CN219136912U

CN219136912U - Processing platform

Info

Publication number: CN219136912U
Application number: CN202320169732.8U
Authority: CN
Inventors: 请求不公布姓名
Original assignee: Shenzhen Yuansu Photoelectric Technology Co ltd
Current assignee: Shenzhen Yuansu Photoelectric Technology Co ltd
Priority date: 2023-01-18
Filing date: 2023-01-18
Publication date: 2023-06-06
Anticipated expiration: 2033-01-18

Abstract

The utility model discloses a processing platform. The processing platform comprises a first platform, a thimble, a second platform and a driving device. The first platform is provided with a bearing surface and a through hole, the bearing surface is used for bearing a workpiece, and the through hole penetrates through the first platform along the direction perpendicular to the bearing surface. The thimble includes main part, first tip and second tip, and first tip and second tip are connected in the opposite both ends of main part respectively, and the thimble wears to locate the through-hole and can move in the through-hole, and first tip is used for jacking work piece. The second platform is provided with a propping surface, and the second end part is contacted and propped against the propping surface. The driving device is used for driving the second platform or the first platform to move along the direction vertical to the bearing surface. Through setting up thimble and second platform separation for the second platform supports the thimble through contacting only, and when first platform and second platform took place at the radial relative motion of thimble, the thimble can be along with first platform motion, reduces the thimble card and dies in the through-hole and take place the possibility of damage.

Description

Processing platform

Technical Field

The utility model relates to the technical field of production equipment, in particular to a processing platform.

Background

In the production and manufacture of a part of workpieces, such as the production and manufacture of semiconductors or the vacuum coating process of the workpieces, the workpieces need to be lifted up to facilitate the transportation of the workpieces. In the related art, the ejector pins are usually fixed on the jacking plate or integrally formed with the jacking plate. Under the higher production environment of temperature, jacking plate, thimble and work piece plummer all probably thermal expansion produces deformation, and because the deformation that jacking plate and thimble and work piece plummer take place is different for the radial displacement of the through-hole that wears to establish of thimble and plummer is also different, so the thimble is blocked easily in the through-hole that wears to establish of plummer, and then causes the damage of thimble. In addition, when the machining precision is difficult to ensure, when the relative position of the jacking plate and the workpiece bearing table deviates, the thimble can be blocked, so that the thimble is damaged. Therefore, it is necessary to solve the above problems.

Disclosure of Invention

The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides a processing platform which can reduce the damage probability of the thimble.

According to an embodiment of the utility model, a processing platform comprises:

the first platform is provided with a bearing surface and a through hole, the bearing surface is used for bearing a workpiece, and the through hole penetrates through the first platform along the direction perpendicular to the bearing surface;

the thimble comprises a main body, a first end and a second end, wherein the first end and the second end are respectively connected to two opposite ends of the main body, the thimble penetrates through the through hole and can move in the through hole, and the first end is used for jacking a workpiece;

the second platform is provided with a propping surface, and the second end part is contacted and propped with the propping surface;

the driving device is connected with the first platform or the second platform and is used for driving the second platform and the first platform to move relatively in the direction perpendicular to the bearing surface.

The processing platform provided by the embodiment of the utility model has at least the following beneficial effects: through setting up thimble and second platform separation for the second platform supports the thimble through the contact only, and when first platform and second platform took place at the radial relative motion of thimble, the thimble can be along with first platform motion, thereby makes the thimble be in the state of wearing to locate the through-hole, reduces because one end of thimble is fixed in the second platform and causes the thimble card to die in the through-hole and take place the possibility of damage.

According to some embodiments of the utility model, the second end portion includes a connecting portion and an extension portion connected to each other, the connecting portion being connected to the main body, the extension portion extending in a direction perpendicular to an axial direction of the ejector pin.

According to some embodiments of the utility model, the second platform is further provided with a limiting part, the limiting part is arranged on the abutting surface, and the limiting part is used for abutting against one side of the extending part, which is away from the abutting surface, so as to limit the movement of the thimble, which is away from the second platform.

According to some embodiments of the utility model, the processing platform further comprises an elastic member, one end of the elastic member abuts against the first platform, the other end of the elastic member is connected with the thimble, and the elastic member is used for driving the thimble to move along the direction of the first platform towards the second platform.

According to some embodiments of the utility model, the second end has an outer surface with a coefficient of friction that is less than a coefficient of friction of an outer surface of the body.

According to some embodiments of the utility model, the processing platform further comprises a linear bearing, the linear bearing is disposed in the through hole, and the thimble is disposed through the linear bearing.

According to some embodiments of the utility model, the inner surface of the through hole is provided with a lubrication layer having a friction coefficient smaller than that of the surface of the first land.

According to some embodiments of the utility model, the cross-sectional area of the first end portion decreases gradually in a direction away from the second end portion, and an outer surface of the first end portion is curved.

