CN219226228U

CN219226228U - Semiconductor manufacturing equipment

Info

Publication number: CN219226228U
Application number: CN202223154759.4U
Authority: CN
Inventors: 李建鑫
Original assignee: Hangzhou Fuxin Semiconductor Co Ltd
Current assignee: Hangzhou Fuxin Semiconductor Co Ltd
Priority date: 2022-11-25
Filing date: 2022-11-25
Publication date: 2023-06-20
Anticipated expiration: 2032-11-25

Abstract

The present disclosure provides a semiconductor manufacturing apparatus, comprising: the circulating water system comprises a circulating water supply assembly, a circulating backwater assembly and a loop water tank, and the loop water tank is connected with the exposure system through the circulating water supply assembly and the circulating backwater assembly; the liquid level sensor is arranged on the loop water tank and comprises a first liquid level sensor arranged at a first position of the loop water tank, and the first liquid level sensor detects that the water level in the loop water tank reaches the first position and sends out a first liquid level signal; the timing circuit is connected with the first liquid level sensor, receives a first liquid level signal and generates first time information, wherein the first time is the time when the liquid level in the loop water tank is reduced from the full position to the first position; the control circuit is connected with the timing circuit, receives the first time information and sends out a leakage alarm signal when the first time reaches a first threshold value. The semiconductor manufacturing equipment can timely find out the leakage of the circulating water system.

Description

Semiconductor manufacturing equipment

Technical Field

The present disclosure relates to the field of semiconductor processing equipment, and in particular, to semiconductor manufacturing equipment.

Background

In the semiconductor manufacturing industry, it is necessary to control the temperature of some parts by using a circulating water system during processing in semiconductor processing equipment such as a photolithography machine. In order to ensure the normal operation of the circulating water system, it is necessary to ensure that the circulating water is not lost.

In order to ensure the normal operation of the circulating water system, the water level of the loop water tank is generally monitored. When the water level in the loop water tank of the circulating water system is monitored to be reduced to the set water level, the circulating water can be timely supplemented into the loop water tank. But cannot detect whether there is water leakage in the circulating water system. If the condition that the circulating water leaks can not be found in time, the product is possibly seriously influenced, and the product is lost.

Disclosure of Invention

The present disclosure provides a semiconductor manufacturing apparatus to solve at least the above technical problems existing in the prior art.

According to a first aspect of the present disclosure, there is provided a semiconductor manufacturing apparatus, the apparatus comprising:

the circulating water system comprises a circulating water supply assembly, a circulating water return assembly and a loop water tank, and the loop water tank is connected with the exposure system through the circulating water supply assembly and the circulating water return assembly;

the liquid level sensor is arranged on the loop water tank and used for detecting the water level in the loop water tank, the liquid level sensor comprises a first liquid level sensor arranged at a first position of the loop water tank, the first liquid level sensor detects that the water level in the loop water tank reaches the first position and sends out a first liquid level signal;

the timing circuit is connected with the first liquid level sensor, receives the first liquid level signal and generates first time information, wherein the first time is the time when the liquid level in the loop water tank is reduced from the full position to the first position;

the control circuit is connected with the timing circuit, receives the first time information and sends out a leakage alarm signal when the first time reaches a first threshold value.

In an embodiment, the liquid level sensor further comprises:

the second liquid level sensor is arranged at a second position of the loop water tank, the second position is lower than the first position, the second liquid level sensor detects that the water level in the loop water tank reaches the second position and sends out a second liquid level signal, and the second liquid level sensor is connected with the timing circuit;

the timing circuit receives the second liquid level signal and generates second time information, wherein the second time is the time from the time of receiving the first liquid level signal to the time of receiving the second liquid level signal;

the control circuit receives the second time information and sends out a leakage alarm signal when the second time reaches a second threshold value.

In one embodiment, the loop water tank is made of plastic; the first liquid level sensor and the second liquid level sensor are respectively capacitive liquid level sensors, and the first liquid level sensor and the second liquid level sensor are respectively arranged on the outer wall surface of the liquid level pipe.

