CN219099305U - Transfer device and coating equipment - Google Patents
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- CN219099305U CN219099305U CN202320171063.8U CN202320171063U CN219099305U CN 219099305 U CN219099305 U CN 219099305U CN 202320171063 U CN202320171063 U CN 202320171063U CN 219099305 U CN219099305 U CN 219099305U
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- 238000000576 coating method Methods 0.000 title claims description 7
- 239000000758 substrate Substances 0.000 claims abstract description 62
- 238000007747 plating Methods 0.000 claims abstract description 6
- 230000000694 effects Effects 0.000 abstract description 7
- 238000000034 method Methods 0.000 abstract description 5
- 238000002360 preparation method Methods 0.000 abstract description 4
- 206010053615 Thermal burn Diseases 0.000 abstract description 2
- 239000010408 film Substances 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000004913 activation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000036760 body temperature Effects 0.000 description 1
- 230000003197 catalytic effect Effects 0.000 description 1
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- 238000007906 compression Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 238000003825 pressing Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model relates to the field of film preparation equipment, in particular to a transfer device and film plating equipment. The transfer device comprises a transfer handle and a quick-release assembly; the quick-release assembly comprises a quick-release rod, an unlocking piece and a locking piece, wherein the quick-release rod is inserted into the mounting hole, the unlocking piece and the locking piece are movably accommodated in the accommodating cavity, the unlocking piece is provided with a guide groove, at least an unlocking position and a locking position are arranged on a moving path of the locking piece, when the quick-release rod is in the locking position, the quick-release rod is inserted into the connecting hole, and the locking piece protrudes from the outer wall of the quick-release rod and is abutted against the opening edge of the connecting hole; in the unlocked position, the locking member is retracted into the guide slot and the outer wall of the locking member is positioned within the inner wall of the receiving cavity. In the transfer device of this embodiment, through quick detach subassembly and transfer handle cooperation, can carry out quick detach dismouting to the substrate frame, can avoid the high temperature to scald at the transfer in-process, the dismouting is convenient simultaneously, avoids occupying the inner space of cavity, simple structure, excellent in use effect.
Description
Technical Field
The utility model relates to the field of film preparation equipment, in particular to a transfer device and film plating equipment.
Background
As a precise and controllable preparation method of thin film materials, ALD technology has become a popular material preparation technology in semiconductor chip manufacture, and is one of the most effective ways to deposit nano-scale thin films. ALD can be classified into conventional thermal ALD, plasma-enhanced ALD, catalytic ALD, and other novel technologies according to the manner of reaction activation. Wherein, because the plasma can provide a reaction atmosphere with high and controllable reactivity for the surface of the substrate at a lower temperature, the plasma has a great promotion effect on promoting the rapid reaction growth of the film, the plasma enhanced ALD stands out and is rapidly developed, and the plasma enhanced ALD has wide application in various fields such as semiconductors and the like.
In current ALD coating equipment, the transport degree of difficulty of sample is great, and this is because for the high temperature state in the processing environment, and sample frame body temperature is higher when needs transfer the sample frame, and operating personnel can't direct contact, generally needs to use the handle to carry the sample frame, but carries the handle to demolish inconveniently, can occupy the inner space of cavity.
Therefore, there is a need for an improvement to the above-described problems to change the current situation.
Disclosure of Invention
The utility model provides a transfer device and coating equipment, which are used for solving the problem that a sample rack in the existing coating equipment is inconvenient to carry.
The utility model provides a transfer device, which is used for being connected with a substrate frame, wherein the substrate frame is provided with a connecting hole, and the transfer device comprises:
a transfer handle provided with a mounting hole; and
the quick-release assembly comprises a quick-release rod, an unlocking piece and a locking piece, wherein the quick-release rod is inserted into the mounting hole, a containing cavity is formed in the quick-release rod, the unlocking piece and the locking piece are movably contained in the containing cavity, a guide groove is formed in the unlocking piece, and the locking piece is at least partially contained in the guide groove and is movably arranged relative to the locking piece;
the locking piece is provided with a locking position and a unlocking position on the moving path of the locking piece, when the locking position is adopted, the quick release rod is inserted into the connecting hole, and the locking piece protrudes from the outer wall of the quick release rod and is abutted against the opening edge of the connecting hole; when in the unlocking position, the locking piece is retracted into the guide groove, and the outer wall of the locking piece is positioned in the inner wall of the accommodating cavity.
