CN219117549U - Tube furnace with uniform air guide - Google Patents
Tube furnace with uniform air guide Download PDFInfo
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- CN219117549U CN219117549U CN202223287352.9U CN202223287352U CN219117549U CN 219117549 U CN219117549 U CN 219117549U CN 202223287352 U CN202223287352 U CN 202223287352U CN 219117549 U CN219117549 U CN 219117549U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to the technical field of Chemical Vapor Deposition (CVD) tube furnaces, in particular to a tube furnace with uniform gas guide, which comprises: a furnace body; the quartz tube penetrates through the furnace body, and two end parts of the quartz tube extend outwards from the furnace body, and each of the two end parts comprises a first end part and a second end part; the two flanges are respectively arranged on the first end part and the second end part of the quartz tube; the air guide device is positioned on the first end part of the quartz tube and comprises an air inlet pipe penetrating through the flange of the first end part and an air guide structure which is arranged in the quartz tube and communicated with the air inlet pipe; the air guide structure comprises an air inlet main pipeline, an air guide main pipeline communicated with the air inlet main pipeline, a plurality of air guide branch pipelines communicated with the air inlet main pipeline and arranged in an annular parallel manner with the air guide main pipeline, and annular reinforcing parts sequentially connected with the air guide branch pipelines; the air outlet pipe is arranged on the flange at the second end part in a penetrating way. The tube furnace with uniform gas guide provided by the utility model has stable gas flow in the furnace and uniform gas diffusion.
Description
Technical Field
The utility model relates to the technical field of Chemical Vapor Deposition (CVD) tube furnaces, in particular to a tube furnace with uniform gas guide.
Background
Chemical Vapor Deposition (CVD) is a chemical technology in which chemical gases react on the surface of a substrate to form a thin film or a nanomaterial, and is one of the most widely used technologies for preparing a thin film material in the semiconductor field. The technology mainly uses one or more gas phase compounds or simple substances to carry out chemical reaction on the surface of a substrate to generate a film or a nano material.
The applicant found that when a tubular furnace is used for preparing a two-dimensional material by a CVD method, the gas flow diffusion is uneven, so that the chemical gas combination is uneven, and the repeatability of the material preparation is poor; and when the sample is light powder, the unstable air flow easily blows the powder off, so that other raw materials are polluted, medicines are wasted, a quartz tube is polluted, an air outlet is blocked and the like. Therefore, stable gas flow and uniform gas diffusion are the problems to be solved in the technical field of preparing two-dimensional materials by a tube furnace CVD method.
Disclosure of Invention
The utility model aims to overcome the defects in the prior art and provide a tubular furnace with uniform air guide.
In order to solve the technical problems, the utility model provides a tube furnace with uniform air guide, comprising:
a furnace body;
the quartz tube penetrates through the furnace body, and two end parts of the quartz tube extend outwards from the furnace body, and the two end parts comprise a first end part and a second end part;
the two flanges are respectively arranged on the first end part and the second end part of the quartz tube;
the air guide device is positioned on the first end part of the quartz tube and comprises an air inlet pipe penetrating through the flange of the first end part and an air guide structure which is arranged in the quartz tube and communicated with the air inlet pipe;
the air guide structure comprises an air inlet main pipeline, an air guide main pipeline communicated with the air inlet main pipeline, a plurality of air guide branch pipelines communicated with the air inlet main pipeline and arranged in an annular parallel manner with the air guide main pipeline, and an annular reinforcing member sequentially connected with the air guide branch pipelines;
and the air outlet pipe is arranged on the flange at the second end part in a penetrating way.
In a more preferred embodiment, the pipe diameter of the main air inlet pipe is larger than the pipe diameter of the main air guide pipe.
In a more preferred embodiment, the ratio of the pipe diameter of the main air inlet pipe to the pipe diameter of the main air guide pipe is (9-10): 4-5.
In a more preferred embodiment, the distance from the outermost surface of the gas guide structure to the inner wall of the quartz tube is 9-10mm.
In a more preferred embodiment, the pipe diameter of the quartz pipe is 59-61mm, the pipe diameter of the main air inlet pipe is 11-12mm, the pipe diameter of the air inlet pipe is 13-14mm, and the pipe diameter of the air outlet pipe is 13-14mm.
In a preferred embodiment, the main inlet duct communicates with the air-guiding branch duct via an arcuate duct.
In a more preferred embodiment, the arc of the arcuate tube is pi/2-19 pi/36.
In a more preferred embodiment, the air guiding structure comprises 4 air guiding branch pipes, and the 4 air guiding branch pipes are respectively located right above, right below, right left below and right below the air guiding main pipe as seen along the axial direction of the pipe diameter of the air inlet main pipe.
