CN219189826U - Glass vacuum chuck with boss adsorption surface - Google Patents
Glass vacuum chuck with boss adsorption surface Download PDFInfo
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- CN219189826U CN219189826U CN202223599510.4U CN202223599510U CN219189826U CN 219189826 U CN219189826 U CN 219189826U CN 202223599510 U CN202223599510 U CN 202223599510U CN 219189826 U CN219189826 U CN 219189826U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
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- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The utility model discloses a glass vacuum chuck with a boss adsorption surface, which comprises a vacuum cavity lower plate and a vacuum cavity upper plate which are buckled and assembled in a sealing way, wherein one surface of the vacuum cavity lower plate is a lower fixed plate assembly surface, the other surface of the vacuum cavity lower plate is provided with an air vent groove, the air vent groove comprises a linear groove and a circular groove, one buckled surface of the vacuum cavity upper plate and the vacuum cavity lower plate is provided with a plurality of crossed and communicated longitudinal grooves and transverse grooves, and the intersection position of the longitudinal grooves and the transverse grooves is provided with an adsorption hole; the circular grooves are a plurality of concentric circles taking the central vent hole as the center of a circle, and the radius arithmetic difference of the concentric circles is increased; one surface of the vacuum cavity upper disc for adsorbing glass is provided with a boss-shaped adsorption surface, adsorption holes penetrate through the vacuum cavity upper disc, and orifices are uniformly distributed on the boss-shaped adsorption surface. The utility model can ensure that the air flow is distributed in each adsorption hole as uniformly as possible, simultaneously reduces the polishing liquid sucked into the vacuum cavity, and is beneficial to smoothly discharging the polishing liquid sucked into the vacuum cavity.
Description
Technical Field
The utility model relates to the technical field of glass processing equipment, in particular to a glass vacuum chuck with a boss adsorption surface.
Background
The applicant enterprises are constantly devoted to the design and research and development of glass processing equipment, and in the glass processing equipment, a plurality of vacuum adsorption discs with different structures and polishing machines are also researched and developed, so that automation of a glass polishing process is realized gradually, the working efficiency is improved, and the labor intensity of workers is reduced.
For example, chinese patent No. 20212117684. X filed 28 at 5 of 2021 by the applicant discloses a vacuum chuck for polishing machine, a polishing machine with the vacuum chuck, and a fully automatic polishing machine system. According to the utility model, the polishing piece is adsorbed by adopting a vacuum adsorption disc, the loading and unloading of the polishing piece are realized by switching on and off the vacuum, and the automatic loading and unloading manipulator is adopted to grasp and take materials, so that a foundation is laid for realizing glass polishing automation. The vacuum adsorption disc adopted by the method is an optimized structure after repeated experiments by the inventor, so that an adsorption pad is omitted, and the mechanical property of the vacuum adsorption disc is ensured. However, as the research goes deeper, the inventor has realized that this structure can continue to be optimized for increasing the suction effect of the vacuum chuck in several ways: 1. when the glass is adsorbed for polishing, a large part of polishing liquid at the edge of the glass can be sucked into the vacuum cavity; 2. the polishing liquid sucked into the vacuum cavity is inconvenient to smoothly discharge.
Therefore, the development of a novel glass vacuum sucker with a boss adsorption surface has urgent research value, good economic benefit and industrial application potential, and is the basis of the power of the utility model.
Disclosure of Invention
The present inventors have conducted intensive studies to overcome the above-mentioned drawbacks of the prior art, and have completed the present utility model after a great deal of creative effort.
Specifically, the technical problems to be solved by the utility model are as follows: the glass vacuum sucker with the boss adsorption surface is provided to solve the technical problems that most of polishing liquid at the edge of glass is sucked into a vacuum cavity, and the polishing liquid sucked into the vacuum cavity is inconvenient to smoothly drain away.
