CN219244606U

CN219244606U - Level measuring instrument

Info

Publication number: CN219244606U
Application number: CN202320339075.7U
Authority: CN
Inventors: 何正鸿; 张超; 陈泽; 孔德荣
Original assignee: Forehope Electronic Ningbo Co Ltd
Current assignee: Forehope Electronic Ningbo Co Ltd
Priority date: 2023-02-15
Filing date: 2023-02-15
Publication date: 2023-06-23
Anticipated expiration: 2033-02-15

Abstract

The utility model provides a level measuring instrument which comprises a shell, a hollow buoy and a marking bubble, wherein the shell is provided with a first inner cavity, first liquid is filled in the first inner cavity, the hollow buoy is freely suspended in the first liquid to form primary measurement, meanwhile, the hollow buoy is provided with a second inner cavity, the second inner cavity is filled with second liquid, the marking bubble is freely suspended in the second liquid to form secondary measurement, the movement track direction of the hollow buoy is along a first direction, the level measurement in the first direction is realized, the movement track direction of the marking bubble is along a second direction, and the level measurement in the second direction is realized, so that the level measuring instrument can realize multi-directional levelness measurement. Compared with the prior art, the utility model realizes multidirectional horizontal measurement in a primary measurement and secondary measurement mode, does not need to carry out direction adjustment for many times during measurement, simplifies the measurement flow, has high measurement precision, and avoids the influence on the measurement precision during direction adjustment.

Description

Level measuring instrument

Technical Field

The utility model relates to the technical field of measurement, in particular to a level measuring instrument.

Background

Along with the rapid development of the semiconductor industry, a measuring tool is commonly used for measuring an inclination angle relative to a horizontal position, flatness and straightness of a device guide rail, the horizontal position and vertical position of device installation and the like, however, in a wafer level packaging process, strict requirements are required for the level of a wafer tray, the level of a rail and the like, the conventional measuring tool can only meet the measurement of a transverse single level, multi-direction angle measurement cannot be realized, the level of the wafer tray needs to be measured in different directions for many times, and the measuring tool is very complicated and can cause the influence on the measuring precision.

Disclosure of Invention

The utility model aims to provide a level measuring instrument which can simplify a level measuring process, has high measuring precision and can realize multi-directional level measurement.

Embodiments of the present utility model are implemented as follows:

in a first aspect, the present utility model provides a level gauge comprising:

the shell is transparent in at least part area and is provided with a first inner cavity, and the first inner cavity is filled with first liquid;

the hollow buoy is movably arranged in the first inner cavity and can freely suspend in the first liquid so that the hollow buoy can move along a first direction, and the hollow buoy is partially transparent and is provided with a second inner cavity, and the second inner cavity is filled with the second liquid;

the marking bubble is movably arranged in the second inner cavity and can freely suspend in the second liquid, so that the hollow buoy can move along the second direction.

In an alternative embodiment, the first direction and the second direction are perpendicular.

In an alternative embodiment, the housing is arcuate.

In an alternative embodiment, the arc of the housing is 180 °.

In an alternative embodiment, a first scale marking is provided on the housing along a first direction.

In an alternative embodiment, the shell includes arc frid and arc apron, the arc apron is transparent, and covers and establish on the arc frid, just the arc apron with the arc frid encloses to establish and forms first inner chamber, the cavity buoy simultaneously with the arc frid with arc apron looks interval.

In an alternative embodiment, a second scale mark is arranged on the hollow buoy along a second direction.

In an alternative embodiment, the hollow buoy comprises a buoy shell and a viewing window, the viewing window is arranged at the top end of the buoy shell and surrounds the buoy shell to form the second inner cavity, and the viewing window is transparent.

In an alternative embodiment, both ends of the float housing in the second direction are curved.

In an alternative embodiment, the identification bubble is a gas bubble.

