CN219244909U - Rectangular workpiece helium leakage detection jig - Google Patents
Rectangular workpiece helium leakage detection jig Download PDFInfo
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- CN219244909U CN219244909U CN202320310731.0U CN202320310731U CN219244909U CN 219244909 U CN219244909 U CN 219244909U CN 202320310731 U CN202320310731 U CN 202320310731U CN 219244909 U CN219244909 U CN 219244909U
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Abstract
The utility model provides a jig for detecting helium leakage of a rectangular workpiece, which comprises a jig panel; a sealing area is arranged in the jig panel; the surface roughness Ra of the sealing area is less than 0.8 mu m; the shape of the sealing area is a round rectangle; a sealing groove is formed in the circumference of the sealing area; a first sealing ring is arranged in the sealing groove; a through hole is formed in the sealing area; the through hole is communicated with the exhaust pipe to one side far away from the sealing area; one end of the exhaust pipe, which is far away from the jig panel, is provided with a flange; and a second sealing ring is arranged on the periphery of the flange. The jig provided by the utility model is suitable for rectangular non-standard workpieces, can enable the workpieces to reach a vacuum state, and has the advantages of high test accuracy, stable tightness, convenience in installation and repeatability in use.
Description
Technical Field
The utility model relates to the field of component product detection, in particular to a jig for helium leakage detection of a rectangular workpiece.
Background
The helium mass spectrum leak detection technology has high sensitivity, quick instrument response, high diffusion speed of helium molecules in a high-vacuum environment and stable performance, so that the helium mass spectrum leak detection technology is widely applied in the technical field of vacuum leak detection.
Helium mass spectrometer leak detection techniques typically employ a helium mass spectrometer leak detector for detection. For some vacuum workpieces, it is necessary to test the weld quality of the workpiece or to determine the vacuum tightness of the workpiece, but the workpiece is not completely closed, so a corresponding jig is required to achieve sealing of the workpiece in order to accurately test the workpiece performance. Before detection, the workpiece is firstly installed in a jig capable of sealing the opening end of the workpiece, then a helium mass spectrometer leak detector is adopted to enable the workpiece to reach a vacuum state, and helium is adopted to sweep the welding seam and the vacuum sealing position of the workpiece so as to judge whether leakage occurs in the welding seam and the vacuum sealing position of the workpiece.
Currently, commonly-detected vacuum workpieces comprise standard components, such as KF flanges, CF flanges, ISO flanges and the like, and the standard workpieces are attached with a matched leakage detection jig; however, for non-standard parts, such as rectangular workpieces, no matched leak detection jig exists at present, and the existing jig is not tight in tightness, so that the detection precision and sensitivity are poor.
CN214407915U discloses a jig for helium leakage detection of a sputtering target, which comprises a jig body and a connecting piece provided on the jig body; the clamp body is a circular ring cover which is adaptive to the back plate structure; the connecting piece is a hollow pipe communicated with the water inlet or the water outlet of the backboard. The clamp is used for realizing indirect connection between a corrugated pipe and a backboard water inlet and outlet of the helium mass spectrometer leak detector, but cannot seal a rectangular workpiece.
CN208505547U discloses a small-sized component leak tightness test fixture, which comprises a chassis, a plurality of bearing baskets and a cover plate, wherein the chassis and the cover plate are connected through a tightening bolt; the bearing baskets are arranged between the underframe and the cover plate, and the tightening bolts are provided with handles. Although the jig can improve the working efficiency of leakage detection, the accuracy of leakage detection is not high.
Therefore, the leakage detecting jig which is higher in accuracy and suitable for rectangular workpieces is of great significance.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide the jig for detecting helium leakage of the rectangular workpiece, which is suitable for the rectangular nonstandard workpiece, can enable the workpiece to reach a vacuum state, and has the advantages of high test accuracy, stable sealing performance, convenience in installation and repeatability in use.
