CN219176984U

CN219176984U - Self-adaptive valve plate suitable for semiconductor industry

Info

Publication number: CN219176984U
Application number: CN202223366498.2U
Authority: CN
Inventors: 姜小蛟; 李加平; 杨帅
Original assignee: Shenyang Fortune Precision Equipment Co Ltd
Current assignee: Shenyang Fortune Precision Equipment Co Ltd
Priority date: 2022-12-15
Filing date: 2022-12-15
Publication date: 2023-06-13
Anticipated expiration: 2032-12-15

Abstract

The utility model relates to a self-adaptive valve plate suitable for the semiconductor industry, which comprises a valve plate, a rotating shaft, a fixed seat, a first fastening screw, a second fastening screw and a transmission shaft; the back of the valve plate is provided with an arc groove, and a rotating shaft is arranged in the arc groove; the fixed seat is buckled on the outer side of the rotating shaft, and is fixedly arranged on the valve plate through a second fastening screw; the two ends of the rotating shaft are of step structures, the middle part of the rotating shaft is fixedly connected with a connecting piece, and the top end of the transmission shaft is inserted into the connecting piece and fixedly connected with the connecting piece through a first fastening screw. The valve plate is suitable for a vacuum rectangular valve. Through design valve plate back structure, design a valve plate that can self-adaptation is adjusted, realized that the valve plate closes in the vertical direction of closing the in-process. The valve plate of the self-adaptive structure is designed through the back mechanism, so that friction between the sealing ring and the valve shell in the closing process of the valve is avoided, pollution particles are reduced in principle, and the sealing performance of the valve plate can be greatly improved.

Description

Self-adaptive valve plate suitable for semiconductor industry

Technical Field

The utility model relates to a self-adaptive valve plate suitable for the semiconductor industry, which is suitable for a vacuum rectangular valve. Through design valve plate back structure, design a valve plate that can self-adaptation is adjusted, realized that the valve plate closes in the vertical direction of closing the in-process. The valve plate of the self-adaptive structure is designed through the back mechanism, so that friction between the sealing ring and the valve shell in the closing process of the valve is avoided, pollution particles are reduced in principle, and the sealing performance of the valve plate can be greatly improved.

Background

In semiconductor equipment, a connecting valve among all chambers is critical, along with the high requirements of industries on pollution sources and tightness, further requirements are also put on the valve, the valve plate forms on the market mainly comprise parallel valve plates, and friction between a sealing ring and a valve housing can be generated in the process of L movement of the valve plates, so that the pollution sources in the environment are increased; another is a tilt valve plate which, although reducing friction between the sealing ring and the valve housing to a great extent, still has friction to some extent, but only to some extent, and which increases the difficulty of manufacture and requires a very high degree of tilt.

According to the utility model, the back structure of the valve plate is designed, and the valve plate is self-adaptive and regulated through the structure in the assembly and debugging stage, so that the valve plate is ensured to have no friction in the actual use process, and the manufacturing difficulty is greatly reduced.

Disclosure of Invention

The utility model aims to provide a self-adaptive valve plate which is suitable for the semiconductor industry and can realize self-adaptive adjustment of the valve plate through matching between a valve plate groove and a rotating shaft.

The technical scheme adopted for achieving the purpose is as follows:

the self-adaptive valve plate comprises a valve plate, a rotating shaft, a fixed seat, a first fastening screw, a second fastening screw and a transmission shaft; the back of the valve plate is provided with an arc groove, and a rotating shaft is arranged in the arc groove; the fixed seat is buckled on the outer side of the rotating shaft, and is fixedly arranged on the valve plate through a second fastening screw; the two ends of the rotating shaft are of step structures, the middle part of the rotating shaft is fixedly connected with a connecting piece, and the top end of the transmission shaft is inserted into the connecting piece and fixedly connected with the connecting piece through a first fastening screw.

The beneficial effects of the utility model are as follows:

1. the utility model can effectively reduce friction generated by the sealing ring and the valve shell in the closing process of the valve, thereby reducing the generation of pollution particles.

2. According to the utility model, the valve plate is adaptively adjusted, so that the design, manufacture and installation precision of a valve bottom transmission mechanism are reduced, and excellent sealing performance of a product is realized.

3. The utility model is beneficial to product processing and reduces the difficulty of the inclined valve plate in the processing and manufacturing process.

4. The utility model innovatively selects the material of the rotating shaft, and the friction in the self-adaptive adjustment process of the valve plate is avoided by selecting the rotating shaft made of self-lubricating plastic materials.

Drawings

FIG. 1 is a schematic diagram of the overall structure of the present utility model.

Figure 2 is a side view of the present utility model.

Fig. 3 is a schematic view showing the open state of the valve plate of the present utility model.

