CN219117547U

CN219117547U - Insulation assembly for MOCVD heater

Info

Publication number: CN219117547U
Application number: CN202223580848.5U
Authority: CN
Inventors: 万飞华; 周慧娟
Original assignee: Chuyun Technology Shaoxing Co ltd
Current assignee: Lanhe Technology Shaoxing Co ltd
Priority date: 2022-12-31
Filing date: 2022-12-31
Publication date: 2023-06-02
Anticipated expiration: 2032-12-31

Abstract

The utility model provides an insulation component for an MOCVD heater, which is used for adapting to a connecting piece, a first substrate and a second substrate, wherein the first substrate and the second substrate are sleeved on the connecting piece and comprise the following components: the insulating sleeve is sleeved on the connecting piece and comprises a first insulating part penetrating through the second substrate, and the first insulating part comprises a first protruding part protruding out of the second substrate; the inner side of the fixed insulating piece is provided with a first groove which is matched with the first protruding part; the first groove and the first insulation part insulate the connecting piece from the second substrate. The utility model can improve the electrical isolation safety while guaranteeing the strength, and is particularly suitable for a heater system with compact structure and small installation space.

Description

Insulation assembly for MOCVD heater

Technical Field

The utility model relates to the technical field of semiconductors, in particular to an insulating component for an MOCVD heater.

Background

In the semiconductor production process, all high-temperature environments are needed, all types of heaters are needed, parts of the heaters are all in the high-temperature environments in the use process, the structure is complex, the heaters are all of multi-layer board structures, the electrical properties of each layer of the heaters are different, and at least three electrical properties of an anode, a cathode and suspension are provided.

In order to reduce the difficulty of installation and maintenance, the multi-layer boards with different electrical properties are required to be connected and fixed together to form a whole, so that the installation and maintenance are convenient. The plates with different electrical properties are connected together, the reliability of mutual isolation is crucial, and the quality of the heater and even the safety of the whole equipment are directly affected.

In the prior art, a cylindrical insulating ceramic is generally used to penetrate through two substrates with different electrical properties, then the substrates are separated by a fixing ceramic, and finally a metal connecting piece is used to penetrate through the substrates, the fixing ceramic and the insulating ceramic and then is fixed by a fixing part. However, when the installation space is small, the sizes of the fixed ceramic and the insulating ceramic are required to be small, so that the wall thickness of the structure is also reduced, and the ceramic is easy to break and damage during installation or use.

In order to solve the above-mentioned problems, as shown in fig. 1, the prior art replaces the cylindrical insulating ceramic with a plurality of

ceramics

3 and 4 having a T-shaped cross section, inserts the electrode plates 1 and 2, and the metal rod 6 as a connecting member passes through the substrate and the ceramics having a T-shape and is then fixed by the fixing portion 5. When the installation space is smaller, the T-

shaped ceramics

3 and 4 can have larger outer diameters except for the places penetrating through the electrode plates, so that the structure has better strength, but the gap between the T-

shaped ceramics

3 and 4 can cause too small gap between the metal rod 6 and the electrode plates 1 or 2, and the T-shaped ceramics are easy to break down by current in the use process, so that short circuit is caused to damage.

Disclosure of Invention

The utility model aims to provide an insulation assembly for an MOCVD heater, so as to improve electrical isolation safety while ensuring strength.

The utility model provides an insulation component for an MOCVD heater, which is used for adapting to a connecting piece, a first substrate and a second substrate in the MOCVD heater, wherein the first substrate and the second substrate are sleeved on the connecting piece, and the insulation component comprises: the insulating sleeve is sleeved on the connecting piece and comprises a first insulating part penetrating through the second substrate, and the first insulating part comprises a first protruding part protruding out of the second substrate; the first fixed insulating piece is provided with a first groove at the inner side, and the first groove is matched with the first protruding part; the first groove and the first insulation part insulate the connecting piece from the second substrate.