In order to solve the technical problems, the technical scheme of the utility model is as follows:
the glass vacuum sucker with the boss adsorption surface comprises a vacuum cavity lower disc and a vacuum cavity upper disc which are buckled and assembled in a sealing manner, wherein a vacuum cavity is formed between the vacuum cavity lower disc and the vacuum cavity upper disc;
one surface of the lower disc of the vacuum cavity is a lower fixed disc assembly surface, the other surface is provided with a ventilation groove,
the central position of the vacuum cavity lower plate is provided with a central vent hole, the vent groove comprises a linear groove and a circular groove, the linear groove is radially distributed in a meter shape by taking the central vent hole as the center, the linear groove is communicated with the central vent hole to form an air flow channel, and the circular groove is crossed and communicated with the linear groove to form an air flow channel communicated with the central vent hole;
a plurality of crossed and penetrated longitudinal grooves and transverse grooves are formed in one buckled surface of the vacuum cavity upper plate and the vacuum cavity lower plate, and adsorption holes are formed in the positions of intersections of the longitudinal grooves and the transverse grooves;
in the utility model, the circular grooves are a plurality of concentric circles taking the central vent hole as a circle center, and the radius of the concentric circles is increased in equal difference;
and one surface of the vacuum cavity upper plate for adsorbing glass is provided with a boss-shaped adsorption surface, the adsorption holes penetrate through the vacuum cavity upper plate, and the orifices are uniformly distributed on the boss-shaped adsorption surface.
As an improvement, the vacuum cavity bottom plate is provided with a long fixing strip and a short fixing strip, and the long fixing strip and the short fixing strip are opposite to each other in pairs and are distributed on two groups of opposite sides of the vacuum cavity bottom plate.
As an improvement, the long fixing strip and the short fixing strip are fixed on the side surface of the edge of the vacuum cavity lower disc by screws.
As an improvement, bolt holes matched with the lower fixed disc of the polishing machine are formed in the long fixing strip and the short fixing strip, and the lower disc of the vacuum cavity is fixedly arranged on the lower fixed disc of the polishing machine by bolts.
As an improvement, the vacuum cavity lower disc and the vacuum cavity upper disc are tightly connected by using screws, the vacuum cavity lower disc is provided with a sealing groove surrounding the ventilation groove, and a sealing ring is filled in the sealing groove to realize the sealing between the vacuum cavity lower disc and the vacuum cavity upper disc.
As a modification, the whole thickness of the vacuum cavity bottom wall is 40mm-60mm.
As a modification, the width of the linear groove is 10mm-20mm.
As an improvement, the straight groove has an inclination angle gradually inclined toward the center vent hole.
As an improvement, the inclination angle of the straight groove is 1.5-3 degrees.
As an improvement, the depth of the circular groove is 5mm-15mm, and the width is smaller than the width of the linear groove.
As an improvement, the overall thickness of the upper disc of the vacuum cavity is 25mm-40mm.
As an improvement, the height of the boss-shaped adsorption surface is 1mm-5mm, and the distance between the edge of the boss-shaped adsorption surface and the edge of the upper disc of the vacuum cavity is 70mm-120mm.
As an improvement, the aperture of the adsorption holes is 0.5mm-3mm, and 3000-4000 adsorption holes are uniformly distributed on the boss-shaped adsorption surface.
As an improvement, the width of the longitudinal groove and the transverse groove is 3mm-6mm, and the depth is 3mm-10mm.
According to the utility model, after the vacuum cavity lower disc and the vacuum cavity upper disc are assembled, the vacuum cavity lower disc and the vacuum cavity upper disc are fixedly arranged on the polishing machine lower fixed disc, and the central vent hole of the vacuum cavity lower disc is communicated with the central hole of the polishing machine lower fixed disc and then connected with the polishing machine lower fixed disc main shaft, so that vacuumizing and inflation are realized.
