CN219190035U

CN219190035U - Auxiliary disassembling tool

Info

Publication number: CN219190035U
Application number: CN202223384495.1U
Authority: CN
Inventors: 程刚
Original assignee: Yuexin Semiconductor Technology Co ltd
Current assignee: Yuexin Semiconductor Technology Co ltd
Priority date: 2022-12-16
Filing date: 2022-12-16
Publication date: 2023-06-16
Anticipated expiration: 2032-12-16

Abstract

The utility model provides an auxiliary disassembling tool, and relates to the technical field of integrated circuit manufacturing. The auxiliary dismounting tool is used for dismounting an annular piece of PVD equipment, the annular piece is installed on the heater, the heater is provided with a hole site, the auxiliary dismounting tool comprises an expansion clamping seat and a push rod, the expansion clamping seat is provided with a deformation part, the deformation part can be clamped in the hole site of the heater through extrusion deformation, a first through hole for the push rod to pass through is formed in the expansion clamping seat, and the push rod can move in the first through hole. According to the utility model, the hole site existing in the heater is utilized, the PVD equipment is not required to be modified, the expansion clamping seat is clamped in the hole site of the heater through the extrusion deformation of the deformation part, and a fixed fulcrum is provided for the ejector rod, so that the ejector rod is convenient to gradually screw in and jack up the annular part, the rapid disassembly operation of the annular part and the heater is realized, and the disassembly efficiency and the safety are improved.

Description

Auxiliary disassembling tool

Technical Field

The utility model relates to the technical field of integrated circuit manufacturing, in particular to an auxiliary disassembling tool.

Background

Physical Vapor Deposition (PVD) refers to a process in which physical processes are used to effect transfer of a substance, and atoms or molecules are transferred from a sputtering cathode or evaporation source onto a substrate surface. The PVD equipment has the function of spraying particles with special properties (high strength, wear resistance, heat dissipation, corrosion resistance and the like) on a parent body with lower properties, so that the parent body has better properties, and the basic methods for processing PVD equipment comprise vacuum evaporation, sputtering, ion plating and the like.

In a chamber of a PVD apparatus, an annular member (deprisk) in a process kit (process) is fixed on a heater (heater) by screws, and since the diameter of the heater is smaller than that of a wafer, a peripheral portion of the heater cannot be covered by the wafer and the annular member, the heater is directly exposed in the chamber, and as the progress of the process advances, film deposition occurs on the heater, so that a gap between the heater and the annular member is smaller and smaller, and then the annular member is blocked on the heater, which is inconvenient to disassemble.

At present, for disassembling the annular piece, a mode of scraping a deposited film layer between the heater and a gap at the side surface of the annular piece is generally adopted, and then a thin sheet or a straight line or the like is adopted to tilt the gap between the heater and the bottom of the annular piece, so that the heater is separated from the annular piece. The above-described disassembly process is inconvenient to operate, time consuming and prone to various degrees of damage to the ring and other components.

Disclosure of Invention

The utility model aims to provide an auxiliary dismounting tool for solving the problem that an annular piece and a heater in the conventional PVD equipment are inconvenient to dismount.

To solve the above technical problems, the present utility model provides an auxiliary dismounting tool for dismounting an annular member of a PVD apparatus, the PVD apparatus including a heater on which the annular member is mounted, the heater having a hole site, the auxiliary dismounting tool comprising: an expansion clamping seat and a push rod; the expansion clamping seat is provided with a deformation part, and the deformation part is clamped in a hole position on the heater through extrusion deformation; the expansion clamping seat is provided with a first through hole for the ejector rod to pass through, and the first through hole is positioned in a hole position of the heater; the ejector rod is detachably connected with the first through hole and can move in the first through hole.

Optionally, the deformation part includes at least two elastic blocks, and at least two elastic blocks are arranged at intervals along the circumferential direction of the first through hole;

at least two elastic blocks are clamped in hole sites on the heater through internal extrusion expansion or external elastic compression.

Optionally, the elastic block further comprises a jackscrew, wherein the jackscrew is in threaded connection with the first through hole and is used for extruding the elastic block to expand outwards.

Optionally, the outer diameter of the deformation part is not larger than the hole diameter on the heater, and the inner surfaces of any two opposite elastic blocks in the plurality of elastic blocks are obliquely arranged.

Optionally, the outer surface of the elastic block in the deformation part, which abuts against the hole wall of the hole site in the heater, is an arc surface.