According to some embodiments of the utility model, the first end is detachably connected to the body.

According to some embodiments of the utility model, the processing platform further comprises a heating element, the first platform is further provided with a heating hole, and the heating element is arranged in the heating hole in a penetrating manner.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

The utility model is further described with reference to the accompanying drawings and examples, in which:

FIG. 1 is a schematic view of a processing platform according to an embodiment of the present utility model;

FIG. 2 is a schematic view of a portion of the processing platform of FIG. 1;

fig. 3 is a schematic view of a processing platform according to another embodiment of the utility model.

Reference numerals:

a processing platform 100;

the first stage 200, the carrying surface 210, the through holes 220, and the heating holes 230;

thimble 300, first end 310, second end 320, connecting portion 321, extension 322, and main body 330;

a second platform 400, a supporting surface 410 and a limiting part 420;

an elastic member 500, a linear bearing 510, and a heating member 520;

the workpiece 600.

Detailed Description

Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.

In the description of the present utility model, it should be understood that references to orientation descriptions such as upper, lower, front, rear, left, right, etc. are based on the orientation or positional relationship shown in the drawings, are merely for convenience of description of the present utility model and to simplify the description, and do not indicate or imply that the apparatus or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present utility model.

In the description of the present utility model, the meaning of a number is one or more, the meaning of a number is two or more, and greater than, less than, exceeding, etc. are understood to exclude the present number, and the meaning of a number is understood to include the present number. The description of the first and second is for the purpose of distinguishing between technical features only and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or implicitly indicating the precedence of the technical features indicated.

In the description of the present utility model, unless explicitly defined otherwise, terms such as arrangement, installation, connection, etc. should be construed broadly and the specific meaning of the terms in the present utility model can be reasonably determined by a person skilled in the art in combination with the specific contents of the technical scheme.

In the description of the present utility model, the descriptions of the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

To the easy dead problem of card that takes place in the plummer is worn to locate to the thimble, this application carries out separable setting through carrying out the thimble with the platform that bears the thimble for plummer and the platform that bears the thimble take place when the radial relative motion of thimble, and the plummer motion can be followed to the thimble, thereby reduces the thimble card and dies in the probability in the through-hole.

The processing platform according to the embodiment of the present utility model is described below with reference to the drawings in the specification.

Referring to fig. 1 to 3, a processing platform 100 according to an embodiment of the present utility model includes a first platform 200, a thimble 300, a second platform 400, and a driving device (not shown). The first platform 200 is provided with a carrying surface 210 and a through hole 220, the carrying surface 210 is used for carrying the workpiece 600, and the through hole 220 penetrates through the first platform 200 along a direction perpendicular to the carrying surface 210. The thimble 300 includes a main body 330, a first end 310 and a second end 320, the first end 310 and the second end 320 are respectively connected to two opposite ends of the main body 330, the thimble 300 is disposed through the through hole 220 and can move in the through hole 220, and the first end 310 is used for lifting up the workpiece 600. The second platform 400 is provided with an abutting surface 410, and the second end 320 contacts and abuts against the abutting surface 410. The driving device is used for driving the second platform 400 or the first platform 200 to move along the direction perpendicular to the bearing surface 210.

By separating the thimble 300 from the second platform 400, the second platform 400 supports the thimble 300 only through contact, and when the first platform 200 and the second platform 400 move in the radial direction of the thimble 300, the thimble 300 can move along with the first platform 200, so that the thimble 300 is in a state of penetrating through the through hole 220, and the possibility that the thimble 300 is blocked in the through hole 220 and damaged due to the fact that one end of the thimble 300 is fixed to the second platform 400 is reduced.

Specifically, the number of through holes 220 and pins 300 can be correspondingly provided with a plurality of through holes, and the specific number is determined according to the production requirement. The shape of the thimble 300 may be selected from a cylindrical shape, a square shape, a conical shape, or other shapes, and the axial direction of the thimble 300, that is, the penetrating direction of the through hole 220, and the radial direction of the thimble 300, that is, the direction perpendicular to the axial direction of the thimble 300. The driving means can be connected to the first stage 200 to drive the first stage 200 to move, or can be connected to the second stage 400 to drive the second stage 400 to move, as long as the driving means can drive the first stage 200 and the second stage 400 to approach or separate from each other in a direction perpendicular to the carrying surface 210. The drive means can be selected as a drive rod or a linear drive motor as is conventional in the basic field.