Further, the insulating sleeve further has a supporting insulating portion provided between the first substrate and the second substrate.

Further, the maximum distance of the support insulator from the connector central axis is greater than the maximum distance of the first insulator from the connector central axis.

Further, the outer diameter of the support insulating portion is larger than the outer diameter of the first insulating portion.

Further, two insulating sleeves are arranged between the first substrate and the second substrate, and supporting insulating parts of the two insulating sleeves are adjacent.

Further, one end of the supporting insulating part is integrated with the first insulating part, and the other end of the supporting insulating part comprises a second insulating part, the second insulating part penetrates through the first substrate, and the second insulating part is provided with a second protruding part protruding out of the first substrate.

Further, the first fixed insulating part is provided with a central through hole, the connecting part penetrates through the first fixed insulating part through the central through hole, and the size of the central through hole is smaller than that of the first groove.

Further, a locking piece is arranged on one side, far away from the insulating sleeve, of the first fixed insulating piece, the connecting piece is sleeved with the locking piece, and the locking piece moves in the direction of the connecting piece for adjustment, so that the first fixed insulating piece is locked to the insulating sleeve.

Further, the first protruding portion protrudes from the second substrate to a height of 0.1mm to 5mm.

Further, the diameter of the groove is 3mm to 9mm.

Further, the pipe diameter of the supporting insulation part is less than or equal to 10mm.

According to the utility model, the insulation sleeve penetrates through and protrudes out of the second substrate, the groove is formed in the fixed insulation piece, the protruding part is matched with the groove, insulation isolation between the connection piece and the second substrate is realized, the electrical distance between the substrate and the connection piece is increased, the gap between the connection piece and the second substrate is prevented from being too small, the electrical insulation property between the connection piece and the substrate is enhanced, and therefore, the gap is prevented from being broken down by current in the use process, damage caused by short circuit is avoided, and the electrical isolation safety is improved. Further, by designing the middle portion of the insulating sleeve to have a larger outer diameter to secure strength, electrical isolation safety can be improved while securing strength, and the insulating sleeve is particularly suitable for a heater system having a compact structure and a small installation space.

Drawings

The above features, technical features, advantages and implementation of the present utility model will be further described in the following description of preferred embodiments with reference to the accompanying drawings in a clear and easily understood manner.

FIG. 1 is a schematic view of a prior art high temperature resistant insulating structural assembly for an MOCVD heater;

FIG. 2 is a schematic view of an insulation assembly for an MOCVD heater according to a preferred embodiment of the present utility model;

fig. 3 is a schematic structural view of another insulating assembly for an MOCVD heater according to the preferred embodiment of the present utility model.

Detailed Description

The technical scheme of the application is further elaborated below by referring to the drawings in the specification and the specific embodiments. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.

Referring to fig. 2, an insulating assembly for an MOCVD heater according to a preferred embodiment of the present utility model is configured to fit a connector 20, a first substrate 10 and a second substrate 30 in the MOCVD heater, wherein the first substrate 10 and the second substrate 30 are sleeved on the connector 20, and the insulating assembly comprises: an insulating sleeve 40 sleeved on the connector 20 and comprising a first insulating part 42 penetrating through the second substrate 30, wherein the first insulating part 42 is provided with a first protruding part 422 protruding from the second substrate 30; a first fixed insulating member 61, a first groove 62 is provided on the inner side of the first fixed insulating member 61, and the first groove 62 is adapted to the first protruding portion 422; the first recess 62 insulates the connector 20 from the second substrate 30 with the first insulating portion 42.

The insulating assembly of the embodiment can resist high temperature, can be used for an MOCVD heater after being matched with and fastened with a plurality of substrates which are arranged in a stacked mode and have different electrical properties, and keeps insulating isolation and stable positions among the substrates. The insulation component is provided with a protruding part through penetrating through and protruding any substrate of the insulation sleeve, and is matched with a fixed insulation piece with a groove, so that the protruding part is matched with the groove, insulation isolation between the connection piece and the substrate is realized, the electrical distance between the substrate and the connection piece is increased, and the electrical isolation safety is improved while the strength is ensured.