In an embodiment, the first liquid level sensor and the second liquid level sensor are respectively connected with the control circuit in a wireless mode.

In an embodiment, the circulating water system includes a lens circulating water system and a motor circulating water system, the lens circulating water system is connected with the projection lens of the exposure system through the circulating water supply assembly and the circulating water return assembly, and is used for cooling the projection lens, and the motor circulating water system is connected with the motor of the exposure system through the circulating water pipe, and is used for cooling the motor.

In an embodiment, the apparatus further comprises:

the water replenishing system is used for replenishing circulating water into the loop water tank and is connected with the control circuit;

and the control circuit sends out a water supplementing signal when the second time does not reach a second threshold value, so that the water supplementing system supplements the liquid level in the loop water tank to the full-filling position.

In one embodiment, the circulating backwater assembly includes:

a circulating water return pipe connecting the exposure system and the loop water tank;

and the circulating water return pipe is connected with the first fluid side of the heat exchanger, and the second fluid side of the heat exchanger is connected with an industrial water system.

In an embodiment, the circulating backwater assembly further comprises:

the pre-heater is arranged on the circulating water return pipe, and the pre-heater (13) is arranged close to the loop water tank;

the back pressure regulating valve is arranged on the circulating water return pipe;

and the ultraviolet sterilizer is connected with the back pressure regulating valve in parallel.

In one embodiment, the circulating water supply assembly includes:

a circulation water supply pipe connecting the exposure system and the loop water tank;

the precise heater is arranged on the circulating water supply pipe;

the circulating pump is arranged on the circulating water supply pipe;

the circulating filter is arranged on the circulating water supply pipe;

and the water supply valve is arranged on the circulating water supply pipe.

In one embodiment, the loop water tank includes a water tank body and a water level indicator having a water level pipe which communicates with the water tank body such that a water level in the water level pipe is the same as a water level of the water tank body, and the liquid level sensor is provided on the water tank body or the liquid level sensor is provided on the water level pipe.

In the semiconductor manufacturing equipment disclosed by the disclosure, the circulating water system can cool the exposure system, so that the exposure system keeps working temperature, the liquid level sensor can detect the water level of the loop water tank of the circulating water system, the timing circuit can receive the liquid level signal sent by the liquid level sensor and calculate the time required by the liquid level change in the loop water tank, and therefore whether the circulating water system leaks or not can be found in time, and the influence on the product quality caused by the water leakage of the circulating water system is avoided.

It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the disclosure, nor is it intended to be used to limit the scope of the disclosure. Other features of the present disclosure will become apparent from the following specification.

Drawings

The above, as well as additional purposes, features, and advantages of exemplary embodiments of the present disclosure will become readily apparent from the following detailed description when read in conjunction with the accompanying drawings. Several embodiments of the present disclosure are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings, in which:

in the drawings, the same or corresponding reference numerals indicate the same or corresponding parts.

Fig. 1 shows a partial schematic configuration diagram of a semiconductor manufacturing apparatus according to an embodiment of the present disclosure.

The reference numerals in the figures illustrate: the device comprises a 1-loop water tank, a 2-circulation water supply assembly, a 3-circulation backwater assembly, a 4-water supplementing system, a 5-water level pipe, a 6-first liquid level sensor, a 7-second liquid level sensor, an 8-timing circuit, a 9-control circuit, a 10-exposure system, an 11-industrial water utilization system, a 12-heat exchanger, a 13-preheater, a 14-precise heater, a 15-back pressure regulating valve, a 16-ultraviolet sterilizer, a 17-circulation pump, a 18-circulation filter, a 19-water supply valve, a 20-backwater valve, a 21-water supplementing valve, a 22-water supplementing filter, a 23-water supplementing pump, a 24-water mixing valve, a 25-flow setting valve, a 26-industrial water utilization filter, a 27-circulation water supply pipe and a 28-circulation backwater pipe.

