CN219079695U

CN219079695U - Dust collector and single crystal production system

Info

Publication number: CN219079695U
Application number: CN202223526347.9U
Authority: CN
Inventors: 刘选; 王林; 周刚
Original assignee: Sany Silicon Energy Zhuzhou Co Ltd
Current assignee: Zhuzhou Sany Silicon Energy Technology Co ltd
Priority date: 2022-12-23
Filing date: 2022-12-23
Publication date: 2023-05-26
Anticipated expiration: 2032-12-23

Abstract

The utility model provides a dust removing device and a monocrystal production system, and relates to the technical field of dust removing equipment. The dust removing device comprises a tank body, an exhaust pipe, a sealing plate, a driving mechanism and a filtering assembly. The tank body is provided with an air inlet, an air outlet and a back blowing port, and the back blowing port is arranged at the top of the tank body; the exhaust pipe is arranged in the inner cavity of the tank body, the first end of the exhaust pipe is communicated with the exhaust port, and the second end of the exhaust pipe extends towards the back blowing port; the sealing plate is movably arranged between the second end of the exhaust pipe and the back blowing port and is suitable for selectively opening the second end of the exhaust pipe and the back blowing port; the driving mechanism is connected with the sealing plate and is suitable for driving the sealing plate to be in sealing connection with the second end of the back-blowing port or the exhaust pipe; the filter component is arranged in the inner cavity of the tank body. The utility model can solve the problems of large noise, large vibration and poor cleaning effect of the filter bag when the filter bag in the dust removing device in the prior art is cleaned, and has the effects of reducing noise and vibration and cleaning dust more cleanly and thoroughly.

Description

Dust collector and single crystal production system

Technical Field

The utility model relates to the technical field of dust removing equipment, in particular to a dust removing device and a monocrystal production system.

Background

The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas (nitrogen and helium are mainly) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like. Single crystal growth is required to be performed under vacuum and inert gas. Inert gas is used as protective atmosphere, and the upper part and the lower part of the furnace body are provided with gas inlets for gas inlet and gas outlet. When growing single crystals, a dust removing device is needed to be arranged after inert gas is injected into the vacuumizing device.

The existing dust collector generally adopts a filter bag to remove dust, clean gas filtered by the filter bag is discharged, dust is attached to the filter bag or falls and is collected, and in order to prevent the filter bag from blocking and affecting the dust collection effect, the dust attached to the filter bag needs to be cleaned regularly. In the prior art, the filter bag is cleaned in a vibrating mode, so that the scheme causes larger noise and vibration, and the cleaning effect of the filter bag is poor.

Disclosure of Invention

The utility model aims to overcome the defects of large noise, large vibration and poor cleaning effect of a filter bag in the cleaning process of the filter bag in the dust removing device in the prior art, thereby providing the dust removing device and the monocrystal production system.

In order to solve the problems, the utility model provides a dust removing device which comprises a tank body, an exhaust pipe, a sealing plate, a driving mechanism and a filtering assembly. The tank body is provided with an air inlet, an air outlet and a back blowing port, and the back blowing port is arranged at the top of the tank body; the exhaust pipe is arranged in the inner cavity of the tank body, the first end of the exhaust pipe is communicated with the exhaust port, and the second end of the exhaust pipe extends towards the back-blowing port; the sealing plate is movably arranged between the second end of the exhaust pipe and the back blowing port and is suitable for selectively opening the second end of the exhaust pipe and the back blowing port; the driving mechanism is connected with the sealing plate and is suitable for driving the sealing plate to be in sealing connection with the second end of the back-blowing port or the exhaust pipe; the filter component is arranged in the inner cavity of the tank body.

Optionally, a blowback pipe is arranged at the top of the tank body, a first end of the blowback pipe is connected with the blowback port, and a second end of the blowback pipe is opposite to a second end of the exhaust pipe.

Optionally, the second end of the blowback pipe and the second end of the exhaust pipe are disposed vertically opposite to each other, and the driving mechanism is adapted to drive the sealing plate to perform a linear motion in a vertical direction.

Optionally, the driving mechanism comprises a driving cylinder, and a piston rod of the driving cylinder extends into the back blowing pipe.

Optionally, the second end of the back-blowing pipe and the second end of the exhaust pipe are both provided with sealing rings.

Optionally, the air vent is located the below of filter component, and the blast pipe includes first exhaust section and the second exhaust section of intercommunication each other, and first exhaust section and air vent are connected, and the first end and the first exhaust section of second exhaust section are connected, and the second end of second exhaust section extends from bottom to top, and the closing plate is suitable for and the second end sealing connection of second exhaust section.

