. 1-4, including support 1, air capacitor 2, motor 3 and radio frequency interface 4, two air capacitor 2 set up in support 1 top inner wall, and two motor 3 set up in support 1 one side outer wall, motor 3's output is provided with the shaft coupling, air capacitor 2 sets up in shaft coupling one end, support 1 one side outer wall is provided with spacing spout 5, spacing spout 5 inner wall sliding connection has spacing slider 8, spacing slider 8 one side outer wall fixedly connected with connecting block 9, radio frequency interface 4 one side outer wall is provided with connecting plate 10, connecting plate 10 one end is provided with coupling mechanism, and connecting plate 9 passes through coupling mechanism swing joint in connecting plate 10 one end.

The inside of the connecting mechanism is provided with a main inserting rod 12 and an auxiliary inserting rod 18, the outer wall of one side of the connecting block 9 is provided with a slot, the inner wall of the slot is provided with a plurality of circumferentially arranged inserting cavities, the main inserting rod 12 is matched with the slot, and the auxiliary inserting rod 18 is matched with the inserting cavities.

The first rotation hole has been seted up to main inserted bar 12 one side outer wall, and first rotation hole extends to connection bottom plate 10 one side outer wall, and first rotation hole inner wall rotates and is connected with connection bull stick 13, connects bull stick 13 one end fixedly connected with knob two 11, and connects bull stick 13 other end rotation to connect in main inserted bar 12 inner wall.

The both ends of the outer wall of one side of the main inserted link 12 are fixedly connected with limit grooves 19, and limit blocks 20 are arranged at both ends of the inner wall of one side of the slot, the limit grooves 19 are matched with the limit blocks 20, and the limit grooves 19 and the limit blocks 20 are in a round table shape with isosceles trapezoid cross sections.

The inner wall of the main inserting rod 12 is fixedly connected with a plurality of fixed loop bars 17 which are circumferentially arranged, the auxiliary inserting rod 18 is slidably connected with the inner wall of the fixed loop bars 17, one end, close to the connecting rotating rod 13, of the fixed loop bars 17 is rotatably connected with a bevel gear II 15, the outer wall of the connecting rotating rod 13 is fixedly connected with a bevel gear I14, and the bevel gear II 15 is meshed with the outer wall of the bevel gear I14.

The second bevel gear 15 is axially provided with a second screw rod 16, and the second screw rod 16 penetrates through the fixed sleeve rod 17 and is connected with the inner wall of the auxiliary inserted link 18 in a threaded manner.

Through the coupling mechanism who sets up, when needs connect connecting block 9 and connection bottom plate 10, insert the slot inner wall on connecting block 9 with the main inserted bar 12 on the connection bottom plate 10, the spacing groove 19 on the main inserted bar 12 can insert in the stopper 20 this moment, stopper 20 can be spacing main inserted bar 12 through spacing groove 19, immediately, rotate knob two 11, knob two 11 rotates and drives bevel gear one 14 on it through connecting the bull stick 13 and rotate, bevel gear one 14 rotates and drives bevel gear two 15 on it and rotate, bevel gear two 15 rotates and can drive its axial lead screw two 16 and rotate, vice inserted bar 18 on the lead screw two 16 rotates and drives threaded connection is in fixed sleeve 17 inner wall slip, vice inserted bar 18 can slide out in the fixed sleeve 17 and insert the intracavity, can fix main inserted bar 12, then can connect connecting block 9 and connection bottom plate 10, when need dismantle, only need reverse rotation knob two 11, can drive vice inserted bar 18 and slide back in the fixed sleeve 17, can release the connection between the two, thereby can dismantle the interface 4 with convenient and easy to install and repair the interface 4.

Embodiment two: on the basis of the first embodiment, referring to fig. 2, a second rotation hole is formed in the inner wall of the top of the limit sliding groove 5, the second rotation hole extends to the top of the bracket 1, a first screw rod 7 is rotatably connected to the inner wall of the second rotation hole, a first knob 6 is fixedly connected to the top of the first screw rod 7, the bottom of the first screw rod 7 is rotatably connected to the inner wall of the limit sliding groove 5, a threaded hole is formed in the inner wall of the limit sliding block 8, and the first screw rod 7 is in threaded connection with the inner wall of the threaded hole.

Through knob one 6 and lead screw one 7 that set up, when needs remove radio frequency interface 4, rotate knob one 6 this moment, knob one 6 rotates and drives spacing slider 8 on the threaded connection lead screw one 7 through lead screw one 7 and slide in spacing spout 5, can drive connecting plate 10 and radio frequency interface 4 through connecting block 9 and remove along spacing spout 5, then can be convenient remove radio frequency interface 4, make things convenient for it to adjust to suitable height, make things convenient for radio frequency interface 4 to radio frequency signal reception.

Embodiment III: on the basis of the first embodiment, referring to fig. 5, a fixing groove is formed in the inner wall of one side of the insertion cavity, and an elastic block 23 is fixedly connected to the inner wall of the fixing groove.