Detailed Description

In order to make the objects, features and advantages of the present disclosure more comprehensible, the technical solutions in the embodiments of the present disclosure will be clearly described in conjunction with the accompanying drawings in the embodiments of the present disclosure, and it is apparent that the described embodiments are only some embodiments of the present disclosure, but not all embodiments. Based on the embodiments in this disclosure, all other embodiments that a person skilled in the art would obtain without making any inventive effort are within the scope of protection of this disclosure.

Referring to fig. 1, an embodiment of the present disclosure provides a semiconductor manufacturing apparatus including a circulating water system, a liquid level sensor, a timing circuit 8, and a control circuit 9.

The circulating water system comprises a circulating water supply assembly 2, a circulating backwater assembly 3 and a loop water tank 1, wherein the loop water tank 1 is connected with an exposure system 10 through the circulating water supply assembly 2 and the circulating backwater assembly 3. The circulating water system is used for circularly cooling the exposure system 10, and circulating water in the loop water tank 1 is conveyed to the exposure system 10 through the circulating water supply assembly 2, so that the exposure system 10 is kept at the working temperature, and the influence of overhigh or overlow temperature on the normal operation of the exposure system 10 is avoided.

The liquid level sensor is arranged on the loop water tank 1 and is used for detecting the water level in the loop water tank 1, the liquid level sensor comprises a first liquid level sensor 6 arranged at a first position of the loop water tank 1, the first liquid level sensor 6 can detect whether the water level in the loop water tank 1 reaches the first position, and the first liquid level sensor 6 detects that the water level in the loop water tank 1 reaches the first position and sends out a first liquid level signal.

The timing circuit 8 is connected with the liquid level sensor, and the timing circuit 8 can receive a liquid level signal sent by the liquid level sensor. The timing circuit 8 is connected with the first liquid level sensor 6, and the timing circuit 8 receives the first liquid level signal and generates first time information, wherein the first time is the time when the water level in the loop water tank 1 is reduced from the full position to the first position. The initial water level in the loop water tank 1 is the full position, and after a period of time, the water level in the loop water tank 1 can be lowered due to normal consumption or water leakage of the circulating water system, and the liquid level sensor can detect whether the water level in the loop water tank 1 reaches the corresponding position. The timing circuit 8 can generate time information of different water level changes, such as receiving a first liquid level signal sent by the first liquid level sensor 6, and can generate first time information.

The control circuit 9 is connected with the timing circuit 8, and the control circuit 9 receives the time information corresponding to different water level changes sent by the timing circuit 8 and can send out a leakage alarm signal under the condition that the time represented by the time information reaches a corresponding threshold value. For example, the control circuit 9 receives the first time information and issues a leakage alarm signal when the first time reaches a first threshold. The first time reaching the first threshold value means that the time required for the water level in the circuit water tank 1 to drop from the full position to the first position is smaller than the time required for the circulating water in the circulating water system to be normally consumed, and it is considered that the circulating water system is leaking. The time required for the normal consumption of the circulating water may be determined through the history data. For example, by statistically analyzing the history data, the time taken for the water level in the circuit water tank 1 to drop from the full position to the first position is allowed to be normal consumption for 60 days or more, and 60 days may be set as the first threshold value, and if the time taken for the water level in the circuit water tank 1 to drop from the full position to the first position is detected to be less than 60 days, the actual consumption of the circulating water is faster than the normal consumption, and it is considered that there is a leak in the circulating water system and maintenance is required. Of course, in consideration of the possible fluctuation of the normal consumption of the circulating water system, an observation threshold may be set, and in the case where the time taken for the water level in the circuit water tank 1 to drop from the full position to the first position reaches the observation threshold, the control circuit 9 may issue an observation signal prompting the user to pay attention to the observation of the circulating water system, and the situation of whether or not the circulating water system has a leak is determined based on the situation of further monitoring the water level of the circulating water. The observation threshold is greater than the first threshold. For example, based on historical data statistical analysis, the observation threshold may be set to 60 days and the first threshold to 48 days. If it is detected that the water level in the circuit tank 1 has fallen from the full position to the first position for between 48 days and 60 days, the control circuit 9 may send an observation signal to prompt the user to pay attention to the circulating water system. If it is detected that the water level in the circuit water tank 1 has fallen from the full position to the first position for 48 days or less, it can be considered that the circulating water system has a leak, and maintenance is required, and the control circuit 9 sends a leak alarm signal.

