CN219104342U

CN219104342U - Device for vacuum test of semiconductor vacuum valve

Info

Publication number: CN219104342U
Application number: CN202223482374.0U
Authority: CN
Inventors: 禹哲明
Original assignee: Suzhou Aoketike Semiconductor Technology Co ltd
Current assignee: Suzhou Aoketike Semiconductor Technology Co ltd
Priority date: 2022-12-27
Filing date: 2022-12-27
Publication date: 2023-05-30
Anticipated expiration: 2032-12-27

Abstract

The utility model belongs to the technical field of vacuum testing of semiconductor vacuum valves, in particular to a device for vacuum testing of semiconductor vacuum valves, which comprises a valve body, wherein a first sealing plate and a second sealing plate are respectively arranged on two sides of the valve body, four mounting holes which are mutually communicated are respectively formed in the valve body, the first sealing plate and the second sealing plate, and a rotating rod is rotatably connected at an orifice of the mounting hole through a bearing seat.

Description

Device for vacuum test of semiconductor vacuum valve

Technical Field

The utility model relates to the technical field of vacuum testing of semiconductor vacuum valves, in particular to a device for vacuum testing of semiconductor vacuum valves.

Background

Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high power conversion, etc., such as diodes, which are devices fabricated using semiconductors; the importance of semiconductors is enormous, both from a technological and an economic point of view. Most electronic products, such as computers, mobile phones or digital recorders, have very close association with semiconductors;

through a large number of searches, the following findings are found: chinese patent special column: the publication No. CN114184372A discloses a device for vacuum testing of a semiconductor vacuum valve, wherein front and rear walls of the vacuum valve are provided with front and rear air holes, the device comprises a front sealing plate, a rear sealing plate, a front vacuum connection conversion pipe and a rear vacuum connection conversion pipe, the central position of the front sealing plate is provided with a front testing hole communicated with the front air hole, the central position of the rear sealing plate is provided with a rear testing hole communicated with the rear air hole, the front and rear sealing plates are provided with assembly holes corresponding to the front and rear walls of the vacuum valve, the front and rear sealing plates are fixedly arranged on the front and rear walls of the vacuum valve through nuts, and the front and rear vacuum connection conversion pipes are fixedly arranged at the front and rear testing holes; although the device can shorten the test time and improve the test efficiency, the device also utilizes a plurality of related test structures such as bolt dismouting front sealing plate and back sealing plate, and in the process of dismantling a plurality of bolts, the dismouting is loaded down with trivial details repeatedly, and the dismouting efficiency is low, has increased the vacuum test preparation time of semiconductor vacuum valve to still can influence the efficiency of semiconductor vacuum valve vacuum test.

Disclosure of Invention

(one) solving the technical problems

Aiming at the defects of the prior art, the utility model provides a device for vacuum testing of a semiconductor vacuum valve, which solves the problems that the dismounting preparation time of the existing vacuum test of the semiconductor vacuum valve is long and the testing efficiency is affected.

(II) technical scheme

The utility model adopts the following technical scheme for realizing the purposes:

the utility model provides a device for vacuum test of semiconductor vacuum valve, includes the valve body the both sides of valve body are provided with first closing plate and second closing plate respectively, four mounting holes that link up each other are all seted up on valve body, first closing plate and the second closing plate, first closing plate is located the drill way department of mounting hole and rotates through the bearing frame and be connected with the bull stick, the nut groove that link up with the mounting hole and be connected is seted up to one side of bull stick, the sliding connection has the push pedal in the nut groove, the notch department threaded connection in nut groove has the thread board, fixedly connected with spring between push pedal and the thread board, first closing plate one side is provided with drives four bull stick pivoted rotating assembly simultaneously.

Further, the rotating assembly comprises toothed belts and toothed bars which are connected in a meshed mode, a sliding groove is formed in one side of the first sealing plate, the toothed belts are slidably connected in a cavity of the sliding groove, the toothed bars are rotationally connected to the first sealing plate through bearing seats, and toothed rings which are connected with the toothed belts in a meshed mode are fixedly sleeved on the four rotating rods.

Further, a nut groove is formed in the position, located at the orifice of the mounting hole, of the second sealing plate, and a baffle is connected to one side, located at the nut groove, of the second sealing plate through a bearing seat in a rotating mode.

Further, the both sides of first closing plate all are connected with the connecting rod through the bearing frame rotation, the draw-in groove has been seted up to the expansion end of connecting rod, the both sides of second closing plate all fixedly connected with draw-in lever, two the draw-in lever respectively with two draw-in grooves grafting connection.

Further, sealing rings are arranged between the first sealing plate and the valve body and between the valve body and the second sealing plate, and the two sealing rings are respectively matched with a sealing groove arranged between the first sealing plate and the valve body and a sealing groove arranged between the valve body and the second sealing plate.

