CN219226221U

CN219226221U - Glow discharge mass spectrometer test auxiliary sample injection foil

Info

Publication number: CN219226221U
Application number: CN202320034405.1U
Authority: CN
Inventors: 周童; 徐国军; 张蛟; 蒋明伟
Original assignee: Xuancheng Advanced Photovoltaic Technology Co ltd; Anhui Dirac New Material Technology Co ltd
Current assignee: Xuancheng Advanced Photovoltaic Technology Co ltd; Anhui Dirac New Material Technology Co ltd
Priority date: 2023-01-05
Filing date: 2023-01-05
Publication date: 2023-06-20
Anticipated expiration: 2033-01-05

Abstract

The utility model relates to the technical field of glow discharge mass spectrometer testing equipment, in particular to an auxiliary sample injection foil for glow discharge mass spectrometer testing. In order to solve the problem that low-melting-point metals such as indium and gallium are easy to melt and cause short circuit in the GDMS test process, so that the test is terminated. The foil is arranged on a sample holder of a glow discharge mass spectrometer, a test sample is placed on the upper part of the foil, the foil is circular in top view, the inner diameter of the foil is 12-18 mm, the outer diameter of the foil is 20-40 mm, and the thickness of the foil is 0.1-0.3mm.

Description

Glow discharge mass spectrometer test auxiliary sample injection foil

Technical Field

The utility model relates to the technical field of glow discharge mass spectrometer testing equipment, in particular to an auxiliary sample injection foil for glow discharge mass spectrometer testing.

Background

GDMS is short for glow discharge mass spectrometry and has the advantages of high sensitivity (E10 cps or more), low detection limit (sub ppb level), wide element analysis range (74 elements can be tested), and the like. ELEMENTGD is a glow discharge mass spectrometer developed by the company Simer-Feier, U.S.A., ELEMENTGD employs a Grimm ion source, one of which is characterized by a particularly close proximity of the anode cap to the sample (i.e., cathode), about 200 μm apart, which allows the sputtering zone to be severely limited to a specific range, resulting in good sputtering morphology. However, the disadvantage is that the influence of the flatness of the sample surface is large, and if the surface of the sample is provided with bulges or more reverse depositions exist in the sputtering process, the short circuit between the sample and the anode cap, namely the short circuit is generated. Short circuit can seriously affect the test efficiency of GDMS, and sample preparation and sample injection are needed again. The most problematic problem encountered in ELEMENTGD applications is shorting, which limits further widespread use of the instrument. Particularly, low melting point metals such as indium and gallium are easy to melt when heated in the GDMS test process, so that short circuit is caused, and the test is terminated.

Disclosure of Invention

Therefore, the utility model aims to provide an auxiliary sample injection foil for glow discharge mass spectrometer test, which solves the problems that low-melting-point metals such as indium and gallium are heated in the GDMS test process, are easy to melt and cause short circuit, and the test is terminated.

Based on the above purpose, the utility model provides an auxiliary sample injection foil for glow discharge mass spectrometer test, which is arranged on a sample holder of the glow discharge mass spectrometer, a test sample is placed on the upper part of the foil, the top view of the foil is circular, the inner diameter of the foil is 12-18 mm, the outer diameter of the foil is 20-40 mm, and the thickness of the foil is 0.1-0.3mm.

As a further improvement of the present application, the purity of the foil is above 99.99%, and the material is preferably tantalum.

As a further development of the application, the foil has an inner diameter of 12 mm.

As a further development of the application, the foil has an outer diameter of 40 mm.

As a further improvement of the present application, the foil surface is smooth.

The utility model has the beneficial effects that: by arranging the foil, the distance between the anode cap and the test sample (cathode) in the Grimm ion source can be increased, so that the problem of short circuit is avoided, and the method is particularly aimed at a low-melting-point sample.

Drawings

In order to more clearly illustrate the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only of the utility model and that other drawings can be obtained from them without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a glow discharge mass spectrometer test auxiliary sample injection foil structure according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a structure of a glow discharge mass spectrometer test auxiliary sample foil in combination with a sample holder according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a glow discharge mass spectrometer test auxiliary sample foil combined with a test sample according to an embodiment of the present utility model;

FIG. 4 is a schematic diagram of a structure of a glow discharge mass spectrometer test auxiliary sample foil in combination with a test sample according to an embodiment of the present utility model;

fig. 5 is a schematic structural diagram of a glow discharge mass spectrometer test auxiliary sample injection foil when matched with a test sample according to an embodiment of the present utility model.

