CN219173305U - Material conveying device for beam transmission line irradiation system - Google Patents
Material conveying device for beam transmission line irradiation system Download PDFInfo
- Publication number
- CN219173305U CN219173305U CN202223580432.3U CN202223580432U CN219173305U CN 219173305 U CN219173305 U CN 219173305U CN 202223580432 U CN202223580432 U CN 202223580432U CN 219173305 U CN219173305 U CN 219173305U
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- guiding
- feeding
- transverse
- conveying device
- sliding
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- 239000000463 material Substances 0.000 title claims abstract description 65
- 230000005540 biological transmission Effects 0.000 title claims abstract description 45
- 230000033001 locomotion Effects 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a material conveying device for a beam transmission line irradiation system, which comprises: the feeding unit is used for lifting the supporting plate on which the wafer is placed; the cross sliding table is used for driving the supporting plate with the wafer to reciprocate in a preset space so that the beam current can irradiate the wafer; according to the utility model, a group of driving parts are designed to drive two groups of driving parts to rotate, so that the sliding parts are driven to slide along the feeding sliding rail, and the supporting plate is driven to lift, compared with a traditional two-set driving system, two motors are not required to be designed, only one motor is designed, when the technical motor is damaged, the whole feeding unit is stopped, compared with the traditional two-set driving system, a certain motor is not damaged, and when the other group of motors continue to work, the supporting plate is inclined, and the whole lifting part is damaged in severe cases.
Description
Technical Field
The utility model relates to the field of feeding, in particular to a material conveying device for a beam transmission line irradiation system.
Background
Proton irradiation in the chip field generally refers to proton, deuterium beam, helium ion irradiation, collectively referred to as light ion irradiation, and is conventionally referred to as "proton irradiation".
The plasma implantation of boron and phosphorus in chip manufacture generally has a depth of 1 micron, and the depth of proton irradiation is more than tens of microns, especially the depth of proton irradiation of a high-voltage power chip can reach hundreds of microns, and the proton irradiation and the ion implantation are different process links in the power chip link manufacture.
The technological process of chip manufacture comprises links of chip design, wafer manufacture, wafer test, packaging, finished product test and the like. Wherein proton and heavy ion irradiation is an important process means which can not be replaced in the wafer manufacturing process to improve the chip performance; is the only feasible means for realizing the local minority carrier lifetime control of the power chip.
When the existing irradiation assembly line irradiates the wafer, the wafer is required to be transported to the lower part of the beam transmission line through the material transporting system, and the existing material transporting system generally comprises two parts, namely a lifting part for driving the wafer supporting plate to lift and a shifting part for driving the supporting plate to move to the lower part of the beam transmission;
because the wafer layer board has length, the jacking part of current fortune material system has designed two sets of actuating system in order to guarantee the gentle lift of wafer layer board, through applys the driving force to the slide at wafer layer board both ends, and then drive the gentle lift work of layer board, and two sets of actuating system then mean that two motors are required to drive, and two motors are in the motion in-process, need guarantee that two sets of motors start simultaneously and shut down, and need the rotational speed unanimous, and in addition in case damage appears in one of them motor, but when another set of motor continued to work, can make the layer board take place the slope, damage can all appear in whole jacking part when serious.
Disclosure of Invention
The utility model aims to: a material conveying device for a beam transmission line irradiation system is provided to solve the problems in the prior art.
The technical scheme is as follows: a beam transmission line material transporting device for an irradiation system, comprising:
the feeding unit is used for lifting the supporting plate on which the wafer is placed;
the cross sliding table is used for driving the supporting plate with the wafer to reciprocate in a preset space so that the beam current can irradiate the wafer;
the feeding unit comprises:
the bearing main body comprises a frame, and a feeding sliding rail is arranged on the frame;
the driving piece is arranged on the frame and is designed into a group;
the driving parts are designed into two groups and are in transmission connection with the driving parts, and the driving parts are respectively arranged at two ends of the driving parts;
the sliding piece is sleeved on the transmission piece.