Because the thimble 300 is directly in contact with the second platform 400, in order to facilitate the transportation of the workpiece 600 after the workpiece 600 is lifted, the thimble 300 is generally thinner, the area of the thimble 300 contacting with the second platform 400 is smaller, and the stability of the second platform 400 contacting with the thimble 300 is poorer. In order to solve the above-mentioned problems, the present application further provides an improvement, referring to fig. 1, in which the second end 320 includes a connecting portion 321 and an extension portion 322 connected to each other, the connecting portion 321 is connected to the main body 330, and the extension portion 322 extends in a direction perpendicular to an axial direction of the ejector pin 300. By arranging the extension part 322, the contact area between the thimble 300 and the second platform 400 can be increased, so that the stability of the thimble 300 propped against the second platform 400 is improved, the probability of tilting the thimble 300 in the through hole 220 is reduced, and the thimble 300 is kept vertical.

Specifically, the extension portion 322 can be disposed around the connection portion 321 individually, such that the extension portion 322 has a disc-shaped or polygonal base. Extension 322 can also be a plurality of protrusions surrounding connection 321 that provide support for spike 300 in a plurality of positions. In this case, referring to fig. 1, the second end 320 and the main body 330 may be integrally formed, or, referring to fig. 2, the second end 320 and the main body 330 may be coupled to each other by a pretension such as welding or a bolt.

When first land 200 and second land 400 are displaced in the radial direction of ejector pin 300, ejector pin 300 moves with first land 200, but ejector pin 300 is still limited in through hole 220 to lose contact with second land 400 due to the friction force between the inner surface of through hole 220 and the outer surface of ejector pin 300. In order to solve the above-mentioned problem, further referring to fig. 1, the second platform 400 is further provided with a limiting portion 420, where the limiting portion 420 is disposed on the abutting surface 410, and the limiting portion 420 is used to abut against a side of the extending portion 322 away from the abutting surface 410, so as to limit the movement of the ejector pin 300 away from the second platform 400. Through setting up limit part 420, can make thimble 300 and second platform 400 take place the motion that keeps away from each other, support through limit part 420 and thimble 300 to drive thimble 300 and second platform 400 together motion, and then resume the support of thimble 300 and second platform 400 to hold, make thimble 300 can follow first platform 200 smoothly towards the direction shrink in through-hole 220 of second platform 400.

Specifically, the limiting portion 420 and the ejector pin 300 have a certain gap in the axial direction of the ejector pin 300 and in the radial direction of the ejector pin 300. The clearance in the axial direction of the thimble 300 can reduce friction which may be generated between the thimble 300 and the limiting portion 420, thereby reducing the influence of the limiting portion 420 on the movement of the thimble 300 in the normal movement state. The radial clearance of ejector pin 300 provides a movement space for movement of ejector pin 300 in the radial direction, so that ejector pin 300 can follow the movement of first platform 200 in the radial direction of ejector pin 300.

As a further improvement of the above solution, referring to fig. 1, the processing platform 100 further includes an elastic member 500, where one end of the elastic member 500 abuts against the first platform 200, and the other end of the elastic member 500 is connected to the ejector pin 300, and the elastic member 500 is used to drive the ejector pin 300 to move along the first platform 200 toward the second platform 400. By arranging the elastic element 500, when the thimble 300 protrudes out of the through hole 220 along the direction away from the second platform 400, the thimble 300 is subjected to a force moving towards the second platform 400, and when the thimble 300 rubs with the inner surface of the through hole 220 and is limited in the through hole 220, the elasticity of the elastic element 500 drives the thimble 300 to move continuously so as to keep abutting against the second platform 400.

Specifically, the elastic member 500 may be a large-sized spring, where the spring is sleeved on the thimble 300, one end of the spring abuts against the first platform 200, and the other end of the spring is fixed to the thimble 300 by welding or the like, or in an embodiment where the second end 320 is provided with the extension portion 322, the other end of the spring abuts against the extension portion 322. Alternatively, the springs may be selected from a plurality of small-sized springs, each of which is arranged along the circumferential direction of the ejector pin 300.

According to some embodiments of the present application, the friction coefficient of the outer surface of the second end 320 is smaller than that of the outer surface of the main body 330, so as to reduce the friction force generated when the ejector pin 300 and the second platform 400 move relatively to each other in the radial direction of the ejector pin 300, so that the movement of the ejector pin 300 relative to the second platform 400 is smoother. When the first platform 200 and the second platform 400 perform the relative movement in the radial direction of the thimble 300, the thimble 300 can smoothly follow the first platform 200 to move, so that the probability of the thimble 300 being jammed due to the friction force generated by the contact between the second end 320 and the second platform 400 is reduced.

Specifically, the control of the friction coefficient of the outer surface of the second end 320 can be achieved by adding a lubricating coating to the outer surface of the second end 320. Alternatively, the outer surface of the second end surface may be finished to be smoother, or, referring to fig. 2, the extension 322 of the second end portion 320 may be provided as a low friction coefficient member, thereby reducing friction between the second end portion 320 and the second platform 400.

