CN219167958U - Single crystal furnace dust removal device and system - Google Patents
Single crystal furnace dust removal device and system Download PDFInfo
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- CN219167958U CN219167958U CN202223200850.5U CN202223200850U CN219167958U CN 219167958 U CN219167958 U CN 219167958U CN 202223200850 U CN202223200850 U CN 202223200850U CN 219167958 U CN219167958 U CN 219167958U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters
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Abstract
The application provides a single crystal furnace dust removing device and a system, wherein the single crystal furnace dust removing device comprises a filter tank, a telescopic filter mechanism, a striking block and a driving mechanism; the filter tank is provided with an air inlet and an air outlet, the air inlet is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet is used for being connected with vacuumizing equipment; the filter mechanism is arranged in the filter tank, and the filter mechanism is arranged between the air inlet and the air outlet; the driving mechanism is fixed on the filtering tank, the striking block is connected with the output end of the driving mechanism, and the striking block can be circularly contacted and separated with the filtering mechanism under the driving of the driving mechanism. The embodiment of the application provides a single crystal furnace dust collector, through setting up can be under actuating mechanism's drive, with the striking piece of filtering mechanism circulation contact and separation, realize shaking down the dust of deposit on the filtering mechanism with the mode of striking vibrations, reach the effective clearance to filtering mechanism, can effectively alleviate equipment wearing and tearing, the jamming problem.
Description
Technical Field
The application relates to the technical field of crystal growth, in particular to a dust removing device and system of a single crystal furnace.
Background
Currently, single crystal silicon is generally prepared by a Czochralski method using a single crystal furnace. The production of silicon single crystal by Czochralski method usually adopts a reduced pressure crystal pulling process, and inert gas is required to be continuously introduced into a hearth of a single crystal furnace in the whole crystal pulling process so as to take away silicon oxide and impurity volatile matters generated due to high temperature, and simultaneously a vacuum pump is required to be continuously utilized to pump air outwards from the hearth so as to keep the vacuum degree in the hearth stable and reduce the influence of external factors on the vacuum degree in the hearth of the single crystal.
In order to avoid that silicon oxide and impurity volatile matters generated in the production process enter the vacuum pump and cause the vacuum pump to be abnormal and damaged, a filtering tank needs to be added between the single crystal furnace and the vacuum pump so as to filter the silicon oxide and the impurity volatile matters carried in the inert gas. Since the filter bag in the filter tank is liable to adhere a large amount of silicon oxide and impurities during the long-time single crystal pulling process, evacuation is difficult, and therefore cleaning of dust adhering to the filter bag is required at regular intervals.
The filter bag in the filter tank is generally cleaned in a tightness vibration mode in the prior art, but equipment abrasion and clamping stagnation are easily caused by long-time operation of the cleaning mode, and further operation faults are caused.
Disclosure of Invention
The technical problem to be solved by the application is to provide a single crystal furnace dust removal device and system, so as to solve the problem that equipment faults are easy to occur in the dust removal device used in the existing Czochralski crystal growth process.
In order to solve the problems, the application is realized by the following technical scheme:
the application provides a single crystal furnace dust removal device, which comprises a filter tank, a telescopic filter mechanism, a striking block and a driving mechanism;
the filter tank is provided with an air inlet and an air outlet, the air inlet is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet is used for being connected with vacuumizing equipment;
the filter mechanism is arranged in the filter tank, and the filter mechanism is arranged between the air inlet and the air outlet;
the driving mechanism is fixed on the filtering tank, the striking block is connected with the output end of the driving mechanism, and the striking block can be circularly contacted and separated with the filtering mechanism under the driving of the driving mechanism.
Optionally, the dust removing device further comprises a first partition board fixedly arranged in the filter tank, a first through hole is formed in the first partition board, the filter mechanism is arranged on one side, close to the air outlet, of the first partition board, the filter mechanism is correspondingly arranged with the first through hole, and one end of the filter mechanism is connected with the first partition board.
Optionally, the dust removing device further comprises a second partition board fixedly arranged inside the filtering tank, and the second partition board is arranged between the filtering mechanism and the air outlet;
the filtering mechanism comprises a filtering bag and an elastic assembly, one end of the filtering bag is connected with the first partition board, and the other end of the filtering bag is connected with the second partition board through the elastic assembly.