According to one embodiment of the utility model, the outer wall of the quick release rod is provided with a locking hole communicated with the accommodating cavity, and when the quick release rod is in the locking position, the locking piece is accommodated in the locking hole and protrudes from the outer wall of the quick release rod.
According to one embodiment of the utility model, the locking element is of spherical construction.
According to one embodiment of the utility model, the quick release rod is provided with a guide hole, the unlocking piece comprises an unlocking part and a slide rod part, the unlocking part is connected to one end of the slide rod part, the guide groove is arranged on the outer wall of the unlocking part, and the slide rod part is in sliding fit with the guide hole.
According to one embodiment of the utility model, the quick release rod is further provided with a limiting groove, the diameter of the limiting groove is larger than that of the guide hole, and the opposite ends of the guide hole are respectively communicated with the limiting groove and the accommodating cavity; the unlocking piece further comprises a button part, the button part is connected to one end, far away from the unlocking part, of the sliding rod part, and the button part is movably accommodated in the limiting groove.
According to one embodiment of the utility model, the guide groove comprises an abutting groove part and a containing groove part which are communicated, and the depth of the abutting groove part is smaller than that of the containing groove part along the radial direction of the unlocking piece.
According to one embodiment of the utility model, the quick release assembly further comprises a reset member, wherein the reset member is respectively connected to the unlocking member and the quick release rod, and the reset member is used for driving the unlocking member to move and driving the locking member to have a trend of moving towards the outside of the quick release rod.
According to one embodiment of the present utility model, the number of the locking pieces and the number of the guide grooves are plural, and the plurality of locking pieces are uniformly arranged along the circumferential direction of the unlocking piece.
The utility model also provides a coating device, comprising:
a processing cavity;
the substrate frame is accommodated in the processing cavity, and a connecting hole is formed in one side of the substrate frame; and
the transfer device of any one of the above claims, wherein the transfer device is in plug-in fit with the connecting hole through the quick release rod, and the transfer device is used for being connected with the substrate frame and driving the substrate frame to move.
According to one embodiment of the utility model, the substrate holder is provided with a hook, and the hook is arranged on one side far away from the connecting hole.
The embodiment of the utility model has the following beneficial effects:
when the transfer device of the embodiment is used for carrying the substrate frame, firstly, the quick-release rod of the quick-release assembly is inserted into the connecting hole of the substrate frame, the unlocking piece is positioned at the inner side of the opening of the connecting hole, at the moment, the locking piece can fix the substrate frame and the transfer handle, and an operator can transfer the substrate frame by holding the transfer handle; after the transportation is completed, the locking piece can be driven to move towards the inside of the quick-release rod through operating the unlocking piece so as to unlock the substrate frame, and at the moment, an operator can draw out the quick-release rod from the connecting hole so as to separate the substrate frame, so that the operation is convenient.