Further, in order to reduce the probability of the ejector pin 300 moving in the through hole 220 to be blocked, a lubrication layer (not shown in the figure) is disposed on the inner surface of the through hole 220, and the friction coefficient of the lubrication layer is smaller than that of the surface of the first platform 200, so that the ejector pin 300 moves in the through hole 220 more smoothly. The lubricating layer can be selected as a lubricating oil or a lubricious coating, a sticker layer as is conventional in the art.

On the other hand, a linear bearing 510 may be provided in the through hole 220, and the ejector pin 300 may be inserted into the linear bearing 510. Through the linear bearing 510, sliding friction between the ejector pin 300 and the through hole 220 can be converted into rolling friction, so that friction force of the ejector pin 300 moving in the through hole 220 is reduced, and probability of blocking of the ejector pin 300 moving in the through hole 220 is reduced.

According to some embodiments of the present application, referring to fig. 2, the cross-sectional area of the first end portion 310 gradually decreases along the direction away from the second end portion 320, so that the outer surface of the first end portion 310 is curved, and when the first end portion 310 contacts the workpiece 600, the jacking force applied to the workpiece 600 is softer, and the probability of damaging the workpiece 600 can be reduced compared to when the first end portion 310 has a corner step or the contact surface of the first end portion 310 and the workpiece 600 is too sharp.

Specifically, the first end 310 can be integrally formed with the body 330 such that the outer surface of the first end 310 is machined to a curved surface during machining. Alternatively, referring to fig. 3, the first end 310 is a plug that is connected to the main body 330 by welding or the like, and is connected to the main body 330 after being separated from the main body 330. The material of the first end 310 can also be selected to be engineering plastic, so that the lifting of the first end 310 is softer. According to the production requirement, the engineering plastic can be selected as high-temperature resistant engineering plastic.

Further, since the first end 310 needs to repeatedly contact the workpiece 600, it wears out more rapidly, and when the first end 310 needs to be replaced, the main body 330 may also need to be replaced. In order to facilitate installation and replacement of first end 310 and reduce the cost of using spike 300, referring to fig. 3, first end 310 is detachably coupled to main body 330 in a manner that may be selected from a threaded connection or a tightened connection of a pretensioning member such as a bolt. The detachable connection enables the first end 310 to be replaced, thereby enabling the main body 330 to be quickly recycled, thereby reducing maintenance costs and extending service life.

On the other hand, some workpieces 600 need to be produced at a certain temperature, and in order to improve the heating effect, referring to fig. 3, an improvement is provided in the present application. The processing platform 100 further includes a heating element 520, the first platform 200 is further provided with a heating hole 230, and the heating element 520 is disposed in the heating hole 230 in a penetrating manner. The first platform 200 can be processed through the heating element 520, and the workpiece 600 is heated through contact in a heat conduction mode, so that the heating effect is better and a certain space is saved compared with the mode that a heating cover is sleeved on the periphery of the first platform 200.

Specifically, the heating member 520 can be selected to be a heating wire as is conventional in the art.

The embodiments of the present utility model have been described in detail with reference to the accompanying drawings, but the present utility model is not limited to the above embodiments, and various changes can be made within the knowledge of one of ordinary skill in the art without departing from the spirit of the present utility model. Furthermore, embodiments of the utility model and features of the embodiments may be combined with each other without conflict.

Claims

1. Processing platform, its characterized in that includes:

2. The tooling platform of claim 1, wherein the second end includes an interconnecting connection portion and an extension portion, the connection portion being connected to the body, the extension portion extending in a direction perpendicular to an axial direction of the thimble.

3. The processing platform of claim 2, wherein the second platform is further provided with a limiting portion, the limiting portion is disposed on the abutting surface, and the limiting portion is configured to abut against a side of the extending portion facing away from the abutting surface, so as to limit movement of the ejector pin facing away from the second platform.

4. The processing platform according to claim 1 or 2, further comprising an elastic member, wherein one end of the elastic member abuts against the first platform, the other end of the elastic member is connected to the thimble, and the elastic member is configured to drive the thimble to move along the direction of the first platform toward the second platform.

5. The tooling platform of claim 1 or 2, wherein the coefficient of friction of the outer surface of the second end is less than the coefficient of friction of the outer surface of the body.

6. The processing platform of claim 1, further comprising a linear bearing disposed within the through hole, and the thimble is threaded through the linear bearing.

7. The processing platform of claim 1, wherein an inner surface of the through hole is provided with a lubrication layer having a coefficient of friction that is less than a coefficient of friction of a surface of the first platform.

8. The tooling platform of claim 1, wherein the cross-sectional area of the first end portion decreases in a direction away from the second end portion, the outer surface of the first end portion being curved.

9. The tooling platform of claim 1, wherein the first end is removably connected to the body.

10. The processing platform of claim 1, further comprising a heating element, wherein the first platform is further provided with a heating aperture, and wherein the heating element is disposed through the heating aperture.