According to the utility model, a group of driving parts are designed to drive two groups of driving parts to rotate, so that the sliding parts are driven to slide along the feeding sliding rail, and the supporting plate is driven to lift, compared with a traditional two-set driving system, two motors are not required to be designed, only one motor is designed, when the technical motor is damaged, the whole feeding unit is stopped, compared with the traditional two-set driving system, a certain motor is not damaged, and when the other group of motors continue to work, the supporting plate is inclined, and the whole lifting part is damaged in severe cases.
In a further embodiment, the driving piece comprises a feeding motor installed on the frame, a feeding shaft arranged at the output end of the feeding motor, a feeding gear sleeved on the feeding shaft, a transmission gear in transmission connection with the feeding gear, a feeding input shaft spliced on the transmission gear, and input bevel gears sleeved at two ends of the feeding input shaft;
a transmission chain is arranged between the feeding gear and the transmission gear.
In a further embodiment, the transmission includes an output bevel gear meshed with the input bevel gear, and a feed output screw coupled to the output bevel gear.
In a further embodiment, the sliding piece comprises a feeding sliding plate sleeved on the feeding output screw rod and a plurality of feeding clamping grooves arranged on the feeding sliding plate;
the feeding slide plate is matched with the feeding slide rail.
In a further embodiment, the cross slide comprises:
the transverse guiding unit is positioned at one side of the feeding unit and used for guiding the supporting plate with the wafer placed under the beam outlet and performing transverse movement;
the traction unit is connected with the transverse guiding unit and is used for dragging the supporting plate on which the wafer is placed to avoid dislocation;
the longitudinal material guiding unit is arranged below the transverse material guiding unit, is placed in a cross shape with the transverse material guiding unit and is used for driving the transverse material guiding unit to longitudinally move.
In a further embodiment, the transverse guiding unit comprises a transverse guiding base plate positioned at one side of the frame, a transverse guiding driving screw rod and a transverse guiding guide rod which are arranged on the transverse guiding base plate, a transverse guiding sliding sleeve sleeved on the transverse guiding driving screw rod, a transverse guiding connecting piece arranged on the transverse guiding sliding sleeve, and a transverse guiding sliding block connected with the transverse guiding connecting piece and sleeved on the transverse guiding guide rod;
the transverse material guiding sliding block is connected with a magnetic block and is used for adsorbing the supporting plate;
and any end of the transverse guiding driving screw rod is provided with a transverse guiding motor.
In a further embodiment, the traction unit comprises a carriage connected with the transverse guiding bottom plate and a plurality of rollers arranged on the carriage;
the sliding frame is also provided with a sliding groove matched with the supporting plate.
In a further embodiment, the longitudinal guiding unit comprises a longitudinal guiding bottom plate, a longitudinal guiding sliding rail and a longitudinal guiding motor which are arranged on the longitudinal guiding bottom plate, a longitudinal guiding screw rod connected with the output end of the longitudinal guiding motor, and a longitudinal guiding sliding plate sleeved on the longitudinal guiding screw rod and adapted to the longitudinal guiding sliding rail;
the longitudinal material guiding sliding plate is connected with the transverse material guiding bottom plate.
The beneficial effects are that: the utility model discloses a material conveying device for a beam transmission line irradiation system, which is characterized in that a group of driving parts are designed to drive two groups of driving parts to rotate so as to drive sliding parts to slide along a feeding sliding rail and further drive a supporting plate to lift.
Drawings
Fig. 1 is a schematic structural view of the present utility model.
Fig. 2 is a schematic diagram of a lateral indexing unit of the present utility model.
Fig. 3 is a schematic drawing of a traction unit of the present utility model.
Fig. 4 is a schematic view of a longitudinal priming unit of the present utility model.
Fig. 5 is a schematic diagram of a feed unit of the present utility model.