Optionally, the air inlet is disposed below the filter assembly.

Optionally, the inner chamber of the jar body is located the below of filter component and is equipped with screw conveying mechanism, and screw conveying mechanism includes the conveying axle, is equipped with helical blade on the conveying axle.

Optionally, a pressure release valve is arranged on the tank body.

In another aspect, the utility model provides a single crystal production system, comprising the dust removing device in any one of the above technical schemes.

The utility model has the following advantages:

1. by utilizing the technical scheme of the utility model, firstly, the tank body is internally provided with the air inlet, the air outlet and the filter assembly, when the gas exhausted by the single crystal furnace is dedusted, the driving mechanism drives the sealing plate to be in sealing connection with the back blowing port, at the moment, the back blowing port is disconnected with the inner cavity of the tank body, the exhaust pipe is communicated with the inner cavity of the tank body, dust-containing gas enters the inner cavity of the tank body through the air inlet and is filtered by the filter assembly, and clean gas after filtration is exhausted through the exhaust pipe and the air outlet. When the dust attached to the filter assembly is cleaned, the driving mechanism drives the sealing plate to be in sealing connection with the second end of the exhaust pipe, at the moment, the back-blowing port is communicated with the inner cavity of the tank body, the exhaust pipe is disconnected with the inner cavity of the tank body, inert gas is introduced into the inner cavity of the tank body through the back-blowing port, and the filter assembly is back-blown, so that the dust attached to the filter assembly is blown off. Second, compared with the back-blowing gas arranged at the side of the filter assembly, the back-blowing opening is arranged at the top of the tank body, the back-blowing gas can be directly blown to the filter assembly from top to bottom, the back-blowing gas is not blocked by other partition boards, the energy loss is small, the back-blowing dust cleaning effect is better, and the dust cleaning is clean and thorough. Thirdly, the sealing plate is driven by the driving mechanism to respectively seal the back-blowing port and the exhaust pipe in a sealing butt joint mode, so that switching of different air ports is realized, the structure is simple, the control is easy, and the manufacturing cost is low.

2. The blowback pipe is arranged on the blowback port, the blowback pipe and the exhaust pipe are oppositely arranged in the vertical direction, the sealing plate moves linearly, the moving path of the sealing plate is vertical to the end faces of the blowback pipe and the exhaust pipe, the sealing plate, the blowback pipe, the sealing plate and the exhaust pipe can be vertically sealed, the sealing effect is better, air leakage is prevented, and the dedusting and dust cleaning effects are guaranteed.

3. The below of filter unit is located to the gas vent, and the blast pipe sets up the second exhaust section, extends from bottom to top, and the air inlet is established in filter unit's below to, dirty gas from bottom to top passes through filter unit, makes the dust separate with gaseous under filter unit's filtration and gravity's dual effect, further improves the filter effect to the clean gas of exhaust in the single crystal growing furnace.

4. The below of filter component is equipped with screw conveying mechanism, and the dust in the gas is filtered the back, and partly drops to the bottom of jar body, and partly adheres to on filter component, and the dust that drops in jar body bottom discharges under screw conveying mechanism's effect, and the dust clearance labour saving and time saving.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

Fig. 1 shows a schematic structural diagram of a dust removing device according to an embodiment of the present utility model;

fig. 2 shows a cross-sectional view of the dust removing device of fig. 1 in a dust removing state;

fig. 3 shows a cross-sectional view of the dust collector of fig. 1 in blowback cleaning.

Reference numerals illustrate:

1. a tank body; 11. an air inlet; 12. an exhaust port; 13. a back-blowing port; 14. a material cleaning port; 2. a filter assembly; 3. an exhaust pipe; 31. a first exhaust section; 32. a second exhaust section; 4. a sealing plate; 5. a driving mechanism; 6. a blowback pipe; 7. a seal ring; 8. a screw conveying mechanism; 9. and a pressure release valve.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

For the purpose of illustrating the concepts of the utility model, the drawings and detailed description are to be regarded as illustrative in nature and not as restrictive.

Example 1

A dust removing device comprises a tank body 1, an exhaust pipe 3, a sealing plate 4, a driving mechanism 5 and a filtering assembly 2. The tank body 1 is provided with an air inlet 11, an air outlet 12 and a back blowing port 13, and the back blowing port 13 is arranged at the top of the tank body 1; the exhaust pipe 3 is arranged in the inner cavity of the tank body 1, a first end of the exhaust pipe 3 is communicated with the exhaust port 12, and a second end extends towards the back-blowing port 13; the sealing plate 4 is movably arranged between the second end of the exhaust pipe 3 and the blowback opening 13, and is suitable for selectively opening the second end of the exhaust pipe 3 and the blowback opening 13; the driving mechanism 5 is connected with the sealing plate 4 and is suitable for driving the sealing plate 4 to be in sealing connection with the blowback opening 13 or the second end of the exhaust pipe 3; the filter component 2 is arranged in the inner cavity of the tank body 1.

