CN219136916U

CN219136916U - Vacuum chamber of film plating machine

Info

Publication number: CN219136916U
Application number: CN202320229456.XU
Authority: CN
Inventors: 张冬林; 刘辉; 杨科; 王军
Original assignee: Shanghai Baiya Information Technology Development Co ltd
Current assignee: Shanghai Baiya Information Technology Development Co ltd
Priority date: 2023-02-16
Filing date: 2023-02-16
Publication date: 2023-06-06
Anticipated expiration: 2033-02-16

Abstract

The utility model discloses a vacuum chamber of a coating machine, which comprises a furnace body and a furnace door, wherein the furnace body is a polygonal cube, the furnace door is hinged with one vertical surface of the furnace body, a heating rod mounting seat is arranged at the top of the furnace body, a power input mounting seat is arranged at the bottom of the furnace body, a thermocouple mounting interface and an extraction opening interface are arranged on the vertical surface of the furnace body, and an ionization source mounting seat is circumferentially arranged on the vacuum chamber. The utility model provides a vacuum chamber of a coating machine, wherein a furnace body is in a polygonal cube, the inner space is large, and the mounting surfaces of functional parts are increased, so that interfaces for mounting the functional parts on the side surfaces of the vacuum chamber can be increased, the functions of the vacuum coating machine are enhanced, and the coating accuracy is improved.

Description

Vacuum chamber of film plating machine

Technical Field

The utility model is suitable for the technical field of coating machines, and particularly relates to a vacuum chamber of a coating machine.

Background

The vacuum coating machine mainly refers to equipment which needs to carry out coating under higher vacuum degree, is mainly used for plating metal materials or alloy materials on the surface of a workpiece, and is widely used in the fields of machinery, chemical industry, metallurgy, light industry, electronics and the like. The existing film coating technology mainly comprises the steps of converting a film material from a solid state into a gaseous state in a vacuum chamber of a vacuum film coating machine, and finally depositing the film material on the surface of a workpiece to form a film.

However, most of the vacuum chambers of the existing vacuum coating machines are cylindrical, and interfaces for installing functional parts are limited on the side surfaces of the vacuum chambers, so that the vacuum coating machines have single functions, and meanwhile, the structural design of the vacuum chambers is unreasonable, so that accurate coating is inconvenient.

Disclosure of Invention

In view of the fact that the vacuum chamber of the existing vacuum coating machine is single in function and inconvenient to accurately coat, the vacuum chamber of the coating machine is provided with the polygonal cube furnace body, the inner space is large, the mounting surface of functional parts is increased, and therefore interfaces for mounting the functional parts on the side face of the vacuum chamber can be increased, the functions of the vacuum coating machine are enhanced, and the coating accuracy is improved.

In order to achieve the above purpose, the embodiment of the present utility model adopts the following technical scheme:

the utility model provides a coating machine vacuum chamber, includes furnace body and furnace gate, the furnace body is polygon cube, the furnace gate with a facade of furnace body articulates, the top of furnace body is equipped with the heating rod mount pad, the bottom of furnace body is equipped with the power input mount pad, be equipped with thermocouple installation interface and extraction opening interface on the facade of furnace body, the ionization source mount pad is arranged to the vacuum chamber circumference.

According to one aspect of the utility model, the furnace body and the furnace door are formed by adopting stainless steel plates in a welding mode, and an interlayer water jacket is arranged between the inner walls of the stainless steel plates.

According to one aspect of the utility model, the furnace body and the inner wall of the furnace door are provided with lining plates.

According to one aspect of the utility model, door frame reinforcing ribs are arranged around the door frame of the oven door.

According to one aspect of the utility model, the front surface of the furnace door and the two vertical surfaces of the furnace body are provided with the observation window mounting seats.

According to one aspect of the utility model, the top of the vacuum chamber is provided with a plurality of sensor interfaces.