The reference numerals are:
51. a feeding unit; 511. a feeding motor; 512. a feed input shaft; 513. an input bevel gear; 514. an output bevel gear; 515. feeding and outputting a screw rod; 516. a feeding slide rail; 517. a feeding slide plate; 518. a feeding clamping groove;
52. a transverse guiding unit; 521. a transverse material guiding bottom plate; 522. a transverse guiding rod; 523. a transverse material guiding sliding block; 524. a screw rod is driven by transverse guiding; 525. a transverse guiding sliding sleeve; 526. a transverse guiding connecting piece;
53. a traction unit; 531. a carriage; 532. a chute; 533. a roller;
54. a longitudinal guiding unit; 541. a longitudinal material guiding bottom plate; 542. a longitudinal material guiding motor; 543. a longitudinal guiding slide rail; 544. a longitudinal material guiding sliding plate; 545. and a longitudinal material guiding screw rod.
Detailed Description
The present application relates to a material transporting device for a beam transmission line irradiation system, and is explained in detail below by way of specific embodiments.
Because the wafer layer board has length, the jacking part of current fortune material system is in order to guarantee the lift work of wafer layer board, basically has two modes:
a beam transmission line material transporting device for an irradiation system, comprising:
a feeding unit 51 for lifting and lowering a pallet on which a wafer is placed;
the cross sliding table is used for driving the supporting plate with the wafer to reciprocate in a preset space so that the beam current can irradiate the wafer;
the feeding unit 51 includes:
the bearing main body comprises a frame, and a feeding sliding rail 516 is arranged on the frame;
the driving piece is arranged on the frame and is designed into a group;
the driving parts are designed into two groups and are in transmission connection with the driving parts, and the driving parts are respectively arranged at two ends of the driving parts;
the sliding piece is sleeved on the transmission piece.
According to the utility model, one group of driving parts is designed to drive the two groups of driving parts to rotate, so that the sliding parts are driven to slide along the feeding sliding rail 516, and the supporting plate is driven to lift, compared with the traditional two groups of driving systems, two motors are not required to be designed, only one motor is designed, when the technical motor is damaged, the whole feeding unit 51 is only stopped, compared with the traditional two groups of driving systems, a certain motor is not damaged, and when the other group of motors continue to work, the supporting plate is inclined, and the whole lifting part is damaged in severe cases.
The two groups of driving pieces are driven to move through the group of driving pieces, the conditions that the motor rotation speed is consistent and the motor is started and stopped simultaneously are not required, the design of an electric control system is further reduced, meanwhile, the stress of sliding pieces at two ends is uniform, the two ends of a supporting plate placed in the feeding clamping groove 518 are enabled to slide uniformly, and the inclination is avoided.
The driving part comprises a feeding motor 511 arranged on the frame, a feeding shaft arranged at the output end of the feeding motor 511, a feeding gear sleeved on the feeding shaft, a transmission gear in transmission connection with the feeding gear, a feeding input shaft 512 spliced on the transmission gear, and input bevel gears 513 sleeved at two ends of the feeding input shaft 512;
a transmission chain is arranged between the feeding gear and the transmission gear.
The transmission includes an output bevel gear 514 engaged with the input bevel gear 513, and a feed output screw 515 connected to the output bevel gear 514.
The sliding piece comprises a feeding sliding plate 517 sleeved on a feeding output screw 515 and a plurality of feeding clamping grooves 518 arranged on the feeding sliding plate 517;
the feed slide 517 is adapted to feed slide 516.
The cross slip table includes:
a transverse guiding unit 52, located at one side of the feeding unit 51, for guiding the pallet with the wafer placed under the beam outlet, and performing a transverse movement;
the traction unit 53 is connected with the transverse guiding unit 52 and is used for traction of the supporting plate on which the wafer is placed so as to avoid dislocation;
the longitudinal guiding unit 54 is disposed below the transverse guiding unit 52 and is disposed in a cross shape with the transverse guiding unit 52, so as to drive the transverse guiding unit 52 to move longitudinally.
The lateral guiding unit 52 includes a lateral guiding bottom plate 521 located at one side of the frame, a lateral guiding driving screw 524 and a lateral guiding guide rod 522 disposed on the lateral guiding bottom plate 521, a lateral guiding sliding sleeve 525 sleeved on the lateral guiding driving screw 524, a lateral guiding connecting piece 526 disposed on the lateral guiding sliding sleeve 525, and a lateral guiding sliding block 523 connected with the lateral guiding connecting piece 526 and sleeved on the lateral guiding guide rod 522;
the transverse material guiding slide block 523 is connected with a magnetic block for adsorbing the supporting plate;
and any end of the transverse guiding driving screw rod 524 is provided with a transverse guiding motor.