After the technical scheme is adopted, the utility model has the beneficial effects that:
the circular grooves of the vacuum cavity bottom plate are a plurality of concentric circles taking the central vent hole as a circle center, and the radius of the concentric circles is increased; in addition, the circular grooves are intersected and communicated with the linear grooves, the linear grooves are radially distributed in a shape of a Chinese character 'mi' with the central vent hole as the center, and an air flow channel communicated with the central vent hole is formed by being intersected and communicated with the linear grooves. Based on the structure, when the vacuum chamber is in operation, the linear grooves and the circular grooves of the lower disc of the vacuum chamber can form uniform pressure to the greatest extent, and the longitudinal grooves and the transverse grooves which are distributed at equal intervals in the upper disc of the vacuum chamber are matched, so that air flows can be distributed in all the adsorption holes as uniformly as possible, and the adsorption holes form negative pressure with basically consistent pressure, thereby being more beneficial to adsorption of glass.
The upper plate of the vacuum cavity is provided with a boss-shaped adsorption surface on one surface for adsorbing glass, adsorption holes penetrate through the upper plate of the vacuum cavity, orifices are uniformly distributed on the boss-shaped adsorption surface, the height of the boss-shaped adsorption surface is 1mm-5mm, and the distance between the edge of the boss-shaped adsorption surface and the edge of the upper plate of the vacuum cavity is 70mm-120mm. Based on the structure, when the polishing device works, the polishing liquid at the edge of the glass in the polishing process can be blocked by the edge of the boss-shaped adsorption surface, so that a large part of the polishing liquid is reduced to enter the adsorption surfaces of the boss-shaped adsorption surface and the adsorption surface, and the polishing liquid sucked into the vacuum cavity is reduced.
The linear grooves have an inclination angle gradually inclined towards the central vent hole, and the inclination angle of the linear grooves is 1.5-3 degrees, namely, the linear grooves which are radially distributed by taking the central vent hole as the center in a m shape are more beneficial to the smooth flow of the polishing liquid sucked into the vacuum cavity to the central vent hole and then are discharged through the vacuum pipeline of the lower fixed disk main shaft.
In summary, the utility model can make the air flow be distributed in each adsorption hole as uniformly as possible, and simultaneously, reduces the polishing liquid sucked into the vacuum cavity, and is beneficial to the smooth discharge of the polishing liquid sucked into the vacuum cavity.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is an enlarged schematic view of the portion A of FIG. 1;
FIG. 3 is a schematic view of the structure of the lower surface of the vacuum chamber of the present utility model;
FIG. 4 is an enlarged schematic view of the portion B of FIG. 3;
FIG. 5 is a schematic view of the structure of the other side of the vacuum chamber bottom wall of the present utility model;
FIG. 6 is an enlarged schematic view of the portion C of FIG. 5;
FIG. 7 is a schematic view of the structure of the boss-like suction surface of the upper plate of the vacuum chamber of the present utility model;
FIG. 8 is a schematic view of the structure of the other side of the upper plate of the vacuum chamber of the present utility model;
fig. 9 is an enlarged schematic view of the part D of fig. 8.
Wherein in fig. 1-9, each numerical designation refers to a particular meaning, element and/or component, respectively, as follows.
In the figure: a vacuum chamber bottom wall 1; an internally threaded through hole 11; a center vent hole 12; a linear groove 13; a circular groove 14;
a vacuum chamber upper plate 2; an internally threaded blind bore 21; a longitudinal groove 22; a lateral groove 23; a boss-like adsorption surface 24; a long fixing strip 3; a short fixing strip 4; adsorption hole 5.
Detailed Description
The utility model will be further illustrated with reference to specific examples. The purpose and purpose of these exemplary embodiments are merely to illustrate the present utility model and are not intended to limit the true scope of the present utility model in any way.
Example 1
This example exemplifies a vacuum chuck for suction polishing 1500 x 1850mm glass.
As shown in fig. 1-9, the glass vacuum sucker with the boss adsorption surface comprises a vacuum cavity lower disc 1 and a vacuum cavity upper disc 2 which are buckled and sealed, wherein the sizes of the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2 are matched and are 60mm larger than the size of glass, and a vacuum cavity is formed between the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2.