Fig. 4 is a second schematic diagram of the valve plate of the present utility model in an open state.

Detailed Description

The utility model will be described in further detail with reference to figures 1-4 of the drawings.

The self-adaptive valve plate suitable for the semiconductor industry comprises a valve plate 1, a rotating shaft 2, a fixed seat 3, a first fastening screw 7, a second fastening screw 5 and a transmission shaft 6; the back of the valve plate 1 is provided with an arc groove, and a rotating shaft 2 is arranged in the arc groove; the fixed seat 3 is buckled on the outer side of the rotating shaft 2, and the fixed seat 3 is fixedly arranged on the valve plate 1 through a second fastening screw 5; the two ends of the rotating shaft 2 are of step structures, the middle part of the rotating shaft is fixedly connected with a connecting piece 4, and the top end of a transmission shaft 6 is inserted into the connecting piece 4 and is fixedly connected through a first fastening screw 7.

The number of the fixing seats 3 is at least two.

The top end of the transmission shaft 6 is of a columnar directional structure, and the bottom end of the transmission shaft is of a columnar step structure.

The connecting piece 4 is fixedly connected with the rotating shaft 2 through welding or bolts.

The connecting piece 4 is provided with a square inner cavity for accommodating the transmission shaft 6, and a round hole for the first fastening screw 7 to penetrate is formed in the side wall of the inner cavity.

The included angle between the valve plate 1 and the transmission shaft 6 is alpha, and alpha is more than 0 degrees and less than 120 degrees.

Examples

In the assembly process, a fastening screw and an adjusting valve plate are not needed at first, when the valve plate is subjected to a closing state sealing test for the first time, the valve plate is adjusted to enable the valve plate to rotate relative to the rotating shaft, when the sealing state is qualified, the valve plate is enabled to rotate at a proper angle, the screw is fastened along with the valve plate, the valve plate is locked at an angle, and the valve plate is inclined from the mechanism angle.

In the whole valve assembly process, the valve plate angle position is not required to be adjusted, the natural state assembly is kept, the fastening screw is locked by a spanner, and the valve plate angle position is not required to be in place. In this case, the valve plate is in a state before self-adaptive adjustment, as shown in fig. 2.

After the valve is assembled, the valve is subjected to a functional test (sealing test), the angle between the valve plate and the rotating shaft is adjusted to enable the valve plate and the rotating shaft to rotate relatively, and meanwhile, the angle of the valve plate relative to the transmission shaft 6 can be adjusted by adjusting the tightness of the second fastening screw 5. The position of the valve plate is changed by adjusting the angle of the valve plate around the x axis and the angle of the valve plate around the y axis. And meanwhile, the sealing performance of the product is tested, when the sealing performance is qualified, the valve plate is properly rotated, the fastening screw is locked, the valve plate angle is determined, and the valve plate inclination is realized from the mechanism adjusting angle. In this case, the valve plate is adaptively adjusted to be in a later state.

The whole assembly and debugging links increase the angle adjusting time, but greatly reduce the particle pollution caused by the horizontal valve plate, simultaneously reduce the processing difficulty of the inclined valve plate, and further reduce the precision problem of the whole valve transmission mechanism. Through the material of reasonable design transmission shaft, make it and valve plate between not produce the pollution particle, effectual cleanliness factor and the seal reliability of guaranteeing the valve switch.

Claims

1. The self-adaptive valve plate is characterized by comprising a valve plate, a rotating shaft, a fixed seat, a first fastening screw, a second fastening screw and a transmission shaft;

the back of the valve plate 1 is provided with an arc groove, and a rotating shaft is arranged in the arc groove; the fixed seat is buckled on the outer side of the rotating shaft, and is fixedly arranged on the valve plate through a second fastening screw;

the two ends of the rotating shaft are of step structures, the middle part of the rotating shaft is fixedly connected with a connecting piece, and the top end of the transmission shaft is inserted into the connecting piece and fixedly connected with the connecting piece through a first fastening screw.

2. An adaptive valve plate for use in the semiconductor industry as defined in claim 1, wherein the number of holders is at least two.

3. The self-adaptive valve plate for semiconductor industry according to claim 1, wherein the top end of the transmission shaft is of a directional columnar structure, and the bottom end of the transmission shaft is of a columnar step structure.

4. An adaptive valve plate for use in the semiconductor industry as claimed in claim 1,

the connecting piece is fixedly connected with the rotating shaft through welding or bolts.

5. An adaptive valve plate for use in the semiconductor industry as claimed in claim 1,

the connecting piece is provided with a square inner cavity for accommodating the transmission shaft, and a round hole for the first fastening screw to penetrate is formed in the side wall of the inner cavity.

6. An adaptive valve plate for use in the semiconductor industry as claimed in claim 1,

the included angle between the valve plate and the transmission shaft is alpha.