CN219079641U

CN219079641U - Vapor deposition furnace

Info

Publication number: CN219079641U
Application number: CN202223409905.3U
Authority: CN
Inventors: 杜宁; 张金来; 王振; 杨传昌; 宋信信; 叶天成
Original assignee: Linyi Dongmu Kiln Equipment Co ltd; Zhejiang Lichen New Material Technology Co ltd
Current assignee: Linyi Dongmu Kiln Equipment Co ltd; Zhejiang Lichen New Material Technology Co ltd
Priority date: 2022-12-20
Filing date: 2022-12-20
Publication date: 2023-05-26
Anticipated expiration: 2032-12-20

Abstract

The utility model discloses a vapor deposition furnace, which comprises a rotary furnace body, a furnace body upper frame and a furnace body lower seat; the rotary furnace body is rotatably fixed on the upper furnace body frame along the axis direction, and the upper furnace body frame can be rotatably connected to the lower furnace body seat around one end of the upper furnace body frame; the rotary furnace body is of a cylindrical structure with hollow inside, a plurality of groups of material carrying plates are arranged inside the rotary furnace body, and the rotary furnace body comprises a discharging material carrying plate and at least one group of symmetrical stirring material carrying plate groups. According to the utility model, through the specially designed structure of the material carrying plate in the furnace, the material can be ensured to realize axial and radial synchronous track movement along with the rotation of the furnace body in the furnace tube; the combination of the micro negative angle design and the material carrying plate can realize the material circulation back and forth in the furnace, so that the material is heated and contacted with the atmosphere in the furnace relatively uniformly, and the consistency of the material is ensured; through the shower structure of intaking, can ensure that gas and material's contact is more abundant, realize the homogeneity of deposit.

Description

Vapor deposition furnace

Technical Field

The utility model relates to the technical field of heat treatment equipment, in particular to a vapor deposition furnace.

Background

The vapor deposition technology is a surface film forming technology which is developed rapidly and widely applied, and can be used for preparing film coatings with various special mechanical properties (such as super-hard, high corrosion resistance, heat resistance, oxidation resistance and the like) and also can be used for preparing various functional film materials, decorative film coatings and the like. It is also widely used in the processing of lithium battery materials, such as for vapor deposition of carbon, silicon or other costs.

The vapor deposition is mainly applied to powdery raw materials in the field of lithium batteries, and how to ensure that the vapor deposition is sufficient, uniform and efficient is a main problem to be solved in the production process, and particularly how to avoid uneven deposition caused by agglomeration of the raw materials in the deposition process is a difficulty in production for lighter raw materials such as graphite.

Disclosure of Invention

The utility model aims to provide a vapor deposition furnace which solves the problems in the prior art.

In order to achieve the above purpose, the technical scheme of the utility model provides a vapor deposition furnace, which comprises a rotary furnace body, a furnace body upper frame and a furnace body lower seat; the rotary furnace body is rotatably fixed on the upper furnace body frame along the axis direction, and the upper furnace body frame can be rotatably connected to the lower furnace body seat around one end of the upper furnace body frame; the rotary furnace body is of a cylindrical structure with hollow inside, a plurality of groups of material carrying plates are arranged inside the rotary furnace body, and the rotary furnace body comprises a discharging material carrying plate and at least one group of symmetrical stirring material carrying plate groups.

Preferably, the vapor deposition furnace further comprises an actuating rod, one end of the lower part of the upper furnace body frame is hinged with one end of the upper part of the lower furnace body seat, the other end of the upper furnace body frame is hinged with one end of the actuating rod, and the other end of the actuating rod is hinged with the other end of the lower furnace body seat.

Preferably, the actuating rods are any one of an electric push rod and a hydraulic oil cylinder, and one or more actuating rods are symmetrically distributed along the axis of the rotary furnace body.

Preferably, the rotary furnace body is provided with a discharge end of the circular truncated cone-shaped cavity, the axis of the discharge end is axially overlapped with the rotary furnace body, and at least one discharge strip plate with an included angle with the axis of the discharge end is arranged on the inner wall of the discharge end.