Further, the conversion holes formed in one side of the first sealing plate and one side of the second sealing plate are fixedly connected with swivel pipes, and a penetrating gas bin is formed in one side of the valve body and located inside the sealing ring.

(III) beneficial effects

Compared with the prior art, the utility model provides a device for vacuum testing of a semiconductor vacuum valve, which has the following beneficial effects:

according to the utility model, the rotating rods are arranged on the device for vacuum testing the semiconductor vacuum valve, and only the hexagon screws are required to be inserted into the nut grooves of the rotating rods, then the first sealing plate, the second sealing plate and the valve body are installed, and then the rotating assemblies are utilized to simultaneously rotate the rotating rods to install the hexagon screws.

Drawings

FIG. 1 is an assembled perspective view of the whole of the present utility model;

FIG. 2 is an expanded perspective view of the whole of the present utility model;

FIG. 3 is a schematic perspective view of the whole section of the present utility model;

FIG. 4 is a schematic side perspective view of a second seal plate of the present utility model;

fig. 5 is a schematic cross-sectional view of a first sealing plate according to the present utility model.

In the figure: 1. a valve body; 2. a first sealing plate; 3. a second sealing plate; 4. a rotating assembly; 401. a toothed ring; 402. a toothed belt; 403. a toothed bar; 5. a rotating rod; 6. rotating the ring pipe; 7. a connecting rod; 8. a clamping rod; 9. sealing grooves; 10. a mounting hole; 11. a seal ring; 12. a gas bin; 13. a push plate; 14. a nut groove; 15. a nut groove; 16. and a baffle.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Examples

As shown in fig. 1 to 5, a device for vacuum testing of a semiconductor vacuum valve according to an embodiment of the present utility model includes a valve body 1, a first sealing plate 2 and a second sealing plate 3 are respectively disposed on two sides of the valve body 1, four mounting holes 10 that are mutually and completely connected are formed on the valve body 1, the first sealing plate 2 and the second sealing plate 3, a rotating rod 5 is rotatably connected to an orifice of the mounting hole 10 through a bearing seat, a nut groove 14 that is in through connection with the mounting hole 10 is formed on one side of the rotating rod 5, a push plate 13 is slidably connected in the nut groove 14, a threaded plate is threadedly connected to a notch of the nut groove 14, a spring is fixedly connected between the push plate 13 and the threaded plate, and a rotating assembly 4 that drives the four rotating rods 5 simultaneously is disposed on one side of the first sealing plate 2;

inserting a hexagonal screw into the nut groove 14, enabling the nut end on the hexagonal screw to be positioned in the cavity of the nut groove 14 in a sliding connection mode, enabling the nut groove 14 to be matched with the nut on the hexagonal screw and be in sliding connection with each other, enabling the other end of the hexagonal screw to sequentially penetrate through corresponding mounting holes 10 on the first sealing plate 2, the valve body 1 and the second sealing plate 3, and enabling the other end of the hexagonal screw to be in butt joint with the nut on one side of the second sealing plate 3; then insert push pedal 13 in the nut groove 14 and with the nut inconsistent, again screw thread board and nut groove 14 notch threaded connection, afterwards rotate equipment valve body 1, first closing plate 2 and second closing plate 3, hexagonal screw can extrude push pedal 13 and compression spring this moment, the spring then gives push pedal 13 and hexagonal screw's a thrust, afterwards drive each bull stick 5 through rotating assembly 4 and rotate simultaneously, bull stick 5 then drives the hexagonal screw rotation that corresponds, thereby make hexagonal screw and nut threaded connection, and finally make nut and nut cooperation on the hexagonal screw clip and lock valve body 1, first closing plate 2 and second closing plate 3 can carry out subsequent vacuum test.

As shown in fig. 3, in some embodiments, the rotating assembly 4 includes a toothed belt 402 and a toothed bar 403 that are engaged with each other, a chute is formed on one side of the first sealing plate 2, the toothed belt 402 is slidably connected in the chute cavity, the toothed bar 403 is rotatably connected to the first sealing plate 2 through a bearing seat, and toothed rings 401 engaged with the toothed belt 402 are fixedly sleeved on the four rotating rods 5;

by manually rotating the toothed bar 403, the toothed bar 403 drives the toothed belt 402 to slide in the sliding groove, so that the toothed belt 402 drives each toothed ring 401 to rotate simultaneously, and the toothed rings 401 drive the corresponding rotating rods 5 to rotate.

As shown in fig. 3, in some embodiments, a nut groove 15 is formed at the orifice of the mounting hole 10 of the second sealing plate 3, and a baffle 16 is rotatably connected to one side of the second sealing plate 3, which is located at the nut groove 15, through a bearing seat;

the nut groove 15 is matched with a nut, the nut is inserted into the nut groove 15, then the baffle 16 is rotated to the notch of the nut groove 15 to stop the nut from being separated from the nut groove 15, and the hexagon screw passes through the mounting holes 10 and is in threaded connection with the nut in the nut groove 15.