In some embodiments, the connecting member 20 may be a metal screw rod, in a rod shape or a bar shape, or may be a sheet-shaped supporting sheet, and is suitable for forming various shapes thereon. The connector 20 is used for penetrating and connecting a plurality of substrates, and the plurality of substrates include the first substrate 10 and the second substrate 30. The substrates are stacked, connected, fixed and insulated, and have different electrical properties. Illustratively, the first substrate 10 is a polar substrate and the second substrate 30 is an adapter substrate. The electrical property of the first substrate 10 may be any of positive electrode, negative electrode, or suspended state, and the electrical property of the second substrate 30 is different from that of the first substrate 10. The first substrate 10 and the second substrate 30 may be conductive substrates, such as metal plates, or insulating substrates, and the materials of the insulating substrates depend on the electrical properties of the substrates. The insulating sleeve 40 and the first fixed insulator 61 may be ceramic sleeves or other insulating sleeves that can withstand high temperatures.

An insulating sleeve 40 is fixed between the adjacent substrates, and referring to fig. 2, an insulating sleeve 40 is fixed between the first substrate 10 and the second substrate 30, and the insulating sleeve 40 is used for spacing the first substrate 10 and the second substrate 30. The insulating sleeve 40 is sleeved on the connector 20, and comprises a first insulating portion 42 penetrating through the second substrate 30, and a supporting insulating portion 44 located between the first substrate 10 and the second substrate 30, wherein the maximum distance between the supporting insulating portion 44 and the central axis of the connector 20 is greater than the maximum distance between the first insulating portion 42 and the central axis of the connector 20. Specifically, when the insulating sleeve 40 is cylindrical, the outer diameter of the second insulating portion 44 is larger than the outer diameter of the first insulating portion 42. Specifically, the first insulating portion 42 has a protruding portion 422 protruding from the second substrate 30, and the protruding portion 422 insulates the connection member 20 from the second substrate 30.

In some embodiments, the height of the first projection 422 is greater than 0.1mm. Preferably, the height is 0.1mm to 5mm.

In some embodiments, one end of the support insulating portion 44 is integrally formed with the first insulating portion 42, and the other end of the support insulating portion 44 includes a second insulating portion 46, the second insulating portion 46 penetrating the first substrate 10, the second insulating portion 46 having a second protruding portion 462 protruding from the first substrate 10. In other embodiments, the insulating sleeve 40 may include only the second insulating portion 46 penetrating and protruding from the first substrate 10, or only the first insulating portion 42 penetrating and protruding from the second substrate 30, depending on whether electrical isolation is required between the connector 20 and the first and

second substrates

10 and 30.

The insulating sleeve 40 of the embodiment is capable of extending through and protruding from the substrate that needs to be electrically isolated from the connector 20, so as to increase the electrical distance between the connector 20 and the substrate while achieving electrical isolation, as shown in fig. 2, so as to enhance the electrical insulation between the connector and the substrate, thereby avoiding the breakdown of the gap a by current during use, avoiding damage caused by short circuit, and improving electrical isolation safety. Further, by sizing the support portion 44 of the insulating sleeve 40 between the first and

second substrates

10 and 30 to have a larger outer diameter to secure the mounting strength, the electrical isolation safety can be improved while securing the strength, and the insulating sleeve is particularly suitable for a heater system having a compact structure and a small mounting space.

In some embodiments, there is only one insulating sleeve 40 between the first substrate 10 and the second substrate 30, and in another embodiment, referring to fig. 3, there are two insulating sleeves 40 between the first substrate 10 and the second substrate 30, the second insulating portions 44 of the two insulating sleeves 40 are adjacent, and the two insulating sleeves 40 are disposed opposite to each other.