Optionally, the striking block is connected with the output end of the driving mechanism through a connecting rod, the driving mechanism is fixed on one side of the second partition plate far away from the filtering mechanism, and a second through hole for the connecting rod to pass through is formed in the second partition plate.
Optionally, the elastic component comprises an elastic piece and a hanging plate, the hanging plate is suspended at one end of the elastic piece, the other end of the elastic piece is fixed on the second partition board, and the other end of the filter bag is fixed on the hanging plate; the striking block can be circularly contacted with and separated from one side of the hanging plate, which is far away from the filter bag, under the drive of the driving mechanism.
Optionally, the filter bag is provided with a plurality of filter bags.
Optionally, a plurality of hanging plates are provided, and at least one filter bag is fixed on each hanging plate;
at least one striking block and a driving mechanism for driving the striking block are arranged on one side, away from the filter bag, of each hanging plate.
Optionally, each hanging plate is fixed to the second partition plate through a plurality of elastic pieces respectively; the elastic pieces are uniformly arranged between the hanging plate and the second partition plate.
Optionally, the second partition plate has a guide bar towards one side of the hanging plate, a third through hole for the guide bar to pass through is formed in the hanging plate, and the hanging plate is in sliding connection with the guide bar through the third through hole.
Optionally, the dust removing device further comprises a supporting rod, the supporting rod is fixed between the first partition board and the second partition board, and two ends of the supporting rod are respectively connected with the first partition board and the second partition board.
Optionally, an ash settling chamber is formed in the filter tank at one side of the first partition plate away from the air outlet, and the bottom of the ash settling chamber is lower than the air inlet.
Optionally, an ash removing opening capable of being opened and closed is arranged on the filtering tank, and the ash removing opening is connected with the ash settling chamber.
Optionally, the ash removal opening is lower than the bottom of the ash settling chamber or is flush with the bottom of the ash settling chamber.
Optionally, the filtering mechanism is a filter bag, and an opening of the filter bag is communicated with the first through hole.
Optionally, the elastic element is a spring.
Optionally, the driving mechanism is a cylinder or an electromagnet.
The application also provides a single crystal furnace system, which comprises at least one single crystal furnace, vacuumizing equipment and the single crystal furnace dust removing device, wherein a tail gas outlet of the at least one single crystal furnace is connected with the air inlet in the single crystal furnace dust removing device, and the vacuumizing equipment is connected with the air outlet in the single crystal furnace dust removing device.
Compared with the prior art, the application has the following advantages:
the single crystal furnace dust removing device comprises a filtering tank, a telescopic filtering mechanism, a striking block and a driving mechanism; the filtering tank is provided with an air inlet and an air outlet, the air inlet is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet is used for being connected with vacuumizing equipment; the filter mechanism is arranged in the filter tank, and the filter mechanism is arranged between the air inlet and the air outlet; the driving mechanism is fixed on the filtering tank, the striking block is connected with the output end of the driving mechanism, and the striking block can be circularly contacted and separated with the filtering mechanism under the driving of the driving mechanism; the impact block which can be in circular contact with and separated from the filtering mechanism under the driving of the driving mechanism is arranged, so that dust deposited on the filtering mechanism can be shaken off in a striking vibration mode, the filtering mechanism is effectively cleaned, the structure is compact, the filtering mechanism is stable in operation, and the equipment abrasion and clamping stagnation problems can be effectively relieved.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the application.
Drawings
Fig. 1 is a perspective view of a dust removal device for a single crystal furnace according to an embodiment of the present application;
FIG. 2 is a top view of a dust removal device for a single crystal furnace according to an embodiment of the present disclosure;
FIG. 3 is a cross-sectional view in the B direction of FIG. 2;
fig. 4 is a schematic view of a first angle of an internal structure of a dust removing device for a single crystal furnace according to an embodiment of the present application;
FIG. 5 is a second schematic view of the internal structure of the dust removing device for the single crystal furnace according to the embodiment of the present application;
FIG. 6 is a schematic diagram of a dust removal system for a single crystal furnace according to an embodiment of the present application 。
Detailed Description
The following description of the embodiments of the present application will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are some, but not all, of the embodiments of the present application. All other embodiments, which can be made by one of ordinary skill in the art without undue burden from the present disclosure, are within the scope of the present disclosure.