In order to facilitate the sealing connection of the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2, an internal thread through hole 11 is formed in the edge of the vacuum cavity lower disc 1, an internal thread blind hole 21 is formed in the corresponding position of the edge of the vacuum cavity upper disc 2, the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2 are tightly connected through the internal thread through hole 11 and the internal thread blind hole 21 by using screws, one end of the internal thread through hole 11 is designed into a counter bore mode in consideration of the plane flatness of a vacuum chuck, the nut of the screws is prevented from protruding, a sealing groove 12 is formed in the vacuum cavity lower disc, the sealing groove 12 surrounds the periphery of a ventilation groove and is not communicated with the ventilation groove, a sealing ring (not shown in the figure) is filled in the sealing groove 12, and the sealing property between the vacuum cavity lower disc and the vacuum cavity upper disc can be realized after the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2 are connected. In order to improve the tightness, the inner parts of the vacuum cavity lower plate 1 and the vacuum cavity upper plate 2 are also respectively provided with an internal thread through hole 11 and an internal thread blind hole 21, and the internal thread through hole 11 and the internal thread blind hole 21 are respectively symmetrically arranged at the centers of the vacuum cavity lower plate 1 and the vacuum cavity upper plate 2 and are also connected by using screws.
The vacuum cavity bottom plate is provided with the long fixing strips 3 and the short fixing strips 4, and the long fixing strips 3 and the short fixing strips 4 are opposite to each other in pairs and are distributed on two opposite sides of the vacuum cavity bottom plate. The side faces of the edge of the vacuum cavity lower plate are provided with threaded holes, and the long fixing strips and the short fixing strips are fixed on the side faces of the edge of the vacuum cavity lower plate through the threaded holes by using screws. Bolt holes matched with the lower fixed disc of the polishing machine are formed in the long fixing strip and the short fixing strip, and the lower disc of the vacuum cavity is fixedly installed on the lower fixed disc (not shown in the figure) of the polishing machine by bolts.
In the utility model, the whole thickness of the vacuum cavity bottom wall 1 is 80mm. The vacuum chamber lower plate is characterized in that one surface of the vacuum chamber lower plate is a lower fixed plate assembly surface, an air vent groove is formed in the other surface of the vacuum chamber lower plate, a central vent hole 12 is formed in the central position of the vacuum chamber lower plate, the air vent groove comprises a linear groove 13 and a circular groove 14, the linear groove is radially distributed in a meter shape by taking the central vent hole as the center, the linear groove and the central vent hole are communicated to form an air flow channel, the width of the linear groove 13 is 15mm, the linear groove is provided with an inclination angle gradually inclined towards the central vent hole, the inclination angle of the linear groove is 3 degrees, the polishing liquid sucked into the vacuum chamber is more favorably discharged to the central vent hole, then the circular groove 14 is communicated with the linear groove in a crossing mode through a vacuum pipeline (not shown in the figure), the circular groove is also formed into an air flow channel communicated with the central vent hole, the circular groove is a plurality of concentric circles taking the central vent hole as the center, the radius of the concentric circles is increased, the depth of the circular groove is 10mm, and the width of the circular groove is smaller than the width of the linear groove. In practical application, the fact that the linear grooves and the circular grooves of the lower disc of the vacuum cavity can form uniform pressure to the greatest extent when the vacuum chamber is in operation, and the longitudinal grooves and the transverse grooves which are distributed in the upper disc of the vacuum chamber at equal intervals are matched, so that air flows can be distributed in all the adsorption holes as uniformly as possible, the adsorption holes form negative pressure with basically consistent pressure, and the adsorption of glass is facilitated.