To achieve the purpose, the utility model adopts the following technical scheme:
the utility model provides a jig for detecting helium leakage of a rectangular workpiece, which comprises a jig panel;
a sealing area is arranged in the jig panel;
the surface roughness Ra of the sealing area is less than 0.8 mu m;
the shape of the sealing area is a round rectangle;
a sealing groove is formed in the circumference of the sealing area;
a first sealing ring is arranged in the sealing groove;
a through hole is formed in the sealing area;
the through hole is communicated with the exhaust pipe to one side far away from the sealing area;
one end of the exhaust pipe, which is far away from the jig panel, is provided with a flange;
and a second sealing ring is arranged on the periphery of the flange.
The surface roughness Ra of the sealing region is < 0.8 μm, and may be, for example, 0.7 μm, 0.6 μm, 0.5 μm, 0.4 μm, 0.3 μm, 0.2 μm or 0.1 μm, but is not limited to the values recited, and other values not recited in the numerical range are equally applicable.
The jig provided by the utility model can seal rectangular workpieces, the rectangular workpieces are placed in a sealing area when in use, the circumferences of the sealing area are sealed through the sealing groove and the first sealing ring, after the workpieces and the jig are assembled, the exhaust pipe is used for exhausting gas in the workpieces through the through holes, the flange at the end part of the exhaust pipe is sealed again through the second sealing ring, finally the workpieces are in a vacuum state, and then the welding seam and the vacuum sealing position of the workpieces are purged by helium gas to judge whether leakage occurs in the welding seam and the vacuum sealing position of the workpieces. According to the utility model, the tightness of the jig can be further improved by controlling the surface roughness Ra in a specific range, so that the detection precision is greatly improved, and the method is particularly suitable for non-standard workpieces such as rectangular workpieces.
In the utility model, the rectangular workpiece comprises a cavity with one side open, and the sealing area is used for placing the rectangular workpiece and sealing the opening.
In the utility model, the through hole is used for communicating the workpiece with the exhaust pipe, and the workpiece can be pumped through the exhaust pipe and the through hole, so that the workpiece is in a vacuum state.
Preferably, the depth of the seal groove is 1.2-4.8mm, for example, 1.2mm, 2mm, 3mm, 4mm or 4.8mm, but not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the width of the seal groove is 2-8mm, for example, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm or 8mm, but not limited to the recited values, and other non-recited values within the range of values are equally applicable.
In the utility model, the depth and the width of the sealing groove are preferably controlled within a specific range, so that the tightness of the jig can be further improved, and the good detection precision is achieved.
Preferably, the flatness of the jig panel is less than or equal to 0.1mm, for example, 0.1mm, 0.08mm, 0.06mm, 0.04mm or 0.02mm, but is not limited to the recited values, and other non-recited values in the numerical range are equally applicable.
In the utility model, the flatness of the jig panel is preferably controlled within a specific range, so that the tightness of the jig can be further improved, and the good detection precision is achieved.
Preferably, a positioning hole is further formed in the portion, except the sealing area and the sealing groove, of the jig panel; the locating hole sets up in the circumference of seal groove.
In the utility model, the positioning holes are designed corresponding to the mounting holes on the workpiece, and the positioning holes are used for assembling the jig and the workpiece by arranging pins or screws, and can be through holes or threaded holes.
Preferably, the diameter of the positioning hole is 8-9mm, for example, 8mm, 8.2mm, 8.4mm, 8.6mm, 8.8mm or 9mm, but not limited to the recited values, and other non-recited values in the numerical range are equally applicable.
Preferably, the number of the positioning holes is at least 2, for example, may be 2, 4, 6 or 8, but is not limited to the recited values, and other non-recited values in the range of values are equally applicable.
Preferably, the thickness of the jig panel is 20-24mm, for example, 20mm, 20.5mm, 21mm, 21.5mm, 22mm, 22.5mm, 23mm, 23.5mm or 24mm, but not limited to the recited values, and other non-recited values in the numerical range are equally applicable.
Preferably, the length of the air extraction tube is 58-62mm, for example, 58mm, 59mm, 60mm, 61mm or 62mm, but is not limited to the recited values, and other non-recited values within the range of values are equally applicable.
In the utility model, the length of the exhaust pipe refers to the distance from the end face of the exhaust pipe, which contacts the flange, to the end face of the exhaust pipe, which contacts the sealing area.