It should be appreciated that reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the appearances of the phrases "in one embodiment" or "in an embodiment" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
The dust collector for the single crystal furnace mainly filters inert gas containing silicon oxide and impurities discharged from an exhaust gas outlet of the single crystal furnace, namely, the inert gas is purified for recycling, and meanwhile, the vacuumizing equipment is protected from being damaged by the impurities.
When the existing dust collector for the single crystal furnace is installed, the vacuum pump is connected with the air outlet of the dust collector, the single crystal furnace is connected with the air inlet of the dust collector, the filter bag in the dust collector is provided with a bottom opening formed by filter cloth, the upper part of the filter bag is provided with a closed filter bag, the bottom of the filter bag is fixed to a flower plate, the upper part of the filter bag is fixed to a hanging plate, the hanging plate is fixed on a connecting rod through bolts, the connecting rod is connected with an air cylinder on a cover of a filter tank, the air cylinder is set through a relay to perform timed reciprocating motion, the filter bag can be in a loose state when the air cylinder moves downwards, the filter bag can be in a tightening state when the air cylinder is recovered, and the filter bag can generate an oscillating force when being fast tightened, so that silicon oxide and impurities attached to the filter bag are vibrated down, and cleaning of the filter bag is realized.
The hanging plate and the connecting rod are directly connected and fixed from the bottom through bolts, and in the using process, the hanging plate and the connecting rod do not move absolutely and vertically due to the stress problem, the bolts are easy to rub with the hanging plate, the bolts are ground and even broken, through holes in the hanging plate are ground to be bigger and bigger, and finally the hanging plate falls off; meanwhile, the cylinder rod is deflected by the hanging plate, so that air leakage of the cylinder can be caused after the cylinder rod runs for a long time, the filter bag cannot vibrate, the filter bag is damaged, the burden of the vacuum pump can be increased, the negative pressure in the furnace can be kept only by the aid of the larger frequency of the vacuum pump, and the single crystal production efficiency is affected.
In view of the above problems, as shown in fig. 1 to 5, a dust removing device 10 for a single crystal furnace provided in an embodiment of the present application includes a filter tank 11, a telescopic filter mechanism 12, a striking block 13, and a driving mechanism 14; the filter tank 11 is provided with an air inlet 111 and an air outlet 112, the air inlet 111 is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet 112 is used for being connected with vacuumizing equipment; the filter mechanism 12 is disposed in the filter tank 11, and the filter mechanism 12 is disposed between the air inlet 111 and the air outlet 112; the driving mechanism 14 is fixed on the filter tank 11, the striking block 13 is connected with the output end of the driving mechanism 14, and the striking block 13 can be circularly contacted with and separated from the filter mechanism 12 under the driving of the driving mechanism 14.
When pulling the crystal, the vacuum equipment works, the vacuum operation is carried out, the gas, silicon oxide and impurities at the tail gas outlet of the single crystal furnace are pumped through the gas inlet 111 and then upwards run into the filter mechanism 12, the gas enters the vacuum equipment through the gas outlet 112 after passing through the filter mechanism 12, and the impurities are attached to the filter mechanism 12.
The filter tank 11 is a hollow case, and may be made of high-strength steel or the like; the top of the filter tank 11 is covered with a filter tank cover 113, and the bottom of the filter tank 11 is also provided with a caster 114 so as to facilitate the movement of the dust removing device; the vacuum pumping device may be a dry pump or an oil pump, and the filter mechanism 12 may include a filter bag or a filter mesh. It will be appreciated that when the filter means 12 is a filter bag, the opening of the filter bag is directed towards the air inlet 111 side.
Wherein, the driving mechanism 14 is set by a relay to reciprocate at fixed time; when the driving mechanism 14 moves downwards to drive the striking block 13 to move towards the filtering mechanism 12 until touching the filtering mechanism 12 so as to strike the filtering mechanism 12; when the driving mechanism 14 is retracted, the striking block 13 is far away from the filtering mechanism 12, and the filtering mechanism 12 generates an oscillating force in the process of touching and separating with the striking block 13, so that silicon oxide and impurities attached to the filtering mechanism 12 can be shaken off. Alternatively, the driving mechanism 14 may be an air cylinder or an electromagnet, and the driving mechanism 14 is electrically connected to the electric control cabinet, and the relay of the electric control cabinet controls the driving mechanism 14 to move.
