CN219093039U

CN219093039U - Quartz crucible high-pressure spraying device

Info

Publication number: CN219093039U
Application number: CN202223256887.XU
Authority: CN
Inventors: 陶飞; 周勇; 吴伟华; 王洋洋
Original assignee: Zhejiang Meijing New Materials Co ltd
Current assignee: Zhejiang Meijing New Materials Co ltd
Priority date: 2022-12-06
Filing date: 2022-12-06
Publication date: 2023-05-30
Anticipated expiration: 2032-12-06

Abstract

The utility model provides a high-pressure spraying device for a quartz crucible, which relates to the technical field of quartz crucible production and comprises the following components: the top of the spray box is fixedly provided with a high-pressure water pump. When the water tank is used, the high-pressure water pump is started, water in the water tank is fed into the water outlet pipe and the shunt pipe through the water suction pipe, finally, the water is sprayed out through the arc-shaped spray pipe, the cleaned water flows downwards through the water seepage hole at the top of the spray table and flows into the recovery pool below, the valves on the outer surfaces of the blow-down pipe and the conveying pipe are in a closed state, the valves on the outer surfaces of the conveying pipe are opened, at the moment, the water sequentially passes through the primary filter screen and the efficient filter screen, impurities in the water are filtered under the filtering action of the primary filter screen and the efficient filter screen, and the filtered water flows into the water tank to be reused, so that the effect of recycling water resources is achieved.

Description

Quartz crucible high-pressure spraying device

Technical Field

The utility model relates to the technical field of quartz crucible production, in particular to a high-pressure spraying device for a quartz crucible.

Background

The quartz crucible has the advantages of high purity, strong temperature resistance, high size precision, good heat preservation, energy conservation, stable quality and the like, is widely applied, can be used below 1450 ℃, is divided into transparent and opaque, is a basic material necessary for drawing large-diameter monocrystalline silicon and developing large-scale integrated circuits, is used for replacing a small transparent quartz crucible in developed countries of the semiconductor industry, and is an important procedure for cleaning the crucible in the process of producing and processing the crucible by high-pressure spraying.

In the prior art, for example, chinese patent numbers: CN212633573U discloses a quartz crucible high pressure spray set, including mounting plate, mounting plate's bottom fixed mounting has the installation base, mounting plate's top fixed mounting has the high pressure spray ware, mounting plate's bottom fixed mounting has the fixed foot, around fixed mounting has the installation piece between the fixed foot the regulation spout has all been seted up to the opposite face of installation piece about, swing joint has the collecting box with regulation spout sliding connection between the installation piece. This quartz crucible high pressure spray set through setting up first pressure strip and second pressure strip, and first pressure strip, second pressure strip and mounting panel pass under the effect of drive belt and set up the installation through-hole in installation base department and circulate circular motion to make the device possess the advantage that the in-process of conveniently transmitting quartz crucible carries out simple fixed to quartz crucible, made things convenient for the user to use.

In the prior art, the existing quartz crucible high-pressure spraying device sprays and cleans the crucible through a spray head in the use process, but most of water sprayed by the spraying device is directly discharged through an underground drain pipe after flowing to the ground, and the cleaned water is lack of recycling, so that the waste of water resources can be caused to a certain extent, and the energy conservation and the environmental protection are not facilitated.

Disclosure of Invention

The utility model aims to solve the problems that in the prior art, the existing quartz crucible high-pressure spraying device is used, most of sprayed water is directly discharged through an underground drain pipe after flowing to the ground, and the cleaned water is not recycled, so that water resources are wasted to a certain extent, energy conservation and environmental protection are not facilitated.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: a high pressure shower apparatus for a quartz crucible, comprising: the top of the spray box is fixedly provided with a high-pressure water pump, a water inlet of the high-pressure water pump is connected with a water suction pipe through a flange plate, a water outlet of the high-pressure water pump is connected with a water outlet pipe through the flange plate, one end of the water outlet pipe is fixedly communicated with a shunt pipe, and two ends of the shunt pipe are fixedly connected with arc-shaped spray pipes;

recovery subassembly, recovery subassembly fixed mounting is in the bottom of spraying the case, the spraying the case includes the recovery pond, the recovery pond is inside to be close to the equal fixed mounting in four corners department at top has the installation piece, and is a plurality of the top of installation piece is provided with the shower table, the inside inner wall fixed mounting who is close to the bottom in recovery pond has the bottom plate, the top of bottom plate is provided with high-efficient filter screen, high-efficient filter screen is close to the equal fixed mounting in top of both sides and has a plurality of connecting rods, and is a plurality of the top fixed mounting of connecting rod has first effect filter screen, the bottom fixedly connected with conveyer pipe of recovery pond, the fixed surface intercommunication of conveyer pipe has the blow off pipe, the bottom fixed mounting of conveyer pipe has the water tank.

