CN219119741U

CN219119741U - Spline type spiral guiding transmission mechanism

Info

Publication number: CN219119741U
Application number: CN202223302643.0U
Authority: CN
Inventors: 程珂丽
Original assignee: Tianjin Fuxingda Chain Co ltd
Current assignee: Tianjin Fuxingda Chain Co ltd
Priority date: 2022-12-06
Filing date: 2022-12-06
Publication date: 2023-06-02
Anticipated expiration: 2032-12-06

Abstract

The utility model relates to a spline type spiral guide transmission mechanism, which comprises a mounting plate, wherein a guide driving box is fixedly connected to the mounting plate, a servo motor is fixedly connected to one side of the guide driving box, the output end of the servo motor is fixedly connected with a threaded rod, the tail end of the threaded rod is rotationally connected with the inner wall of the guide driving box, the periphery of the threaded rod is in threaded connection with a threaded sleeve, the side wall of the threaded sleeve is fixedly connected with a spline sleeve through a connecting block, a spline rod is slidably connected inside the spline sleeve, and two ends of the spline rod are fixedly connected with the inner wall of the guide driving box.

Description

Spline type spiral guiding transmission mechanism

Technical Field

The utility model relates to a method for manufacturing a semiconductor device, in particular to a method for manufacturing a semiconductor device, and belongs to the technical field.

Background

On the basis of the traditional sliding screw rod, a ball screw rod shaft is extended and developed, and a mechanical element consisting of parts such as a screw rod, a nut, a ball and the like is used for converting rotary motion into linear motion or converting the linear motion into rotary motion.

The existing movable workbench generally adopts sliding rail transmission, clamping or shaking is easy to occur in the moving process, the moving precision is affected, the threaded rod is seriously worn in the transmission process, and the guiding transmission precision is easy to be affected after long-term use.

Disclosure of Invention

The utility model aims to solve the problems and provide a spline type spiral guide transmission mechanism, which can enable the movement of a thread bush in the horizontal direction to be more stable by arranging a spline bush and a spline rod in a sliding connection manner, is convenient for the thread bush to drive a moving platform to carry out guide transmission, and can convey lubricating oil in a lubricating oil tank to the surfaces of the spline rod and a threaded rod through a branch pipeline by arranging a lubricating oil pump, so that the abrasion degree of the spline rod and the threaded rod is reduced, and the transmission stability is improved.

The spline type spiral guide transmission mechanism comprises a mounting plate, wherein a guide driving box is fixedly connected to the mounting plate, a servo motor is fixedly connected to one side of the guide driving box, a threaded rod is fixedly connected to the output end of the servo motor, the tail end of the threaded rod is rotationally connected with the inner wall of the guide driving box, a thread bush is connected to the periphery of the threaded rod in a threaded manner, a spline bush is fixedly connected to the side wall of the thread bush through a connecting block, a spline rod is connected to the inside of the spline bush in a sliding manner, and two ends of the spline rod are fixedly connected with the inner wall of the guide driving box.

Preferably, the connecting block is fixedly connected with a lubrication cavity, a first oil injection hole is formed in the surface of the lubrication cavity, and a lubrication oil tank is fixedly connected inside the lubrication cavity.

Preferably, the second oil filling hole is formed in the surface of the lubricating oil tank, the position of the second oil filling hole corresponds to that of the first oil filling hole, and one side of the lubricating oil tank is fixedly connected with the lubricating oil pump through a pipeline.

Preferably, one side of the lubricating oil pump is fixedly connected with a branch pipeline through a pipeline, and the tail ends of the branch pipeline are respectively positioned above the spline rod and the threaded rod.

Preferably, spline grooves are formed in the inner wall of the spline housing, spline bars are fixedly connected to the outer surface of the spline rod, and the size of the spline bars is matched with that of the spline grooves.

Preferably, the spline housing is kept away from connecting block one side fixedly connected with extension board, extension board one side fixedly connected with buffering seat, the inside fixedly connected with damping buffer spring of buffering seat, damping buffer spring end fixedly connected with spacing post, spacing post periphery and buffering seat inner wall sliding connection.