Preferably, the diameter of the through hole is 20-24mm, for example, 20mm, 21mm, 22mm, 23mm or 24mm, but not limited to the recited values, and other non-recited values in the numerical range are equally applicable.
The operation process of the jig for helium leakage detection of rectangular workpieces provided by the utility model is as follows:
placing a rectangular workpiece in a sealing area of a jig, then placing a first sealing ring in a sealing groove for sealing, assembling the jig and the workpiece through a positioning hole, exhausting air through a flange end of an exhaust pipe, setting a second sealing ring for sealing until the rectangular workpiece reaches a vacuum state, and then adopting helium to sweep a welding seam and a vacuum sealing position of the workpiece to judge whether leakage occurs at the welding seam or the vacuum sealing position.
Compared with the prior art, the utility model has the beneficial effects that:
the fixture provided by the utility model can achieve a good sealing effect on a nonstandard rectangular workpiece, can be used for helium leakage detection, has stable test tightness, is convenient to install, has higher precision and can be reused.
Drawings
FIG. 1 is a longitudinal sectional view of a jig according to embodiment 1 of the present utility model;
fig. 2 is a bottom view of the jig according to embodiment 1 of the present utility model.
In the figure: 1-a sealing region; 2-sealing the groove; 3-a first sealing ring; 4-through holes; 5-an exhaust pipe; 6-a flange; 7-a second sealing ring; 8-positioning holes.
Detailed Description
The technical scheme of the utility model is further described below by the specific embodiments with reference to the accompanying drawings.
The present utility model will be described in further detail below. The following examples are merely illustrative of the present utility model and are not intended to represent or limit the scope of the utility model as defined in the claims.
It is to be understood that in the description of the present utility model, the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus are not to be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
It should be noted that, in the description of the present utility model, unless explicitly specified and limited otherwise, the terms "disposed," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.
It will be appreciated by those skilled in the art that the present utility model necessarily includes the necessary piping, conventional valves and general pumping equipment for achieving the process integrity, but the foregoing is not a major inventive aspect of the present utility model, and that the present utility model is not particularly limited thereto as the layout may be added by themselves based on the process flow and the equipment configuration options.
Example 1
The embodiment provides a jig for detecting helium leakage of a rectangular workpiece, the longitudinal section and the bottom view of the jig are shown in fig. 1 and 2 respectively, the jig comprises a jig panel, a sealing area 1 is arranged in the jig panel, the surface roughness Ra of the sealing area 1 is 0.6 mu m, the sealing area 1 is in a round rectangle, a sealing groove 2 is circumferentially arranged in the sealing area 1, a first sealing ring 3 is arranged in the sealing groove 2, a through hole 4 is arranged in the sealing area 1, the through hole 4 is communicated with an exhaust pipe 5 towards one side far away from the sealing area 1, a flange 6 is arranged at one end of the exhaust pipe 5 far away from the jig panel, and a second sealing ring 7 is circumferentially arranged on the flange 6;
the depth of seal groove 2 is 3.84mm, the width of seal groove 2 is 4.89mm, the flatness of tool panel is 0.1mm, the part of tool panel except seal area 1 and seal groove 2 still is provided with locating hole 8, locating hole 8 sets up in the circumference of seal groove 2, the diameter of locating hole 8 is 8.4mm, the number of locating hole 8 is 4, the thickness of tool panel is 22mm, the length of exhaust tube 5 is 60mm, the diameter of through-hole 4 is 22.1mm.
Example 2
This embodiment provides a tool that rectangular workpiece helium was revealed and is detected, compares with embodiment 1 only in the surface roughness Ra of sealing area is 0.5 mu m, the degree of depth of seal groove is 1.2mm, the width of seal groove is 2mm, the planarization of tool panel is 0.1mm, the diameter of locating hole is 8mm, the number of locating hole is 4, the thickness of tool panel is 20mm, the length of exhaust tube is 58mm, the diameter of through-hole is 20mm.
Example 3
This embodiment provides a tool that rectangular workpiece helium was revealed and is detected, compares with embodiment 1 only in the surface roughness Ra of sealing area is 0.4 mu m, the degree of depth of seal groove is 4.8mm, the width of seal groove is 8mm, the planarization of tool panel is 0.1mm, the diameter of locating hole is 9mm, the number of locating hole is 4, the thickness of tool panel is 24mm, the length of exhaust tube is 62mm, the diameter of through-hole is 24mm.
