CN219200773U

CN219200773U - Leakage detection device for evaporation source water cooling jacket

Info

Publication number: CN219200773U
Application number: CN202320136886.7U
Authority: CN
Inventors: 何军舫; 王军勇
Original assignee: Boyu Tianjin Semiconductor Material Co ltd; Boyu Zhaoyang Semiconductor Technology Co ltd; Boyu Semiconductor Vessel Craftwork Technology Co ltd
Current assignee: Boyu Tianjin Semiconductor Material Co ltd; Boyu Zhaoyang Semiconductor Technology Co ltd; Boyu Semiconductor Vessel Craftwork Technology Co ltd
Priority date: 2023-02-07
Filing date: 2023-02-07
Publication date: 2023-06-16
Anticipated expiration: 2033-02-07

Abstract

The application discloses a leak detection device for an evaporation source water cooling jacket, which comprises an evaporation source main body and a leak detection mechanism; the evaporation source main body comprises a supporting disc, a feed through component and a water cooling jacket; the top surface and the bottom surface of the supporting disc are respectively provided with a feed through component and a water cooling jacket; the support disc is fixedly provided with a water cooling inlet and a water cooling outlet corresponding to the water cooling sleeve; the support disc is detachably provided with a leak detection mechanism for leak detection of the water cooling jacket; the leak detection mechanism comprises a mounting flange and an inlet pipe and an outlet pipe. The leakage detection device for the evaporation source water cooling jacket is convenient to assemble and disassemble, good in sealing effect and high in working efficiency.

Description

Leakage detection device for evaporation source water cooling jacket

Technical Field

The application relates to the technical field of vacuum evaporation, in particular to a leakage detection device for an evaporation source water cooling jacket.

Background

The evaporation source is mainly applied to the field of vacuum evaporation of OLED, CIGS, MBE and other materials, and generally consists of a vacuum-atmosphere through structure (feed through assembly), a water cooling structure (water cooling jacket), a heater structure, a heat insulation structure, a thermocouple structure, a supporting structure and other structural members, wherein the water cooling jacket is mainly used for ensuring that the outside temperature of the evaporation source can be controlled within a safe range when the evaporation source runs at high temperature, so that the quality of the evaporation source affects the reliability of the whole evaporation source.

The water pressure detection and the vacuum leak detection are generally required to be carried out on the water cooling jacket before delivery, and the reliability of the water cooling jacket is confirmed through the detection results of positive and negative pressure. At present, the water cooling jacket leakage detection work is mostly to seal a water cooling inlet and a water cooling outlet through some simple tools or vacuum mud and perform leakage detection work, and errors are very easy to occur during operation, so that the test result and the test efficiency are affected. Therefore, a leakage detection device which is convenient to assemble and disassemble, high in testing efficiency and high in testing quality aiming at the evaporation source water cooling jacket needs to be designed.

Disclosure of Invention

In view of the above-mentioned drawbacks or shortcomings in the prior art, it is desirable to provide a leak detection device for an evaporation source water jacket that is convenient to disassemble and assemble, has a good sealing effect, and has high working efficiency.

The application provides a leak detection device for an evaporation source water cooling jacket, which comprises an evaporation source main body and a leak detection mechanism;

the evaporation source main body comprises a supporting disc, a feed through component and a water cooling jacket; the top surface and the bottom surface of the supporting disc are respectively provided with a feed through component and a water cooling jacket; the support disc is fixedly provided with a water cooling inlet and a water cooling outlet corresponding to the water cooling sleeve;

the support disc is detachably provided with a leak detection mechanism for leak detection of the water cooling jacket; the leak detection mechanism comprises a mounting flange and an inlet pipe and an outlet pipe.

Preferably, the top surface of the supporting disc is detachably provided with a mounting flange; one end of the supporting disc in the diameter direction is provided with a first through hole in a penetrating way along the axis direction; a plurality of first through holes are uniformly formed along the circumferential direction of the support disc;

screw holes are formed in the mounting flange in a penetrating manner along the axial direction of the mounting flange corresponding to the first through holes; the screw holes correspond to the first through holes and are uniformly formed in a plurality of positions along the circumferential direction of the mounting flange.