In the transfer device of this embodiment, through quick detach subassembly and transfer handle cooperation, can carry out quick detach dismouting to the substrate frame, can avoid the high temperature to scald at the transfer in-process, the dismouting is convenient simultaneously, avoids occupying the inner space of cavity, simple structure, excellent in use effect.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Wherein:
FIG. 1 is a schematic view of a transfer device in use according to an embodiment of the present utility model;
FIG. 2 is a schematic view of the structure of a locked position of a transfer device in an embodiment of the utility model;
FIG. 3 is a side view of a transfer device coupled to a substrate holder in accordance with an embodiment of the present utility model;
FIG. 4 is a schematic diagram of a transfer device in accordance with an embodiment of the present utility model;
FIG. 5 is a cross-sectional view of a quick release assembly in an embodiment of the utility model;
reference numerals:
10. a transfer device; 100. a transfer handle; 110. a mounting hole; 200. a quick release assembly; 210. a quick-release rod; 211. a receiving chamber; 212. a locking hole; 213. a guide hole; 214. a limit groove; 220. a locking member; 230. an unlocking member; 231. an unlocking part; 2311. a guide groove; 23111. the abutting groove part; 23112. a receiving groove portion; 232. a slide bar portion; 233. a button part; 240. a reset member; 20. a substrate holder; 21. a connection hole; 22. a hook; 30. and processing the cavity.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1 to 5, an embodiment of the present utility model provides a transfer device 10 for connecting with a substrate holder 20 of a film plating apparatus, wherein the substrate holder 20 is provided with a connecting hole 21, and in particular, the transfer device 10 includes a transfer handle 100 and a quick-release assembly 200, and the transfer handle 100 is provided with a mounting hole 110; the quick-release assembly 200 comprises a quick-release rod 210, an unlocking piece 230 and a locking piece 220, wherein the quick-release rod 210 is inserted into the mounting hole 110, a containing cavity 211 is formed in the quick-release rod 210, the unlocking piece 230 and the locking piece 220 are movably contained in the containing cavity 211, the unlocking piece 230 is provided with a guide groove 2311, and the locking piece 220 is at least partially contained in the guide groove 2311 and is movably arranged relative to the locking piece 220; wherein, at least an unlocking position and a locking position are provided on the moving path of the locking member 220, when in the locking position, the quick release rod 210 is inserted into the connecting hole 21, and the locking member 220 protrudes from the outer wall of the quick release rod 210 and is abutted to the opening edge of the connecting hole 21; in the unlocked position, the locking member 220 is retracted into the guide slot 2311 and the outer wall of the locking member 220 is positioned within the inner wall of the receiving cavity 211.
When the transfer device 10 of the present embodiment is used to transport the substrate rack 20, firstly, the quick release rod 210 of the quick release assembly 200 is inserted into the connecting hole 21 of the substrate rack, and the unlocking member 230 is located at the inner side of the opening of the connecting hole 21, at this time, the locking member 220 can fix the substrate rack 20 and the transfer handle 100, and an operator can transport the substrate rack 20 by holding the transfer handle 100; after the transfer is completed, the unlocking member 230 is operated to drive the locking member 220 to move towards the inside of the quick release rod 210 so as to unlock the substrate frame 20, and at this time, an operator can withdraw the quick release rod 210 from the connecting hole 21 to separate the substrate frame 20, so that the operation is convenient.
In the transfer device 10 of this embodiment, through quick detach subassembly 200 and transfer handle 100 cooperation, can carry out quick detach dismouting to substrate frame 20, can avoid the high temperature scalding at the transfer in-process, the dismouting is convenient simultaneously, avoids taking the inner space of cavity, simple structure, excellent in use effect.
Specifically, referring to fig. 4 and 5, the outer wall of the quick release rod 210 is provided with a locking hole 212 communicating with the accommodating cavity 211, and in the locking position, the locking member 220 is accommodated in the locking hole 212 and protrudes from the outer wall of the quick release rod 210.
When the transfer device 10 of the present embodiment is used, firstly, the transfer device 10 is inserted into the connecting hole 21 of the substrate frame 20 through the quick release rod 210, so that the locking hole 212 passes through the connecting hole 21, at this time, the transfer handle 100 abuts against one side of the substrate frame 20, the locking hole 212 is located at the other side of the substrate frame 20, after the locking piece 220 protrudes from the locking hole 212, the quick release assembly 200 can be fixedly connected with the substrate frame 20 through cooperation with the transfer handle 100, and because the substrate frame 20 is usually high in temperature when processing is completed, an operator can drive the substrate frame 20 to transfer by holding the transfer handle 100; after the transfer is completed, the unlocking member 230 is moved to drive the locking member 220 to move towards the accommodating cavity 211, so that an operator can withdraw the quick release rod 210 from the connecting hole 21, thereby realizing the separation of the transfer device 10 and the substrate frame 20, and the quick release device is convenient to operate and good in use effect.
