CN219180480U

CN219180480U - Waterwheel device for soaking silicon wafer polishing clamp

Info

Publication number: CN219180480U
Application number: CN202223540048.0U
Authority: CN
Inventors: 吴泓明; 钟佑生; 李古圣; 李欢欢
Original assignee: Zhengzhou Hejing Silicon Materials Co ltd
Current assignee: Zhengzhou Hejing Silicon Materials Co ltd
Priority date: 2022-12-29
Filing date: 2022-12-29
Publication date: 2023-06-13
Anticipated expiration: 2032-12-29

Abstract

The utility model discloses a waterwheel device for soaking a silicon wafer polishing clamp, which comprises a vehicle body with wheels, a water tank and a water circulation device, wherein the water tank and the water circulation device are arranged on the vehicle body; the water tank is internally divided into a plurality of soaking chambers by a partition board, and each partition board is provided with a water permeable hole; and a hook is arranged in each soaking chamber. The utility model provides a waterwheel device makes anchor clamps cavity hang and soaks in having circulating water's soaking chamber, can make the polishing slurry who adheres to anchor clamps surface dilute in aqueous through the circulation of water, has guaranteed the cleanliness factor on anchor clamps surface, can prevent that anchor clamps surface from rust owing to there being polishing slurry, further can prevent to rust granule adhesion anchor clamps surface and cause the chip fish tail, has reduced the anchor clamps in the prior art and has placed the risk that has easy dropping in the board in addition. In addition, this application can make things convenient for the removal of device, makes things convenient for getting of anchor clamps to put through setting up mobilizable automobile body.

Description

Waterwheel device for soaking silicon wafer polishing clamp

Technical Field

The utility model belongs to the technical field of semiconductor silicon wafer manufacturing, and particularly relates to a waterwheel device for soaking a silicon wafer polishing clamp.

Background

The double-sided polishing station of the silicon wafer process occupies an important process station in the silicon wafer production, wherein the double-sided polishing can be replaced by silicon wafer clamps with different thicknesses according to the thickness of the produced silicon wafer, and any particles or rust spots on the surfaces of the clamps can cause the yield and productivity loss of chips. In the prior art, no special tool for placing the clamp is arranged, and the replaced clamp is usually hung on a machine table, so that the risk of falling is caused. The fixture used for double-sided polishing is made of stainless steel, polishing slurry is left on the fixture after the fixture is directly leaked outside, the surface of the fixture is easy to rust after long-time exposure to air, metal on the surface of a chip exceeds a standard, particles are arranged on the surface of the chip, and the particles can scratch the chip, so that in order to improve the storage environment of the fixture of the double-sided polishing machine, the applicant provides a waterwheel device for soaking the fixture.

Disclosure of Invention

The utility model aims to provide a waterwheel device for soaking a silicon wafer polishing clamp, which aims to solve the defects in the prior art.

The utility model aims at realizing the following technical scheme:

a waterwheel device for soaking a silicon wafer polishing clamp comprises a vehicle body with wheels, a water tank and a water circulation device, wherein the water tank and the water circulation device are arranged on the vehicle body;

the water tank is internally divided into a plurality of soaking chambers by a partition board, and each partition board is provided with a water permeable hole; a hook is arranged in each soaking chamber and used for enabling the silicon wafer polishing clamp to be suspended in the soaking chamber in a hollow mode;

the water circulation device is used for circulating the soaking water in each soaking chamber through the water permeable holes.

Preferably, a braking device is arranged on the wheel.

Preferably, the wheel is a universal damping wheel.

Preferably, a box cover with a handle is arranged on the water tank.

Preferably, the partition board and the hooks are made of PVC materials.

Preferably, the water circulation device comprises a circulation motor arranged on the vehicle body and a water circulation pipeline connected with the circulation motor and the water tank.

Preferably, the circulating motor is a self-water-filling circulating motor.

The utility model provides a waterwheel device makes anchor clamps cavity hang and soaks in having circulating water's soaking chamber, can make the polishing slurry who adheres to anchor clamps surface dilute in aqueous through the circulation of water, has guaranteed the cleanliness factor on anchor clamps surface, can prevent that anchor clamps surface from rust owing to there being polishing slurry, further can prevent to rust granule adhesion anchor clamps surface and cause the chip fish tail, has reduced the anchor clamps in the prior art and has placed the risk that has easy dropping in the board in addition. In addition, this application can make things convenient for the removal of device, makes things convenient for getting of anchor clamps to put through setting up mobilizable automobile body.

