CN219061927U

CN219061927U - Multistage vacuum suction filtration system of mass spectrometer

Info

Publication number: CN219061927U
Application number: CN202222801013.1U
Authority: CN
Inventors: 王璐菊; 吴海荣; 杨章静
Original assignee: Suzhou Bowei Instrument Technology Co ltd
Current assignee: Suzhou Bowei Instrument Technology Co ltd
Priority date: 2022-10-24
Filing date: 2022-10-24
Publication date: 2023-05-23
Anticipated expiration: 2032-10-24

Abstract

The utility model discloses a multistage vacuum filtration system of a mass spectrometer, which comprises a vacuum cavity, a first molecular pump, a second molecular pump, a mechanical pump and a connecting mechanism, wherein the first molecular pump and the second molecular pump are arranged at the bottom end of the vacuum cavity, and the first molecular pump, the second molecular pump and the mechanical pump are connected with each other through the connecting mechanism. The utility model, turbo-moleculesThe pump has the advantages of quick start, resistance to irradiation of various rays, atmospheric impact resistance, no gas storage and desorption effects, no or little pollution of oil vapor, and capability of obtaining clean ultrahigh vacuum; through the combined design of two groups of turbo molecular pumps and mechanical pumps, the vacuum degree can be normally kept to be 10 ^‑6 And the Pa level greatly ensures the sensitivity characteristic of the instrument.

Description

Multistage vacuum suction filtration system of mass spectrometer

Technical Field

The utility model relates to the technical field of mass spectrometers, in particular to a multistage vacuum suction filtration system of a mass spectrometer.

Background

The mass spectrometer is used for a vacuum cavity for quality screening, the vacuum cavity can work normally only by ensuring the relative vacuum degree, and the condition that the sensitivity is reduced or even no signal is output can not occur due to insufficient vacuum degree, so that the vacuum degree of the vacuum cavity is ensured to be critical to the overall performance of the instrument. The independent vacuumizing device can cause too large air flow fluctuation, so that the testing repeatability data is affected, and the key point of the technology is how to ensure high-flow vacuum filtering and meanwhile ensure the stability of air flow.

Disclosure of Invention

The utility model aims to provide a multi-stage vacuum suction filtration system of a mass spectrometer, which aims to solve the problems in the prior art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a multistage vacuum suction filtration system of mass spectrometer, includes vacuum cavity, first molecular pump, second molecular pump, mechanical pump and coupling mechanism, first molecular pump and second molecular pump are installed to the vacuum cavity bottom, interconnect through coupling mechanism between first molecular pump, second molecular pump and the mechanical pump.

Preferably, the connecting mechanism comprises a first bent pipe, a straight pipe, a three-way pipe, a second bent pipe and a clamp, wherein one end of the straight pipe is fixed with the first bent pipe through the clamp, the other end of the straight pipe is fixed with the three-way pipe through the clamp, and the three-way pipe is connected with the second bent pipe through the clamp.

Preferably, the first elbow pipe is connected with the first molecular pump through a clamp, the second elbow pipe is connected with the mechanical pump through a clamp, and the three-way pipe is connected with the second molecular pump through a clamp.

Preferably, the clamp includes first splint, connector, second splint and sealing washer, the cross-section of connector is T shape structure, the mid-mounting of connector has the sealing washer, first splint and second splint are installed in the outside of connector.

Preferably, the connector is arranged at the sealing ring and is in a circular arc structure.

Compared with the prior art, the utility model has the beneficial effects that: the front end and the rear end of the vacuum cavity are simultaneously adoptedThe method comprises the steps of using two turbomolecular pump devices, transmitting momentum to gas molecules by using a rotor rotating at a high speed to obtain directional speed, compressing, driving to an exhaust port, pumping away for a front stage, and then connecting exhaust pipes connected in series to a high-power mechanical pump for air flow conversion; the turbomolecular pump has the advantages of quick start, resistance to irradiation of various rays, atmospheric impact resistance, no gas storage and desorption effects, no oil vapor pollution or little pollution, and capability of obtaining clean ultrahigh vacuum; through the combined design of two groups of turbo molecular pumps and mechanical pumps, the vacuum degree can be normally kept to be 10 ^-6 And the Pa level greatly ensures the sensitivity characteristic of the instrument.

Drawings

The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:

fig. 1 is a schematic structural view of the present utility model.

Fig. 2 is a schematic structural view of the present utility model.

Fig. 3 is a schematic structural view of the present utility model.

Fig. 4 is a schematic structural view of the present utility model.