According to the single crystal furnace dust removal device provided by the embodiment of the application, the striking block 13 can be driven by the driving mechanism 14 to be in circular contact with and separate from the filtering mechanism 12, so that the striking effect of the filtering mechanism 12 is achieved, dust deposited on the filtering mechanism 12 is shaken off, the filtering mechanism 12 is effectively cleaned, the structure is compact, the filtering mechanism 12 operates stably in the ash removal process, and the equipment abrasion and clamping stagnation problems can be effectively relieved.
Optionally, in an embodiment, the dust removing device provided in this application embodiment further includes a first partition 15 fixedly disposed inside the filter tank 11, a first through hole is disposed on the first partition 15, the filter mechanism 12 is disposed on a side of the first partition 15 near the air outlet 112, the filter mechanism 12 is disposed corresponding to the first through hole, and one end of the filter mechanism 12 is connected to the first partition 15. In this embodiment, after the tail gas of the single crystal furnace enters the filter tank 11 through the gas inlet 111, the tail gas enters the filter mechanism 12 through the first through hole for filtering, and then is discharged through the gas outlet 112.
Wherein one end of the filtering mechanism 12 is an inlet end for gas to enter the filtering mechanism 12; the shape of the first through hole is matched with the opening of the filter mechanism 12 so as to facilitate the gas flowing into the filter mechanism 12 for filtering. The shape crystal of the first through hole may be circular, square, or the like.
Because the filter tank 11 in the embodiment of the present application is of a hollow cavity structure, and the first partition 15 is transversely disposed inside the filter tank 11, a separate chamber is formed on a side of the first partition 15 away from the air outlet 112, that is, a side facing the air outlet 112, as the ash settling chamber 115, and the bottom of the ash settling chamber 115 is lower than the air inlet 111. When pulling crystal, the vacuum pumping equipment works, the vacuum pumping operation is carried out, the gas, silicon oxide and impurities at the tail gas outlet of the single crystal furnace are pumped into the gas inlet 111 and pass through the ash settling chamber 115, part of silicon oxide and impurities can fall into the ash settling chamber 115, the rest silicon oxide and impurities enter the filter mechanism 12 upwards along with the gas, the gas enters the vacuum pumping equipment through the gas outlet 112 after passing through the filter mechanism 12, and the impurities can be attached to the filter mechanism 12.
Optionally, in a specific embodiment, the filter tank 11 is provided with an ash removing opening 116 that can be opened and closed, and the ash removing opening 116 is connected with the ash settling chamber 115, so that when more dust is settled in the ash settling chamber 115, the ash removing opening 116 is opened for cleaning.
Optionally, in one embodiment, the ash removal opening 116 is below the bottom of the ash chamber 115 or is flush with the bottom of the ash chamber 115, so as to remove the dust deposited at the bottom of the ash chamber 115.
Optionally, in one embodiment, the dust removing device provided in the embodiment of the present application further includes a second partition 16 fixedly disposed inside the filter tank 11, where the second partition 16 is disposed between the filter mechanism 12 and the air outlet 112; the filter mechanism 12 includes a filter bag 121 and an elastic member 122, one end of the filter bag 121 is connected to the first partition 15, and the other end of the filter bag 121 is connected to the second partition 16 through the elastic member 122.
In this embodiment, a second partition plate 16 is disposed in the filter tank 11, the second partition plate 16 is located above the filter mechanism 12, one end of the filter bag 121 is fixed to the first partition plate 15, the opening 1211 thereof is communicated with the first through hole in the first partition plate 15, and the tail portion of the filter bag 121 is suspended from the second partition plate 16 by the elastic member 122, so that the filter bag 121 is fixed between the first partition plate 15 and the second partition plate 16 in a tensioned manner and can be extended and retracted relative to the second partition plate 16.