Preferably, the symmetrical stirring strip plate group comprises a middle strip plate and two end strip plates symmetrically arranged at two sides of the middle strip plate; the middle material carrying plate is parallel to the axis of the rotary furnace body, and the material carrying plates at the two ends and the axis of the rotary furnace body are provided with included angles.

Preferably, the material carrying plates at the two ends comprise a plurality of material carrying sub-plates, the material carrying sub-plates are mutually parallel and are arranged at intervals along the circumferential direction of the rotary furnace body.

Preferably, the interval angle of the strip sub-boards is a fixed angle or the highest point of the bottom edge of one strip sub-board is between the lowest point and the middle point of the bottom edge of the last strip sub-board in two adjacent strip sub-boards.

Preferably, the rotary furnace body is further provided with an air inlet pipe, the air inlet pipe is arranged at the axis of the end part of the rotary furnace body and extends into the rotary furnace body, the air inlet pipe is of a closed cylinder structure, and a plurality of groups of air inlet holes are arranged on the side face of the air inlet pipe.

According to the utility model, through the specially designed structure of the material carrying plate in the furnace, the material can be ensured to realize axial and radial synchronous track movement along with the rotation of the furnace body in the furnace tube; the combination of the micro negative angle design and the material carrying plate can realize the material circulation back and forth in the furnace, so that the material is heated and contacted with the atmosphere in the furnace relatively uniformly, and the consistency of the material is ensured; through the shower structure of intaking, can ensure that gas and material's contact is more abundant, realize the homogeneity of deposit.

In order to make the concepts and other objects, advantages, features and functions of the present utility model more apparent and understood, a preferred embodiment will be described in detail below with reference to the accompanying drawings.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view in elevation of one embodiment of the present utility model.

Fig. 2 is a schematic side view of an embodiment of the present utility model.

FIG. 3 is a schematic side view of a rotary furnace according to yet another embodiment of the present utility model.

Fig. 4 is a schematic perspective view of a rotary furnace according to another embodiment of the present utility model.

FIG. 5 is a schematic view of a rotary furnace in cross section according to yet another embodiment of the present utility model.

Fig. 6 is a schematic perspective view of a rotary furnace according to still another embodiment of the present utility model.

FIG. 7 is a schematic side view of a rotary furnace according to yet another embodiment of the present utility model.

Fig. 8 is a schematic view of an intake pipe according to an embodiment of the present utility model.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1, a vapor deposition furnace according to the present utility model includes a rotary furnace body 1, a furnace body upper frame 2, and a furnace body lower seat 3.

As shown in fig. 1, the rotary furnace body 1 is rotatably fixed on the upper furnace body frame 2 along the axial direction, and is generally in rotatable connection with two ends of the rotary furnace body 1 through the cooperation of bearings arranged on the upper furnace body frame 2, and the specific connection structure is common in the art and is not protected in the application.

The furnace body upper frame 2 is of a frame type structure with a metal structure, one end of the lower part of the furnace body upper frame 2 is hinged with one end of the upper part of the furnace body lower seat 3, the other end of the furnace body upper frame is hinged with one end of the actuating rod 21, and the other end of the actuating rod 21 is hinged with the other end of the furnace body lower seat 3.

The actuating rods 21 are any one of electric push rods and hydraulic cylinders, and one or more actuating rods 21 are symmetrically distributed along the axis of the rotary furnace body 1.

The angle of the rotary furnace body 1 with the horizontal plane can be adjusted through the actuating rod 21, preferably-5 to 15 degrees, the diffusion of the deposition gas in the furnace body is facilitated through the inclined rotary furnace body 1, and meanwhile, the stirring of materials in the rotary furnace body 1 is facilitated through different adjustment of the angle of the rotary furnace body 1, so that the uniformity of deposition is improved.