In the embodiment of the present disclosure, the specific manner in which the timer circuit 8 generates the time information corresponding to the different water level changes is not limited. The timer circuit 8 may record the time points of the respective water levels, and obtain time information corresponding to the water level change by making a difference between the time points of the different water levels. For example, a first time point when the water level in the circuit water tank 1 is at the full position and a second time point when the water level is at the first position are recorded, and the first time is obtained by subtracting the first time point from the second time point, so that the first time information can be generated.

In the embodiment of the present disclosure, the timing circuit 8 may start timing from when the circulating water in the loop water tank 1 reaches a certain water level, so that the time taken for the circulating water in the loop water tank 1 to reach the next water level can be obtained. For example, when the water level in the circuit water tank 1 is at the full position, the timer circuit 8 starts to count, and when the water level in the circuit water tank 1 is lowered to the first position, the time accumulated by the timer circuit 8 is the first time of the water level change from the full position to the first position, so that the first time information can be generated.

In the embodiment of the disclosure, the replenishment of the circulating water in the loop water tank 1 to the replenishment position may be performed manually or automatically. In the case of manually refilling the circulating water system, it may be that the timer circuit 8 is manually triggered to record the first point in time when the water level in the circuit tank 1 is in the refill position. Or the manual trigger timing circuit 8 starts timing when the circulating water in the loop water tank 1 is at the full position. In the case of automatic replenishment of the circulating water system, however, the automatic triggering timing circuit 8 records a first point in time at which the water level in the circuit tank 1 is at the replenishment position. Or the manual trigger timing circuit 8 starts timing when the circulating water in the loop water tank 1 is at the full position.

In an embodiment, the liquid level sensor further includes a second liquid level sensor 7, the second liquid level sensor 7 is disposed at a second position of the loop water tank 1, the second position is lower than the first position, the second liquid level sensor is capable of detecting whether circulating water in the loop water tank 1 reaches the second position, the second liquid level sensor 7 detects that the water level in the loop water tank 1 reaches the second position, a second liquid level signal is sent, the second liquid level sensor 7 is connected with the timing circuit 8, and the second liquid level sensor 7 sends the second liquid level signal to the timing circuit 8 to trigger the timing circuit 8 to generate corresponding time information. The timing circuit 8 receives the second liquid level signal and generates second time information, the second time being the time between the reception of the first liquid level signal and the reception of the second liquid level signal. The control circuit 9 receives the second time information and issues a leakage alarm signal when the second time reaches a second threshold.

The timer circuit 8 in the embodiment of the disclosure may record a corresponding time point when the first liquid level signal is received, record a corresponding time point when the second liquid level signal is received, and obtain a time taken by the difference between the two time points to drop the liquid level of the circulating water in the loop water tank 1 from the first position to the second position, where the time taken by the liquid level of the circulating water in the loop water tank 1 to drop from the first position to the second position is the second time for convenience of distinguishing.

In the embodiment of the disclosure, the timing circuit 8 may start timing when receiving the first liquid level signal, and the accumulated time is the second time when receiving the second liquid level signal.

In the embodiment of the disclosure, the water levels of the first position and the second position are detected by the first liquid level sensor 6 and the second liquid level sensor 7 respectively, and when the water level is detected to drop to the corresponding positions, corresponding liquid level signals are sent to the timing circuit 8, so that the timing circuit 8 can generate corresponding second time information, and the second time represented by the second time information is the time taken for the water level to drop from the first position to the second position. And determining whether the circulating water system leaks or not according to the second time. For example, the second time reaches a second threshold, and it may be determined that a water leakage condition exists in the circulating water system.