In this embodiment, when the driving mechanism 14 can be set by the relay to perform a reciprocating motion at fixed time, and the driving mechanism 14 drives the striking block 13 to move downwards, the elastic component 122 is struck, so that the elastic component 122 is forced to move downwards, and the filter bag 121 is in a loose state; when the driving mechanism 14 drives the striking block 13 to retract, the elastic component 122 retracts upwards under the elastic action, so that the filter bag 121 is restored to a tight state, and the filter bag 121 can generate an oscillating force when being fast tightened, so that silicon oxide and impurities attached to the filter bag 121 can be shaken down and fall into the ash settling chamber 115, and cleaning of the filter bag 121 is realized.
Alternatively, in one embodiment, the striking block 13 is connected to the output end of the driving mechanism 14 through a connecting rod 17, the driving mechanism 14 is fixed to a side of the second partition 16 away from the filtering mechanism 12, and a second through hole 161 through which the connecting rod 17 passes is provided on the second partition 16. The driving mechanism 14 drives the striking block 13 to reciprocate through the driving connecting rod 17 to strike the elastic component 122 on the filtering mechanism 12, so that dust attached to the filtering mechanism 12 is shaken off.
The shape of the second through hole 161 is not limited, and the connecting rod 17 may pass through.
Optionally, in one embodiment, the elastic component 122 includes an elastic member 1221 and a hanging plate 1222, the hanging plate 1222 is suspended at one end of the elastic member 1221, the other end of the elastic member 1221 is fixed to the second partition 16, and the other end of the filter bag 121 is fixed to the hanging plate 1222; the striking block 13 is circularly contacted with and separated from one side of the hanging plate 1222 away from the filter bag 121 under the driving of the driving mechanism 14. The elastic member 1221 may be a member having elastic elasticity such as a spring.
In this embodiment, the tail end of the filter bag 121 is suspended at the bottom of the hanging plate 1222, the hanging plate 1222 is connected to the second partition 16 through the elastic member 1221, and the top of the hanging plate 1222 is used to receive the impact of the impact block 13 to shake off the dust attached to the filter bag 121.
Optionally, the hanging plate 1222 is horizontally arranged, and the striking block 13 can be driven by the driving mechanism 14 to move up and down in the vertical direction, so as to avoid mechanical abrasion and jamming caused by the inclination of the hanging plate 1222 and the filter bag 121.
Optionally, in an embodiment, a plurality of filter bags 121 are provided to enhance the filtering effect on the tail gas of the single crystal furnace.
Optionally, in a specific embodiment, a plurality of hanging plates 1222 are provided, and at least one filter bag 121 is fixed on each hanging plate 1222, and at least one striking block 13 and a driving mechanism 14 for driving the striking block 13 are provided on a side of each hanging plate 1222 away from the filter bag 121.
In this embodiment, each hanging plate 1222 is connected to the second partition 16 through a corresponding elastic member 1221, and the hanging plates 1222 are provided with a plurality of striking blocks 13 and driving mechanisms 14, that is, the driving mechanisms 14 and the striking blocks 13 are provided corresponding to the hanging plates 1222, so that each hanging plate 1222 can independently receive the corresponding striking blocks 13 for striking to shake off the dust attached to the suspended filter bag 121.
Alternatively, in one embodiment, each hanging plate 1222 is fixed to the second partition 16 by a plurality of elastic members 1221 described above; the plurality of elastic members 1221 are uniformly disposed between the hanging plate 1222 and the second partition 16. Each of the hanging plates 1222 is horizontally disposed on the second partition 16 through a plurality of elastic members 1221, and each of the elastic members 1221 is uniformly stretched and stressed, so that the hanging plates 1222 run more stably in a vertical direction when being struck by the striking block 13. Illustratively, each hanger plate 1222 is suspended from the second spacer 16 by 3 springs.
Optionally, in a specific implementation method, the filter tank 11 is further provided with an openable and closable filter bag mounting opening 117, and the filter bag mounting opening 117 is located opposite to the filter bag 121, and the filter bag mounting opening 117 can be opened when the filter bag 121 needs to be replaced so as to replace the filter bag 121.
Optionally, in an embodiment, in the dust removing device provided in the embodiment of the present application, a side of the second partition 16 facing the hanging board 1222 is provided with a guide rod 162, the hanging board 1222 is provided with a third through hole through which the guide rod 162 passes, and the hanging board 1222 is slidably connected with the guide rod 162 through the third through hole. By providing the guide rod 162 slidably connected to the hanging plate 1222 on the second partition 16, when the hanging plate 1222 is knocked by the striking block 13 to move up and down, the hanging plate 1222 can only move vertically up and down due to the fixing of the guide rod 162, and the hanging plates 1222 cannot be affected, and the hanging plate 1222 is connected to the second partition 16 through the elastic member 1221, so that the hanging plate 1222 and the guide rod 162 can be prevented from being jammed.