It should be noted that the two sides of the substrate holder 20 are not limited to the opposite sides of the overall structure of the substrate holder 20, and in the embodiment shown in fig. 2, the side plates of the substrate holder 20 have a loop-shaped structure, and when the transferring device 10 is connected to the substrate holder 20, the locking member 220 and the transferring handle 100 may be respectively located on opposite sides of one of the side plates, so that the transferring device 10 may have a compact structure after the substrate holder 20 is assembled, so as to reduce the space occupied during the transferring process of the substrate holder 20 by the transferring device 10.
In one embodiment, the locking member 220 is a sphere structure.
By adopting the locking member 220 with a ball structure, when the unlocking member 230 drives the locking member 220 to move, friction between the locking member 220 and the unlocking member can be reduced, as in the embodiment shown in fig. 5, when the quick release assembly 200 moves relative to the substrate holder 20, once the locking member 220 is clamped into the locking hole 212, the quick release assembly 200 can be moved to enable the inner wall of the connecting hole 21 to abut against the locking member 220, and the locking member 220 is driven to retract into the guide groove 2311, so that smoothness of the quick release assembly 200 during assembly and disassembly is improved.
In other embodiments, the locking member 220 may also be a cylindrical structure, and the locking member 220 is a sliding fit with the locking aperture 212. With this arrangement, when the locking member 220 moves relative to the quick release lever 210, the smoothness of movement of the locking member 220 can be improved by the guiding action of the locking hole 212.
Specifically, referring to fig. 5, the quick release rod 210 is provided with a guide hole 213, the unlocking member 230 includes an unlocking portion 231 and a sliding rod portion 232, the unlocking portion 231 is connected to one end of the sliding rod portion 232, and the guide groove 2311 is disposed on an outer wall of the unlocking portion 231, and the sliding rod portion 232 is slidably engaged with the guide hole 213.
In this embodiment, by setting the sliding rod portion 232 to cooperate with the guide hole 213 of the quick-release rod 210, the smoothness of the movement of the unlocking member 230 can be improved, and the unlocking portion 231 is accommodated in the accommodating cavity 211, so that the dustproof function of the unlocking portion 231 can be realized, and the durability of the quick-release assembly 200 can be improved.
In an embodiment, the quick release rod 210 is further provided with a limiting groove 214, the diameter of the limiting groove 214 is larger than that of the guiding hole 213, and two opposite ends of the guiding hole 213 are respectively communicated with the limiting groove 214 and the accommodating cavity 211; the unlocking piece 230 further includes a button portion 233, the button portion 233 is connected to an end of the sliding rod portion 232 away from the unlocking portion 231, and the button portion 233 is movably accommodated in the limiting groove 214.
Therefore, when the locking piece 220 needs to be unlocked, an operator can drive the sliding rod part 232 to slide by pressing the button part 233 and drive the unlocking part 231 to move relative to the quick release rod 210, and finally unlock the locking piece 220, and can limit the movement of the button part 233 by arranging the limit groove 214 to be matched with the button part 233; in the placement state shown in fig. 5, when the button portion 233 moves toward the lower side, the locking member 220 may move toward the inside of the guiding slot 2311, and after the button portion 233 moves to the end of the path, the inner bottom surface of the limiting slot 214 may limit the movement of the button portion 233, so as to prevent the unlocking member 230 from being separated from the accommodating cavity 211.
In this embodiment, the button portion 233 and the slide bar portion 232 may be connected in a detachable manner, so that the button portion 233 may be easily detached during the use of the transfer device 10, specifically, the button portion 233 and the slide bar portion 232 may be detachably connected in a manner such as a threaded connection, a snap connection, a pin connection, a magnetic connection, or the like.