Preferably, the mounting flange is provided with an inlet and outlet hole corresponding to the water-cooling inlet and outlet along the axial direction of the mounting flange in a penetrating way; the top surface of the inlet and outlet hole is fixedly provided with an inlet and outlet pipe; the top ends of the two inlet and outlet pipes are respectively fixedly provided with a leak detector quick connector and a pressurizing pump quick connector.

Preferably, the periphery of the bottom surface of the access hole is fixedly provided with a first sealing groove along the axial direction.

Preferably, the center of the mounting flange is provided with a center through hole in a penetrating manner along the axis direction of the mounting flange corresponding to the feed through component; the periphery of the bottom surface of the central through hole is fixedly provided with a second sealing groove along the axial direction.

Preferably, the support disc is provided with a second through hole in a penetrating manner along the axial direction; the second through holes are formed in a plurality of the first through holes;

a positioning hole is formed in the mounting flange in a penetrating manner along the axial direction of the mounting flange, and corresponds to the second through hole; a positioning pin is arranged in the positioning hole and used for positioning the second through hole; the locating holes and the locating pins are matched in groups, and a plurality of groups of locating holes are arranged corresponding to the second through holes.

Compared with the prior art, the beneficial effects of the application are as follows:

the utility model discloses a through setting up leak hunting mechanism, leak hunting mechanism designs to evaporation source water jacket, locating hole and locating pin utilize the preformed hole in the evaporation source main part to realize the quick positioning of supporting disk, mounting flange utilizes preformed hole in the evaporation source main part and supporting disk installation, fixed, the location, the dismouting is simple quick and convenient, test cycle has been reduced, leak detector quick-operation joint and the pump quick-operation joint that pushes down on the business turn over pipe are used for quick connect leak detector and pump that pushes down respectively, the leak hunting work of being convenient for goes on, work efficiency has been increased, and be provided with multiple sealing means on the mounting flange, sealed effectual, leak hunting work quality is high.

It should be understood that the description in this summary is not intended to limit key or critical features of embodiments of the present application, nor is it intended to be used to limit the scope of the present application. Other features of the present application will become apparent from the description that follows.

Drawings

Other features, objects and advantages of the present application will become more apparent upon reading of the detailed description of non-limiting embodiments, made with reference to the following drawings, in which:

fig. 1 is a schematic structural diagram of a leak detection device for an evaporation source water jacket according to an embodiment of the present application;

fig. 2 is a schematic structural diagram of a leak detection mechanism of a leak detection device for an evaporation source water jacket according to an embodiment of the present application.

Reference numerals in the drawings: 1. an evaporation source main body; 2. a leak detection mechanism;

11. a support plate; 12. a feedthru component; 13. a water cooling jacket; 14. water-cooling the inlet and the outlet; 15. a first through hole; 16. a second through hole;

21. a mounting flange; 22. an inlet pipe and an outlet pipe; 23. a screw hole; 24. an inlet and outlet hole; 25. a leak detector quick connector; 26. a rapid joint of the pressurizing pump; 27. a central through hole;

31. a first seal groove; 32. a second seal groove; 33. positioning holes; 34. and (5) positioning pins.

Detailed Description

The present application is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the application and not limiting of the application. It should be noted that, for convenience of description, only the portions related to the application are shown in the drawings.

It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other. The present application will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.

Referring to fig. 1 and 2, an embodiment of the present application provides a leak detection device for an evaporation source water-cooled jacket, which includes an evaporation source main body 1 and a leak detection mechanism 2;

the evaporation source main body 1 comprises a supporting disc 11, a feed through component 12 and a water cooling jacket 13; the top surface and the bottom surface of the supporting disc 11 are respectively provided with a feed through component 12 and a water cooling jacket 13; a water cooling inlet and outlet 14 is fixedly arranged on the supporting disc 11 corresponding to the water cooling sleeve 13;

the support disc 11 is detachably provided with a leak detection mechanism 2 for leak detection of the water cooling jacket 13; the leak detection mechanism 2 includes a mounting flange 21 and an inlet and outlet pipe 22.

