CN219181709U - Resistance heating rod structure for photoresist remover - Google Patents
Resistance heating rod structure for photoresist remover Download PDFInfo
- Publication number
- CN219181709U CN219181709U CN202223325031.3U CN202223325031U CN219181709U CN 219181709 U CN219181709 U CN 219181709U CN 202223325031 U CN202223325031 U CN 202223325031U CN 219181709 U CN219181709 U CN 219181709U
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- Prior art keywords
- resistance heating
- rod
- fixed seat
- penetrating
- heating rod
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 88
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 24
- 230000000149 penetrating effect Effects 0.000 claims description 42
- 230000007246 mechanism Effects 0.000 claims description 7
- 229910010293 ceramic material Inorganic materials 0.000 abstract description 4
- 238000006073 displacement reaction Methods 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 238000012423 maintenance Methods 0.000 description 4
- 210000002445 nipple Anatomy 0.000 description 4
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
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Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Resistance Heating (AREA)
Abstract
The utility model relates to the technical field of photoresist removers, in particular to a resistance heating rod structure for a photoresist remover. The utility model uses the ceramic material as the connecting sleeve for insulating the resistance heating rod and connecting a plurality of resistance heating rods in parallel, and simultaneously the connecting sleeve is fixedly connected with the fixed seat, so that the resistance heating rods which are distributed in eight designs and two by eight matrixes are connected together to form a whole.
Description
Technical Field
The utility model relates to the technical field of photoresist removers, in particular to a resistance heating rod structure for a photoresist remover.
Background
The manufacturing process of the semiconductor device comprises thin film deposition, exposure, etching, photoresist removal and wet cleaning, wherein: the photoresist is removed on a plasma photoresist remover, and a resistance heating rod is assembled on the photoresist remover and used for heating and raising the temperature of a heating disc of the photoresist remover.
In the photoresist remover, can set up the heating plate, the heating plate can cooperate the resistance heating stick to use for the heating is raised temperature, because the heating stick can adopt a plurality ofly simultaneously, synchronous, simultaneously put into use, and most heating sticks are mostly single design, it is all inconvenient when using, installation, take off, maintenance, be the square four matrix design of distributing with the heating stick earlier, and connect the insulating stick at the heating stick top, insulating stick end side fixed connection structure for link together a plurality of resistance heating sticks, form integral type resistance heating stick structure.
Disclosure of Invention
The utility model aims to provide a resistance heating rod structure for a photoresist remover.
In order to achieve the above purpose, the present utility model adopts the following technical scheme:
the utility model provides a resistance heating stick structure for photoresist remover, includes resistance heating stick, the threaded rod is installed at resistance heating stick's top, and the top of threaded rod is settled there is the nipple, the sleeve mouth has been seted up to the bottom wall of nipple, link rod mechanism is installed in the top outside of nipple.
Preferably, the connecting rod mechanism comprises a fixed seat, screws, a penetrating hole, penetrating rods and a fixed seat, the screws are penetrated in the front walls of the left end and the right end of the fixed seat, the penetrating hole is formed in the fixed seat, the penetrating rods are installed on the inner sides of the penetrating holes, and the fixed seat is arranged on the end sides of the penetrating rods.
Preferably, the fixed seat and the screw are in threaded connection, and the fixed seat and the penetrating rod form a sliding structure through the penetrating opening.
Preferably, the penetrating rod is fixedly connected with the fixed seat, and the penetrating rod is symmetrically distributed relative to the center of the fixed seat.
Preferably, the resistance heating rod and the threaded rod are fixedly connected, and the resistance heating rod is in threaded connection with the sleeve opening through the threaded rod.
Preferably, the number of the connectors is the same as the number of the resistance heating rods and the number of the threaded rods, and the connectors are fixedly connected with the fixed seat.