The rotary furnace body 1 is of a cylindrical structure with a hollow inside, a plurality of groups of material carrying plates are arranged inside the rotary furnace body, and the rotary furnace body comprises a discharging material carrying plate 11 and at least one group of symmetrical stirring material carrying plate groups 12. Through the setting of taking the flitch, can improve stirring effect and work efficiency to the raw and other materials, be favorable to improving vapor deposition's homogeneity. The strip plates are preferably metal plates, the thickness of the strip plates is adaptively selected according to the size of the rotary furnace body 1, the thickness of the strip plates is generally within 5cm, the length of the single strip plate is within 100cm, and the height of the single strip plate is 10% -30% of the inner diameter of the rotary furnace body 1. The bottom surface of the material carrying plate is fixed with the inner wall of the rotary furnace body 1, the shape of the bottom surface is adaptively selected according to the fixed position, when the length direction of the material carrying plate is parallel to the axis of the rotary furnace body 1, the bottom surface is a plane, and when the length direction of the material carrying plate forms an included angle with the axis of the rotary furnace body 1, the bottom surface is a curved surface. The top surface of the glass plate opposite to the bottom surface can be flat or curved on two side surfaces in the thickness direction. For ease of processing, preferably planar, the projection of the top of the corresponding strap in the thickness direction may be a rectangular upper portion (middle strap 121 shown in fig. 3) or a trapezoidal upper portion (both end straps 122 shown in fig. 5) with an obtuse interior angle.

The discharging strip material plate 11 is arranged on the inner wall of the discharging end of the rotary furnace body 1, as shown in figures 3 and 4, the discharging end 15 of the rotary furnace body 1 is a circular table-shaped cavity, the axis of the cavity is axially coincident with the rotary furnace body 1, at least one discharging strip material plate 11 with an included angle with the axis of the discharging end is arranged on the inner wall of the discharging end 15, and the discharging strip material plates 11 are 3 in the figures and are uniformly distributed.

The material can be effectively prevented from outwards flowing or accumulating on one side under the rotation of the furnace body in the vapor deposition process through the arrangement of the circular truncated cone-shaped discharge end 15, so that the stirring effect can be improved, and the rotation speed of the furnace body is accelerated. During discharging, the furnace body upper frame 2, the furnace body lower seat 3 and the actuating rod 21 are matched, and the furnace body 1 is obliquely rotated to realize discharging.

As shown in fig. 3, 4 and 5, the symmetrical stirring strip set 12 includes a middle strip 121 and two end strips 122 symmetrically disposed on both sides of the middle strip 121.

The middle strip plate 121 is a rectangular plate and is parallel to the axis of the rotary furnace body 1. The two end strip plates 122 are plates, an included angle is formed between the plates and the axis of the rotary furnace body 1, and in fig. 3, the number of the middle strip plates 121 and the two end strip plates 122 on one side are 3 and are uniformly distributed.

The middle strip plate 121 and the two end strip plates 122 can be fixed on the inner wall of the rotary furnace body 1 vertically with the inner wall of the rotary furnace body 1, and can also be obliquely fixed on the inner wall of the rotary furnace body 1, such as an inclination angle of 60-80 degrees.

Further, as shown in fig. 6 and 7, there may be multiple symmetrical stirring belt plate sets 12, including three middle belt plates 121 and four two end belt plates 122 disposed on two sides of the middle belt plate 121.

The middle strip plate 121 and the two end strip plates 122 are formed by a plurality of parts, as shown in fig. 6 and 7, the whole strip plate is divided into three adjacent strip plates, and then the three adjacent strip plates are spliced when welded to the inner wall of the furnace body, so that the problems that the length of the single strip plate is too long, the welding deformation is too large when the whole strip plate is welded with the furnace tube, the furnace tube is heated for a long time, the heated area of the strip plate in the furnace and the heated outer tube of the furnace are uneven, and the welded junction time is long and the risk that the strip plate in the furnace falls off due to carburized hydrogen generated by high temperature are reduced.

The two-end strip plates 122 include a plurality of strip sub-plates 1221, and each of the two-end strip plates 122 shown in fig. 7 includes three strip sub-plates 1221, where the strip sub-plates 1221 are disposed parallel to each other and are spaced apart along the circumferential direction of the rotary furnace body 1, and the spacing angle of the strip sub-plates 1221 may be a fixed angle, for example 80 degrees; can also be controlled according to the following method: in two adjacent strip sub-boards 1221, the highest point of the bottom edge of one strip sub-board 1221 is between the lowest point and the middle point of the bottom edge of the last strip sub-board 1221. Through the design, the stirring effect can be further improved, and meanwhile, the stacking of raw materials on the material carrying plate is reduced.