Specifically, the guide groove 2311 includes an abutment groove 23111 and a receiving groove 23112 that are communicated, and a depth of the abutment groove 23111 is smaller than a depth of the receiving groove 23112 in a radial direction of the unlocking member 230.
Therefore, when the quick release assembly 200 needs to lock the locking member 220, the unlocking member 230 can move relative to the quick release rod 210, so that the abutting groove portion 23111 of the guiding groove 2311 corresponds to the locking member 220, as shown in fig. 5, the abutting groove portion 23111 and the accommodating groove portion 23112 can be connected through a slope, at this time, the guiding groove 2311 can drive the locking member 220 to move into the abutting groove portion 23111 under the driving action of the slope, and thus the locking member 220 can be driven to protrude from the locking hole 212 to the outer wall of the quick release rod 210; when the locking member 220 is to be unlocked, only the unlocking member 230 needs to be moved reversely to make the receiving groove portion 23112 of the guiding groove 2311 correspond to the locking member 220, and since the depth of the receiving groove portion 23112 is greater than that of the abutting groove portion 23111, the outer wall of the locking member 220 can be retracted into the receiving cavity 211, and thus the quick release lever 210 can be released from the connection hole 21.
Further, the quick release assembly 200 further includes a reset member 240, wherein the reset member 240 is respectively connected to the unlocking member 230 and the quick release lever 210, and the reset member 240 is configured to drive the unlocking member 230 to move and drive the locking member 220 to move towards the outside of the quick release lever 210.
Referring to fig. 5, in an embodiment, the reset element 240 is a coil spring and is sleeved on the sliding rod portion 232, the reset element 240 is a tension spring, and opposite ends of the reset element 240 are respectively connected with the unlocking portion 231 and the inner wall of the accommodating cavity 211, so that the reset element 240 can drive the locking element 220 to move towards the outer side of the locking hole 212 when no external force is applied to the reset element 240; in other embodiments, the restoring member 240 may also be an elastic element such as a spring plate or a compression spring, and the specific setting position of the restoring member 240 is adaptively adjusted according to different manners of releasing the elastic force, which is not described herein.
Further, the number of the locking pieces 220 and the guide grooves 2311 is plural, and the plurality of locking pieces 220 are uniformly arranged in the circumferential direction of the unlocking piece 230.
It can be appreciated that, by providing the plurality of sets of locking members 220 to cooperate with the guide grooves 2311, after the quick release rod 210 is inserted into the connection hole 21, the plurality of sets of locking members 220 can cooperate with the substrate holder 20 to improve the fixing firmness of the quick release assembly 200, thereby improving the connection reliability of the transfer device 10, and having good use effect.
The utility model also provides a film plating device, which comprises the transfer device 10, the substrate frame 20 and the processing cavity 30 in any embodiment, wherein the processing cavity 30 is used for accommodating the substrate frame 20 and processing materials on the substrate frame 20 at high temperature, the substrate frame 20 is accommodated in the processing cavity 30, and one side of the substrate frame 20 is provided with a connecting hole 21; the transfer device 10 is in plug-in fit with the connecting hole 21 through the quick release rod 210, and the transfer device 10 is used for being connected with the substrate frame 20 and driving the substrate frame 20 to move.
It can be appreciated that in the film plating apparatus of this embodiment, through setting up the cooperation of transfer device 10 and substrate frame 20 in the above-mentioned embodiment, can carry out the quick detach dismouting to substrate frame 20, can avoid the high temperature scalding in the transfer process, the dismouting is convenient simultaneously, avoids taking the inner space of processing cavity 30, simple structure, excellent in use effect.
In one embodiment, the substrate holder 20 is provided with a hook 22, and the hook 22 is provided at a side remote from the connection hole 21.