By utilizing the technical scheme of the utility model, firstly, an air inlet 11, an air outlet 12 and a filter assembly 2 are arranged in a tank body 1, when the gas exhausted by the single crystal furnace is dedusted, a driving mechanism 5 drives a sealing plate 4 to be in sealing connection with a back blowing port 13, as shown in fig. 2, at the moment, the back blowing port 13 is disconnected with the inner cavity of the tank body 1, an exhaust pipe 3 is communicated with the inner cavity of the tank body 1, dust-containing gas enters the inner cavity of the tank body 1 through the air inlet 11, is filtered by the filter assembly 2, and clean gas after filtration is exhausted through the exhaust pipe 3 and the air outlet 12. When the dust attached to the filter assembly 2 is cleaned, the driving mechanism 5 drives the sealing plate 4 to be in sealing connection with the second end of the exhaust pipe 3, as shown in fig. 3, at the moment, the blowback port 13 is communicated with the inner cavity of the tank body 1, the exhaust pipe 3 is disconnected with the inner cavity of the tank body 1, inert gas is introduced into the inner cavity of the tank body 1 through the blowback port 13, and the filter assembly 2 is blowback, so that the dust attached to the filter assembly 2 is blown away. Second, compared with the back-blowing gas arranged at the side of the filter assembly 2, the back-blowing port 13 is arranged at the top of the tank body 1, the back-blowing gas can be directly blown to the filter assembly 2 from top to bottom, the back-blowing gas is not blocked by other partition boards, the energy loss is small, the back-blowing dust cleaning effect is better, and the back-blowing dust cleaning effect is clean and thorough. Thirdly, the sealing plate 4 is driven by the driving mechanism 5, the back-blowing port 13 and the exhaust pipe 3 are respectively sealed and butted, so that the switching of different air ports is realized, the structure is simple, the control is easy, and the manufacturing cost is low.

Optionally, a blowback pipe 6 is arranged at the top of the tank body 1, a first end of the blowback pipe 6 is connected with the blowback port 13, and a second end of the blowback pipe is opposite to a second end of the exhaust pipe 3.

Specifically, referring to fig. 1 in combination with fig. 2, one end of the blowback pipe 6 extends into the tank 1, the other end is located outside the tank 1, the top of the blowback pipe 6 is closed, and the blowback port 13 is provided on the blowback pipe 6 located outside the tank 1.

Alternatively, the second end of the blowback pipe 6 and the second end of the exhaust pipe 3 are disposed vertically opposite to each other, and the driving mechanism 5 is adapted to drive the sealing plate 4 to perform a linear motion in the vertical direction. The motion path of the sealing plate 4 is vertical to the end surfaces of the blowback pipe 6 and the exhaust pipe 3, the sealing plate 4, the blowback pipe 6 and the sealing plate 4 and the exhaust pipe 3 can be vertically sealed, the sealing effect is better, the air leakage is prevented, and the dedusting and dust cleaning effects are guaranteed.

Alternatively, the drive mechanism 5 comprises a drive cylinder, the piston rod of which extends into the blowback pipe 6. Specifically, the driving cylinder includes an electric cylinder, an air cylinder, and a hydraulic cylinder. Specifically, in this embodiment, the driving cylinder adopts a cylinder, the axis of the cylinder is vertically arranged, the cylinder body of the cylinder is fixedly connected with the blowback pipe 6, and the piston rod of the cylinder can stretch out and draw back in the blowback pipe 6. The end part of a piston rod of the air cylinder is fixedly connected with the sealing plate 4, and the sealing plate 4 can be driven to move up and down by the expansion and contraction of the piston rod.

Optionally, the second end of the blowback pipe 6 and the second end of the exhaust pipe 3 are both provided with sealing rings 7. The arrangement can ensure good sealing effect when the sealing plate 4 is in butt joint with the end face of the blowback pipe 6 or the exhaust pipe 3, and air leakage is prevented, so that the dust removal and blowback effects are ensured.

Optionally, the exhaust port 12 is disposed below the filter assembly 2, the exhaust pipe 3 includes a first exhaust section 31 and a second exhaust section 32 that are mutually communicated, the first exhaust section 31 is connected to the exhaust port 12, a first end of the second exhaust section 32 is connected to the first exhaust section 31, a second end of the second exhaust section 32 extends from bottom to top, and the sealing plate 4 is adapted to be in sealing connection with the second end of the second exhaust section 32.