The beneficial effects of the utility model are as follows:

according to the utility model, the spline housing and the spline rod are slidably connected, so that the movement of the thread housing in the horizontal direction is more stable, the thread housing is convenient to drive the moving platform to conduct guiding transmission, lubricating oil in the lubricating oil tank can be conveyed to the surfaces of the spline rod and the threaded rod through the branch pipeline by arranging the lubricating oil pump, the abrasion degree of the spline rod and the threaded rod is reduced, the transmission stability is improved, the practicability is higher, the maximum movement stroke of the thread housing and the spline housing can be unilaterally limited by arranging the limiting column and the damping buffer spring, and the phenomenon that the branch pipeline is impacted due to overlarge movement distance of the thread housing and the spline housing is avoided, and the lubrication effect is influenced.

Drawings

Fig. 1 is a schematic view of the overall structure of the present utility model.

Fig. 2 is a schematic view of the internal structure of the lubrication chamber of the present utility model.

Fig. 3 is a schematic structural view of the spline housing of the present utility model.

Fig. 4 is an enlarged view of a portion of the present utility model.

Reference numerals in the drawings: 1. a mounting plate; 2. a guide driving box; 3. a threaded rod; 4. a thread sleeve; 5. a spline housing; 6. a spline bar; 7. a lubrication chamber; 8. a lubrication oil tank; 9. a lubrication pump; 10. a branch pipe; 11. spline grooves; 12. a buffer seat; 13. damping buffer springs; 14. and a limit column.

Detailed Description

The technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, but not all embodiments, and all other embodiments obtained by those skilled in the art without making creative efforts based on the embodiments of the present utility model are included in the protection scope of the present utility model.

Embodiment 1 please refer to fig. 1-4, spline formula spiral direction drive mechanism, including mounting panel 1, fixedly connected with direction drive case 2 on the mounting panel 1, direction drive case 2 one side fixedly connected with servo motor, servo motor output fixedly connected with threaded rod 3, threaded rod 3 terminal and direction drive case 2 inner wall rotate to be connected, threaded rod 3 peripheral threaded connection has thread bush 4, thread bush 4 lateral wall is through connecting block fixedly connected with spline housing 5, spline housing 5 inside sliding connection has spline pole 6, spline pole 6 both ends and direction drive case 2 inner wall fixed connection.

Specifically, a lubrication cavity 7 is fixedly connected to the connecting block, a first oil hole is formed in the surface of the lubrication cavity 7, a lubrication oil tank 8 is fixedly connected to the inside of the lubrication cavity 7, a second oil hole is formed in the surface of the lubrication oil tank 8, the position of the second oil hole corresponds to that of the first oil hole, a lubrication oil pump 9 is fixedly connected to one side of the lubrication oil tank 8 through a pipeline, a branch pipeline 10 is fixedly connected to one side of the lubrication oil pump 9 through a pipeline, the tail ends of the branch pipelines 10 are respectively positioned above a spline rod 6 and a threaded rod 3, a spline groove 11 is formed in the inner wall of the spline sleeve 5, spline bars are fixedly connected to the outer surface of the spline rod 6, the spline bars are matched with the spline groove 11 in size, a support plate is fixedly connected to one side of the spline sleeve 5 away from the connecting block, a buffer seat 12 is fixedly connected to one side of the support plate, the damping buffer spring 13 is fixedly connected inside the buffer seat 12, the limit post 14 is fixedly connected at the tail end of the damping buffer spring 13, the periphery of the limit post 14 is in sliding connection with the inner wall of the buffer seat 12, the movement of the thread bush 4 in the horizontal direction can be more stable by arranging the spline bush 5 and the spline rod 6 in sliding connection, the thread bush 4 can drive the moving platform to conduct guiding transmission conveniently, lubricating oil in the lubricating oil tank 8 can be conveyed to the surfaces of the spline rod 6 and the threaded rod 3 through the branch pipe 10 by arranging the lubricating oil pump 9, the abrasion degree of the spline rod 6 and the threaded rod 3 is reduced, the transmission stability is improved, the practicability is higher, the maximum movement stroke of the thread bush 4 and the spline bush 5 can be limited in a single side by arranging the limit post 14 and the damping buffer spring 13, the situation that the movement distance between the thread bush 4 and the spline bush 5 is overlarge, the branch pipe 10 is impacted is avoided, affecting the lubrication effect.