In the figure: 1. a vacuum chamber; 2. a first molecular pump; 3. a second molecular pump; 4. a mechanical pump; 5. a connecting mechanism; 51. a first elbow; 52. a straight pipe; 53. a three-way pipe; 54. a second elbow; 55. a clamp; 551. a first clamping plate; 552. a connector; 553. a second clamping plate; 554. and (3) sealing rings.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1-4, in an embodiment of the present utility model, a multi-stage vacuum filtration system of a mass spectrometer includes a vacuum chamber 1, a first molecular pump 2, a second molecular pump 3, a mechanical pump 4, and a connection mechanism 5, wherein the first molecular pump 2 and the second molecular pump 3 are installed at the bottom end of the vacuum chamber 1, and the first molecular pump 2, the second molecular pump 3 and the mechanical pump 4 are connected with each other through the connection mechanism 5; the connecting mechanism 5 comprises a first bent pipe 51, a straight pipe 52, a three-way pipe 53, a second bent pipe 54 and a clamp 55, wherein one end of the straight pipe 52 is fixed with the first bent pipe 51 through the clamp 55, the other end of the straight pipe 52 is fixed with the three-way pipe 53 through the clamp 55, and the three-way pipe 53 is connected with the second bent pipe 54 through the clamp 55. The method comprises the steps of carrying out a first treatment on the surface of the The first elbow pipe 51 is connected with the first molecular pump 2 through a clamp 55, the second elbow pipe 54 is connected with the mechanical pump 4 through a clamp 55, and the tee pipe 53 is connected with the second molecular pump 3 through a clamp 55; the clamping hoop 55 comprises a first clamping plate 551, a connector 552, a second clamping plate 553 and a sealing ring 554, wherein the cross section of the connector 552 is of a T-shaped structure, the sealing ring 554 is arranged in the middle of the connector 552, and the first clamping plate 551 and the second clamping plate 553 are arranged on the outer side of the connector 552; the connecting head 552 is arranged at the sealing ring 554 and is in a circular arc structure; two turbomolecular pump devices are simultaneously adopted at the front end and the rear end of the vacuum cavity, momentum is transmitted to gas molecules by utilizing a rotor rotating at a high speed, so that the gas molecules obtain directional speed, the gas molecules are compressed and driven to an exhaust port to be pumped away for the front stage, and then an exhaust pipe connected in series is connected with a high-power mechanical pump to convert air flow. The turbomolecular pump has the advantages of quick start, resistance to irradiation of various rays, atmospheric impact resistance, no gas storage and desorption effects, no or little pollution of oil vapor, and capability of obtaining clean ultrahigh vacuum. Through the combined design of two groups of turbo molecular pumps and mechanical pumps, the vacuum degree can be normally kept to be 10 ^-6 And the Pa level greatly ensures the sensitivity characteristic of the instrument.

The working principle of the utility model is as follows: two turbomolecular pump devices are simultaneously adopted at the front end and the rear end of the vacuum cavity, and momentum is transmitted to gas molecules by utilizing a rotor rotating at high speed to obtain directional speed, so that the gas molecules are compressed and driven to an exhaust port to obtainThe front stage is pumped away, and then the exhaust pipes connected in series are connected with a high-power mechanical pump to convert the air flow. The turbomolecular pump has the advantages of quick start, resistance to irradiation of various rays, atmospheric impact resistance, no gas storage and desorption effects, no or little pollution of oil vapor, and capability of obtaining clean ultrahigh vacuum. Through the combined design of two groups of turbo molecular pumps and mechanical pumps, the vacuum degree can be normally kept to be 10 ^-6 And the Pa level greatly ensures the sensitivity characteristic of the instrument.

Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims

1. A multi-stage vacuum filtration system for a mass spectrometer, characterized by: including vacuum cavity (1), first molecular pump (2), second molecular pump (3), mechanical pump (4) and coupling mechanism (5), first molecular pump (2) and second molecular pump (3) are installed to vacuum cavity (1) bottom, connect through coupling mechanism (5) between first molecular pump (2), second molecular pump (3) and the mechanical pump (4).

2. A multi-stage vacuum filtration system for a mass spectrometer as claimed in claim 1 wherein: coupling mechanism (5) are including first return bend (51), straight tube (52), three-way pipe (53), second return bend (54) and clamp (55), straight tube (52) one end is fixed with first return bend (51) through clamp (55), and straight tube (52) other end is fixed with three-way pipe (53) through clamp (55), three-way pipe (53) are connected with second return bend (54) through clamp (55).

3. A multi-stage vacuum filtration system for a mass spectrometer as claimed in claim 2 wherein: the first bent pipe (51) is connected with the first molecular pump (2) through a clamp (55), the second bent pipe (54) is connected with the mechanical pump (4) through the clamp (55), and the three-way pipe (53) is connected with the second molecular pump (3) through the clamp (55).

4. A multi-stage vacuum filtration system for a mass spectrometer as claimed in claim 2 wherein: the clamp (55) comprises a first clamping plate (551), a connector (552), a second clamping plate (553) and a sealing ring (554), the cross section of the connector (552) is of a T-shaped structure, the sealing ring (554) is mounted in the middle of the connector (552), and the first clamping plate (551) and the second clamping plate (553) are mounted on the outer side of the connector (552).

5. The multi-stage vacuum filtration system of a mass spectrometer of claim 4, wherein: the connector (552) is arranged at the sealing ring (554) and is in a circular arc structure.