The circulating water system in the embodiment of the disclosure can allow the circulating water to be reduced to a certain extent within a certain time. In a certain period of time, the reduction of the circulating water is within an allowable range, namely the normal loss of the circulating water can be considered, and the equipment and the products cannot be influenced. If the circulating water system has water leakage, the loss of the circulating water can exceed the allowable range within a certain period of time. Alternatively, a certain amount of circulating water is consumed, and the time taken for this is less than the allowable range. In the embodiment of the disclosure, the water level in the loop water tank 1 is detected by the liquid level sensor, so that the loss of circulating water in the circulating water system can be determined, the timing circuit 8 can determine the time used for different water level changes, and on the basis of knowing the circulating water loss and the corresponding time used, whether the circulating water system leaks or not can be determined according to whether the time used reaches the corresponding threshold value or not.

In the exemplary embodiment, the first position is 3cm lower than the full position, according to the empirical data, the time allowed for the water level in the loop water tank 1 to drop from the full position to the first position is 60 days, if the time is less than 60 days, the circulating water system can be considered to have the risk of water leakage, and a water leakage alarm signal can be sent to remind maintenance. The distance from the full-filling position to the first position is a first distance, the distance from the first position to the second position is a second distance, and the second distance may be the same as the first distance or different from the first distance. When the second distance is different from the first distance, the second distance may be smaller than the first distance or larger than the first distance. For example, the second distance is 2cm, and the setting of the second threshold value may be consistent with the setting of the first threshold value, that is, the circulating water loss rate corresponding to the second threshold value is consistent with the circulating water loss rate corresponding to the first threshold value. The setting of the second threshold value may also be inconsistent with the setting of the first threshold value, i.e. the circulation water loss rate corresponding to the second threshold value is inconsistent with the circulation water loss rate corresponding to the first threshold value, e.g. the second threshold value may be set according to a slower or faster loss rate. In an exemplary embodiment, the time value of the second threshold corresponding to the second distance of 2cm may be 40 days.

In the embodiment of the disclosure, different leakage risk levels may be set according to the consumption rate of the circulating water, and the control circuit 9 receives time information corresponding to different water level changes sent by the timing circuit 8 and determines the leakage risk level corresponding to the received time information. The control circuit 9 may receive the first time information and determine a leakage risk level corresponding to the first time information. The control circuit may also receive the second time information and determine a leakage risk level corresponding to the second time information. For example, the first position is 3cm lower than the full position, the time for the water level in the circuit tank 1 to drop from the full position to the first position is 60 days or longer, and the leakage risk level is low, and it is considered that there is no leakage. The time for the water level in the loop water tank 1 to drop from the full position to the first position is 48-60 days, and the leakage risk level is intermediate, so that a certain leakage risk can be considered, and observation can be kept. The time for the water level in the loop water tank 1 to drop from the full position to the first position is less than 48 days, the leakage risk level is high, and the circulating water system can be considered to have leakage condition and needs to be overhauled immediately. Of course, in addition to being classified into three leakage risk classes, high, medium and low, more classes may be used, for example 1-5 classes, or 1-10 classes,

in the embodiment of the disclosure, the control circuit 9 may also convert the received time information, index the received time information to obtain a leakage index, and determine a leakage risk level corresponding to the leakage index. And can send corresponding risk prompt information, for example when the leakage risk level is higher, can send leakage alarm signal. Indexing the received time information may be comparing the corresponding time with a safe time value to obtain a ratio. For example, the first position is 3cm lower than the full position, and the safe time for the water level in the circuit tank 1 to drop from the full position to the first position is 60 days. The first time represented by the first time information is divided by the safe time value 60 to obtain a corresponding leakage indicator. The leakage index is 1 or more, and the leakage risk level is low, so that no leakage can be considered. The leakage index is 0.8-1, and the leakage risk level is middle, so that a certain leakage risk can be considered, and observation can be kept. The leakage index is smaller than 0.8, the leakage risk level is high, and the circulating water system can be considered to have leakage condition and needs to be overhauled immediately.