In this embodiment, the first through hole 15 and the second through hole 16 on the supporting disc 11 are reserved holes on the evaporation source supporting structure, the leak detection mechanism 2 is designed for the evaporation source water jacket, the positioning holes 33 and the positioning pins 34 utilize the reserved holes on the evaporation source main body 1 to realize the rapid positioning of the supporting disc 11, the mounting flange 21 utilizes the reserved holes on the evaporation source main body 1 to be mounted and fixed with the supporting disc 11, positioning and dismounting are simple, convenient and rapid, the test period is reduced, the leak detector rapid connector 25 and the pressurizing pump rapid connector 26 on the inlet pipe 22 are respectively used for rapidly connecting the leak detector and the pressurizing pump, the leak detection is convenient to perform, the working efficiency is improved, multiple sealing measures are provided on the mounting flange 21, the sealing effect is good, and the leak detection working quality is high.

In a preferred embodiment, the top surface of the support plate 11 is detachably provided with a mounting flange 21; one end of the supporting disk 11 in the diameter direction is provided with a first through hole 15 in a penetrating manner along the axial direction; the first through holes 15 are uniformly provided in plurality along the circumferential direction of the support plate 11;

screw holes 23 are formed in the mounting flange 21 in a penetrating manner along the axial direction of the mounting flange 21 corresponding to the first through holes 15; the screw holes 23 are uniformly provided in plurality along the circumferential direction of the mounting flange 21 corresponding to the first through holes 15.

Referring to fig. 1 and 2, in this embodiment, the first through hole 15 is a preformed hole on the evaporation source supporting structure, and the screw hole 23 is disposed corresponding to the first through hole 15 for mounting a connecting piece, so as to facilitate detachable connection between the supporting disc 11 and the mounting flange 21.

In a preferred embodiment, the mounting flange 21 is provided with an inlet and outlet hole 24 corresponding to the water cooling inlet and outlet 14 along the axial direction of the mounting flange 21; the top surface of the access hole 24 is fixedly provided with an access pipe 22; the top ends of the two inlet and outlet pipes 22 are fixedly provided with leak detector quick connectors 25 and pressurizing pump quick connectors 26 respectively.

Referring to fig. 1 and 2, in this embodiment, two water cooling inlets and outlets 14, two water cooling inlets and outlets 24, and two water cooling pipes 22 are respectively provided, and the leak detector quick connector 25 and the pressurizing pump quick connector 26 are respectively used for quick connection of the leak detector and the pressurizing pump for leak detection operation, and correspond to water inlet and water outlet operation of the water cooling jacket 13.

During leak detection, a plurality of positioning pins 34 on the mounting flange 21 are inserted corresponding to the second through holes 16 on the supporting plate 11 to finish positioning alignment of the evaporation source main body 1 and the mounting flange 21, then connecting pieces such as screws penetrate through the first through holes 15 on the supporting plate 11 and are connected into screw holes 23 on the mounting flange 21 in a threaded manner to finish connection fixation of the evaporation source main body 1 and the mounting flange 21, then the leak detector and the pressurizing pump are selectively connected on the quick connector 25 and the quick connector 26 of the pressurizing pump, leak detection is performed by using the leak detector and the pressurizing pump, water pressure and vacuum leakage rate detection of the water cooling jacket 13 is realized by using the leak detection mechanism, interference of human factors is avoided, and detection efficiency is greatly improved.

In a preferred embodiment, the periphery of the bottom surface of the access hole 24 is fixedly provided with a first seal groove 31 along the axial direction.

Referring to fig. 1 and 2, in this embodiment, a sealing ring is detachably disposed in the first sealing groove 31, so that the connection between the inlet and outlet holes 24 and the water-cooling inlet and outlet 14 is sealed when the mounting flange 21 and the support plate 11 are fixedly mounted, and normal leakage detection is ensured.

In a preferred embodiment, a central through hole 27 is formed in the center of the mounting flange 21 corresponding to the Feedthrough assembly 12 along the axial direction of the mounting flange 21; a second seal groove 32 is fixedly provided along the axis direction at the bottom surface periphery of the center through hole 27.