In a more preferred embodiment, the distance between any of the air guide branch pipes and the air inlet main pipe is equal.
In a preferred embodiment, a barometer is provided on the air inlet pipe.
In summary, the present application includes at least one of the following beneficial technical effects: the gas flow in the tube furnace is stable and the gas diffusion is uniform.
Additional features and advantages of the utility model will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model. The objectives and other advantages of the utility model will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
For a clearer description of embodiments of the utility model or of the solutions of the prior art, the drawings that are needed in the description of the embodiments or of the prior art will be briefly described, it being obvious that the drawings in the description below are some embodiments of the utility model, and that other drawings can be obtained from them without inventive effort for a person skilled in the art; the positional relationships described in the drawings in the following description are based on the orientation of the elements shown in the drawings unless otherwise specified.
FIG. 1 is a schematic view of a tube furnace with uniform gas guiding according to an embodiment of the present utility model;
FIG. 2 is an enlarged schematic view of an air guiding structure according to an embodiment of the present utility model;
fig. 3 is a schematic side view of an air guiding structure according to an embodiment of the utility model.
Reference numerals:
1. a furnace body; 11. an upper cavity; 12. a lower cavity; 2. a quartz tube; 21. a first end; 22. a second end; 23. front porcelain ark; 23a, upstream raw materials; 24. a rear porcelain ark; 24a, downstream raw materials; 24b, inverting the substrate; 31. an air inlet flange; 32. an air outlet flange; 41. an air inlet pipe; 42. a main intake pipe; 43. a main gas guide pipe; 44. an air guide branch pipe; 45. an annular reinforcement; 46. an arc-shaped pipe; 47. an air pressure gauge; 5. and an air outlet pipe.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model; the technical features designed in the different embodiments of the utility model described below can be combined with each other as long as they do not conflict with each other; all other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
In the description of the present utility model, it should be noted that all terms used in the present utility model (including technical terms and scientific terms) have the same meaning as commonly understood by one of ordinary skill in the art to which the present utility model belongs and are not to be construed as limiting the present utility model; it will be further understood that terms used herein should be interpreted as having a meaning that is consistent with their meaning in the context of this specification and the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The different embodiments disclosed below may reuse the same reference symbols and/or labels. These repetition are for the purpose of simplicity and clarity and do not in itself dictate a particular relationship between the various embodiments and/or configurations discussed.
Referring to fig. 1-3, an embodiment of the present utility model provides a tube furnace with uniform gas guiding, which includes a furnace body 1, a quartz tube 2, two flanges, a gas guiding device 4 and a gas outlet tube 5;
a furnace body 1, wherein a cavity is arranged in the furnace body 1, and the cavity is formed by an upper cavity 11 and a lower cavity 12;
a quartz tube 2 penetrating the furnace body 1 and having two ends extending outward from the furnace body 1, wherein the two ends include a first end 21 and a second end 22, specifically, the quartz tube 2 is divided into a first end 21, a middle part, and a second end 22, wherein most of the quartz tube 2 is the middle part in the furnace body 1, and the rest is the ends, for example, 3/5 of the quartz tube 2 is located in the furnace body 1, and the first end 21 and the second end 22 respectively occupy 1/5 and extend outward from the two ends of the furnace body 1;
the two flanges are respectively arranged on the first end part 21 and the second end part 22 of the quartz tube 2, specifically, the two flanges comprise an air inlet flange 31 and an air outlet flange 32 which are arranged at the tube end of the quartz tube 2 and play a good role in sealing;
an air guide device 4, which is positioned on the first end 21 of the quartz tube 2 and comprises an air inlet tube 41 penetrating through the flange of the first end 21 and an air guide structure which is arranged in the quartz tube 2 and communicated with the air inlet tube 41; the air inlet pipe 41 is provided with an air pressure gauge 47.