In some embodiments, referring to fig. 3, the first fixing insulator 61 is provided with a central through hole 66, and the connecting member 20 penetrates the first fixing insulator 61 through the central through hole 66, and the size of the central through hole 66 is smaller than the size of the first groove 62. The central through hole 66 is provided for the connection member 20 to penetrate the first fixed insulating member 61 only, and the insulating sleeve 40 does not penetrate the first fixed insulating member 61, i.e., the size of the central through hole 66 is smaller than that of the first groove 62, so that the wall thickness of the first fixed insulating member 61 can be ensured, and the strength of the first fixed insulating member 61 can be ensured. In some embodiments, the first recess 62 is 3mm to 9mm in size. In some embodiments, the first fixed insulator 61 has the same outer diameter as the supporting insulator 44 of the insulating sleeve 40, so that the first fixed insulator 61 and the insulating sleeve 40 as a whole have a relatively wide width and thus have a relatively high strength. In some embodiments, the support insulator 44 has a tube diameter of 10mm or less,

in some embodiments, referring to fig. 2, the insulating sleeve 40 includes not only a first insulating portion 42 that extends through and protrudes from the second substrate 30, but also a second insulating portion 46 that extends through and protrudes from the first substrate 10, the second insulating portion 46 having a second protruding portion 462 that protrudes from the first substrate 10, in which case the insulating assembly includes a second fixed insulating member 51 in addition to the first fixed insulating member 61. Referring to fig. 2, the first fixed insulator 61 and the second fixed insulator 51 are fastened to two ends of the insulating sleeve 40, and a first groove 62 is formed in the first fixed insulator 61, and the first groove 62 is adapted to the first protruding portion 422. The second fixed insulator 51 is fastened to the lower end of the insulating sleeve 40. The second fixing insulator 51 is internally formed with a second groove 52, and the second groove 52 is fitted with the second protruding portion 462. At this time, the first fixed insulator 61 has a central through hole 66, and the second fixed insulator 51 also has a similar central through hole structure, which will not be described in detail, and preferably, the first fixed insulator 61 and the central through hole of the second fixed insulator 51 are coaxial and have the same size. The connector 20 passes through the central perforations in both the first and second

fixed insulators

61 and 51.

In some embodiments, referring to fig. 2 and 3, the insulating sleeve 40 is provided with a shaft perforation 48, the shaft perforation 48 being coaxial with a central perforation in the first and second

fixed insulators

61, 51 and of the same size, adapted to the size of the connector 20. In this way, the connecting piece 20 passes through the insulating sleeve 40, then two ends of the insulating sleeve 40 respectively penetrate through and protrude out of the first substrate 10 and the second substrate 30, the first fixing insulating piece 61 and the second fixing insulating piece 51 are respectively sleeved on the connecting piece 20 through central perforation, so that the first groove 62 of the first fixing insulating piece 61 is buckled with the first protruding portion 422, and the second groove 52 of the second fixing insulating piece 51 is buckled with the second protruding portion 462. Since only the portion of the insulating sleeve 40 penetrating the first substrate 10 and the second substrate 30 is a narrow portion (the outer diameter is 3mm-9 mm), the supporting insulating portion 44 of the insulating sleeve 40 between the first substrate 10 and the second substrate 30, the first fixing insulating member 61 and the second fixing insulating member 51 have wider outer diameters (the outer diameter is 4mm-10 mm), so that the insulating sleeve has better strength, the first groove 62 of the first fixing insulating member 61 is buckled with the first protruding portion 422, and the second groove 52 of the second fixing insulating member 51 is buckled with the second protruding portion 462, and therefore, good electrical isolation safety is provided between the connecting member 20 and the substrate. Therefore, the insulating assembly according to the present embodiment may be used in a scene where the mounting pitch is small, for example, the mounting pitch is less than 10mm.