According to one aspect of the utility model, the thermocouple installation interfaces are 3.

According to one aspect of the utility model, the furnace body is an octagonal cube.

According to one aspect of the utility model, the oven door is connected with one vertical surface of the vacuum chamber body through a door hinge.

The implementation of the utility model has the advantages that: the utility model provides a coating machine vacuum chamber, the furnace body setting is polygon cube, and not only the inner space is big, can improve the productivity of vacuum coating machine greatly, and function piece installation face increases moreover, consequently can increase the interface that vacuum chamber side was used for installing the function part, makes the function enhancement of vacuum coating machine. The heating rod mounting seat, the power input mounting seat, the thermocouple mounting interface and the extraction opening interface are reasonably arranged, and meanwhile, the ionization source mounting seat is circumferentially arranged in the vacuum chamber, so that the coating accuracy can be improved, and the production efficiency of the vacuum coating machine is greatly improved. The interlayer water jacket is arranged, so that sealing elements, insulating elements and the like on the vacuum chamber can be protected from being damaged, and workers can be prevented from being accidentally scalded.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a schematic structural view of a vacuum chamber of a coating machine according to the present utility model.

In fig. 1, a furnace body; 2. a furnace door; 3. a bracket; 4. an ionization source mounting seat; 5. an observation window mounting seat; 6. a thermocouple installation interface; 7. a fixing plate; 8. a door hinge; 9. and (5) mounting holes.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1, the vacuum chamber of the coating machine comprises a furnace body 1 and a furnace door 2, wherein the furnace body 1 is a polygonal cube, the furnace door 2 is hinged with one vertical face of the furnace body 1, a heating rod mounting seat is arranged at the top of the furnace body 1, a power input mounting seat is arranged at the bottom of the furnace body 1, a thermocouple mounting interface 6 and an extraction opening interface are arranged on the vertical face of the furnace body 1, and an ionization source mounting seat 4 is circumferentially arranged in the vacuum chamber.

By arranging the furnace body 1 to be a polygonal cube, the internal space is large, the productivity of the vacuum coating machine can be greatly improved, and the mounting surface of the functional part is increased, so that the interface of the side surface of the vacuum chamber for mounting the functional part can be increased, and the function of the vacuum coating machine is enhanced. The heating rod mounting seat, the power input mounting seat, the thermocouple mounting interface 6 and the extraction opening interface are reasonably arranged, meanwhile, the ionization source mounting seat 4 is circumferentially arranged in the vacuum chamber, and the coating accuracy can be improved, so that the production efficiency of the vacuum coating machine is greatly improved.

In practical application, the furnace body 1 and the furnace door 2 can be formed by adopting stainless steel plates for assembly welding. Specifically, a 304 stainless steel plate may be used. Furthermore, an interlayer water jacket is arranged between the inner walls of the stainless steel plates. Because the vacuum coating machine is in operation, sometimes according to the technological requirement, need heat in the vacuum chamber, and the ionization source also can dissipate a large amount of heat energy in operation simultaneously, makes the vacuum chamber wall temperature rise, consequently through setting up the intermediate layer water jacket, can protect sealing element on the vacuum chamber, insulating element etc. from damaging and avoid the staff to be scalded by accident.

In practical application, the inner walls of the vacuum chamber body 1 and the furnace door 2 are provided with the lining plates, so that the adhesion coating layer on the inner wall of the vacuum chamber can be reduced, and meanwhile, the adhesion coating layer on the lining plates is convenient to detach and clean, so that the high-temperature corrosion of the inner wall of the vacuum chamber can be prevented. Specifically, the lining board can be provided with a double layer. Furthermore, door frame reinforcing ribs can be arranged around the door frame of the furnace door 2. Fixing plates 7 can be added at the upper end and the lower end of the furnace body 1.