The rotary furnace body 1 is also provided with an external heat insulation structure 13 and an air inlet pipe 14.

The air inlet pipe 14 is arranged at the axis of the end part of the rotary furnace body 1 and extends into the rotary furnace body 1, the air inlet pipe 14 is arranged at one end of the feeding part far away from the discharging part as shown in the attached drawing 1, the air inlet pipe 14 is of a closed cylinder structure, a plurality of groups of air inlet holes are arranged on the side surface of the air inlet pipe, the air inlet pipe is favorable for uniformly air inlet, and the problem of uneven mixing of furnace gas and materials caused by single air holes is solved. As shown in fig. 8, the air intake holes 141 are provided in the air intake pipe 14, each 4 groups of air intake holes are uniformly arranged on the side of the air intake pipe, and the plurality of groups of air intake holes are uniformly distributed on the side of the air intake pipe 14.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments in accordance with the present application. As used herein, the singular is also intended to include the plural unless the context clearly indicates otherwise, and furthermore, it is to be understood that the terms "comprises" and/or "comprising" when used in this specification are taken to specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof.

It should be noted that, unless explicitly stated or limited otherwise, terms such as "mounted," "connected," "secured," "disposed," and the like should be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, in the description of the present utility model, the terms "first" and "second" are used to define the components, and are merely for convenience of distinguishing the corresponding components, and unless otherwise stated, the terms have no special meaning, and thus should not be construed as limiting the scope of the present application.

While the foregoing is directed to the preferred embodiments of the present utility model, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the utility model, such changes and modifications are also intended to be within the scope of the utility model.

Claims

1. The vapor deposition furnace is characterized by comprising a rotary furnace body, a furnace body upper frame and a furnace body lower seat; the rotary furnace body is rotatably fixed on the upper furnace body frame along the axis direction, and the upper furnace body frame can be rotatably connected to the lower furnace body seat around one end of the upper furnace body frame; the rotary furnace body is of a cylindrical structure with hollow inside, a plurality of groups of material carrying plates are arranged inside the rotary furnace body, and each material carrying plate comprises a discharging material carrying plate and at least one group of symmetrical stirring material carrying plate groups.

2. The vapor deposition furnace according to claim 1, further comprising an actuating rod, wherein one end of the lower part of the upper furnace frame is hinged to one end of the upper part of the lower furnace seat, the other end of the upper furnace frame is hinged to one end of the actuating rod, and the other end of the actuating rod is hinged to the other end of the lower furnace seat.

3. The vapor deposition furnace according to claim 2, wherein the actuating rods are any one of electric push rods and hydraulic cylinders, and the actuating rods are one or more of the actuating rods and are symmetrically distributed along the axis of the rotary furnace body.

4. The vapor deposition furnace according to claim 1, wherein the rotary furnace body is provided with a discharge end of a circular-table-shaped cavity, the axis of the discharge end is axially coincident with the rotary furnace body, and at least one discharge strip plate with an included angle with the axis of the discharge end is arranged on the inner wall of the discharge end.

5. The vapor deposition furnace according to claim 1, wherein the symmetrical stirring belt plate group comprises a middle belt plate and two end belt plates symmetrically arranged at two sides of the middle belt plate; the middle material carrying plate is parallel to the axis of the rotary furnace body, and the material carrying plates at the two ends and the axis of the rotary furnace body are provided with included angles.

6. The vapor deposition furnace according to claim 5, wherein the two-end strip plates comprise a plurality of strip sub-plates, the strip sub-plates being disposed parallel to each other and arranged at intervals in the circumferential direction of the rotary furnace body.

7. The vapor deposition furnace of claim 6, wherein the strip sub-plate spacing angle is a fixed angle or a highest point of a bottom edge of one of two adjacent strip sub-plates is between a lowest point and a middle point of a bottom edge of the last strip sub-plate.

8. The vapor deposition furnace according to claim 1, wherein the rotary furnace body is further provided with an air inlet pipe, the air inlet pipe is arranged at the axis of the end part of the rotary furnace body and extends into the rotary furnace body, the air inlet pipe is of a closed cylinder structure, and a plurality of groups of air inlet holes are arranged on the side surface of the air inlet pipe.