In one embodiment, the loop tank 1 is made of plastic. The signal of the liquid level sensor can penetrate through the wall surface of the loop water tank 1, and the liquid level sensor is more convenient to set. The first liquid level sensor 6 and the second liquid level sensor 7 are respectively capacitive liquid level sensors, and the first liquid level sensor 6 and the second liquid level sensor 7 are respectively arranged on the outer wall surface of the liquid level pipe. The capacitive liquid level sensor monitors the water level by adopting capacitive sensing, and changes the capacitance of the capacitive sensor due to the conductivity of the circulating water. The capacitive sensor performs non-contact detection by outputting different signals by using the capacitance change of the presence or absence of water. The capacitive sensor is tightly attached to the outer wall of the loop water tank 1, so that the water level change in the loop water tank 1 can be detected, and the non-contact detection can be performed.

In one embodiment, the first liquid level sensor 6 and the second liquid level sensor 7 are each connected wirelessly to the control circuit 9. The liquid level sensor transmits time information through wireless signals, and wiring is avoided.

In an embodiment, the circulating water system comprises a lens circulating water system and a motor circulating water system, the lens circulating water system is connected with the projection lens of the exposure system 10 through the circulating water supply assembly 2 and the circulating water return assembly 3 and used for cooling the projection lens, and the motor circulating water system is connected with the motor of the exposure system 10 through a circulating water pipe and used for cooling the motor. The projection lens and motor of the exposure system 10 may be cooled using a circulating water system in embodiments of the present disclosure, respectively. The lens circulating water system and the motor circulating water system are mutually independent circulating water systems.

In one embodiment, the semiconductor manufacturing apparatus further includes a water replenishing system 4, the water replenishing system 4 is used for replenishing circulating water into the loop water tank 1, and the water replenishing system 4 is connected with the control circuit 9; the control circuit 9 sends out a water replenishment signal when the second time does not reach the second threshold value, so that the water replenishment system 4 replenishes the liquid level in the loop water tank 1 to a replenishment position. The second time does not reach the second threshold, and the circulating water system is considered to be not leaked, and the second liquid level sensor can be used for prompting the supplementary circulating water at the same time. When the water level reaches the second position and the circulating water system is not leaked, the control circuit sends out a water supplementing signal to enable the water supplementing system 4 to supplement circulating water into the loop water tank 1.

In one embodiment, the water replenishment system 4 comprises at least one of the following: a water supplementing valve 21, a water supplementing filter 22 and a water supplementing pump 23. The water replenishing valve 21, the water replenishing filter 22 and the water replenishing pump 23 are all arranged on the water replenishing pipeline, the water replenishing valve 21 is used for controlling the on-off of the water replenishing pipeline, the water replenishing filter 22 is used for filtering the replenished circulating water, and the water replenishing pump 23 is used for conveying the replenished circulating water to the loop water tank 1. In an exemplary embodiment, the make-up circulating water may also be fed by gravity along the make-up line to the circuit tank 1.

In one embodiment, the circulation water return assembly 3 includes a circulation water return pipe 28, the circulation water return pipe 28 connecting the exposure system 10 and the loop water tank 1, the circulation water return pipe 28 for conveying the circulation water from the exposure system 10 back to the loop water tank 1.

In one embodiment, the circulating water return assembly 3 further comprises at least one of the following: a heat exchanger 12, a preheater 13, a back pressure regulating valve 15, an ultraviolet sterilizer 16 and a back water valve 20.

The recycle line 28 is connected to the first fluid side of the heat exchanger 12 and the second fluid side of the heat exchanger 12 is connected to the industrial process water system 11. By providing the heat exchanger 12 to exchange heat between the circulating water return pipe 28 and the industrial water system 11, heat energy can be effectively utilized, and energy can be saved.