Referring again to fig. 2, the connector 20, in which a plurality of substrates are stacked, may be fastened at both ends by at least one fastening member 80, respectively. Retaining member 80 may be a nut or a latch. The locking member 80 is sleeved on the connecting member 20 and is arranged on one side, far away from the insulating sleeve 40, of the first fixed insulating member 61, and the locking member 80 moves and adjusts along the direction of the connecting member 20 to lock the first fixed insulating member 61 on the insulating sleeve 40, so that the maintenance is convenient and quick. The spacer is arranged between the locking member 80 and the first fixed insulating member 61, and the arrangement of the spacer can make the stress distribution applied by the locking member 80 more uniform, so that the probability of cracking each part due to uneven stress is reduced. In some embodiments, the locking member 80 may be coupled by any one of a nut, a dovetail, a snap, and a nest. Similarly, the locking member 80 can fix the second fixed insulator 51 in the same manner.

The insulating structure capable of withstanding high temperatures provided by the present utility model has been described above by taking the first substrate 10 and the second substrate 30 as examples, and those skilled in the art will clearly understand that a plurality of substrates stacked on the connector 20 may be disposed in this manner.

The foregoing is merely specific embodiments of the present application, but the scope of the present application is not limited thereto, and any person skilled in the art can easily think about changes or substitutions within the technical scope of the present application, and the changes and substitutions are intended to be covered by the scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An insulating assembly for an MOCVD heater for adapting a connector (20), a first substrate (10) and a second substrate (30) in the MOCVD heater, the first substrate (10) and the second substrate (30) being sleeved on the connector (20), characterized by comprising:

an insulating sleeve (40) sleeved on the connecting piece (20) and comprising a first insulating part (42) penetrating through the second substrate (30), wherein the first insulating part (42) is provided with a first protruding part (422) protruding out of the second substrate (30);

a first fixed insulating piece (61), wherein a first groove (62) is arranged on the inner side of the first fixed insulating piece (61), and the first groove (62) is matched with the first protruding part (422);

the first groove (62) insulates the connector (20) from the second substrate (30) with the first insulating portion (42).

2. The insulation assembly for a MOCVD heater according to claim 1, wherein the insulation sleeve (40) further has a supporting insulation (44), the supporting insulation (44) being disposed between the first substrate (10) and the second substrate (30).

3. The insulation assembly for a MOCVD heater according to claim 2, wherein an outer diameter of the support insulation portion (44) is larger than an outer diameter of the first insulation portion (42).

4. The insulation assembly for a MOCVD heater according to claim 2, wherein there are two insulation bushings (40) between the first and second substrates (10, 30), the support insulation (44) of two insulation bushings (40) being adjacent.

5. The insulating assembly for a MOCVD heater according to claim 2, wherein one end of the supporting insulating portion (44) is formed integrally with the first insulating portion (42), the other end of the supporting insulating portion (44) includes a second insulating portion (46), the second insulating portion (46) penetrates the first substrate (10), and the second insulating portion (46) has a second protruding portion (462) protruding from the first substrate (10).

6. The insulation assembly for a MOCVD heater according to claim 2, wherein the first stationary insulation member (61) is provided with a central penetration hole (66), the connection member (20) penetrates the first stationary insulation member (61) through the central penetration hole (66), and a size of the central penetration hole (66) is smaller than a size of the first recess (62).

7. The insulation assembly for the MOCVD heater according to claim 1, wherein a locking member (80) is provided at a side of the first fixed insulating member (61) away from the insulating sleeve (40), the locking member (80) is sleeved on the connecting member (20), and the locking member (80) is moved and adjusted along a direction of the connecting member (20), so that the first fixed insulating member (61) is locked to the insulating sleeve (40).

8. The insulation assembly for a MOCVD heater according to claim 1, wherein the height of the first protrusion (422) is 0.1mm to 5mm.

9. The insulation assembly for a MOCVD heater according to claim 6, wherein the first groove (62) has a diameter of 3mm to 9mm.

10. The insulating assembly for a MOCVD heater according to claim 9, wherein the pipe diameter of the supporting insulating portion (44) is 10mm or less.