Comparative example 1
This comparative example provides a jig for helium leak detection of a rectangular workpiece, which differs from example 1 only in that the surface roughness Ra of the sealing region is 3.2 μm.
For rectangular workpieces known to have good sealability, helium leak testing using the tools provided in examples 1-3 and comparative example 1 was performed as follows:
placing a rectangular workpiece in a sealing area of a jig, then placing a first sealing ring in a sealing groove for sealing, assembling the jig and the workpiece through a positioning hole, exhausting air through a flange end of an exhaust pipe, setting a second sealing ring for sealing until the rectangular workpiece reaches a vacuum state, and then adopting helium to sweep a welding seam and a vacuum sealing position of the workpiece to judge whether leakage occurs at the welding seam or the vacuum sealing position.
The tests found that the helium mass spectrometer leak detectors of examples 1-3 had stable readings, indicating good sealability, while the comparative example 1 had fluctuating readings, indicating poor sealability. Therefore, the utility model further improves the tightness by controlling the roughness between the jig panel and the workpiece within a specific range.
In summary, the non-standard workpiece suitable for the rectangle provided by the utility model can enable the workpiece to reach a vacuum state, and has the advantages of high test accuracy, stable tightness, convenience in installation and repeatability in use.
The applicant declares that the above is only a specific embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and it should be apparent to those skilled in the art that any changes or substitutions that are easily conceivable within the technical scope of the present utility model disclosed by the present utility model fall within the scope of the present utility model and the disclosure.
Claims (10)
1. The utility model provides a tool that rectangular workpiece helium revealed and detects which characterized in that, the tool includes the tool panel;
a sealing area is arranged in the jig panel;
the surface roughness Ra of the sealing area is less than 0.8 mu m;
the shape of the sealing area is a round rectangle;
a sealing groove is formed in the circumference of the sealing area;
a first sealing ring is arranged in the sealing groove;
a through hole is formed in the sealing area;
the through hole is communicated with the exhaust pipe to one side far away from the sealing area;
one end of the exhaust pipe, which is far away from the jig panel, is provided with a flange;
and a second sealing ring is arranged on the periphery of the flange.
2. The fixture for helium leak testing of rectangular workpieces of claim 1, wherein the depth of the seal groove is 1.2-4.8mm.
3. The fixture for helium leak testing of rectangular workpieces of claim 1, wherein the width of the seal groove is 2-8mm.
4. The jig for helium leak detection of a rectangular workpiece according to claim 1, wherein the flatness of the jig panel is 0.1mm or less.
5. The jig for helium leak detection of a rectangular workpiece according to claim 1, wherein the jig panel is further provided with a positioning hole at a portion excluding the sealing region and the sealing groove;
the locating hole sets up in the circumference of seal groove.
6. The fixture for helium leak testing of a rectangular workpiece according to claim 5, wherein the diameter of the positioning hole is 8-9mm.
7. The fixture for helium leak testing of a rectangular workpiece according to claim 5, wherein the number of said positioning holes is at least 2.
8. The jig for helium leak detection of rectangular workpieces according to claim 1, wherein the thickness of the jig panel is 20-24mm.
9. The fixture for helium leak testing of rectangular workpieces according to claim 1, wherein the length of the exhaust tube is 58-62mm.
10. The jig for helium leak detection of a rectangular workpiece according to claim 1, wherein the diameter of the through hole is 20-24mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320310731.0U CN219244909U (en) | 2023-02-24 | 2023-02-24 | Rectangular workpiece helium leakage detection jig |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320310731.0U CN219244909U (en) | 2023-02-24 | 2023-02-24 | Rectangular workpiece helium leakage detection jig |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219244909U true CN219244909U (en) | 2023-06-23 |
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ID=86846638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320310731.0U Active CN219244909U (en) | 2023-02-24 | 2023-02-24 | Rectangular workpiece helium leakage detection jig |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219244909U (en) |
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2023
- 2023-02-24 CN CN202320310731.0U patent/CN219244909U/en active Active
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