In this embodiment, the overall thickness of the vacuum chamber upper plate 2 is 35mm, one surface of the vacuum chamber upper plate 2 buckled with the vacuum chamber lower plate is provided with a plurality of crossed and penetrated longitudinal grooves 22 and transverse grooves 23, the widths of the longitudinal grooves 22 and the transverse grooves 23 are 5mm, the depths are 6mm, and the positions of intersections of the longitudinal grooves and the transverse grooves are provided with adsorption holes 5. The vacuum chamber upper plate is used for adsorbing glass, one surface of the vacuum chamber upper plate is provided with a boss-shaped adsorption surface, adsorption holes penetrate through the vacuum chamber upper plate, and orifices are uniformly distributed on the boss-shaped adsorption surface. The height of the boss-shaped adsorption surface 24 is 5mm, and the distance between the edge of the boss-shaped adsorption surface and the edge of the upper disc of the vacuum cavity is 70mm. In practical application, the polishing liquid at the edge of the glass in the polishing process is blocked by the edge of the boss-shaped adsorption surface, so that a large part of the polishing liquid is reduced to enter the adsorption surfaces of the boss-shaped adsorption surface and the adsorption surface, and the sucked polishing liquid in the vacuum cavity is reduced. In this embodiment, the aperture of the adsorption hole is 1.5mm, and 4000 adsorption holes are uniformly distributed on the boss-shaped adsorption surface 24.
When the vacuum cavity lower disc 1 and the vacuum cavity upper disc 2 are assembled, the whole vacuum cavity lower disc is installed on the polishing machine lower fixed disc, the central vent hole of the vacuum cavity lower disc is communicated with the central hole of the polishing machine lower fixed disc, and the vacuum cavity lower disc is connected with the main shaft of the polishing machine lower fixed disc to realize vacuumizing; the glass is adsorbed on the polishing device for polishing, polishing liquid is sprayed during polishing, and the polishing liquid flows down along the edge of the glass. In practical application, it is found that: because the boss-shaped adsorption surface is arranged, the edge of the adsorption surface blocks a large part of polishing liquid from being sucked into the vacuum cavity, and meanwhile, the sucked polishing liquid is easy to discharge along the linear groove with the inclined angle.
Example 2
This example exemplifies a vacuum chuck that adsorbs 1300 x 1500mm glass.
The structure is substantially the same as that of embodiment 1 except that: the dimensions of the vacuum cavity bottom plate 1 and the vacuum cavity top plate 2 are matched and are 80mm larger than the dimension of glass, the overall thickness of the vacuum cavity bottom plate 1 is 60mm, the width of the linear groove 13 is 20mm, the inclination angle of the linear groove is 1.5 degrees, the depth of the circular groove is 15mm, and the width is smaller than the width of the linear groove and is 15mm.
The whole thickness of vacuum cavity upper disc is 40mm, the width of vertical slot and horizontal slot is 6mm, and the degree of depth is 10mm, boss form adsorption face's height is 3mm, just boss form adsorption face's border is 110mm apart from vacuum cavity upper disc border. The aperture of the adsorption holes is 3mm, and 3500 adsorption holes are uniformly distributed on the boss-shaped adsorption surface.
Example 3
This example exemplifies a vacuum chuck that adsorbs 730 x 920mm glass.
The structure is substantially the same as that of embodiment 1 except that: the dimensions of the vacuum cavity bottom plate 1 and the vacuum cavity top plate 2 are matched and are 100mm larger than the dimension of glass, the overall thickness of the vacuum cavity bottom plate 1 is 40mm, the width of the linear groove 13 is 10mm, the inclination angle of the linear groove is 1.5 degrees, the depth of the circular groove is 5mm, the width is smaller than the width of the linear groove, and the width is 8mm.
The whole thickness of vacuum cavity upper disc is 25mm, the width of vertical slot and horizontal slot is 3mm, and the degree of depth is 3mm, boss form adsorption face's height is 1mm, just boss form adsorption face's border is 120mm apart from vacuum cavity upper disc border. The aperture of the adsorption holes is 0.5mm, and 3000 adsorption holes are uniformly distributed on the boss-shaped adsorption surface.
It should be understood that these examples are for the purpose of illustrating the utility model only and are not intended to limit the scope of the utility model. Furthermore, it is to be understood that various changes, modifications and/or variations may be made by those skilled in the art after reading the technical content of the present utility model, and that all such equivalents are intended to fall within the scope of protection defined in the claims appended hereto.