The air guide structure comprises an air inlet main pipeline 42, an air guide main pipeline 43 communicated with the air inlet main pipeline 42, a plurality of air guide branch pipelines 44 communicated with the air inlet main pipeline 42 and arranged in an annular parallel manner with the air guide main pipeline 43, and an annular reinforcing member 45 sequentially connected with the air guide branch pipelines 44; by adopting the annular parallel arrangement mode, the gas can be more uniformly dispersed in the existing single-tube gas inlet mode, so that the gas flow in the quartz tube 2 is more stable and more uniform in diffusion, and the two-dimensional material grows in the tube better; as shown in fig. 2 and 3, a circulation cavity is formed between the air guiding structure and each branch pipe, and the air flows into the circulation cavity from the main air inlet pipe 42, and the circulation cavity is simultaneously communicated with 4 branch pipes, namely 1 main air guiding pipe 43 and 4 branch air guiding pipes 44, so as to split the air; in another embodiment, the pipe diameter of the main air guiding pipe 43 may be smaller than that of the branch air guiding pipe 44, so that the air can be better dispersed into the branch air guiding pipe 44, and in addition, the air guiding structure can keep the air guiding pipes to be inflated even if the air guiding structure encounters a large air flow by combining the stabilizing effect of the annular reinforcing member 45, so as to prevent the air flow from being distracted and unstable; in this embodiment, the air guiding structure includes 4 air guiding branch pipes 44, as viewed along the axial direction of the pipe diameter of the air inlet main pipe 42, the 4 air guiding branch pipes 44 are respectively located right above, right below, right left, and right on the air guiding main pipe 43, the distance between any air guiding branch pipe 44 and the air inlet main pipe 42 is equal, the pipe diameter of any air guiding branch pipe 44 is the same as that of the air guiding main pipe 43, preferably, the air inlet main pipe 42 is communicated with the air guiding branch pipe 44 through an arc-shaped pipe 46, so that air can be uniformly dispersed into the air guiding main pipe 43 and the 4 air guiding branch pipes 44, and the radian of the arc-shaped pipe 46 is pi/2-19 pi/36, so that air of the air inlet main pipe 42 flows into the air guiding branch pipe 44 better, and is connected by an arc-shaped pipe 46, so that the transition between pipes is more natural, and at the same time, the air circulation is less prone to be blocked, and in this arc-shaped pipe 46 is preferably implemented in the arc-shaped pipe 46.
Wherein, the pipe diameter of the main air inlet pipe 42 is larger than the pipe diameter of the main air guide pipe 43, and further, the outer diameter of the main air guide pipe 43 is smaller than the inner diameter of the main air inlet pipe 42; preferably, the ratio of the pipe diameter of the main air inlet pipe 42 to the pipe diameter of the main air guide pipe 43 is (9-10): (4-5), specifically, the pipe diameter of the main air inlet pipe 42 is about 2 times the pipe diameter of the main air guide pipe 43, so that the air flowing out of the main air inlet pipe 42 can be better dispersed into the main air guide pipe 43 and the branch air guide pipe 44, but not directly flow into the main air guide pipe 43, and the air is difficult to be dispersed more uniformly, in this embodiment, the pipe diameter of the main air inlet pipe 42 is 12mm, and the pipe diameter of the main air guide pipe 43 is 6mm; preferably, the distance from the outermost surface of the gas guide structure to the inner wall of the quartz tube 2 is 9-10mm, under the distance, on one hand, the gas guide structure in the quartz tube 2 of the device can be ensured to disperse the introduced gas as uniformly as possible, but can not be excessively dispersed or close to the inner wall of the quartz tube, so that the distance between the outermost surface of the gas guide structure and the inner wall of the quartz tube 2 is set; preferably, in the present embodiment, the distance from the outermost surface of the gas guiding structure to the inner wall of the quartz tube 2 is 10mm;
an outlet pipe 5 is arranged on the flange of the second end 22 in a penetrating way.
Preferably, the pipe diameter of the quartz tube 2 is 59-61mm, the pipe diameter of the main air inlet pipe 42 is 11-12mm, the pipe diameter of the air inlet pipe 41 is 13-14mm, and the pipe diameter of the air outlet pipe 5 is 13-14mm; in this embodiment, the pipe diameter of the quartz tube 2 is 60mm, the pipe diameter of the main air inlet pipe 42 is 12mm, the pipe diameter of the air inlet pipe 41 is 14mm, and the pipe diameter of the air outlet pipe 5 is 14mm.
In actual use, a front porcelain square boat 23 and a rear porcelain square boat 24 are arranged in the quartz tube 2, an upstream raw material 23a is placed in the front porcelain square boat 23, a downstream raw material 24a is placed in the rear porcelain square boat 24, and a substrate 24b is inverted above the rear porcelain square boat 24;
the gas flow direction in the uniformly gas-guiding tube furnace provided by the utility model is as follows:
the air inlet pipe 41, the air guide structure, the quartz tube 2 and the air outlet pipe 5;
the design of the air inlet pipe 41 is matched with the air guide structure, so that air starts to enter at the end of the air inlet pipe 41, and the flow direction of the air in the air guide structure is divided into two paths:
the method comprises the following steps: main inlet pipe 42-main guide pipe 43-quartz pipe 2;
and two,: main inlet pipe 42, arc pipe 46, branch guide pipe 44 and quartz pipe 2;
the air inlet pipe 41 and the air inlet main pipe 42 are parallel and have a tubular structure with the same wall thickness, the arc-shaped pipe 45 has a certain radian, the grid blocks larger air flow and evenly and smoothly guides the air flow to the four diversion openings of the outer ring, and the stability and uniformity of the air entering the quartz tube 2 are improved.