The beneficial effects of the embodiment of the utility model include:

the utility model provides a level measuring instrument, which is characterized in that a first inner cavity of a shell is filled with a first liquid, a hollow buoy is freely suspended in the first liquid to form primary measurement, meanwhile, the hollow buoy is provided with a second inner cavity, a second liquid is filled in the second inner cavity, a marking bubble is freely suspended in the second liquid to form secondary measurement, the movement track direction of the hollow buoy is along a first direction, the level measurement in the first direction is realized, the movement track direction of the marking bubble is along a second direction, and the level measurement in the second direction is realized, so that the level measuring instrument can realize multi-directional levelness measurement. Compared with the prior art, the utility model realizes multidirectional horizontal measurement in a primary measurement and secondary measurement mode, does not need to carry out direction adjustment for many times during measurement, simplifies the measurement flow, has high measurement precision, and avoids the influence on the measurement precision during direction adjustment.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a level gauge according to an embodiment of the present utility model;

FIG. 2 is a schematic cross-sectional view of the housing of FIG. 1;

FIG. 3 is a schematic view of the hollow buoy of FIG. 1;

fig. 4 is a schematic cross-sectional view of the hollow buoy of fig. 3.

Icon:

100-level measuring instrument; 110-a housing; 111-a first lumen; 113-arc-shaped grooved plates; 115-arc cover plate; 130-hollow buoy; 131-a second lumen; 133-a float housing; 135-viewing window; 150-identifying bubbles; 170-first scale identification; 190-second scale mark.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal," "vertical," and the like do not denote a requirement that the component be absolutely horizontal or overhang, but rather may be slightly inclined. As "horizontal" merely means that its direction is more horizontal than "vertical", and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

As disclosed in the background art, the existing level measuring instrument is generally a one-way measurement, i.e., a liquid is filled in the interior of a housing, and the position of a float is used to determine whether or not the level is in that direction. When the wafer tray needs to be measured, the whole tray surface needs to be in a horizontal state, so that the plurality of angles need to be adjusted to carry out horizontal measurement, the steps are complicated, certain errors can be generated in the adjustment process, and the measurement accuracy is affected.

Further, a disc-shaped level measuring instrument is also presented, namely whether the whole surface is level or not is judged by whether the buoy reaches the center of a circle, however, the measuring instrument needs to be filled with a large amount of liquid, and has large volume and inconvenient measurement.

In order to solve the above problems, the present utility model provides a novel level measuring apparatus, which will be described in detail below.

Referring to fig. 1 to 4, the present embodiment provides a level measuring apparatus 100, which can simplify the level measuring process, has high measuring accuracy, and can realize multi-directional level measurement.

The level measuring instrument 100 provided in this embodiment includes a housing 110, a hollow buoy 130, and a marker bubble 150, where at least a part of the housing 110 is transparent and has a first inner cavity 111, and the first inner cavity 111 is filled with a first liquid; the hollow buoy 130 is movably arranged in the first inner cavity 111 and can freely suspend in the first liquid, so that the hollow buoy 130 can move along the first direction, and is partially transparent and provided with a second inner cavity 131, and the second inner cavity 131 is filled with the second liquid; the marker bubble 150 is movably disposed in the second interior chamber 131 and is free to suspend in the second liquid to enable the hollow float 130 to move in the second direction.

In this embodiment, the first cavity 111 of the housing 110 is filled with the first liquid, and the hollow buoy 130 is freely suspended in the first liquid to form a primary measurement, meanwhile, the hollow buoy 130 has the second cavity 131, the second cavity 131 is filled with the second liquid, the marking bubble 150 is freely suspended in the second liquid to form a secondary measurement, the movement track direction of the hollow buoy 130 is along the first direction, the horizontal measurement in the first direction is realized, the movement track direction of the marking bubble 150 is along the second direction, and the horizontal measurement in the second direction is realized, so that the horizontal measurement instrument 100 can realize multi-directional levelness measurement. The multi-directional horizontal measurement is realized through the modes of primary measurement and secondary measurement, the direction adjustment is not needed to be carried out for many times during the measurement, the measurement flow is simplified, the measurement precision is high, and the influence on the measurement precision during the direction adjustment is avoided.