Claims (10)
1. The glass vacuum sucker with the boss adsorption surface comprises a vacuum cavity lower disc and a vacuum cavity upper disc which are buckled and assembled in a sealing manner, wherein a vacuum cavity is formed between the vacuum cavity lower disc and the vacuum cavity upper disc;
one surface of the vacuum cavity lower plate is a lower fixed plate assembly surface, the other surface of the vacuum cavity lower plate is provided with a ventilation groove, the central position of the vacuum cavity lower plate is provided with a central ventilation hole, the ventilation groove comprises a linear groove and a circular groove, the linear groove is radially distributed in a rice shape by taking the central ventilation hole as the center, the linear groove is communicated with the central ventilation hole to form an airflow channel, and the circular groove is crossed and communicated with the linear groove to form an airflow channel communicated with the central ventilation hole;
a plurality of crossed and penetrated longitudinal grooves and transverse grooves are formed in one buckled surface of the vacuum cavity upper plate and the vacuum cavity lower plate, and adsorption holes are formed in the positions of intersections of the longitudinal grooves and the transverse grooves;
the circular grooves are a plurality of concentric circles taking the central vent hole as a circle center, and the radius of the concentric circles is increased in equal difference;
and one surface of the vacuum cavity upper plate for adsorbing glass is provided with a boss-shaped adsorption surface, the adsorption holes penetrate through the vacuum cavity upper plate, and the orifices are uniformly distributed on the boss-shaped adsorption surface.
2. The glass vacuum chuck with the boss adsorption surface according to claim 1, wherein the vacuum chamber lower plate is provided with a long fixing strip and a short fixing strip, the long fixing strip and the short fixing strip are opposite to each other, the long fixing strip and the short fixing strip are respectively arranged on two opposite sides of the vacuum chamber lower plate, and the long fixing strip and the short fixing strip are fixed on the edge side surface of the vacuum chamber lower plate by using screws.
3. The glass vacuum chuck with the boss adsorption surface according to claim 2, wherein bolt holes matched with a lower polishing machine fixed disc are formed in the long fixing strip and the short fixing strip, and the lower vacuum chamber fixed disc is fixedly mounted on the lower polishing machine fixed disc by bolts.
4. The glass vacuum chuck with the boss adsorption surface according to claim 1, wherein the vacuum chamber lower disc and the vacuum chamber upper disc are tightly connected by using screws, a sealing groove surrounding the ventilation groove is formed in the vacuum chamber lower disc, and a sealing ring is filled in the sealing groove to realize sealing between the vacuum chamber lower disc and the vacuum chamber upper disc.
5. A glass vacuum chuck with boss suction surface as in claim 1 wherein the vacuum chamber lower plate has an overall thickness of 40mm to 60mm.
6. The glass vacuum chuck with boss suction surface as set forth in claim 5, wherein said straight line groove has an inclination angle gradually inclined toward said center vent hole.
7. The glass vacuum chuck with boss sucking surface as set forth in claim 6, wherein said straight line groove has an inclination angle of 1.5 degrees to 3 degrees.
8. The glass vacuum chuck with boss sucking surface as set forth in claim 7, wherein the depth of said circular groove is 5mm-15mm and the width is smaller than the width of said straight groove.
9. The glass vacuum chuck with boss-like suction surface according to claim 1, wherein the boss-like suction surface has a height of 1mm to 5mm, and the edge of the boss-like suction surface is 70mm to 120mm from the upper plate edge of the vacuum chamber.
10. A glass vacuum chuck with boss suction surface as in claim 1 wherein the longitudinal and transverse grooves have a width of 3mm to 6mm and a depth of 3mm to 10mm.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202223599510.4U CN219189826U (en) | 2022-12-22 | 2022-12-22 | Glass vacuum chuck with boss adsorption surface |
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Application Number | Priority Date | Filing Date | Title |
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CN202223599510.4U CN219189826U (en) | 2022-12-22 | 2022-12-22 | Glass vacuum chuck with boss adsorption surface |
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CN219189826U true CN219189826U (en) | 2023-06-16 |
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CN202223599510.4U Active CN219189826U (en) | 2022-12-22 | 2022-12-22 | Glass vacuum chuck with boss adsorption surface |
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- 2022-12-22 CN CN202223599510.4U patent/CN219189826U/en active Active
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