CN219200825U

CN219200825U - Portable equipment throttle valve detector

Info

Publication number: CN219200825U
Application number: CN202320753622.6U
Authority: CN
Inventors: 陈云龙; 陈志远
Original assignee: Knight Enterprises Suzhou Industrial Park Co ltd
Current assignee: Knight Enterprises Suzhou Industrial Park Co ltd
Priority date: 2023-04-07
Filing date: 2023-04-07
Publication date: 2023-06-16
Anticipated expiration: 2033-04-07

Abstract

The utility model belongs to the technical field of throttle valve production, and particularly relates to a portable equipment throttle valve detector which comprises a shell and a driving device, wherein the shell comprises a handle, a sleeve is arranged at the top of the handle, and a display device is arranged on the shell; the device is simple in structure, easy to operate, reasonable in shape and convenient to carry.

Description

Portable equipment throttle valve detector

Technical Field

The utility model belongs to the technical field of throttle valve production, and particularly relates to a portable equipment throttle valve detector.

Background

In semiconductor device manufacturing processes, it is often desirable to place a wafer to be processed within a process chamber provided with semiconductor processing equipment. And delivering the process gas into the evacuated processing chamber through a throttle valve. The semiconductor throttle valve is used in semiconductor equipment to control the pressure of the chamber through the opening and closing angle of the throttle valve, and when the semiconductor throttle valve is maintained, accurate data are needed to determine that the throttle valve after maintenance can meet the requirement of semiconductor process.

Currently, the air intake throttle valve requires the installation of a spring and multiple spring mechanisms at the time of assembly. However, there is no detection device on the market for determining whether or not there are a missing spring and a plurality of spring mechanisms during assembly of the air suction throttle valve, and only in the subsequent use process, it is possible to determine whether or not there are a missing spring and a plurality of spring mechanisms, which is costly. For this reason, some studies have been made on the person of the same, for example, chinese patent application No. CN202122145004.7 shown in fig. 1 discloses an air suction throttle valve detecting apparatus, which includes a fixed assembly, a driving mechanism connected to the top of the sliding assembly and used for driving the sliding assembly to move up and down in the fixed assembly, and a pressure sensor connected to the bottom of the sliding assembly and used for applying a force to the air suction throttle valve to detect whether there are springs and a plurality of spring mechanisms in the air suction throttle valve.

However, the throttle valve detection device in the prior art is relatively complicated in structure, inconvenient to carry and use, and low in detection efficiency, and therefore, the throttle valve detector for the portable equipment is improved.

Disclosure of Invention

Aiming at the defects in the prior art, the utility model provides a portable equipment throttle valve detector which is used for solving the problems that a throttle valve detection device in the prior art is relatively complicated in structure, inconvenient to carry, inconvenient to use and low in detection efficiency.

In order to solve the technical problems, the utility model adopts the following technical scheme:

the portable equipment throttle valve detector comprises a shell and a driving device, wherein the shell comprises a handle, a sleeve is arranged at the top of the handle, and a display device is arranged on the shell;

the driving device is fixedly arranged in the inner cavity of the sleeve, the movable end of the driving device is connected with a pressing rod, the radius of the rear end of the pressing rod is larger than that of the front end of the pressing rod, the front end of the pressing rod is provided with a pressure sensor, and the sleeve is provided with a limiting mechanism for limiting the movable length of the pressing rod;

the limiting mechanism comprises a connecting column and a limiting ring, the limiting ring is connected with the sleeve through the connecting column, and the compression rod is movably arranged in the limiting ring.

Further, the display device comprises a display screen embedded on the surface of the sleeve and a microprocessor positioned in the grip, and the microprocessor is connected with the pressure sensor.

Further, the driving device comprises an electric push rod, a switch arranged on the handle and an indicator lamp.

Further, a charging seat communicated with an internal storage battery is arranged at the bottom of the grip.

Further, a heat dissipation hole is formed in the shell of the grip.

Compared with the prior art, the utility model has the following beneficial effects:

1. the device is characterized in that a pistol type shell is arranged, a driving device provided with a pressure sensor is arranged on the shell, a display device is assembled, the detector can be held by one hand during use, an electric push rod is operated through a control switch to drive a compression rod to stretch and retract, the compression rod contacts an original piece of an air suction throttle valve to be detected, pressure data of the contact is detected in real time, and whether a spring mechanism is installed or not is judged;

2. the device has simple structure, easy operation, reasonable shape and convenient carrying.

Drawings

Fig. 1 is a schematic structural view of an air suction throttle valve detecting device (CN 202122145004.7) in the prior art;

FIG. 2 is a schematic perspective view (view angle I) of a throttle valve detector for portable equipment according to an embodiment of the present utility model;

FIG. 3 is a schematic perspective view (view II) of an embodiment of a throttle detector for a portable device according to the present utility model;

fig. 4 is a schematic perspective view (view three) of an embodiment of a throttle valve detector for a portable device according to the present utility model;

reference numerals in the drawings of the specification include:

a shell 1, a driving device 2, a limiting mechanism 3 and a pressure sensor 4;

grip 11, charging stand 12, switch 13, sleeve 14, display device 15, indicator light 16;

the electric push rod 21, the compression rod 22, the connecting column 31 and the limit ring 32.

Detailed Description

In order that those skilled in the art will better understand the present utility model, the following technical scheme of the present utility model will be further described with reference to the accompanying drawings and examples.