The utility model has at least the following beneficial effects:
1. the penetrating hole is matched with the penetrating rod for movement, so that the penetrating rod slides and displaces along the horizontal direction of the penetrating hole, the position of the penetrating rod is changed, the displaced penetrating rod drives the fixed seat to move, the displaced fixed seat drives the resistance heating rods, the threaded rod and the connecting sleeve to displace, the distance between the single resistance heating rods is changed, the distance between the resistance heating rods distributed in a square matrix is convenient to be controllable and adjustable, when the resistance heating rods are installed in a heating disc of a photoresist remover, the whole fixed seat is used for connecting the single resistance heating rods, a plurality of resistance heating rods are integrated, and the resistance heating rods can be synchronously and simultaneously put into use and disassembled for maintenance when in use;
2. the resistance heating rod and the threaded rod are fixed together to form a whole, and when the electric resistance heating rod is used, the socket and the threaded rod are in threaded transmission, so that the resistance heating rod and the connecting sleeve are connected together for synchronous use or are disassembled from the connecting sleeve for maintenance;
3. the connecting sleeve is made of ceramic material and is used for insulating resistance heating rods and connecting a plurality of resistance heating rods in parallel, and meanwhile, the connecting sleeve is fixedly connected with the fixed seat, so that the resistance heating rods which are distributed in eight designs and two-by-eight matrixes are connected together to form a whole.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic illustration of the present utility model;
FIG. 2 is a schematic side view of the resistance heating rod of FIG. 1;
FIG. 3 is a schematic perspective view of the threaded rod and nipple of FIG. 1;
fig. 4 is an enlarged schematic view at a in fig. 1.
In the figure: 1. a resistance heating rod; 2. a threaded rod; 3. a sleeve is connected; 4. sleeving the mouth; 5. a rod connecting mechanism; 6. a fixed seat; 7. a screw; 8. a through hole; 9. penetrating the rod; 10. and (5) setting.
Detailed Description
The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution for a resistance heating rod structure of a photoresist remover:
embodiment one:
as shown in fig. 1-4, a resistance heating rod structure for a photoresist remover comprises a resistance heating rod 1, wherein a threaded rod 2 is arranged at the top of the resistance heating rod 1, a joint sleeve 3 is arranged at the top of the threaded rod 2, a sleeve opening 4 is formed in the bottom end wall of the joint sleeve 3, and a connecting rod mechanism 5 is arranged outside the top of the joint sleeve 3.
Embodiment two:
on the basis of the first embodiment, as shown in fig. 1 and 4, the rod connecting mechanism 5 comprises a fixed seat 6, a screw 7, a penetrating opening 8, a penetrating rod 9 and a fixed seat 10, the screw 7 is penetrated through front walls at the left end and the right end of the fixed seat 6, the penetrating opening 8 is formed in the fixed seat 6, the penetrating rod 9 is installed at the inner side of the penetrating opening 8, the fixed seat 10 is arranged at the end side of the penetrating rod 9, the fixed seat 6 and the screw 7 are in threaded connection, the fixed seat 6 and the penetrating rod 9 form a sliding structure through the penetrating opening 8, the penetrating rod 9 and the fixed seat 10 are fixedly connected, meanwhile, the penetrating rod 9 is symmetrically distributed with the penetrating rod 9 in relation to the center of the fixed seat 6, the penetrating rod 9 slides and moves along the horizontal direction of the penetrating opening 8, the position of the penetrating rod 9 is changed, the displaced penetrating rod 9 drives the fixed seat 6 to move, the displaced fixed seat 6 drives the resistance heating rods 1, the threaded rods 2 and the joint sleeve 3 to move, the spacing between the single resistance heating rods 1 is used for changing the spacing between the single resistance heating rods 1, the two-by-four matrix distributed resistance heating rods 1 can be installed in an adjustable manner, the whole resistance heating plate 1 is simultaneously, and the resistance heating plate 1 is convenient to be disassembled, and the whole heating plate 1 is convenient to be used and connected and can be disassembled when being used;
on the basis of the first embodiment, as shown in fig. 1 and 3, a resistance heating rod 1 and a threaded rod 2 are fixedly connected, the resistance heating rod 1 is in threaded connection with a sleeve opening 4 through the threaded rod 2, and is fixed through the resistance heating rod 1 and the threaded rod 2 to form a whole;
on the basis of the first embodiment, as shown in fig. 1 and 2, the number of the connectors 3 is the same as that of the resistance heating rods 1 and the threaded rods 2, meanwhile, the connectors 3 are fixedly connected with the fixed seat 10, and the connectors 3 are made of ceramic materials and are used for insulating the resistance heating rods 1 and connecting a plurality of resistance heating rods 1 in parallel, and meanwhile, the connectors 3 are fixedly connected with the fixed seat 10, so that the resistance heating rods 1 which are distributed in eight arrays in total and two by eight are connected together to form a whole.