Optionally, the second exhaust section 32 of the exhaust pipe 3 is disposed in the middle of the inner cavity of the tank 1. The arrangement is that the dust-containing gas is dispersed in the inner cavity of the tank body 1 after entering the inner cavity of the tank body 1 through the air inlet 11, and the second exhaust section 32 positioned in the middle provides a suction force, so that the uniform collection of the gas is facilitated, and the dust removal effect is improved. Correspondingly, the back-blowing pipe 6 is arranged at the middle position of the top of the tank body 1. Likewise, when the dust attached to the filter assembly 2 is cleaned by back blowing, the gas blown out by the back blowing pipe 6 is dispersed outwards from the middle part, which is beneficial to improving the back blowing dust removal effect.

Optionally, the air inlet 11 is provided below the filter assembly 2. During dedusting, the dust-containing gas passes through the filter assembly 2 from bottom to top, so that dust is separated from the gas under the double actions of the filtration of the filter assembly 2 and gravity, and the filtering effect of the dust-containing gas exhausted from the single crystal furnace is further improved.

Optionally, the inner chamber of jar body 1 is located the below of filter component 2 and is equipped with screw conveying mechanism 8, and screw conveying mechanism 8 includes the conveying axle, is equipped with helical blade on the conveying axle. The below of filter module 2 is equipped with screw conveyor 8, and the dust in the gas is filtered the back, and a part drops to the bottom of jar body 1, and a part adheres to on filter module 2, and the dust that drops in jar body 1 bottom discharges under screw conveyor 8's effect, and the dust clearance labour saving and time saving.

Optionally, a pressure release valve 9 is arranged on the tank body 1. The pressure release valve 9 is arranged, so that the pressure can be released in time when the pressure in the tank is overlarge during back blowing.

Optionally, the pressure release valve 9 adopts mechanical gravity type pressure release valve 9, specifically sets up the pressure release mouth on the jar body 1, and the pressure release mouth sets up to the terminal surface of slope, articulates on the pressure release mouth has sealing door, and sealing door compresses tightly on the terminal surface of pressure release mouth by gravity. When the pressure in the tank is normal, the sealing door falls down by self weight to seal the pressure relief opening; when the pressure in the tank is large, the sealing door is pushed open by air pressure, the sealing door swings upwards around the hinge point, the pressure relief opening is opened, and when the pressure in the tank is recovered to be normal, the sealing door falls down by self weight, and the pressure relief opening is sealed.

The filter assembly 2 comprises a filter bag and a framework arranged in the filter bag. Optionally, the filter bag is detachably connected to the skeleton, and the skeleton adopts a spring skeleton, which can be compressed, thereby reducing the volume for storage and shipment.

Optionally, the bottom of the tank body 1 is provided with a material cleaning opening 14, the output end of the bolt conveying mechanism is arranged towards the material cleaning opening 14, and when the material cleaning opening 14 is opened, the screw conveying mechanism 8 is started to discharge dust collected to the bottom of the tank body 1 from the material cleaning opening 14.

The working process comprises the following steps:

when the dust is removed, the air inlet 11 is communicated with the air outlet of the single crystal furnace, the driving mechanism 5 drives the sealing plate 4 to move upwards to be in sealing butt joint with the second end of the blowback pipe 6, the blowback pipe 6 is blocked from the inner cavity of the tank body 1, and the exhaust pipe 3 is communicated with the inner cavity of the tank body 1. The exhaust port 12 is connected with a vacuum pump, dust-containing gas exhausted by the single crystal furnace enters the inner cavity of the tank body 1 from the air inlet 11 through vacuum suction, the gas moves upwards under the action of suction force and is filtered by the filtering component 2, part of dust falls and gathers to the bottom of the inner cavity of the tank body 1 under the double actions of filtering of the filter bag and gravity, the other part of dust is attached to the filter bag, the gas passing through the filtering component 2 is filtered completely, and the gas flows to the exhaust port 12 from the second end of the exhaust pipe 3 along the exhaust pipe 3 to be exhausted.

When the dust on the filter component 2 is cleaned, the driving mechanism 5 drives the sealing plate 4 to descend to the sealing plate 4 to be in sealing butt joint with the second end of the exhaust pipe 3, at the moment, the exhaust pipe 3 is blocked with the inner cavity of the tank body 1, and the blowback pipe 6 is communicated with the inner cavity of the tank body 1. Inert gas is introduced into the inner cavity of the tank body 1 through the back-blowing port 13, and in the embodiment, argon back-blowing is adopted. Argon is blown onto the filter assembly 2 from top to bottom, and dust attached to the filter assembly 2 falls to the bottom of the inner cavity of the tank body 1.