It should be noted that, the average density of the hollow buoy 130 in the present embodiment is smaller than that of the first liquid, so that the hollow buoy 130 can move freely under the buoyancy of the first liquid, i.e. the hollow buoy 130 can suspend freely in the first liquid. While the mean density of the identification bubble 150 is less than the density of the second liquid so that the identification bubble 150 is free to move under the buoyancy of the second liquid, i.e. the identification bubble 150 is free to suspend in the second liquid.

In this embodiment, the first direction and the second direction are perpendicular. Specifically, the first direction is the moving track connecting line direction of the hollow buoy 130, the second direction is the moving track connecting line direction of the marking bubble 150, and the first direction and the second direction are mutually perpendicular, so that horizontal measurement can be performed along the mutually perpendicular directions during measurement, and the accuracy of measurement is further improved. Of course, in other preferred embodiments of the present utility model, the first direction and the second direction may also form other included angles, such as 60 ° or 150 °, and the like, which are not limited herein.

In this embodiment, the housing 110 has an arc shape. Specifically, by adopting the arc-shaped housing 110, the level of the plane of the circular structure can be measured better, the fitting degree is better, and meanwhile, the arc-shaped structure can synchronously measure the offset angle or the offset degree, so that the data support is provided for adjusting the wafer pushing disc. Of course, in other preferred embodiments of the present utility model, the housing 110 may also be rectangular in shape, which is not particularly limited herein.

Preferably, in this embodiment, the radian of the housing 110 is 180 °, that is, the housing 110 is in a semicircular arc shape, and by adopting the semicircular arc-shaped housing 110, the housing can be further attached to a circular wafer tray, so as to ensure measurement accuracy. Of course, the curvature of the housing 110 is merely illustrative and not limiting.

In this embodiment, a first scale marking 170 is disposed on the housing 110 along a first direction. Specifically, the first scale marks 170 are distributed along the semicircular edge on the outer side edge of the housing 110, so that the position and the offset angle of the hollow buoy 130 can be monitored in real time, and data support is provided for adjusting the placement angle of the wafer tray. The first scale identifier 170 may be a plurality of identifiers, and may identify the center position of the housing 110 as 0 °, and may indicate that the level is reached in the first direction when the hollow buoy 130 moves to the 0 ° position. Of course, the first scale mark 170 may be marked only at the 0 ° position, and other positions need not be marked, and only whether the first scale mark is level or not needs to be determined.

The casing 110 includes an arc-shaped slot plate 113 and an arc-shaped cover plate 115, the arc-shaped cover plate 115 is transparent and covers the arc-shaped slot plate 113, the arc-shaped cover plate 115 and the arc-shaped slot plate 113 enclose to form a first inner cavity 111, and the hollow buoy 130 is spaced apart from the arc-shaped slot plate 113 and the arc-shaped cover plate 115. Specifically, the arc-shaped cover plate 115 and the arc-shaped groove plate 113 are both in a semicircular shape, the arc-shaped groove plate 113 is filled with the first liquid, and the arc-shaped cover plate 115 and the arc-shaped groove plate 113 are in sealing connection, so that the first liquid can be prevented from leaking.

It should be noted that, in this embodiment, the first liquid may be oil, mercury, diethyl ether, etc., the arc-shaped trough plate 113 may be made of ceramic, metal, or plastic, and the arc-shaped cover plate 115 is made of a transparent material, such as a transparent resin, so as to ensure that the position of the hollow buoy 130 is observed in real time.