In addition, it should be understood by those skilled in the art that although many problems exist in the prior art, each embodiment or technical solution of the present utility model may be modified in only one or several respects, without having to solve all technical problems listed in the prior art or the background art at the same time. Those skilled in the art will understand that nothing in one claim should be taken as a limitation on that claim.
Although terms such as furnace body, cavity, quartz tube, first end, second end, front porcelain square boat, upstream raw material, rear porcelain square boat, downstream raw material, inverted substrate, flange, air inlet flange, air outlet flange, air guide, air inlet pipe, main air guide pipe, branch air guide pipe, annular reinforcement, arc-shaped pipe, barometer, air outlet pipe, etc. are used more herein, the possibility of using other terms is not excluded. These terms are used merely for convenience in describing and explaining the nature of the utility model; they are to be interpreted as any additional limitation that is not inconsistent with the spirit of the present utility model; the terms first, second, and the like in the description and in the claims of embodiments of the utility model and in the above-described figures, if any, are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and not for limiting the same; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the utility model.
Claims (10)
1. A tube furnace for uniform gas introduction, comprising:
a furnace body (1);
a quartz tube (2) which is arranged in the furnace body (1) in a penetrating way, and two end parts of the quartz tube extend outwards from the furnace body (1), wherein the two end parts comprise a first end part (21) and a second end part (22);
two flanges respectively provided on a first end (21) and a second end (22) of the quartz tube (2);
the air guide device (4) is positioned on the first end part (21) of the quartz tube (2) and comprises an air inlet tube (41) penetrating through the flange of the first end part (21) and an air guide structure arranged in the quartz tube (2) and communicated with the air inlet tube (41);
the air guide structure comprises an air inlet main pipeline (42), an air guide main pipeline (43) communicated with the air inlet main pipeline (42), a plurality of air guide branch pipelines (44) communicated with the air inlet main pipeline (42) and arranged in an annular parallel manner with the air guide main pipeline (43), and an annular reinforcing member (45) sequentially connected with the air guide branch pipelines (44);
and the air outlet pipe (5) is arranged on the flange of the second end part (22) in a penetrating way.
2. The uniformly aerated tube furnace of claim 1 wherein: the pipe diameter of the air inlet main pipe (42) is larger than that of the air guide main pipe (43), and the pipe diameter of the air guide main pipe (43) is the same as that of the air guide branch pipe (44).
3. The uniformly aerated tube furnace of claim 1 wherein: the pipe diameter ratio of the air inlet main pipe (42) to the air guide main pipe (43) is (9-10) (4-5).
4. The uniformly aerated tube furnace of claim 1 wherein: the distance from the outermost surface of the air guide structure to the inner wall of the quartz tube is 9-10mm.
5. The uniformly aerated tube furnace of claim 1 wherein: the pipe diameter of the quartz pipe (2) is 59-61mm, the pipe diameter of the main air inlet pipe (42) is 11-12mm, the pipe diameter of the air inlet pipe (41) is 13-14mm, and the pipe diameter of the air outlet pipe (5) is 13-14mm.
6. The uniformly aerated tube furnace of claim 1 wherein: the main air inlet pipeline (42) is communicated with the air guide branch pipeline (44) through an arc-shaped pipeline (46).
7. The uniformly aerated tube furnace of claim 6 wherein: the arc of the arc-shaped pipeline (46) is pi/2-19 pi/36.
8. The uniformly aerated tube furnace of claim 1 wherein: the air guide structure comprises 4 air guide branch pipelines (44), and the 4 air guide branch pipelines (44) are respectively positioned right above, right below, right left and right of the air guide main pipeline (43) as seen along the axial direction of the pipe diameter of the air inlet main pipeline (42).
9. The uniformly aerated tube furnace of claim 8 wherein: the distance between any air guide branch pipeline (44) and the air inlet main pipeline (42) is equal.
10. The uniformly aerated tube furnace of claim 1 wherein: the air inlet pipe (41) is provided with an air pressure gauge (47).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223287352.9U CN219117549U (en) | 2022-12-08 | 2022-12-08 | Tube furnace with uniform air guide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223287352.9U CN219117549U (en) | 2022-12-08 | 2022-12-08 | Tube furnace with uniform air guide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219117549U true CN219117549U (en) | 2023-06-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223287352.9U Active CN219117549U (en) | 2022-12-08 | 2022-12-08 | Tube furnace with uniform air guide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219117549U (en) |
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2022
- 2022-12-08 CN CN202223287352.9U patent/CN219117549U/en active Active
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