When the dust accumulated in the bottom of the tank is cleaned, the cleaning opening is opened, the spiral conveying mechanism 8 is started, and the dust is conveyed to the cleaning opening 14 through the spiral conveying mechanism 8, so that the dust is cleaned.

Example 2

A single crystal production system comprising a dust removal device according to any one of the above technical solutions.

According to the above description, the present patent application has the following advantages:

1. the dust on the filter assembly 2 is cleaned by adopting a back blowing method, so that noise and vibration are reduced;

2. the back blowing port 13 is arranged at the top of the tank body 1, back blowing gas is directly aligned with the filter assembly 2 from top to bottom to blow, the back blowing gas is not blocked, the air flow path is unchanged, the energy loss is small, and the dust is cleaned cleanly and thoroughly under the same back blowing pressure;

3. the back-blowing pipe 6 and the second exhaust section 32 of the exhaust pipe 3 are arranged vertically opposite to each other, the movement path of the sealing plate 4 is vertical to the end surfaces of the back-blowing pipe 6 and the second exhaust section 32, the sealing effect is better, the air leakage is prevented, and the dust removal and back-blowing dust cleaning effects are ensured;

4. the dust-containing gas passes through the filter assembly 2 from bottom to top, so that dust is separated from the gas under the double functions of the filtration of the filter assembly 2 and gravity, and the filtering effect of the dust-containing gas discharged from the single crystal furnace is further improved;

5. the dust falling on the bottom of the tank body 1 is discharged through the spiral conveying mechanism 8, and the dust cleaning is time-saving and labor-saving.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.

Claims

1. A dust removing apparatus, comprising:

the novel energy-saving tank comprises a tank body (1), wherein an air inlet (11), an air outlet (12) and a back blowing port (13) are formed in the tank body (1), and the back blowing port (13) is formed in the top of the tank body (1);

the exhaust pipe (3) is arranged in the inner cavity of the tank body (1), a first end of the exhaust pipe (3) is communicated with the exhaust port (12), and a second end extends towards the blowback port (13);

the sealing plate (4) is movably arranged between the second end of the exhaust pipe (3) and the blowback opening (13) and is suitable for selectively opening the second end of the exhaust pipe (3) and the blowback opening (13);

the driving mechanism (5) is connected with the sealing plate (4) and is suitable for driving the sealing plate (4) to be in sealing connection with the blowback port (13) or the second end of the exhaust pipe (3);

and the filtering component (2) is arranged in the inner cavity of the tank body (1).

2. The dust removal device according to claim 1, characterized in that a blowback pipe (6) is arranged at the top of the tank body (1), a first end of the blowback pipe (6) is connected with the blowback port (13), and a second end is arranged opposite to a second end of the exhaust pipe (3).

3. The dust removal device according to claim 2, characterized in that the second end of the blowback pipe (6) and the second end of the exhaust pipe (3) are arranged vertically opposite each other, and the driving mechanism (5) is adapted to drive the sealing plate (4) to perform a linear movement in a vertical direction.

4. A dust extraction device according to claim 3, characterized in that the drive mechanism (5) comprises a drive cylinder, the piston rod of which extends into the blowback pipe (6).

5. A dust collector according to any one of claims 2-4, characterized in that the second end of the blowback pipe (6) and the second end of the exhaust pipe (3) are both provided with sealing rings (7).

6. The dust extraction device according to any one of claims 1-4, characterized in that the exhaust opening (12) is provided below the filter assembly (2), the exhaust pipe (3) comprises a first exhaust section (31) and a second exhaust section (32) which are in communication with each other, the first exhaust section (31) and the exhaust opening (12) are connected, a first end of the second exhaust section (32) is connected to the first exhaust section (31), a second end of the second exhaust section (32) extends from bottom to top, and the sealing plate (4) is adapted to be in sealing connection with a second end of the second exhaust section (32).

7. The dust removal device according to claim 6, characterized in that the air inlet (11) is provided below the filter assembly (2).

8. The dust removal device according to any one of claims 1-4, wherein a screw conveyor (8) is arranged below the filter assembly (2) in the inner cavity of the tank (1), the screw conveyor (8) comprises a conveyor shaft, and screw blades are arranged on the conveyor shaft.

9. The dust removal device according to any one of claims 1-4, characterized in that a pressure relief valve (9) is provided on the tank (1).

10. A single crystal production system comprising the dust removing device according to any one of claims 1 to 9.