Drawings

FIG. 1 is a schematic view of a waterwheel apparatus according to the present utility model;

FIG. 2 is a schematic diagram of a front view of a waterwheel apparatus according to the present utility model;

FIG. 3 is a schematic top view of a waterwheel apparatus according to the present utility model;

wherein, 1-car body; 2-wheels; 3-a water tank; 4-a separator; 5-hooking; 6-a circulating motor; 7-a water circulation pipeline.

Detailed Description

The utility model provides a waterwheel device for soaking a silicon wafer polishing clamp, which is shown in figure 1 and comprises a vehicle body 1 with wheels 2, a water tank 3 arranged on the vehicle body and a water circulation device.

The water tank 3 is divided into a plurality of soaking chambers by a partition board 4, each partition board is provided with a water permeable hole, and soaking water can flow in each soaking chamber through the water permeable holes; and a hook 5 is arranged in each soaking chamber and is used for enabling the silicon wafer polishing clamp to be suspended in the soaking chamber in a hollow mode, so that the silicon wafer polishing clamp is not contacted with the bottom of the soaking chamber, and pollution is reduced. Preferably, only one silicon wafer polishing jig is soaked in each soaking chamber, so that the jigs are prevented from being contacted with each other, and the pollution risk is increased.

The water circulation device is used for enabling the soaking water to circulate in each soaking chamber through the water permeable holes, and in the circulating flow process, the soaking water can wash the clamp, take away polishing slurry attached to the surface of the clamp and dilute the polishing slurry in the circulating water.

Therefore, the waterwheel device provided by the application, the clamp is hollow and hung in the soaking chamber containing circulating water to be soaked, polishing slurry attached to the surface of the clamp can be diluted in water through water circulation, the cleanliness of the surface of the clamp is guaranteed, the surface of the clamp can be prevented from being rusted due to the polishing slurry, rust particles can be further prevented from being attached to the surface of the clamp to cause chip scratches, and the risk that the clamp is easy to fall off when placed on a machine in the prior art is reduced. In addition, this application can make things convenient for the removal of device, makes things convenient for getting of anchor clamps to put through setting up mobilizable automobile body.

Preferably, the wheel 2 is provided with a brake device which can prevent the wheel from moving randomly when the wheel is stationary.

Preferably, the wheels 2 are universal damping wheels, which reduce vibration of the vehicle body parts during movement.

Preferably, the water tank 3 is provided with a tank cover with a handle, and when the clamp is soaked, the soaking chamber can be covered, so that foreign matters are prevented from falling into the soaking chamber to pollute the clamp.

Preferably, the partition board and the hooks are made of PVC materials, so that dust adhesion and metal pollution can be reduced.

Preferably, the water circulation device comprises a self-water-filling circulation motor 6 arranged on the vehicle body and a water circulation pipeline 7 connected with the circulation motor and the water tank, and the circulation motor supplies power for the circulation of the soaking water in the water tank.

While preferred embodiments of the present utility model have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following claims be interpreted as including the preferred embodiments and all such alterations and modifications as fall within the scope of the utility model. It will be apparent to those skilled in the art that various modifications and variations can be made to the present utility model without departing from the spirit or scope of the utility model. Thus, it is intended that the present utility model also include such modifications and alterations insofar as they come within the scope of the appended claims or the equivalents thereof.

Claims

1. The waterwheel device for soaking the silicon wafer polishing clamp is characterized by comprising a vehicle body with wheels, a water tank and a water circulation device, wherein the water tank and the water circulation device are arranged on the vehicle body;

2. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 1,

and a brake device is arranged on the wheel.

3. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 1,

the wheels are universal damping wheels.

4. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 1,

the water tank is provided with a tank cover with a handle.

5. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 1,

the partition board and the hooks are made of PVC materials.

6. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 1,

the water circulation device comprises a circulation motor arranged on the vehicle body and a water circulation pipeline connected with the circulation motor and the water tank.

7. A waterwheel apparatus for soaking a silicon wafer polishing jig as claimed in claim 6, wherein,

the circulating motor is a self-water-filling circulating motor.