Referring to fig. 1 and 2, in this embodiment, a central through hole 27 is used for accommodating the feedback assembly 12, and a sealing ring is detachably disposed in the second sealing groove 32, so that a sealing effect is ensured when the mounting flange 21 is fixedly mounted on the support disc 11, and normal leakage detection operation is ensured.

In a preferred embodiment, the support plate 11 is provided with a second through hole 16 penetrating in the axial direction; the second through holes 16 are provided in plurality;

a positioning hole 33 is formed in the mounting flange 21 in a penetrating manner along the axial direction of the mounting flange 21 corresponding to the second through hole 16; a positioning pin 34 is arranged in the positioning hole 33 and is used for positioning the second through hole 16; the positioning holes 33 and the positioning pins 34 are arranged in groups which are matched, and a plurality of groups are arranged corresponding to the second through holes 16.

Referring to fig. 1 and 2, in this embodiment, the second through hole 16 is a preformed hole on the evaporation source supporting structure, and the positioning hole 33 and the positioning pin 34 are disposed corresponding to the second through hole 16, and are used for positioning the mounting position of the mounting flange 21, so that the mounting flange 21 can quickly position the supporting disc 11, and the water cooling inlet and outlet 14 and the inlet and outlet hole 24 can be quickly positioned.

In the description of the present specification, the terms "connected," "mounted," "secured," and the like are to be construed broadly, and for example, "connected" may be a fixed connection, a removable connection, or an integral connection; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the terms in this application will be understood by those of ordinary skill in the art as the case may be.

In the description of the present specification, the terms "one embodiment," "some embodiments," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and variations may be made to the present application by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application should be included in the protection scope of the present application.

Claims

1. The leakage detecting device for the evaporation source water cooling jacket is characterized by comprising an evaporation source main body and a leakage detecting mechanism;

the evaporation source main body comprises a supporting disc, a feed through component and a water cooling jacket; the top surface and the bottom surface of the supporting disc are respectively provided with the feed through component and the water cooling jacket; the support disc is fixedly provided with a water cooling inlet and a water cooling outlet corresponding to the water cooling sleeve;

the support disc is detachably provided with the leak detection mechanism for leak detection of the water cooling jacket; the leak detection mechanism comprises a mounting flange and an inlet pipe and an outlet pipe.

2. The leakage detection device for the evaporation source water cooling jacket according to claim 1, wherein the top surface of the support plate is detachably provided with the mounting flange; one end of the supporting disc in the diameter direction is provided with a first through hole in a penetrating manner along the axis direction; the first through holes are uniformly formed in a plurality of positions along the circumferential direction of the supporting disc;

screw holes are formed in the mounting flange in a penetrating manner along the axial direction of the mounting flange, corresponding to the first through holes; the screw holes are uniformly formed in the circumference of the mounting flange corresponding to the first through holes.

3. The leakage detection device for the evaporation source water cooling jacket according to claim 2, wherein the mounting flange is provided with an inlet and outlet hole corresponding to the water cooling inlet and outlet along the axial direction of the mounting flange; the top surface of the inlet and outlet hole is fixedly provided with the inlet and outlet pipe; the top ends of the two inlet and outlet pipes are respectively fixedly provided with a leak detector quick connector and a pressurizing pump quick connector.

4. The leakage detection device for the evaporation source water cooling jacket according to claim 3, wherein a first sealing groove is fixedly formed on the periphery of the bottom surface of the inlet and outlet hole along the axial direction.

5. The leakage detection device for the evaporation source water cooling jacket according to claim 4, wherein a center through hole is formed in the center of the mounting flange in a penetrating manner along the axis direction of the mounting flange, corresponding to the feedthru assembly; and a second sealing groove is fixedly formed in the periphery of the bottom surface of the central through hole along the axial direction.

6. The leakage detection device for the evaporation source water cooling jacket according to claim 5, wherein the support disc is provided with a second through hole in a penetrating manner along the axial direction; the second through holes are formed in a plurality of parts;

a positioning hole is formed in the mounting flange in a penetrating manner along the axial direction of the mounting flange, and corresponds to the second through hole; a positioning pin is arranged in the positioning hole and used for positioning the second through hole; the positioning holes and the positioning pins are matched in groups, and a plurality of groups of positioning holes are formed corresponding to the second through holes.