The preheater 13 is provided in the circulation water return pipe 28, and the preheater 13 is provided near the circuit water tank 1. The temperature of the circulating water in the circuit water tank 1 can be brought close to the design temperature by preheating the circulating water returned to the circuit water tank 1 by the preheater 13.

The back pressure regulating valve 15 is arranged on the circulating water return pipe 28, and the back pressure regulating valve 15 can regulate the pressure of the circulating water return pipe 28. The ultraviolet sterilizer 16 is connected in parallel with the back pressure regulating valve 15. The ultraviolet sterilizer 16 may sterilize circulating water flowing therethrough.

In an embodiment, the circulation water supply assembly includes a circulation water supply pipe 27, the circulation water supply pipe 27 connecting the exposure system 10 and the loop water tank 1, the circulation water supply pipe 27 for supplying the circulation water in the loop water tank 1 to the exposure system 10 to cool the exposure system 10.

The circulating water supply assembly further includes at least one of: the precise heater 14, the circulating pump 17, the circulating filter 18 and the water supply valve 19.

The precise heater 14 is disposed on the circulation water supply pipe 27, and the precise heater 14 is used for heating the circulation water to a design temperature to ensure the working temperature of the exposure system 10. Such as to ensure the operating temperature of the projection lens or motor of the exposure system 10.

The circulation pump 17 is provided on the circulation water supply pipe 27, and the circulation pump 17 is used for circulating the circulation water in the circulation water system.

The circulation filter 18 is provided on the circulation water supply pipe 27, and the circulation filter 18 filters the circulation water to avoid clogging of the cooling structure of the exposure system 10.

The water supply valve 19 is provided on the circulation water supply pipe 27. The water supply valve 19 is used for controlling the on-off of the circulation water supply pipe 27.

In one embodiment, the loop tank 1 includes a tank body and a water level indicator, the water level indicator has a water level pipe 5, and the water level pipe 5 is communicated with the tank body, so that the water level in the water level pipe 5 is the same as the water level of the tank body, and the liquid level sensor may be disposed on the tank body, or the liquid level sensor may be disposed on the water level pipe 5.

The water level indicator may further comprise a frame on which the water level pipe 5 is provided, by means of which the water level indicator may be arranged in a suitable position in the semiconductor manufacturing apparatus. For example, the water level indicator may be provided at a position convenient for observation.

In the embodiment of the disclosure, the industrial water system 11 includes a water mixing valve 24, a flow rate setting valve 25 and an industrial water filter 26, the inlet and outlet of the second fluid side of the heat exchanger is connected through the water mixing valve 24, the industrial water can be regulated through the flow rate setting valve 25, and the industrial water is filtered through the industrial water filter 26.

It should be appreciated that various forms of the flows shown above may be used to reorder, add, or delete steps. For example, the steps recited in the present disclosure may be performed in parallel or sequentially or in a different order, provided that the desired results of the technical solutions of the present disclosure are achieved, and are not limited herein.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present disclosure, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

The foregoing is merely specific embodiments of the disclosure, but the protection scope of the disclosure is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the disclosure, and it is intended to cover the scope of the disclosure. Therefore, the protection scope of the present disclosure shall be subject to the protection scope of the claims.

Claims

1. A semiconductor manufacturing apparatus, the apparatus comprising:

the circulating water system comprises a circulating water supply assembly (2), a circulating backwater assembly (3) and a loop water tank (1), wherein the loop water tank (1) is connected with an exposure system (10) through the circulating water supply assembly (2) and the circulating backwater assembly (3);

the liquid level sensor is arranged on the loop water tank (1) and used for detecting the water level in the loop water tank, the liquid level sensor comprises a first liquid level sensor (6) arranged at a first position of the loop water tank (1), the first liquid level sensor (6) detects that the water level in the loop water tank (1) reaches the first position and sends out a first liquid level signal;

the timing circuit (8) is connected with the first liquid level sensor (6), the timing circuit (8) receives the first liquid level signal and generates first time information, and the first time is the time when the liquid level in the loop water tank (1) is reduced from the full position to the first position;

the control circuit (9) is connected with the timing circuit (8), and the control circuit (9) receives the first time information and sends out a leakage alarm signal when the first time reaches a first threshold value.