The traction unit 53 comprises a carriage 531 connected with the transverse guiding bottom plate 521, and a plurality of rollers 533 arranged on the carriage 531;
the sliding frame 531 is also provided with a sliding groove 532 which is matched with the supporting plate.
The longitudinal guiding unit 54 includes a longitudinal guiding base plate 541, a longitudinal guiding sliding rail 543 and a longitudinal guiding motor 542 mounted on the longitudinal guiding base plate 541, a longitudinal guiding screw 545 connected to an output end of the longitudinal guiding motor 542, and a longitudinal guiding sliding plate 544 sleeved on the longitudinal guiding screw 545 and adapted to the longitudinal guiding sliding rail 543;
the longitudinal index slide 544 is connected to the transverse index base 521.
Description of working principle: the feeding part pulls the supporting plate with the wafer placed below the beam outlet, so that the beam irradiates the wafer; the feeding motor 511 drives the feeding shaft to rotate, the feeding gear to rotate, the transmission chain to rotate, the feeding input shaft 512 to rotate, the input bevel gear 513 to rotate, the output bevel gear 514 to rotate, the feeding output screw 515 to rotate, and the feeding sliding plate 517 to move up and down along the feeding sliding rail 516 until the supporting plate is driven to move to a proper position; after the support plate moves to a proper position, the transverse material guiding unit 52 works, the transverse material guiding motor drives the transverse material guiding driving screw 524 to rotate, so that the transverse material guiding sliding sleeve 525 moves, the transverse material guiding connecting piece 526 is further driven to move, and the transverse material guiding sliding block 523 moves in the transverse material guiding guide rod 522 until the magnetic block contacts with the support plate placed in the clamping groove; after the magnetic block contacts with the supporting plate placed in the clamping groove, the magnetic block is electrified, the magnetic block adsorbs the supporting plate, the transverse guiding unit 52 continues to work and drives the supporting plate to move in the sliding groove 532 and the rolling shaft 533 in the traction unit 53 until the supporting plate moves to the position below the beam outlet, and the transverse direction movement work is completed; when the wafer supporting plate moves in the transverse direction, the feeding and discharging work of the wafer supporting plate can be completed, and the wafer supporting plate is only required to be pulled into a proper clamping groove; the longitudinal material guiding unit 54 is operated, and the longitudinal material guiding motor 542 is operated to drive the longitudinal material guiding screw rod 545 to rotate, so that the longitudinal material guiding sliding plate 544 slides along the longitudinal material guiding sliding rail 543, and further drives the transverse material guiding unit 52 to move along the longitudinal direction, and further drives the supporting plate to reciprocate within a preset range; and then the beam transmission line is used for completing the overall irradiation work of the wafer.
The preferred embodiments of the present utility model have been described in detail above with reference to the accompanying drawings, but the present utility model is not limited to the specific details of the above embodiments, and various equivalent changes can be made to the technical solutions of the present utility model within the scope of the technical concept of the present utility model, and these equivalent changes all fall within the scope of the present utility model.
Claims (8)
1. A beam transmission line material transporting device for an irradiation system, comprising:
a feeding unit (51) for lifting and lowering the pallet on which the wafer is placed;
the cross sliding table is used for driving the supporting plate with the wafer to reciprocate in a preset space so that the beam current can irradiate the wafer;
characterized in that the feeding unit (51) comprises:
the bearing main body comprises a frame, and a feeding sliding rail (516) is arranged on the frame;
the driving piece is arranged on the frame and is designed into a group;
the driving parts are designed into two groups and are in transmission connection with the driving parts, and the driving parts are respectively arranged at two ends of the driving parts;
the sliding piece is sleeved on the transmission piece.