As shown in fig. 3, in some embodiments, two sides of the first sealing plate 2 are rotatably connected with a connecting rod 7 through bearing seats, a clamping groove is formed at a movable end of the connecting rod 7, two sides of the second sealing plate 3 are fixedly connected with clamping rods 8, and the two clamping rods 8 are respectively connected with the two clamping grooves in a plugging manner;

when valve body 1, first closing plate 2 and second closing plate 3 three butt joint are closed and need install the hexagonal screw, can rotate connecting rod 7, make draw-in groove and draw-in lever 8 grafting on the connecting rod 7 be connected, just can make valve body 1, first closing plate 2 and second closing plate 3 three carry out simple mutual fixation to make things convenient for the dismouting of hexagonal screw.

As shown in fig. 3, in some embodiments, sealing rings 11 are respectively arranged between the first sealing plate 2 and the valve body 1 and between the valve body 1 and the second sealing plate 3, and the two sealing rings 11 are respectively matched with a sealing groove 9 arranged between the first sealing plate 2 and the valve body 1 and a sealing groove 9 arranged between the valve body 1 and the second sealing plate 3;

the sealing groove 9, the second sealing plate 3, the valve body 1, the sealing ring 11, the gas bin 12 and the swivel pipe 6 are all in the prior art, and are mainly used for vacuum testing of a semiconductor vacuum valve, and are not specifically described.

As shown in fig. 1, in some embodiments, the conversion holes formed on one side of the first sealing plate 2 and one side of the second sealing plate 3 are fixedly connected with a swivel pipe 6, and a penetrating gas chamber 12 is formed on one side of the valve body 1 and located inside the sealing ring 11.

Finally, it should be noted that: the above is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that the present utility model is described in detail with reference to the foregoing embodiments, and modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. The utility model provides a device for semiconductor vacuum valve vacuum test, includes valve body (1) the both sides of valve body (1) are provided with first closing plate (2) and second closing plate (3) respectively, four mounting holes (10) of mutual through connection have all been seted up on valve body (1), first closing plate (2) and second closing plate (3), its characterized in that: the novel rotary sealing device is characterized in that the rotary rod (5) is rotationally connected to the first sealing plate (2) at the orifice of the mounting hole (10) through the bearing seat, a nut groove (14) which is in through connection with the mounting hole (10) is formed in one side of the rotary rod (5), a push plate (13) is connected in the nut groove (14) in a sliding mode, a threaded plate is connected to the notch of the nut groove (14) in a threaded mode, a spring is fixedly connected between the push plate (13) and the threaded plate, and a rotating assembly (4) which drives the four rotary rods (5) to rotate simultaneously is arranged on one side of the first sealing plate (2).

2. An apparatus for vacuum testing of semiconductor vacuum valves according to claim 1, wherein: the rotating assembly (4) comprises toothed belts (402) and toothed bars (403) which are connected in a meshed mode, a sliding groove is formed in one side of the first sealing plate (2), the toothed belts (402) are connected in a sliding groove cavity in a sliding mode, the toothed bars (403) are connected to the first sealing plate (2) in a rotating mode through bearing seats, and toothed rings (401) meshed with the toothed belts (402) are fixedly sleeved on the rotating rods (5).

3. An apparatus for vacuum testing of semiconductor vacuum valves according to claim 1, wherein: the second sealing plate (3) is provided with a nut groove (15) at the orifice of the mounting hole (10), and a baffle (16) is rotatably connected to one side of the second sealing plate (3) located in the nut groove (15) through a bearing seat.

4. An apparatus for vacuum testing of semiconductor vacuum valves according to claim 1, wherein: the two sides of the first sealing plate (2) are respectively connected with a connecting rod (7) through bearing seats in a rotating mode, clamping grooves are formed in the movable ends of the connecting rods (7), clamping rods (8) are respectively fixedly connected to the two sides of the second sealing plate (3), and the two clamping rods (8) are respectively connected with the two clamping grooves in a plugging mode.

5. An apparatus for vacuum testing of semiconductor vacuum valves according to claim 1, wherein: sealing rings (11) are arranged between the first sealing plate (2) and the valve body (1) and between the valve body (1) and the second sealing plate (3), two sealing rings (11) are respectively matched with sealing grooves (9) formed between the first sealing plate (2) and the valve body (1) and sealing grooves (9) formed between the valve body (1) and the second sealing plate (3).

6. An apparatus for vacuum testing of semiconductor vacuum valves according to claim 5, wherein: the rotary ring pipe (6) is fixedly connected to the conversion holes formed in one side of the first sealing plate (2) and one side of the second sealing plate (3), and the penetrating gas bin (12) is formed in one side of the valve body (1) and located inside the sealing ring (11).