Working principle: through wearing mouth 8 and wearing pole 9 cooperation activity, let wearing pole 9 along wearing mouth 8's horizontal direction sliding displacement, change wearing pole 9's position, the fixed seat 6 displacement is driven to wearing pole 9 of displacement, the fixed seat 6 of displacement drives resistance heating rod 1, threaded rod 2, the adapter 3 displacement, be used for changing the interval between the individual resistance heating rod 1, with the controllable adjustable interval between the resistance heating rod 1 that makes things convenient for the square four matrix to distribute, when resistance heating rod 1 installs in the heating plate through the photoresist remover, it is more convenient, whole fixed seat 10 is used for connecting single resistance heating rod 1 simultaneously, let a plurality of resistance heating rods 1 form an organic whole, in the use, simultaneously put into use and disassemble the maintenance, through resistance heating rod 1, threaded rod 2 looks fixed, form an organic whole, during the use, rotatory resistance heating rod 1 lets the mouth 4, threaded rod 2 looks screw thread drive for resistance heating rod 1 and adapter 3 link together, the synchronous use, or disassemble it with adapter 3, maintain, be ceramic material through adapter 3, be used for insulating resistance heating rod 1, a plurality of resistance heating rods 1, a plurality of common heating rod 1, the square two matrix is connected together, the eight-phase connection, two sets of heating rod 1, two are connected together, two parallel connection, two resistance heating rod 1 are connected together, eight and eight parallel connection, and three-phase connection, two resistance heating rod 1 is connected together.
The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made therein without departing from the spirit and scope of the utility model, which is defined by the appended claims. The scope of the utility model is defined by the appended claims and equivalents thereof.
Claims (6)
1. The utility model provides a resistance heating stick structure for photoresist remover, includes resistance heating stick (1), its characterized in that, threaded rod (2) are installed at the top of resistance heating stick (1), and connect cover (3) are settled at the top of threaded rod (2), the bottom wall of connect cover (3) has seted up pocket (4), link excellent mechanism (5) are installed in the top outside of connect cover (3).
2. The resistance heating rod structure for a photoresist remover according to claim 1, wherein the rod connecting mechanism (5) comprises a fixed seat (6), a screw (7), a penetrating hole (8), a penetrating rod (9) and a fixed seat (10), the screw (7) is penetrated in the front walls of the left end and the right end of the fixed seat (6), the penetrating hole (8) is formed in the fixed seat (6), the penetrating rod (9) is arranged on the inner side of the penetrating hole (8), and the fixed seat (10) is arranged on the end side of the penetrating rod (9).
3. The resistance heating rod structure for the photoresist remover according to claim 2, wherein the fixed seat (6) and the screw (7) are in threaded connection, and the fixed seat (6) and the penetrating rod (9) form a sliding structure through the penetrating opening (8).
4. A resistance heating rod structure for a photoresist stripper according to claim 2, wherein the penetrating rod (9) is fixedly connected with the fixed seat (10), and the penetrating rod (9) is symmetrically distributed about the center of the fixed seat (6).
5. The resistance heating rod structure for the photoresist remover according to claim 1, wherein the resistance heating rod (1) and the threaded rod (2) are fixedly connected, and the resistance heating rod (1) is in threaded connection with the sleeve opening (4) through the threaded rod (2).
6. The resistance heating rod structure for the photoresist remover according to claim 1, wherein the number of the connectors (3) is the same as the number of the resistance heating rods (1) and the threaded rods (2), and the connectors (3) are fixedly connected with the fixed seat (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223325031.3U CN219181709U (en) | 2022-12-12 | 2022-12-12 | Resistance heating rod structure for photoresist remover |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223325031.3U CN219181709U (en) | 2022-12-12 | 2022-12-12 | Resistance heating rod structure for photoresist remover |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219181709U true CN219181709U (en) | 2023-06-13 |
Family
ID=86674293
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223325031.3U Active CN219181709U (en) | 2022-12-12 | 2022-12-12 | Resistance heating rod structure for photoresist remover |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219181709U (en) |
-
2022
- 2022-12-12 CN CN202223325031.3U patent/CN219181709U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CB03 | Change of inventor or designer information | ||
| CB03 | Change of inventor or designer information |
Inventor after: Yang Libin Inventor after: Wang Fubin Inventor after: Mo Kewei Inventor before: Yang Libin Inventor before: Wang Fubin Inventor before: Jin Fankui Inventor before: Mo Kewei |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: No. 1 Jingxiang Road, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214000 Patentee after: Jimsi Semiconductor Technology (Wuxi) Co.,Ltd. Address before: No. 45 and 51, Yougu Industrial Park, Xibei Town, Xishan District, Wuxi City, Jiangsu Province, 214000 Patentee before: GMC SEMITECH Co.,Ltd. |