Optionally, any one end of the jackscrew is partially in a polish rod arrangement.

Optionally, a second through hole for the ejector rod to pass through is formed in the ejector rod, an internal thread is arranged in the second through hole, an external thread is arranged on the outer surface of the ejector rod, and the ejector rod is in threaded connection with the ejector rod.

Optionally, a polygonal hole is formed in one end, far away from the polish rod, of the jackscrew.

Optionally, the local diameter of the deformation is larger than the hole diameter on the heater.

Optionally, each elastic block is bent corresponding to a portion of the deformation portion, where the diameter of the portion is smaller than the diameter of the hole on the heater.

In the auxiliary dismounting tool provided by the utility model, the hole site existing in the heater is utilized, the PVD equipment is not required to be modified, the expansion clamping seat is clamped in the hole site of the heater through the extrusion deformation of the deformation part, the cost is reduced, and meanwhile, the applicability of the auxiliary dismounting tool in the dismounting operation is increased. In addition, with the extrusion deformation joint of expansion cassette through deformation portion in the hole site of heater, provide fixed fulcrum for the ejector pin, the ejector pin progressive thread precession of being convenient for and jack-up annular (reprint), realize the dismantlement operation of annular (reprint) and heater (heater), can reach the effect that reduces annular (reprint) and heater (heater) dismantlement operation time, also can avoid simultaneously causing the damage to annular (reprint) and other spare part at the dismantlement in-process, promoted dismantlement efficiency and security.

Drawings

Those of ordinary skill in the art will appreciate that the figures are provided for a better understanding of the present utility model and do not constitute any limitation on the scope of the present utility model. Wherein:

FIG. 1 is a schematic view of an overall structure of an auxiliary disassembling tool according to an embodiment of the present utility model;

FIG. 2 is a schematic view of an expansion card holder in an auxiliary disassembling tool according to an embodiment of the utility model;

FIG. 3 is a cross-sectional view of an expansion card holder in an auxiliary removal tool in accordance with an embodiment of the present utility model;

fig. 4 is a schematic structural view of a jackscrew in an auxiliary disassembling tool according to an embodiment of the present utility model.

Reference numerals illustrate:

1-an expansion card seat; 11-deformation; 111-elastic blocks; 12-a first through hole; 2-jackscrews; 21-a second through hole; 22-polygonal holes; 3-ejector rod.

Detailed Description

Embodiments of the present utility model will be described in detail below with reference to the attached drawings:

in order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

The embodiment of the utility model provides an auxiliary disassembling tool which can be applied to the disassembling operation of a ring-shaped part (reprint) and a heater (heater) in a process kit (process kit). It should be noted that the auxiliary disassembling tool provided in this embodiment is not limited to this kind of working environment, and may be applied to disassembling operations in other PVD apparatuses under the same conditions.

Referring to fig. 1 and 2, the present embodiment provides an auxiliary disassembling tool, which includes an expansion card seat 1 and a mandrel 3, wherein the expansion card seat 1 has a deformation portion 11, the deformation portion 11 can be clamped in a hole site of a heater in an extrusion deformation manner, a first through hole 12 for the mandrel 3 to pass through is further formed on the expansion card seat 1, the first through hole 12 is located in the hole site of the heater, and the mandrel 3 can move in the first through hole 12. Utilize the hole site that heater itself exists, need not to reform transform PVD equipment, expansion cassette 1 passes through the extrusion deformation joint of deformation portion 11 in the hole site of heater to for ejector pin 3's the fixed fulcrum that provides, the ejector pin 3 progressive thread precession of being convenient for and jack-up annular (reprint), realize annular (reprint) and the dismantlement operation of heater (heater).

In the present embodiment, the outer diameter of the deformation portion 11 is not larger than the hole diameter on the heater so that the deformation portion 11 on the expansion card holder 1 is inserted into the hole of the heater. In addition, the deformation portion 11 includes at least two elastic blocks 111, and the at least two elastic blocks 111 are disposed at intervals along the circumferential direction of the first through hole 12, and the at least two elastic blocks 111 are clamped in the hole site of the heater by means of internal extrusion expansion. Referring to fig. 2 and 3, in the present embodiment, six elastic blocks 111 are provided, and the six elastic blocks 111 are uniformly spaced along the circumferential direction of the first through hole 12 to form a circle. In specific implementation, the number of the elastic blocks can be two, three, four, six, eight and the like, and the number of the elastic blocks can be adaptively adjusted according to the actual processing requirements and the actual mounting strength requirements.