2. The material conveying device for the beam transmission line irradiation system according to claim 1, wherein the material conveying device is characterized in that: the driving piece comprises a feeding motor (511) arranged on the frame, a feeding shaft arranged at the output end of the feeding motor (511), a feeding gear sleeved on the feeding shaft, a transmission gear in transmission connection with the feeding gear, a feeding input shaft (512) spliced on the transmission gear, and input bevel gears (513) sleeved at two ends of the feeding input shaft (512);
a transmission chain is arranged between the feeding gear and the transmission gear.
3. The material conveying device for the beam transmission line irradiation system according to claim 1, wherein the material conveying device is characterized in that: the transmission member comprises an output bevel gear (514) meshed with the input bevel gear (513), and a feeding output screw (515) connected with the output bevel gear (514).
4. The material conveying device for the beam transmission line irradiation system according to claim 1, wherein the material conveying device is characterized in that: the sliding piece comprises a feeding sliding plate (517) sleeved on a feeding output screw rod (515), and a plurality of feeding clamping grooves (518) arranged on the feeding sliding plate (517);
the feeding sliding plate (517) is matched with the feeding sliding rail (516).
5. The material conveying device for the beam transmission line irradiation system according to claim 1, wherein the material conveying device is characterized in that: the cross slip table includes:
the transverse guiding unit (52) is positioned at one side of the feeding unit (51) and used for guiding the supporting plate with the wafer placed under the beam outlet and performing transverse movement;
the traction unit (53) is connected with the transverse guiding unit (52) and is used for dragging the supporting plate on which the wafer is placed so as to avoid dislocation;
the longitudinal material guiding unit (54) is arranged below the transverse material guiding unit (52), is placed in a cross shape with the transverse material guiding unit (52) and is used for driving the transverse material guiding unit (52) to longitudinally move.
6. The material conveying device for the beam transmission line irradiation system according to claim 5, wherein the material conveying device is characterized in that: the transverse guiding unit (52) comprises a transverse guiding bottom plate (521) positioned at one side of the frame, a transverse guiding driving screw rod (524) and a transverse guiding guide rod (522) which are arranged on the transverse guiding bottom plate (521), a transverse guiding sliding sleeve (525) sleeved on the transverse guiding driving screw rod (524), a transverse guiding connecting piece (526) arranged on the transverse guiding sliding sleeve (525), and a transverse guiding sliding block (523) connected with the transverse guiding connecting piece (526) and sleeved on the transverse guiding guide rod (522);
the transverse material guiding slide block (523) is connected with a magnetic block for adsorbing the supporting plate;
and any end of the transverse material guiding driving screw rod (524) is provided with a transverse material guiding motor.
7. The material conveying device for the beam transmission line irradiation system according to claim 5, wherein the material conveying device is characterized in that: the traction unit (53) comprises a carriage (531) connected with a transverse material guiding bottom plate (521), and a plurality of rollers (533) arranged on the carriage (531);
the sliding frame (531) is also provided with a sliding groove (532) which is matched with the supporting plate.
8. The material conveying device for the beam transmission line irradiation system according to claim 5, wherein the material conveying device is characterized in that: the longitudinal guiding unit (54) comprises a longitudinal guiding base plate (541), a longitudinal guiding sliding rail (543) and a longitudinal guiding motor (542) which are arranged on the longitudinal guiding base plate (541), a longitudinal guiding screw rod (545) connected with the output end of the longitudinal guiding motor (542), and a longitudinal guiding sliding plate (544) sleeved on the longitudinal guiding screw rod (545) and adapted to the longitudinal guiding sliding rail (543);
the longitudinal material guiding sliding plate (544) is connected with the transverse material guiding bottom plate (521).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223580432.3U CN219173305U (en) | 2022-12-31 | 2022-12-31 | Material conveying device for beam transmission line irradiation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223580432.3U CN219173305U (en) | 2022-12-31 | 2022-12-31 | Material conveying device for beam transmission line irradiation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219173305U true CN219173305U (en) | 2023-06-13 |
Family
ID=86677554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223580432.3U Active CN219173305U (en) | 2022-12-31 | 2022-12-31 | Material conveying device for beam transmission line irradiation system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219173305U (en) |
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2022
- 2022-12-31 CN CN202223580432.3U patent/CN219173305U/en active Active
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