In this embodiment, a second scale mark 190 is provided on the hollow buoy 130 along the second direction. Specifically, the second scale marks 190 are distributed along the length direction of the hollow buoy 130 at the edge of the hollow buoy 130, so that the position and the offset angle of the mark bubble 150 can be detected in real time, and data support is provided for adjusting the placement angle of the wafer tray. The second scale mark 190 may be a plurality of marks, and marks the center position of the hollow buoy 130 as 0 °, and when the mark bubble 150 moves to the 0 ° position, it may indicate that the level is reached in the second direction. Of course, the second scale mark 190 may be marked only at the 0 ° position, and other positions need not be marked, and only whether the mark is horizontal or not needs to be determined.

The hollow buoy 130 comprises a buoy shell 133 and an observation window 135, the observation window 135 is arranged at the top end of the buoy shell 133, and the observation window 135 and the buoy shell 133 are surrounded to form a second inner cavity 131, and the observation window 135 is transparent. Specifically, the float housing 133 may be made of ceramic, metal or plastic, and the viewing window 135 may be made of a transparent material, such as a transparent resin, so as to ensure real-time viewing of the position of the marker bubble 150.

In this embodiment, both ends of the float housing 133 along the second direction are curved. Specifically, both ends of the float housing 133 are arc-shaped surfaces, so that the hollow float 130 can not be engaged with the arc-shaped slot plate 113 during the movement process, and the free movement of the hollow float 130 is ensured.

In this embodiment, the identification bubble 150 is a bubble. Specifically, the identification bubble 150 may be a micro-point bubble and is disposed above the second liquid. Of course, in other preferred embodiments of the present utility model, the marking bubble 150 may be made of a hollow structure, such as a luminescent material, so as to perform better marking.

When actually measuring, firstly, the level measuring instrument 100 is vertically placed on a measuring workpiece, the position of the hollow buoy 130 is observed, the primary measurement is realized, after the adjustment, the level measuring instrument 100 is tiled on the measuring workpiece, and the position of the marking bubble 150 is observed, so that the secondary measurement is realized.

In summary, in the level measuring apparatus 100 of the present embodiment, the first cavity 111 of the housing 110 is filled with the first liquid, and the hollow buoy 130 is freely suspended in the first liquid to form a primary measurement, meanwhile, the hollow buoy 130 has the second cavity 131, the second cavity 131 is filled with the second liquid, the marking bubble 150 is freely suspended in the second liquid to form a secondary measurement, the movement track direction of the hollow buoy 130 is along the first direction, the level measurement in the first direction is realized, the movement track direction of the marking bubble 150 is along the second direction, and the level measurement in the second direction is realized, so that the level measuring apparatus 100 can realize multi-directional levelness measurement. Meanwhile, the semi-circular arc-shaped shell 110 structure is adopted, so that the semi-circular arc-shaped shell can be more attached to a wafer tray, and the measurement accuracy is higher.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A level gauge, comprising:

the marking bubble is movably arranged in the second inner cavity and can freely suspend in the second liquid, so that the marking bubble can move along the second direction.

2. The level gauge of claim 1, wherein the first direction and the second direction are perpendicular.

3. The level gauge of claim 2 wherein the housing is arcuate.

4. A level gauge according to claim 3, wherein the arc of the housing is 180 °.

5. A level gauge according to claim 3, wherein the housing is provided with a first scale marking along a first direction.

6. The level gauge of claim 3 wherein the housing comprises an arcuate trough plate and an arcuate cover plate, the arcuate cover plate being transparent and covering the arcuate trough plate, and the arcuate cover plate and the arcuate trough plate enclosing to form the first cavity, the hollow buoy being spaced apart from both the arcuate trough plate and the arcuate cover plate.

7. The level gauge of claim 2, wherein the hollow float is provided with a second scale marking along a second direction.

8. The level gauge of claim 2 wherein the hollow float includes a float housing and a viewing window, the viewing window being disposed at a top end of the float housing and surrounding the float housing to form the second interior cavity, the viewing window being transparent.

9. The level gauge of claim 8 wherein both ends of the float housing in the second direction are arcuate.

10. The level gauge of claim 1, wherein the marker bubble is a gas bubble.