In practical application, in order to be convenient for real-time observation, the facade of the vacuum chamber furnace body 1 can be provided with an observation window mounting seat 5, and specifically, the observation window mounting seat 5 can be arranged on two opposite facades of the furnace body 1. Further, for more careful observation during the production process, an observation window mount 5 may be provided in the center of the front face of the oven door 2. In this embodiment, the power input mounting seat includes a mounting hole 9 and a support 3, where the number of the supports 3 is 2, and the supports are symmetrically distributed on two sides of the mounting hole 9.

In practical application, the top of the vacuum chamber of the coating machine can be provided with a plurality of sensor interfaces, and the sensor interfaces are used for installing required sensors, such as vacuum sensors, temperature sensors and other detection components, so that the functions of the vacuum coating machine can be further enhanced.

In practical application, the number of the ionization source mounting seats 4 is set according to practical use requirements, and then the ionization source mounting seats are equally divided into a plurality of groups which are circumferentially arranged around the vacuum chamber. In order to achieve uniform coating, the ionization sources need to be symmetrically arranged, so that the furnace body 1 is preferably arranged in an octagonal cube.

In practical applications, the number of the thermocouple installation interfaces 6 may be set according to the use requirement, for example, 3. In order to ensure the use effect, the thermocouple installation interfaces 6 are longitudinally and uniformly distributed on one vertical surface of the furnace body 1. The air extraction port interface is used for vacuum extraction of the vacuum coating machine furnace body 1, and is opened when the vacuum coating machine extracts high-flow vacuum.

In practical application, one vertical surface of the furnace door 2 and one vertical surface of the vacuum chamber body 1 can be connected through a door hinge 8. Specifically, the door hinge 8 includes a first fixing member and a second fixing member, the first fixing member is connected with one vertical surface of the furnace body 1, the second fixing member is connected with the furnace door 2, and the second fixing member is connected with the first fixing member through a connecting component. The connecting assembly comprises a rotating shaft, a spring and a compressing piece, one end of the rotating shaft is connected to the first fixing piece, the other end of the rotating shaft penetrates through the first fixing piece, the elastic piece is sleeved on the outer side of the other end of the rotating shaft, and the compressing piece is connected to the other end of the rotating shaft. The present embodiment does not limit the structure of the door hinge 8, and may be selected according to actual conditions.

The foregoing is merely illustrative of the present utility model, and the present utility model is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the technical scope of the present utility model should be included in the scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. The utility model provides a coating machine vacuum chamber, includes furnace body and furnace gate, its characterized in that, the furnace body is polygon cube, the furnace gate with a facade of furnace body articulates, the top of furnace body is equipped with the heating rod mount pad, the bottom of furnace body is equipped with the power input mount pad, be equipped with thermocouple installation interface and extraction opening interface on the facade of furnace body, ionization source mount pad is arranged to the vacuum chamber circumference.

2. The vacuum chamber of the coating machine according to claim 1, wherein the furnace body and the furnace door are formed by adopting stainless steel plates in a welding mode, and an interlayer water jacket is arranged between inner walls of the stainless steel plates.

3. The vacuum chamber of claim 2, wherein the furnace body and the inner wall of the furnace door are provided with lining plates.

4. The vacuum chamber of claim 2, wherein door frame ribs are provided around the door frame of the oven door.

5. The vacuum chamber of claim 2, wherein the upper and lower ends of the furnace body are provided with additional fixing plates.

6. The vacuum chamber of claim 1, wherein the front face of the furnace door and the two vertical faces of the furnace body are provided with observation window mounting seats.

7. The vacuum chamber of claim 6, wherein a plurality of sensor interfaces are provided on top of the vacuum chamber.

8. The vacuum chamber of claim 7, wherein the number of thermocouple mounting interfaces is 3.

9. The vacuum chamber of claim 1, wherein the furnace body is an octagonal cube.

10. The vacuum chamber of claim 1, wherein the door is connected to a vertical surface of the vacuum chamber body by a door hinge.