Preferably, the front surface of spray box is connected with the baffle through the hinge rotation, the circular slot has been seted up to the front surface of baffle, the inside fixed mounting in circular slot has the transparent plate.

Preferably, both ends of the shunt tube are fixed to penetrate through the inside of the spray box, and one end of the water pumping tube is fixed to penetrate through the inside of the water tank.

Preferably, the top of spraying the platform is provided with the crucible body, the width of spraying the platform surface and the inside width phase-match of recovery pond, the top fixed mounting in the top of spray box of recovery pond.

Preferably, the top of the water tank close to one side is fixedly connected with a water inlet pipe, and the outer surface of the sewage draining pipe and the outer surface of the conveying pipe are both provided with valves.

Preferably, a fixed block is fixedly arranged on the outer surface of one side of the baffle, and a buckle is movably arranged on the outer surface of one side of the spray box, which is close to the front surface, through an auxiliary plate.

Preferably, one end of the buckle is movably sleeved at the top of the fixed block, and the outer surface of the water pumping pipe and the outer surface of the water outlet pipe are fixedly provided with auxiliary blocks.

Compared with the prior art, the utility model has the advantages and positive effects that,

1. when the water tank is used, the high-pressure water pump is started, water in the water tank is pumped into the water inlet pipe and the water outlet pipe through the water pumping pipe under the pressurizing action of the high-pressure water pump, then flows into the shunt pipe, finally is sprayed out through the arc-shaped spray pipe to clean the crucible body, the cleaned water flows downwards through the water seepage holes at the top of the spraying table and flows into the recovery pool below, the valves on the outer surfaces of the sewage discharging pipe and the conveying pipe are in a closed state, the valves on the outer surfaces of the conveying pipe are opened, at the moment, the water sequentially passes through the primary filter screen and the efficient filter screen, impurities in the water are filtered under the filtering action of the primary filter screen and the efficient filter screen, the filtered water flows into the water tank for secondary utilization, and the cleaned water is recycled under the cooperation of the recovery pool, the primary filter screen and the efficient filter screen, so that the water can be reused, the water resource recycling effect is achieved, the water resource waste is reduced, and the environmental protection and energy saving are realized.

2. According to the utility model, when the crucible is used, spraying is carried out through the two arc-shaped spray pipes, sprayed water can be prevented from splashing everywhere under the cooperation of the spray box and the baffle plate, and through the arrangement of the transparent plate, workers can observe the spray cleaning condition of the crucible body at any time, so that the crucible is convenient to observe.

Drawings

FIG. 1 is a front perspective view of a high-pressure spraying device for a quartz crucible, which is provided by the utility model;

FIG. 2 is an expanded perspective view of a baffle plate of a high-pressure spraying device of a quartz crucible, which is provided by the utility model;

FIG. 3 is a structural development perspective view of a recovery tank of a high-pressure spraying device of a quartz crucible, which is provided by the utility model;

fig. 4 is a cross-sectional and unfolded perspective view of a recovery assembly of a high-pressure spraying device for a quartz crucible, which is provided by the utility model.

Legend description: 1. a spray box; 2. a baffle; 3. a transparent plate; 4. a recovery assembly; 401. a recovery pool; 402. a mounting block; 403. a spray station; 404. a bottom plate; 405. an efficient filter screen; 406. a primary filter screen; 407. a blow-down pipe; 408. a delivery tube; 409. a connecting rod; 5. a water inlet pipe; 6. a water tank; 7. a fixed block; 8. a buckle; 9. a shunt; 10. a high pressure water pump; 11. a water pumping pipe; 12. a circular groove; 13. a water outlet pipe; 14. an arc-shaped spray pipe; 15. a crucible body.

Detailed Description

In order that the above objects, features and advantages of the utility model will be more clearly understood, a further description of the utility model will be rendered by reference to the appended drawings and examples.