Wherein the drawings are for illustrative purposes only and are shown in schematic, non-physical, and not intended to be limiting of the present patent; for the purpose of better illustrating embodiments of the utility model, certain elements of the drawings may be omitted, enlarged or reduced and do not represent the size of the actual product; it will be appreciated by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.

The same or similar reference numbers in the drawings of embodiments of the utility model correspond to the same or similar components; in the description of the present utility model, it should be understood that, if the terms "upper", "lower", "left", "right", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, only for convenience in describing the present utility model and simplifying the description, rather than indicating or implying that the apparatus or elements being referred to must have a specific orientation, be constructed and operated in a specific orientation, so that the terms describing the positional relationships in the drawings are merely for exemplary illustration and should not be construed as limiting the present patent, and that the specific meaning of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances.

In the description of the present utility model, unless explicitly stated and limited otherwise, the term "coupled" or the like should be interpreted broadly, as it may be fixedly coupled, detachably coupled, or integrally formed, as indicating the relationship of components; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between the two parts or interaction relationship between the two parts. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Embodiment one:

as shown in fig. 2-4, the present utility model. Specifically, the portable equipment throttle valve detector comprises a shell 1 and a driving device 2, wherein the shell 1 comprises a grip 11, a sleeve 14 is arranged at the top of the grip 11, and a display device 15 is arranged on the shell 1; the driving device 2 is fixedly arranged in the inner cavity of the sleeve 14, the movable end of the driving device 2 is connected with a pressing rod 22, the radius of the rear end of the pressing rod 22 is larger than that of the front end, the front end of the pressing rod 22 is provided with a pressure sensor 4, and the sleeve 14 is provided with a limiting mechanism 3 for limiting the movable length of the pressing rod 22; the limiting mechanism 3 comprises a connecting column 31 and a limiting ring 32, the limiting ring 32 is connected with the sleeve 14 through the connecting column 31, and the compression bar 22 is movably arranged in the limiting ring 32.

The display device 15 comprises a display screen embedded on the surface of the sleeve 14 and a microprocessor positioned inside the grip 11, and the microprocessor is connected with the pressure sensor 4. The driving device 2 includes an electric push rod 21, a switch 13 provided on the grip 11, and an indicator lamp 16. The bottom of the grip 11 is provided with a charging seat 12 which is communicated with an internal storage battery. The shell of the handle 11 is provided with a heat radiation hole.

The detector can be held by one hand when in use, the electric push rod 21 is operated through the control switch 13 to drive the compression bar 22 to stretch and retract to move, the pressure data of the contact is detected in real time by contacting with an original piece of the air suction throttle valve to be detected, if the pressure data of the pressure sensor 4 provided with the compression bar 22 of the spring mechanism is changed, the data of the pressure sensor 4 is processed by the microprocessor and displayed through the display screen, so that a detector is helped to judge whether the spring mechanism is installed or not, and the compression bar 22 is prevented from moving too much by arranging the limiting mechanism 3 so as not to damage the detected original piece.

The foregoing is merely exemplary of the present utility model, and the specific structures and features well known in the art are not described in any way herein, so that those skilled in the art will be able to ascertain all prior art in the field, and will not be able to ascertain any prior art to which this utility model pertains, without the general knowledge of the skilled person in the field, before the application date or the priority date, to practice the present utility model, with the ability of these skilled persons to perfect and practice this utility model, with the help of the teachings of this application, with some typical known structures or methods not being the obstacle to the practice of this application by those skilled in the art. It should be noted that modifications and improvements can be made by those skilled in the art without departing from the structure of the present utility model, and these should also be considered as the scope of the present utility model, which does not affect the effect of the implementation of the present utility model and the utility of the patent.

Claims

1. The utility model provides a portable equipment throttle valve detector, includes casing (1) and drive arrangement (2), its characterized in that: the shell (1) comprises a handle (11), a sleeve (14) is arranged at the top of the handle (11), and a display device (15) is arranged on the shell (1);

the driving device (2) is fixedly arranged in the inner cavity of the sleeve (14), the movable end of the driving device (2) is connected with a pressing rod (22), the radius of the rear end of the pressing rod (22) is larger than that of the front end, the front end of the pressing rod (22) is provided with a pressure sensor (4), and the sleeve (14) is provided with a limiting mechanism (3) for limiting the movable length of the pressing rod (22);

the limiting mechanism (3) comprises a connecting column (31) and a limiting ring (32), the limiting ring (32) is connected with the sleeve (14) through the connecting column (31), and the compression rod (22) is movably arranged in the limiting ring (32).

2. A portable device throttle valve detector as defined in claim 1, wherein: the display device (15) comprises a display screen embedded on the surface of the sleeve (14) and a microprocessor positioned in the grip (11), and the microprocessor is connected with the pressure sensor (4).

3. A portable device throttle valve detector as defined in claim 2, wherein: the driving device (2) comprises an electric push rod (21), a switch (13) arranged on the handle (11) and an indicator lamp (16).

4. A portable device throttle valve detector as claimed in claim 3, wherein: the bottom of the handle (11) is provided with a charging seat (12) communicated with an internal storage battery.

5. A portable device throttle valve detector as defined in claim 4, wherein: the shell of the handle (11) is provided with a heat dissipation hole.