CN219239709U - Quick automatic cooling device of annealing stove - Google Patents
Quick automatic cooling device of annealing stove Download PDFInfo
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- CN219239709U CN219239709U CN202320088531.5U CN202320088531U CN219239709U CN 219239709 U CN219239709 U CN 219239709U CN 202320088531 U CN202320088531 U CN 202320088531U CN 219239709 U CN219239709 U CN 219239709U
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Abstract
The utility model discloses a rapid automatic cooling device of an annealing furnace, which comprises a furnace body, wherein a furnace chamber is fixedly connected inside the furnace body, a water cooling box is fixedly connected to the lower surface of the furnace body, and air cooling boxes are fixedly connected to the lower surface of the furnace body, which is positioned on two sides of the water cooling box; the heat utilization mechanism comprises a heat box, the heat box is fixedly connected with the upper surface of the furnace body, a pipe body is fixedly connected with the side surface of the heat box, the pipe body is connected with the furnace body, and a heat conducting plate is fixedly connected inside the heat box. Through the structure, external water can be poured into the heat box, when the annealing furnace is cooled, heat in the furnace body can be transferred into the heat box through the pipe body, and the heat conduction plate can be used for discharging the pipe body to transfer heat so as to heat the water in the heat box, so that the heat in the annealing furnace can be collected and utilized.
Description
Technical Field
The utility model relates to the technical field of automatic cooling devices, in particular to a rapid automatic cooling device of an annealing furnace.
Background
The annealing furnace is a process used in the manufacture of semiconductor devices, and comprises the steps of heating a plurality of semiconductor wafers to influence the electrical property of the semiconductor wafers, wherein the annealing furnace has better heat preservation property, so that after the devices are heated, the annealing furnace cannot be quickly cooled to easily influence the processing quality of the devices, and the quality problem is caused by the influence of the heating quantity of the devices after heating.
Disclosure of Invention
The utility model aims to at least solve one of the technical problems in the prior art, and provides a rapid automatic cooling device for an annealing furnace, which can pour external water into a heat box, when the annealing furnace is cooled, heat in a furnace body can be transmitted into the heat box through a pipe body, and the heat conduction plate can be used for transmitting heat discharged by the pipe body to heat the water in the heat box, so that the heat in the annealing furnace can be collected and utilized.
The utility model also provides a rapid automatic cooling device with the annealing furnace, which comprises the following components: the furnace comprises a furnace body, wherein a furnace chamber is fixedly connected inside the furnace body, a water cooling box is fixedly connected to the lower surface of the furnace body, and air cooling boxes are fixedly connected to the lower surface of the furnace body on two sides of the water cooling box; the heat utilization mechanism comprises a heat box, the heat box is fixedly connected with the upper surface of the furnace body, the side surface of the heat box is fixedly connected with a pipe body, the pipe body is connected with the furnace body, the heat box is fixedly connected with a heat conducting plate, external water can be poured into the heat box, when the annealing furnace is cooled, the heat in the furnace body can be conducted into the heat box through the pipe body, the heat conducting plate can be used for discharging the pipe body to conduct heat to transfer heat to heat the water in the heat box, and therefore heat in the annealing furnace can be collected and utilized.
According to the rapid automatic cooling device of the annealing furnace, a fan is fixedly connected in the air cooling box, and the fan is started to cool the furnace body in an air cooling way.
According to the quick automatic cooling device of the annealing furnace, the air cooling box is internally provided with the air pipe fixedly connected with the left side of the fan, one end of the air pipe, which is far away from the air cooling box, extends into the furnace body, and when the fan is used, the air pipe can blow air into the furnace body for use.
According to the quick automatic cooling device of annealing furnace, the inside fixedly connected with water pump of water-cooling tank, the output fixedly connected with water-cooling pipe of water pump, and the surface fixed connection of water-cooling pipe and furnace chamber, the one end that the water-cooling pipe kept away from the water pump extends into the inside of water-cooling tank, starts the water pump and can play the purpose of water-cooling to the furnace body in the water-cooling pipe of water discharge intaking in the water-cooling tank.