Optionally, in one embodiment, the dust removing device further includes a supporting rod 18, where the supporting rod is fixed between the first partition 15 and the second partition 16, and two ends of the supporting rod 18 are connected to the first partition 15 and the second partition 16 respectively, so that the first partition 15 and the second partition 16 are connected into a whole through the supporting rod 18, so that the overall structure is more firm.
In practice, the first partition 15 is fixed to the tank body of the filter tank 11, one end of the support rod 18 is fixed to the first partition 15, and the second partition 16 is fixed to the other end of the support rod 18, thereby fixing the second partition 16 in the filter tank 11.
In addition, the present application further provides a single crystal furnace system, as shown in fig. 6, including at least one single crystal furnace 20, a vacuum apparatus 30, and a single crystal furnace dust removing device 10 as described above, where an exhaust outlet of the at least one single crystal furnace 20 is connected to an air inlet 111 in the single crystal furnace dust removing device 10, and the vacuum apparatus 30 is connected to an air outlet 112 in the single crystal furnace dust removing device.
For the embodiment of the single crystal furnace system, the single crystal furnace dust removing device is included, and the same technical effects can be achieved, so that repetition is avoided, and details are omitted herein, and relevant parts only need to be referred to in the description of the embodiment of the single crystal furnace dust removing device.
To sum up, in the present embodiment, the single crystal furnace dust removing device in the present application includes a filter tank 11, a telescopic filter mechanism 12, a striking block 13, and a driving mechanism 14; the filter tank 11 is provided with an air inlet 111 and an air outlet 112, the air inlet 111 is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet 112 is used for being connected with vacuumizing equipment; the filter mechanism 12 is arranged in the filter tank 11, and the filter mechanism 12 is arranged between the air inlet 111 and the air outlet 112; the driving mechanism 14 is fixed on the filter tank 11, the striking block 13 is connected with the output end of the driving mechanism 14, and the striking block 13 can be circularly contacted and separated with the filter mechanism 12 under the driving of the driving mechanism 14; the striking block 13 which can be circularly contacted with and separated from the filter mechanism 12 under the driving of the driving mechanism 14 is arranged, so that dust deposited on the filter mechanism 12 can be shaken off in a striking vibration mode, the filter mechanism 12 can be effectively cleaned, the structure is compact, the filter mechanism 12 operates stably, and the problems of equipment abrasion and clamping stagnation can be effectively relieved.
It should be noted that, in the present specification, each embodiment is described in a progressive manner, and each embodiment is mainly described as different from other embodiments, and identical and similar parts between the embodiments are all enough to be referred to each other.
While alternative embodiments to the embodiments of the present application have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. It is therefore intended that the following appended claims be interpreted as including alternative embodiments and all such alterations and modifications as fall within the scope of the embodiments of the present application.
Finally, it is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity from another entity without necessarily requiring or implying any actual such relationship or order between such entities. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that an article or terminal that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such article or terminal. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude that an additional identical element is present in an article or terminal device comprising the element.
While the foregoing has been described in some detail by way of illustration of the principles and embodiments of the present application, and in accordance with the principles and implementations of the present application, those of ordinary skill in the art will readily recognize that there could be variations to the principles and implementations of the present application and, therefore, should not be construed as limited to the embodiments set forth herein.
Claims (16)
1. The dust removing device of the single crystal furnace is characterized by comprising a filtering tank, a telescopic filtering mechanism, a striking block and a driving mechanism;
the filter tank is provided with an air inlet and an air outlet, the air inlet is used for being connected with a tail gas outlet of the single crystal furnace, and the air outlet is used for being connected with vacuumizing equipment;
the filter mechanism is arranged in the filter tank, and the filter mechanism is arranged between the air inlet and the air outlet;
the driving mechanism is fixed on the filtering tank, the striking block is connected with the output end of the driving mechanism, and the striking block can be circularly contacted and separated with the filtering mechanism under the driving of the driving mechanism.