Marked in the figure as:

1. a sample holder; 2. testing the sample; 3. a foil.

Detailed Description

The present utility model will be further described in detail with reference to specific embodiments in order to make the objects, technical solutions and advantages of the present utility model more apparent.

It is to be noted that unless otherwise defined, technical or scientific terms used herein should be taken in a general sense as understood by one of ordinary skill in the art to which the present utility model belongs. The terms "first," "second," and the like, as used herein, do not denote any order, quantity, or importance, but rather are used to distinguish one element from another. The word "comprising" or "comprises", and the like, means that elements or items preceding the word are included in the element or item listed after the word and equivalents thereof, but does not exclude other elements or items. The terms "connected" or "connected," and the like, are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "upper", "lower", "left", "right", etc. are used merely to indicate relative positional relationships, which may also be changed when the absolute position of the object to be described is changed.

Embodiment one: as shown in fig. 1-2, an auxiliary sample injection foil for glow discharge mass spectrometer test is arranged on a sample holder 1 of the glow discharge mass spectrometer, a test sample 2 is placed on the upper part of the foil 3, the foil 3 is circular in top view, the inner diameter is 12 mm, the outer diameter is 40 mm, the foil 3 increases the distance between an anode cap and a cathode, and in order to avoid influencing the signal intensity of the test, the thickness of the foil 3 is 0.1-0.3mm.

When in use, as shown in fig. 2, the foil 3 is aligned with the detection hole in the accommodating groove of the sample holder 1 and placed in the accommodating groove, when the test sample 2 is a gallium block, the precooled gallium block is taken out and immediately placed above the foil 3, and finally the sample holder 1 and the gallium block are loaded and placed in a glow discharge mass spectrometer for testing. The gallium block needs to be cooled in a refrigerator or a liquid nitrogen tank at-80 ℃ for more than 1 hour before testing.

Embodiment two: as shown in fig. 3-4, the foil 3 is in a shape of a circular plate, the outer diameter of the circular plate is 6mm, a plurality of foils 3 are distributed at the bottom of the test sample 2, and the test sample 2 is suspended, so that the distance between the anode cap and the cathode is increased, and the influence on the signal intensity of the test is further avoided.

In order to avoid the influence of the false sputtering on the detection data, the purity of the foil 3 is over 99.99 percent, and the high purity effectively avoids the reaction between the foil 3 and the test sample 2, and the material is tantalum.

As a further development of the present application, the foil 3 may also be rectangular, as shown in fig. 5.

Those of ordinary skill in the art will appreciate that: the discussion of any of the embodiments above is merely exemplary and is not intended to suggest that the scope of the utility model (including the claims) is limited to these examples; the technical features of the above embodiments or in the different embodiments may also be combined within the idea of the utility model, the steps may be implemented in any order and there are many other variations of the different aspects of the utility model as described above, which are not provided in detail for the sake of brevity.

The present utility model is intended to embrace all such alternatives, modifications and variances which fall within the broad scope of the appended claims. Therefore, any omission, modification, equivalent replacement, improvement, etc. of the present utility model should be included in the scope of the present utility model.

Claims

1. The auxiliary sample injection foil for the glow discharge mass spectrometer test is arranged on a sample holder (1) of the glow discharge mass spectrometer, and a test sample (2) is placed on the upper part of the foil (3), and is characterized in that the top view of the foil (3) is circular, the inner diameter of the foil is 12-18 mm, the outer diameter of the foil is 20-40 mm, and the thickness of the foil is 0.1-0.3mm.

2. The glow discharge mass spectrometer test auxiliary sample injection foil according to claim 1, characterized in that the purity of the foil (3) is above 99.99%.

3. The glow discharge mass spectrometer test auxiliary sample injection foil according to claim 1, characterized in that the foil (3) has an inner diameter of 12 mm.

4. The glow discharge mass spectrometer test auxiliary sample injection foil according to claim 1, characterized in that the foil (3) has an outer diameter of 40 mm.

5. The glow discharge mass spectrometer test auxiliary sample injection foil according to claim 1, characterized in that the foil (3) is smooth in surface.