Embodiment 1 as shown in fig. 1 to 4, the present utility model provides a high-pressure spraying device for a quartz crucible, comprising: the high-pressure water pump 10 is fixedly arranged at the top of the spray box 1, a water inlet of the high-pressure water pump 10 is connected with the water suction pipe 11 through a flange plate, a water outlet of the high-pressure water pump 10 is connected with the water outlet pipe 13 through a flange plate, one end of the water outlet pipe 13 is fixedly communicated with the split pipe 9, and two ends of the split pipe 9 are fixedly connected with the arc-shaped spray pipes 14; the recovery assembly 4, recovery assembly 4 fixed mounting is in the bottom of spray box 1, spray box 1 includes recovery pond 401, the four corners department that is close to the top inside recovery pond 401 is all fixed mounting has installation piece 402, the top of a plurality of installation pieces 402 is provided with spray table 403, the inside inner wall fixed mounting who is close to the bottom inside recovery pond 401 has bottom plate 404, the top of bottom plate 404 is provided with high-efficient filter screen 405, the top that high-efficient filter screen 405 is close to both sides is all fixed mounting has a plurality of connecting rods 409, the top fixed mounting of a plurality of connecting rods 409 has first effect filter screen 406, the bottom fixedly connected with conveyer pipe 408 of recovery pond 401, the surface fixed intercommunication of conveyer pipe 408 has blow off pipe 407, the bottom fixed mounting of conveyer pipe 408 has water tank 6, the inside of spray box 1 is all fixed to run through at the both ends of shunt tubes 9, the one end of drinking-tube 11 is fixed running through to the inside of water tank 6, the top of spray table 403 is provided with crucible body 15, the width of spray table 403 surface and the inside width phase-match of recovery pond 401, the top fixed mounting of recovery pond 401 is at the top of spray box 1, the top that is close to one side of water tank 6 is provided with inlet tube 5, the surface of the top fixed connection of water tank 407 and the surface of the outer surface of pipe 5 of the outer surface of the pipe 408 and the surface of the conveyer valve of blow off pipe 408.

The whole embodiment 1 achieves the effects that when in use, the crucible body 15 is placed on the top of the spraying table 403, then the high-pressure water pump 10 is started, under the pressurizing action of the high-pressure water pump 10, water in the water tank 6 is pumped into the water inlet and outlet pipe 13 through the water pumping pipe 11 and flows into the shunt pipe 9, finally the crucible body 15 is sprayed and cleaned through the arc spraying pipe 14, the cleaned water flows downwards through the water seepage holes on the top of the spraying table 403 and flows into the recovery pool 401 below, the valves on the outer surfaces of the drain pipe 407 and the conveying pipe 408 are all in a closed state, the valve on the outer surface of the conveying pipe 408 is opened, the cleaned water flows into the water tank 6 through the conveying pipe 408, at the moment, the water sequentially passes through the primary filter screen 406 and the high-efficiency filter screen 405, impurities in the water are filtered under the filtering action of the primary filter screen 406 and the high-efficiency filter screen 405, the filtered water flows into the water tank 6 for secondary use, under the cooperation of the recovery tank 401, the primary filter screen 406 and the high-efficiency filter screen 405, the cleaned water is recovered and treated, so that the cleaned water can be reused, the effect of recovering and reusing water resources is achieved, the waste of water resources is reduced, environmental protection and energy saving are realized, the problems that most of sprayed water flows to the ground and is directly discharged through an underground drain pipe in the use process of the traditional quartz crucible high-pressure spraying device, the cleaned water is not recycled to a certain extent, the waste of water resources is caused, the energy conservation and environmental protection are not facilitated are solved, when the cleaned water needs to be discharged, the valve on the outer surface of the drain pipe 407 is opened, the valve on the outer surface of the conveying pipe 408 is closed, the filtered water is discharged through the drain pipe 407, can reduce pollution.

In the embodiment 2, as shown in fig. 1-4, the front surface of the spray box 1 is rotatably connected with a baffle plate 2 through a hinge, the front surface of the baffle plate 2 is provided with a round groove 12, a transparent plate 3 is fixedly installed in the round groove 12, a fixing block 7 is fixedly installed on the outer surface of one side of the baffle plate 2, a buckle 8 is movably installed on the outer surface of one side, close to the front surface, of the spray box 1 through an auxiliary plate, one end of the buckle 8 is movably sleeved on the top of the fixing block 7, and auxiliary blocks are fixedly installed on the outer surface of a water suction pipe 11 and the outer surface of a water outlet pipe 13.

The effect that its whole embodiment 2 reached is, when using, sprays through two arc-shaped spray pipes 14, under the cooperation of spray box 1 and baffle 2, can prevent that spun water from splashing everywhere, through setting up transparent plate 3, the staff can observe the situation that crucible body 15 sprays the clearance at any time, is convenient for observe.