According to the rapid automatic cooling device of the annealing furnace, the front surface of the water cooling box is fixedly connected with a water pipe, and external water is conveniently poured into the water cooling box through the water pipe for use.
According to the quick automatic cooling device of the annealing furnace, the front surface of the water cooling box is positioned on two sides of the water pipe and is fixedly connected with the organic box, the semiconductor refrigerator is fixedly connected inside the organic box, and the semiconductor refrigerator is started to refrigerate water in the water cooling box.
According to the rapid automatic cooling device of the annealing furnace, the ventilation net is fixedly connected with the side surface of the air cooling box, and the fan is convenient to extract and use outside air by utilizing the ventilation net.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The utility model is further described below with reference to the drawings and examples;
FIG. 1 is a schematic diagram of the internal structure of a rapid automatic cooling device of an annealing furnace according to the utility model;
FIG. 2 is a schematic diagram of the internal structure of a box of the rapid automatic cooling device of the annealing furnace;
FIG. 3 is a front view of the rapid automatic cooling device of the annealing furnace;
FIG. 4 is a schematic side view of a rapid automatic cooling device for an annealing furnace.
Legend description:
1. a furnace body; 2. a heat utilization mechanism; 3. a water cooling tank; 4. a water pump; 5. an air cooling box; 6. a blower; 7. an air duct; 8. a cavity; 9. a water-cooled tube; 10. a machine box; 11. a semiconductor refrigerator; 12. a water pipe;
201. a heat box; 202. a tube body; 203. a heat conducting plate.
Detailed Description
Reference will now be made in detail to the present embodiments of the present utility model, examples of which are illustrated in the accompanying drawings, wherein the accompanying drawings are used to supplement the description of the written description so that one can intuitively and intuitively understand each technical feature and overall technical scheme of the present utility model, but not to limit the scope of the present utility model.
Referring to fig. 1 to 4, a rapid automatic cooling device for an annealing furnace according to an embodiment of the present utility model includes: the furnace body 1, the furnace chamber 8 is fixedly connected in the furnace body 1, the water cooling box 3 is fixedly connected on the lower surface of the furnace body 1, the water pump 4 is fixedly connected in the water cooling box 3, the water cooling pipe 9 is fixedly connected at the output end of the water pump 4, the water cooling pipe 9 is fixedly connected with the surface of the furnace chamber 8, one end of the water cooling pipe 9 far away from the water pump 4 extends into the water cooling box 3, the water pipe 12 is fixedly connected on the front surface of the water cooling box 3, the organic boxes 10 are fixedly connected on the front surface of the water cooling box 3 at the two sides of the water pipe 12, the semiconductor refrigerator 11 is fixedly connected in the interior of the machine box 10, the air cooling box 5 is fixedly connected on the two sides of the water cooling box 3 at the lower surface of the furnace body 1, the fan 6 is fixedly connected in the interior of the air cooling box 5, the ventilation net is fixedly connected on the side surface of the air cooling box 5, the inside of forced air cooling case 5 is located the left side fixedly connected with tuber pipe 7 of fan 6, and the one end that forced air cooling case 5 was kept away from to tuber pipe 7 extends into the inside of furnace body 1, with water pump 4, fan 6, semiconductor refrigerator 11 all is connected with external power source, after the thing heating is accomplished, start fan 6 makes its accessible tuber pipe 7 discharge wind into the furnace body 1 in carry out forced air cooling, can pour external water into water cooling case 3 through water pipe 12, start semiconductor refrigerator 11 can refrigerate the water in the water cooling case 3, start water pump 4 makes it can extract the water after the refrigeration, carry out the water-cooling to furnace body 1 with refrigerated water discharge into water cooling pipe 9 through the output of water pump 4, utilize the water-cooling to cool down with forced air cooling can improve the automatic cooling efficiency of annealing stove.