2. The semiconductor manufacturing apparatus according to claim 1, wherein the liquid level sensor further comprises:

the second liquid level sensor (7) is arranged at a second position of the loop water tank (1), the second position is lower than the first position, the second liquid level sensor (7) detects that the water level in the loop water tank (1) reaches the second position and sends out a second liquid level signal, and the second liquid level sensor (7) is connected with the timing circuit (8);

the timing circuit (8) receives the second liquid level signal and generates second time information, wherein the second time is the time from the time of receiving the first liquid level signal to the time of receiving the second liquid level signal;

the control circuit (9) receives the second time information and sends out a leakage alarm signal when the second time reaches a second threshold value.

3. The semiconductor manufacturing apparatus according to claim 2, wherein the material of the loop tank (1) is plastic; the first liquid level sensor (6) and the second liquid level sensor (7) are respectively capacitive liquid level sensors, and the first liquid level sensor (6) and the second liquid level sensor (7) are respectively arranged on the outer wall surface of the liquid level pipe.

4. The semiconductor manufacturing apparatus according to claim 2, wherein the first liquid level sensor (6) and the second liquid level sensor (7) are each wirelessly connected with the control circuit (9).

5. The semiconductor manufacturing apparatus according to claim 1, wherein the circulating water system includes a lens circulating water system and a motor circulating water system, the lens circulating water system being connected to a projection lens of the exposure system (10) through the circulating water supply assembly (2) and the circulating water return assembly (3) for cooling the projection lens, the motor circulating water system being connected to a motor of the exposure system (10) through the circulating water pipe for cooling the motor.

6. The semiconductor manufacturing apparatus according to claim 2, wherein the apparatus further comprises:

the water replenishing system (4) is used for replenishing circulating water into the loop water tank (1), and the water replenishing system (4) is connected with the control circuit (9);

and the control circuit (9) sends out a water supplementing signal when the second time does not reach a second threshold value so that the water supplementing system (4) supplements the liquid level in the loop water tank (1) to the full position.

7. The semiconductor manufacturing apparatus according to claim 1, wherein the circulating water return assembly (3) comprises:

a circulating water return pipe (28) connecting the exposure system (10) and the loop water tank (1);

the heat exchanger (12), circulating the wet return (28) and connecting the first fluid side of heat exchanger (12), the second fluid side of heat exchanger (12) is connected industry and is made water system (11).

8. The semiconductor manufacturing apparatus according to claim 7, wherein the circulating water return assembly (3) further comprises:

the pre-heater (13) is arranged on the circulating water return pipe (28), and the pre-heater (13) is arranged close to the loop water tank (1);

a back pressure regulating valve (15) arranged on the circulating water return pipe (28);

and the ultraviolet sterilizer (16) is connected with the back pressure regulating valve (15) in parallel.

9. The semiconductor manufacturing apparatus according to claim 1, wherein the circulating water supply assembly comprises:

a circulation water supply pipe (27) connecting the exposure system (10) and the loop water tank (1);

a precision heater (14) arranged on the circulating water supply pipe (27);

a circulation pump (17) provided on the circulation water supply pipe (27);

a circulation filter (18) provided on the circulation water supply pipe (27);

and a water supply valve (19) arranged on the circulating water supply pipe (27).

10. The semiconductor manufacturing apparatus according to claim 1, wherein the circuit water tank (1) includes a water tank body (29) and a water level indicator having a water level pipe (5), the water level pipe (5) communicating with the water tank body (29) such that a water level in the water level pipe (5) is the same as a water level of the water tank body (29), the liquid level sensor is provided on the water tank body (29), or the liquid level sensor is provided on the water level pipe (5).