Working principle: when using, start high-pressure water pump 10, under the effect of the pressurization of high-pressure water pump 10, through the inside water pumping business turn over water pipe 13 of water tank 6, then flow into shunt tubes 9 inside, finally spout through arc spray tube 14 and spray clean crucible body 15, the infiltration hole at spray table 403 top flows downwards through clean water, the inside recovery pond 401 of below flows, the valve of blow off pipe 407 and conveyer pipe 408 surface is the closed condition, open the valve of conveyer pipe 408 surface, the water can pass through first effect filter screen 406 and high-efficient filter screen 405 in proper order at this moment, filter the impurity in the water under the filter effect of first effect filter screen 406 and high-efficient filter screen 405, the water after the filtration flows into water tank 6 inside, can carry out the reutilization, under the cooperation of recovery pond 401, first effect filter screen 406, high-efficient filter screen 405, carry out the recovery to the water after the cleaning, thereby can reuse, thereby reach the effect of water resource recycling, reduce the waste, realize environmental protection and energy saving, when the water after the cleaning needs to discharge, open the valve of blow off pipe 407 surface, the valve is closed, can pass through the spray tube 2 when the spray plate 2 is sprayed through the filter plate, can be carried out under the filter plate 2, the filter condition is sprayed through the spray tube, can be observed through the spray tube 2, the filter plate is sprayed through the filter plate is convenient for the realization, the surface is sprayed through the spray plate is sprayed down, can be sprayed down through the surface, can be sprayed down through the filter plate is convenient for the people, can be sprayed down when observing the surface.

The wiring diagram of the high-pressure water pump 10 in the present utility model belongs to common knowledge in the art, and the working principle thereof is a known technology, and the model thereof is selected to be a proper model according to actual use, so that the control mode and wiring arrangement of the high-pressure water pump 10 will not be explained in detail.

Claims

1. A high pressure shower apparatus for a quartz crucible, comprising: the novel water spraying device comprises a spraying box (1), wherein a high-pressure water pump (10) is fixedly arranged at the top of the spraying box (1), a water inlet of the high-pressure water pump (10) is connected with a water suction pipe (11) through a flange plate, a water outlet of the high-pressure water pump (10) is connected with a water outlet pipe (13) through a flange plate, one end of the water outlet pipe (13) is fixedly communicated with a shunt pipe (9), and two ends of the shunt pipe (9) are fixedly connected with arc-shaped spray pipes (14);

retrieve subassembly (4), retrieve subassembly (4) fixed mounting is in the bottom of spraying case (1), spraying case (1) is including recovery pond (401), the four corners department that is close to the top inside recovery pond (401) is all fixed mounting has installation piece (402), a plurality of the top of installation piece (402) is provided with spray table (403), the inner wall fixed mounting that is close to the bottom inside recovery pond (401) has bottom plate (404), the top of bottom plate (404) is provided with high-efficient filter screen (405), the top that high-efficient filter screen (405) is close to both sides is equal fixed mounting have a plurality of connecting rods (409), a plurality of the top fixed mounting of connecting rods (409) has first effect filter screen (406), the bottom fixedly connected with conveyer pipe (408) of recovery pond (401), the fixed surface intercommunication of conveyer pipe (408) has blow off pipe (407), the bottom fixed mounting of conveyer pipe (408) has water tank (6).

2. The high-pressure spraying device for the quartz crucible according to claim 1, wherein: the front surface of spray box (1) is connected with baffle (2) through the hinge rotation, circular slot (12) have been seted up to the front surface of baffle (2), the inside fixed mounting of circular slot (12) has transparent plate (3).

3. The high-pressure spraying device for the quartz crucible according to claim 1, wherein: both ends of the shunt tube (9) are fixed to penetrate into the spray box (1), and one end of the water pumping tube (11) is fixed to penetrate into the water tank (6).

4. The high-pressure spraying device for the quartz crucible according to claim 1, wherein: the top of spraying platform (403) is provided with crucible body (15), the width of spraying platform (403) surface and the inside width phase-match of recovery pond (401), the top fixed mounting of recovery pond (401) is at the top of spraying case (1).

5. The high-pressure spraying device for the quartz crucible according to claim 1, wherein: the top of the water tank (6) close to one side is fixedly connected with a water inlet pipe (5), and valves are arranged on the outer surface of the sewage draining pipe (407) and the outer surface of the conveying pipe (408).

6. The high-pressure spraying device for the quartz crucible according to claim 2, wherein: one side surface fixed mounting of baffle (2) has fixed block (7), one side surface that sprays case (1) and is close to the front surface has buckle (8) through accessory plate movable mounting.

7. The high-pressure spraying device for the quartz crucible as recited in claim 6, wherein: one end of the buckle (8) is movably sleeved at the top of the fixed block (7), and the outer surface of the water pumping pipe (11) and the outer surface of the water outlet pipe (13) are fixedly provided with auxiliary blocks.