The inner wall of the fixed groove is provided with a plurality of buffer cavities 21 which are circumferentially arranged, the inner wall of the buffer cavity 21 is connected with a piston plate 22 in a sliding manner, and one end, far away from the fixed groove, of the buffer cavity 21 is provided with inert gas.

Through the elastic block 23 and the piston plate 22 that set up, even insert the intracavity when the auxiliary plug rod 18, the design of a plurality of auxiliary plug rods 18 can carry out the pressure-bearing to external stress in a plurality of directions, avoid junction to produce under external force and rock, influence the stability of connection, and when junction on the radio frequency interface 4 produces and rocks, can extrude elastic block 23 through auxiliary plug rod 18, elastic block 23 receives the extrusion to produce deformation and gets into the buffer chamber 21 through deformation and extrude piston plate 22, the inert gas in the buffer chamber 21 can cushion the stress through atmospheric pressure when piston plate 22 receives the extrusion, further keep the stability of junction.

The foregoing has shown and described the basic principles and main features of the present utility model and the advantages of the present utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a radio frequency power matching device, includes support (1), air capacitor (2), motor (3) and radio frequency interface (4), its characterized in that: two air capacitor (2) set up in support (1) top inner wall, and two motor (3) set up in support (1) one side outer wall, and the output of motor (3) is provided with the shaft coupling, and air capacitor (2) set up in shaft coupling one end, support (1) one side outer wall is provided with spacing spout (5), and spacing spout (5) inner wall sliding connection has spacing slider (8), spacing slider (8) one side outer wall fixedly connected with connecting block (9), radio frequency interface (4) one side outer wall is provided with connecting plate (10), and connecting plate (10) one end is provided with coupling mechanism, and connecting plate (9) pass through coupling mechanism swing joint in connecting plate (10) one end.

2. The radio frequency power matching device of claim 1, wherein: the connecting mechanism is internally provided with a main inserting rod (12) and an auxiliary inserting rod (18), the outer wall of one side of the connecting block (9) is provided with a slot, the inner wall of the slot is provided with a plurality of circumferentially arranged inserting cavities, the main inserting rod (12) is matched with the slot, and the auxiliary inserting rod (18) is matched with the inserting cavities.

3. The radio frequency power matching device of claim 2, wherein: the outer wall of one side of the main inserting rod (12) is provided with a first rotating hole, the first rotating hole extends to the outer wall of one side of the connecting bottom plate (10), the inner wall of the first rotating hole is rotationally connected with a connecting rotating rod (13), one end of the connecting rotating rod (13) is fixedly connected with a knob II (11), and the other end of the connecting rotating rod (13) is rotationally connected to the inner wall of the main inserting rod (12).

4. A radio frequency power matching device as claimed in claim 3, characterized in that: the two ends of the outer wall of one side of the main inserting rod (12) are fixedly connected with limiting grooves (19), limiting blocks (20) are arranged at the two ends of the inner wall of one side of the inserting groove, the limiting grooves (19) are matched with the limiting blocks (20), and the cross sections of the limiting grooves (19) and the limiting blocks (20) are isosceles trapezoid circular truncated cones.

5. The radio frequency power matching device according to claim 4, wherein: the main inserted link (12) inner wall fixedly connected with is a plurality of fixed loop bars (17) that are circumference and arrange, vice inserted link (18) sliding connection in fixed loop bar (17) inner wall, and fixed loop bar (17) are close to connecting bull stick (13) one end rotation and are connected with bevel gear two (15), connect bull stick (13) outer wall fixedly connected with bevel gear one (14), bevel gear two (15) meshing in bevel gear one (14) outer wall.

6. The radio frequency power matching device of claim 5, wherein: the second bevel gear (15) is axially provided with a second screw rod (16), and the second screw rod (16) penetrates through the fixed sleeve rod (17) and is connected with the inner wall of the auxiliary inserted rod (18) in a threaded mode.

7. The radio frequency power matching device of claim 1, wherein: the second rotation hole has been seted up to spacing spout (5) top inner wall, and the second rotation hole extends to support (1) top, and second rotation hole inner wall rotation is connected with first (7) of lead screw, first (7) top fixedly connected with knob (6) of lead screw, first (7) bottom rotation connect in spacing spout (5) inner wall, threaded hole has been seted up to spacing slider (8) inner wall, first (7) threaded connection in threaded hole inner wall.

8. The radio frequency power matching device of claim 2, wherein: the inner wall of one side of the insertion cavity is provided with a fixed groove, and the inner wall of the fixed groove is fixedly connected with an elastic block (23).

9. The radio frequency power matching device of claim 8, wherein: the inner wall of the fixed groove is provided with a plurality of buffer cavities (21) which are circumferentially arranged, the inner wall of the buffer cavity (21) is slidably connected with a piston plate (22), and one end, far away from the fixed groove, of the buffer cavity (21) is provided with inert gas.