Referring to fig. 2 and 3, the inner surfaces of any two opposite elastic blocks are inclined. In this embodiment, the cross section of the elastic block 111 along the axial direction of the first through hole 12 is in a right trapezoid shape, and the thickness of the joint of the elastic block and the expansion card seat 1 is relatively smaller, and the thickness of the joint far away from the expansion card seat 1 is relatively larger. In the present embodiment, the inner surface of each elastic block is inclined, so that on one hand, the deformation portion 11 is convenient to process; on the other hand, all elastic blocks can expand outwards to deform, so that the connection strength between the expansion card seat 1 and the hole site in the heater is improved. In addition, in the case of satisfying the connection strength between the expansion card holder 1 and the hole site in the heater, one or more sets of two opposing elastic blocks may be selected to have an inner surface inclined, which is not limited thereto.

In the preferred scheme, the outer surface of the elastic block which is tightly propped against the hole wall of the hole site in the heater in the deformation part 11 is an arc surface, and the arrangement mode can ensure that the outer surface of the elastic block is completely propped against the hole wall of the hole site in the heater, so that the contact area is increased, and the connection strength and the connection stability of the expansion card seat 1 and the hole site in the heater are ensured.

Referring to fig. 1 and 4, the auxiliary removing tool further includes a top thread 2, and the top thread 2 is threadably connected to the first through hole 12 for pressing the elastic block to expand outwardly. In this embodiment, the outer surface of the jackscrew 2 has an external thread, and is connected with an internal thread in the first through hole 12 in a matching manner, and as the jackscrew 2 is continuously screwed in, the end of the jackscrew 2 abuts against the inclined surface of the elastic block, and the elastic block is extruded and expanded outwards, so that the elastic block abuts against the hole site in the heater. Preferably, any one end part of the jackscrew 2 is in a polish rod arrangement and is used for being abutted against the inclined surface of the elastic block, and by adopting the structure arrangement, the damage to the inclined surface of the elastic block can be avoided in the screwing process of the jackscrew 2, so that the expansion degree of the elastic block is guaranteed.

Referring to fig. 1 and 4, in the present embodiment, a second through hole 21 through which the ejector rod 3 passes is formed in the ejector rod 2, an internal thread is disposed in the second through hole 21, an external thread is disposed on an outer surface of the ejector rod 3, the external thread of the ejector rod 3 extends from a section of the ejector rod 3 away from the polish rod to the end of the polish rod, and the ejector rod 3 is in threaded connection with the ejector rod 2. The axis of the second through hole 21 is collinear with the axis of the jackscrew 2, thereby facilitating the processing of the jackscrew 2. In addition, in other embodiments, the axis of the second through hole 21 may be not collinear with the axis of the jackscrew 2, but the axis of the second through hole 21 needs to be parallel to the axis of the jackscrew 2.

In this embodiment, a polygonal hole 22 is formed at one end of the jackscrew 2 far away from the polish rod, and the polygonal hole 22 and the second through hole 21 are coaxially disposed (i.e. the polygonal hole 22 and the second through hole 21 are combined to form a stepped hole), and in addition, the inner diameter of the polygonal hole 22 is larger than the inner diameter of the second through hole 21. The polygonal holes 22 are adopted, so that the jackscrews 2 are matched with an assembling tool, and the assembling operation of workers is facilitated.

In the actual assembly process, a worker inserts the deformation part 11 on the expansion card seat 1 into a hole position on the heater; then, the jackscrew 2 is screwed into the first through hole 12 through the matching of the assembling tool and the polygonal hole 22, and the elastic block in the deformation part 11 gradually expands outwards and abuts against the hole wall of the hole site in the heater along with the increase of the screwing depth of the jackscrew 2, so that the fixed installation of the expansion clamping seat 1 is realized; finally, the ejector rod 3 is gradually screwed into the second through hole 21 on the ejector wire 2, so that the end part of the ejector rod 3 jacks up the annular piece (dep ring) to realize the disassembling operation of the annular piece (dep ring) and the heater.