By this arrangement, after the transfer device 10 moves the substrate holder 20 out of the processing chamber 30, the substrate holder 20 can be connected and fixed with an external member by the hooks 22, and the structure is simple. In this embodiment, the hooks 22 and the substrate rack 20 may be connected in a detachable manner, so that the hooks 22 with corresponding types can be conveniently replaced to be matched with external fixing structures, which is not described herein.
In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.
In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.
Claims (10)
1. A transfer device for connection with a substrate holder, the substrate holder having a connection hole, comprising:
a transfer handle provided with a mounting hole; and
the quick-release assembly comprises a quick-release rod, an unlocking piece and a locking piece, wherein the quick-release rod is inserted into the mounting hole, a containing cavity is formed in the quick-release rod, the unlocking piece and the locking piece are movably contained in the containing cavity, a guide groove is formed in the unlocking piece, and the locking piece is at least partially contained in the guide groove and is movably arranged relative to the locking piece;
the locking piece is provided with a locking position and a unlocking position on the moving path of the locking piece, when the locking position is adopted, the quick release rod is inserted into the connecting hole, and the locking piece protrudes from the outer wall of the quick release rod and is abutted against the opening edge of the connecting hole; when in the unlocking position, the locking piece is retracted into the guide groove, and the outer wall of the locking piece is positioned in the inner wall of the accommodating cavity.
2. The transfer device of claim 1, wherein the outer wall of the quick release lever is provided with a locking hole in communication with the receiving cavity, and the locking member is received in the locking hole and protrudes from the outer wall of the quick release lever when in the locked position.
3. The transfer device of claim 2, wherein the locking member is of a spherical configuration.
4. The transfer device of claim 1, wherein the quick release rod is provided with a guide hole, the unlocking piece comprises an unlocking part and a sliding rod part, the unlocking part is connected to one end of the sliding rod part, the guide groove is formed in the outer wall of the unlocking part, and the sliding rod part is in sliding fit with the guide hole.
5. The transfer device of claim 4, wherein the quick release rod is further provided with a limit groove, the diameter of the limit groove is larger than that of the guide hole, and opposite ends of the guide hole are respectively communicated with the limit groove and the accommodating cavity; the unlocking piece further comprises a button part, the button part is connected to one end, far away from the unlocking part, of the sliding rod part, and the button part is movably accommodated in the limiting groove.
6. The transfer device according to claim 1, wherein the guide groove includes an abutment groove portion and a receiving groove portion that are communicated, and a depth of the abutment groove portion is smaller than a depth of the receiving groove portion in a radial direction of the unlocking member.
7. The transfer device of claim 1, wherein the quick release assembly further comprises a reset member coupled to the unlocking member and the quick release lever, respectively, and wherein the reset member is configured to urge the unlocking member to move and the locking member to have a tendency to move toward the exterior of the quick release lever.
8. The transfer device according to any one of claims 1 to 7, wherein the number of the locking pieces and the guide grooves is plural, and the plural locking pieces are uniformly arranged in a circumferential direction of the unlocking piece.
9. A coating apparatus, characterized by comprising:
a processing cavity;
the substrate frame is accommodated in the processing cavity, and a connecting hole is formed in one side of the substrate frame; and
the transfer device of any one of claims 1-8, wherein the transfer device is in plug-in fit with the connecting hole through the quick release rod, and the transfer device is used for connecting with the substrate frame and driving the substrate frame to move.
10. The plating apparatus according to claim 9, wherein the substrate holder is provided with a hook provided on a side away from the connection hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320171063.8U CN219099305U (en) | 2023-01-16 | 2023-01-16 | Transfer device and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320171063.8U CN219099305U (en) | 2023-01-16 | 2023-01-16 | Transfer device and coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219099305U true CN219099305U (en) | 2023-05-30 |
Family
ID=86454799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320171063.8U Active CN219099305U (en) | 2023-01-16 | 2023-01-16 | Transfer device and coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219099305U (en) |
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2023
- 2023-01-16 CN CN202320171063.8U patent/CN219099305U/en active Active
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