2. The single crystal furnace dust removal device according to claim 1, further comprising a first partition plate fixedly arranged in the filter tank, wherein a first through hole is formed in the first partition plate, the filter mechanism is arranged on one side, close to the air outlet, of the first partition plate, the filter mechanism is correspondingly arranged with the first through hole, and one end of the filter mechanism is connected with the first partition plate.
3. The dust removal device of a single crystal furnace according to claim 2, further comprising a second partition fixedly arranged inside the filter tank, the second partition being arranged between the filter mechanism and the air outlet;
the filtering mechanism comprises a filtering bag and an elastic assembly, one end of the filtering bag is connected with the first partition board, and the other end of the filtering bag is connected with the second partition board through the elastic assembly.
4. The dust collector of claim 3, wherein the striking block is connected to the output end of the driving mechanism via a connecting rod, the driving mechanism is fixed to a side of the second partition plate away from the filtering mechanism, and a second through hole is formed in the second partition plate for the connecting rod to pass through.
5. The dust collector of claim 3, wherein the elastic assembly comprises an elastic member and a hanging plate, the hanging plate is suspended at one end of the elastic member, the other end of the elastic member is fixed on the second partition plate, the other end of the filter bag is fixed on the hanging plate, and the striking block can be circularly contacted with and separated from one side of the hanging plate far away from the filter bag under the driving of the driving mechanism.
6. The dust removing apparatus for a single crystal furnace according to claim 5, wherein the filter bag is provided in plurality.
7. The dust removing device of the single crystal furnace according to claim 6, wherein a plurality of hanging plates are arranged, and at least one filter bag is fixed on each hanging plate;
at least one striking block and a driving mechanism for driving the striking block are arranged on one side, away from the filter bag, of each hanging plate.
8. The dust removing apparatus of a single crystal furnace according to claim 5, wherein each of the hanging plates is fixed to the second partition plate through a plurality of elastic members, respectively; the elastic pieces are uniformly arranged between the hanging plate and the second partition plate.
9. The dust collector of claim 5, wherein the second partition plate has a guide rod facing the hanging plate, a third through hole for the guide rod to pass through is formed in the hanging plate, and the hanging plate is slidably connected with the guide rod through the third through hole.
10. The dust removing device for a single crystal furnace according to claim 3, further comprising a supporting rod, wherein the supporting rod is fixed between the first partition plate and the second partition plate, and two ends of the supporting rod are respectively connected with the first partition plate and the second partition plate.
11. The dust removal device of a single crystal furnace according to claim 2, wherein an ash settling chamber is formed in the filter tank at one side of the first partition plate away from the air outlet, and the bottom of the ash settling chamber is lower than the air inlet.
12. The single crystal furnace dust removal device according to claim 11, wherein an ash removal opening capable of being opened and closed is arranged on the filter tank, and the ash removal opening is connected with the ash settling chamber.
13. The single crystal furnace dust removal device of claim 12, wherein the ash removal port is lower than the bottom of the ash chamber or is flush with the bottom of the ash chamber.
14. The dust remover for single crystal furnace of claim 5, wherein the elastic member is a spring.
15. The dust removing device of the single crystal furnace according to claim 1, wherein the driving mechanism is a cylinder or an electromagnet.
16. A single crystal furnace system, comprising at least one single crystal furnace, a vacuum device and the single crystal furnace dust removing device according to any one of claims 1 to 15, wherein a tail gas outlet of the at least one single crystal furnace is connected with the air inlet in the single crystal furnace dust removing device, and the vacuum device is connected with the air outlet in the single crystal furnace dust removing device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202223200850.5U CN219167958U (en) | 2022-11-30 | 2022-11-30 | Single crystal furnace dust removal device and system |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202223200850.5U CN219167958U (en) | 2022-11-30 | 2022-11-30 | Single crystal furnace dust removal device and system |
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| CN219167958U true CN219167958U (en) | 2023-06-13 |
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| CN202223200850.5U Active CN219167958U (en) | 2022-11-30 | 2022-11-30 | Single crystal furnace dust removal device and system |
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| CN (1) | CN219167958U (en) |
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2022
- 2022-11-30 CN CN202223200850.5U patent/CN219167958U/en active Active
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