The heat utilization mechanism 2, the heat utilization mechanism 2 includes heat box 201, and the last fixed surface of heat box 201 and furnace body 1 is connected, the side fixed surface of heat box 201 is connected with body 202, and body 202 is connected with furnace body 1, the inside fixedly connected with heat conduction board 203 of heat box 201, can pour external water into heat box 201 and use, when the annealing stove is at the cooling, heat in the furnace body 1 can carry out in the heat box 201 through body 202, utilize heat conduction board 203 can carry out the heat transfer with the body 202 emission and heat the water in the heat box 201, make the water heat quantity influence can produce steam and carry out resource utilization.
Working principle: when the device is used, after the object is heated, the fan 6 is started to enable the object to be cooled by air in the furnace body 1 through the air pipe 7, the semiconductor refrigerator 11 is started to refrigerate water in the water cooling box 3, the water pump 4 is started to enable the object to be extracted from the refrigerated water, the refrigerated water is discharged into the water cooling pipe 9 through the output end of the water pump 4 to cool the furnace body 1, when the annealing furnace is cooled, heat in the furnace body 1 can be transferred into the heat box 201 through the pipe body 202, the heat conducting plate 203 can be utilized to transfer heat discharged by the pipe body 202 to heat the water in the heat box 201, and the influence of the heated water on the generated steam can be utilized as resources.
The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model.
Claims (7)
1. A rapid automatic cooling device for an annealing furnace, comprising:
the furnace comprises a furnace body (1), wherein a furnace chamber (8) is fixedly connected inside the furnace body (1), a water cooling box (3) is fixedly connected to the lower surface of the furnace body (1), and air cooling boxes (5) are fixedly connected to the lower surface of the furnace body (1) on two sides of the water cooling box (3);
the heat utilization mechanism (2), heat utilization mechanism (2) include heat box (201), and the upper surface fixed connection of heat box (201) and furnace body (1), the side surface fixedly connected with body (202) of heat box (201), and body (202) are connected with furnace body (1), the inside fixedly connected with heat conduction board (203) of heat box (201).
2. The rapid automatic cooling device for the annealing furnace according to claim 1, wherein a fan (6) is fixedly connected inside the air cooling box (5).
3. The rapid automatic cooling device for the annealing furnace according to claim 1, wherein an air pipe (7) is fixedly connected to the left side of the fan (6) in the air cooling box (5), and one end, far away from the air cooling box (5), of the air pipe (7) extends into the furnace body (1).
4. The rapid automatic cooling device for the annealing furnace according to claim 1, wherein a water pump (4) is fixedly connected to the inside of the water cooling box (3), a water cooling pipe (9) is fixedly connected to the output end of the water pump (4), the water cooling pipe (9) is fixedly connected with the surface of the furnace chamber (8), and one end, far away from the water pump (4), of the water cooling pipe (9) extends into the inside of the water cooling box (3).
5. The rapid automatic cooling device for the annealing furnace according to claim 1, wherein a water pipe (12) is fixedly connected to the front surface of the water cooling tank (3).
6. The rapid automatic cooling device for the annealing furnace according to claim 1, wherein the front surface of the water cooling box (3) is positioned on two sides of the water pipe (12) and is fixedly connected with an organic box (10), and the inside of the organic box (10) is fixedly connected with a semiconductor refrigerator (11).
7. The rapid automatic cooling device for an annealing furnace according to claim 1, wherein a ventilation net is fixedly connected to the side surface of the air cooling box (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320088531.5U CN219239709U (en) | 2023-01-31 | 2023-01-31 | Quick automatic cooling device of annealing stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320088531.5U CN219239709U (en) | 2023-01-31 | 2023-01-31 | Quick automatic cooling device of annealing stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219239709U true CN219239709U (en) | 2023-06-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320088531.5U Active CN219239709U (en) | 2023-01-31 | 2023-01-31 | Quick automatic cooling device of annealing stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219239709U (en) |
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2023
- 2023-01-31 CN CN202320088531.5U patent/CN219239709U/en active Active
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