In other embodiments of the present utility model, the local diameter of the deformation portion 11 may be larger than the hole diameter on the heater, and the plurality of elastic blocks in the deformation portion 11 are clamped in the hole on the heater by means of external elastic compression. Specifically, the whole structure of the deformation portion 11 is claw-shaped, the elastic block is arc-shaped sheet, in the installation process of the expansion card seat 1, the deformation portion 11 stretches into a hole position of the heater, and a part of the outer diameter of the deformation portion 11, which is larger than the hole diameter of the hole position in the heater, is clamped in the deformation portion in a forced compression deformation mode, so that the expansion card seat 1 is installed and fixed.

In addition, each elastic block is arranged in a bending manner corresponding to a part of the deformation part 11, the diameter of which is smaller than that of the hole on the heater; with the structure, when the deformation part 11 is inserted into the hole in the heater, the arc-shaped surface can play a certain guiding role, so that the deformation part 11 can be conveniently inserted. When the deformation portion 11 is engaged with the hole on the heater by means of external elastic compression, the ejector rod 3 may be directly screwed with the first through hole 12, so as to realize screwing of the ejector rod 3, or the ejector rod 3 may be connected with the first through hole 12 by the ejector wire 2, so that the ejector rod 3 is screwed into the ejector wire 2, which is not limited in this case too much.

The expansion card seat, the jackscrew and the ejector rod in the embodiment are all made of stainless steel; in addition, under the condition of meeting the structural strength of the expansion card seat, the jackscrew and the ejector rod, the expansion card seat can be made of other metal materials or plastic materials, and the expansion card seat, the jackscrew and the ejector rod are not limited in the process.

In summary, according to the utility model, in the hole sites existing in the heater, the PVD equipment is not required to be modified, the expansion clamping seat 1 is clamped in the hole sites of the heater through the extrusion deformation of the deformation part 11, so that a fixed fulcrum is provided for the ejector rod 3, the ejector rod 3 is convenient to gradually screw in and jack up the annular part (reprint), and the disassembly operation of the annular part (reprint) and the heater (heater) is realized; the tool greatly reduces the time for disassembling the annular piece (reprint) and the heater (heater), and simultaneously avoids damage to the annular piece (reprint) and other parts in the disassembling process, thereby improving the disassembling efficiency and the safety. Therefore, the utility model effectively overcomes various defects in the prior art and has high industrial utilization value.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples illustrate only a few embodiments of the utility model, which are described in detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of protection of the present utility model is to be determined by the appended claims.

Claims

1. An auxiliary dismounting tool is used for dismounting an annular part of PVD equipment and comprises a heater, the annular part is installed on the heater, the heater is provided with a hole site, and the auxiliary dismounting tool is characterized in that the auxiliary dismounting tool comprises an expansion clamping seat and a push rod, the expansion clamping seat is provided with a deformation part, the deformation part can be clamped in the hole site of the heater through extrusion deformation, a first through hole for the push rod to pass through is formed in the expansion clamping seat, and the push rod can move in the first through hole.

2. The auxiliary disassembly tool according to claim 1, wherein the deformation portion includes at least two elastic pieces, and at least two of the elastic pieces are disposed at intervals along a circumferential direction of the first through hole.

3. The tool according to claim 2, wherein at least two of said elastic blocks are engaged in the hole of said heater by internal compression expansion or external elastic compression.

4. The auxiliary removal tool of claim 3, further comprising a jackscrew threadedly coupled to said first through-hole for compressing said resilient block for outward expansion.

5. The auxiliary disassembling tool according to claim 4, wherein an outer diameter of the deformed portion is not larger than a diameter of a hole site of the heater, and inner surfaces of any two opposing elastic blocks among the plurality of elastic blocks are inclined.

6. The auxiliary disassembling tool according to claim 5, wherein an outer surface of the elastic block in the deformed portion abutting against a hole wall of the hole site of the heater is an arc surface.

7. The tool according to claim 4, wherein one end of the jackscrew is partially in a polish rod arrangement.

8. The auxiliary disassembling tool according to claim 4, wherein a second through hole for the ejector rod to pass through is formed in the ejector rod, an internal thread is arranged in the second through hole, an external thread is arranged on the outer surface of the ejector rod, and the ejector rod is in threaded connection with the ejector rod.

9. The tool according to claim 7, wherein the end of the jackscrew remote from the polish rod is provided with a polygonal hole.

10. The auxiliary disassembly tool according to claim 3, wherein a partial diameter of the deformed portion is larger than a diameter of the hole of the heater.