When the device is used, the spline housing 5 is arranged to be in sliding connection with the spline rod 6, so that the movement of the thread housing 4 in the horizontal direction is more stable, the thread housing 4 is convenient to drive the moving platform to conduct guiding transmission, lubricating oil in the lubricating oil tank 8 can be conveyed to the surfaces of the spline rod 6 and the threaded rod 3 through the branch pipeline 10 by arranging the lubricating oil pump 9, the abrasion degree of the spline rod 6 and the threaded rod 3 is reduced, the transmission stability is improved, the practicability is higher, the limit post 14 and the damping buffer spring 13 are arranged to limit the maximum movement stroke of the thread housing 4 and the spline housing 5 on one side, and the phenomenon that the branch pipeline 10 is impacted due to overlarge movement distance of the thread housing 4 and the spline housing 5 is avoided, so that the lubrication effect is affected is avoided.

It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments and that the present utility model may be embodied in other specific forms without departing from the spirit or essential attributes thereof, and accordingly, the embodiments are to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Furthermore, it should be understood that although the present disclosure describes embodiments, not every embodiment is provided with a separate embodiment, and that this description is provided for clarity only, and that the disclosure is not limited to the embodiments described in detail below, and that the embodiments described in the examples may be combined as appropriate to form other embodiments that will be apparent to those skilled in the art.

Claims

1. Spline formula spiral direction drive mechanism, including mounting panel (1), its characterized in that: fixedly connected with direction driving case (2) on mounting panel (1), direction driving case (2) one side fixedly connected with servo motor, servo motor output fixedly connected with threaded rod (3), threaded rod (3) are terminal to be connected with direction driving case (2) inner wall rotation, threaded rod (3) peripheral threaded connection has thread bush (4), thread bush (4) lateral wall is through connecting block fixedly connected with spline housing (5), inside sliding connection of spline housing (5) has spline pole (6), spline pole (6) both ends and direction driving case (2) inner wall fixed connection.

2. The spline spiral guide drive of claim 1, wherein: the connecting block is fixedly connected with a lubrication cavity (7), a first oil injection hole is formed in the surface of the lubrication cavity (7), and a lubrication oil tank (8) is fixedly connected inside the lubrication cavity (7).

3. The spline spiral guide drive of claim 2, wherein: the surface of the lubricating oil tank (8) is provided with a second oil filling hole, the position of the second oil filling hole corresponds to that of the first oil filling hole, and one side of the lubricating oil tank (8) is fixedly connected with a lubricating oil pump (9) through a pipeline.

4. A spline spiral guide drive according to claim 3, wherein: and one side of the lubricating oil pump (9) is fixedly connected with a branch pipeline (10) through a pipeline, and the tail ends of the branch pipeline (10) are respectively positioned above the spline rod (6) and the threaded rod (3).

5. The spline spiral guide drive of claim 1, wherein: spline grooves (11) are formed in the inner wall of the spline sleeve (5), spline bars are fixedly connected to the outer surface of the spline rod (6), and the size of the spline bars is matched with that of the spline grooves (11).

6. The spline spiral guide drive of claim 1, wherein: spline housing (5) keep away from connecting block one side fixedly connected with extension board, extension board one side fixedly connected with buffering seat (12), inside fixedly connected with damping buffer spring (13) of buffering seat (12), damping buffer spring (13) terminal fixedly connected with spacing post (14), spacing post (14) periphery and buffering seat (12) inner wall sliding connection.