CN219053276U - Machine door and dicing saw with same - Google Patents

Abstract

The utility model discloses a machine door and a dicing machine with the machine door, wherein an unlocking part of a door lock in the machine door is positioned in an accommodating space, and a display mounting frame is arranged at a window position of the accommodating space on a door body, so that when the display mounting frame is in a window closing state, a display arranged on the display mounting frame can play a role of shielding the unlocking part, and the machine door is not easy to open for a person unfamiliar with equipment operation or a person not expert in the machine door, thereby improving the use safety of the dicing machine and avoiding danger caused by unauthorized opening of the person.

Description

Machine door and dicing saw with same

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a gate and a dicing saw with the gate.

Background

The front surface of the wafer is provided with a plurality of cutting channels which are mutually intersected, devices are formed in each area divided by the plurality of cutting channels, and when the dicing saw cuts the wafer along the cutting channels, each device can be obtained. In the process of cutting the wafer, an operator needs to monitor the working state of the dicing saw all the time except for correspondingly controlling the dicing saw, and when the dicing saw alarms or fails, the door is opened for maintenance.

To meet the above-mentioned use requirements, the door is usually mounted on the housing of the dicing saw in an openable manner. In addition to ease of use, the safety of the dicing saw is one of the main factors considered by those skilled in the art.

Disclosure of Invention

The utility model aims to provide a gate with high use safety and a dicing saw with the gate.

The utility model provides a machine door which is used for opening or closing an inner cavity of a machine shell of a dicing saw, and comprises a door body, a door lock and a display installation frame for installing a display;

the door body is provided with an accommodating space, a window is formed in the outer surface of the door body in the accommodating space, and the display mounting frame is arranged at the position of the window and can open or close the window;

the door lock is used for locking or unlocking the door body and the shell, and at least the unlocking part of the door lock is positioned in the accommodating space.

Compared with the prior door lock, the door lock has the advantages that the unlocking part is positioned in the accommodating space, and the display mounting frame is arranged at the window position of the accommodating space on the door body, so that when the display mounting frame is in a window closing state, the display mounted on the display mounting frame can play a role in shielding the unlocking part, and the door lock is not easy to find out the position of the door lock for unfamiliar equipment operation or non-professional staff, so that the door cannot be easily opened, the use safety of the dicing saw can be improved, and the danger caused by unauthorized opening of the non-operator is avoided.

Optionally, a side wall of the display mounting frame is rotatably connected to the door body, and when the display mounting frame closes the window, at least part of the display is located inside the accommodating space.

Optionally, the door body is provided with a pivot shaft, the display mounting frame is pivoted with the door body through the pivot shaft, and the pivot shaft is vertically arranged.

Optionally, the center of the display is arranged coincident with the center of the display frame.

Optionally, the accommodating space is further internally provided with a magnetic component, and the free end of the display mounting frame far away from the rotating shaft can be magnetically attracted to the door body through the magnetic component.

Optionally, the accommodating space is recessed towards the interior of the casing, the side wall of the accommodating space comprises a first wall opposite to the window, and the door lock is located on one side of the first wall towards the window.

Optionally, the unlocking part comprises a handle rotatably mounted on the first wall, and when the handle rotates to a first position, the door lock is in a locking state locked with the casing; when the handle is rotated to the second position, the door lock is in an unlocked state unlocked from the housing.

Optionally, the door further comprises a telescopic component, one end of the telescopic component is fixed on the side wall of the accommodating space, the other end of the telescopic component is fixed on the frame of the display assembly, and when the display assembly rotates around the door body, the telescopic component stretches or shortens to be capable of positioning the display assembly at an opening angle.

Optionally, the telescopic member comprises a telescopic cylinder or a telescopic link with damping.

Optionally, the first side of the door body has a rotation mechanism for rotating connection to the housing, and the door lock is disposed on an opposite side of the first side.

In addition, the utility model also provides a dicing saw, which comprises a machine shell, wherein the machine shell comprises any door, and the machine door is locked or unlocked with the machine shell through the door lock.

Since the machine door has the technical effects as described above, the dicing machine with the machine door has similar technical effects, and therefore, the description thereof is omitted herein.

Drawings

FIG. 1 is a schematic view of a dicing saw door in a closed state;

fig. 2 is a schematic view of the saw blade of the saw machine shown in fig. 1 in an open state.

The reference numerals in fig. 1-2 are illustrated as follows:

1, a machine door; 11 door bodies; 11a accommodating space; 111 a first wall; 12 a display mounting frame; 13 a display; 14, a door lock; 141 unlocking part; 15 telescoping members; 16 pairs of door locks; 17 magnetic attraction parts;

2, a shell; 21 operating the button.

Detailed Description

Currently, the door lock switch of the door of the dicing saw is usually directly arranged outside the door, so that although the door can be conveniently opened by a professional operator to maintain or overhaul the internal components of the equipment, the door lock switch is directly leaked outside the door, on the one hand, a non-professional operator is also easy to open, on the other hand, the door lock switch is also easy to be opened by mistakenly touching, and the safety of the equipment is relatively low.

Aiming at the technical problems, the utility model provides a technical scheme for solving the technical problems, and the technical scheme provided by the utility model not only can meet the use and maintenance requirements of the dicing saw, but also has higher safety.

In order to make the technical solution of the present utility model better understood by those skilled in the art, the present utility model will be further described in detail with reference to the accompanying drawings and specific embodiments.

The term "plurality" as used herein refers to a plurality, typically two or more, of indefinite quantities; and when "a number" is used to denote the number of a certain number of components, the number of components is not necessarily related to each other.

The terms "first," "second," and the like, herein are merely used for convenience in describing two or more structures or components that are identical or functionally similar, and do not denote any particular limitation of order and/or importance.

Referring to fig. 1-2, fig. 1 is a schematic structural view of a door of a dicing saw in a closed state; fig. 2 is a schematic view of the saw blade of the saw machine shown in fig. 1 in an open state.

The utility model provides a dicing saw, which comprises a machine shell 2, a control system and a frame positioned in the machine shell 2, wherein a processing platform, a laser cutting system and an image acquisition system are generally arranged on the frame, and the processing platform is mainly used for placing a wafer to wait for a workpiece. The image acquisition system is mainly used for acquiring images of the wafer and sending the acquired images to the control system, and the control system controls execution components such as the laser cutting system to work according to the image information. The image acquisition system may include a camera or the like.

The main structures of the laser cutting system, the processing platform and the image acquisition system can refer to the prior art, and are not described herein too much.

The dicing saw of the present utility model may further include a man-machine interaction system including operation buttons 21 mounted outside the casing 2 and the display 13. A plurality of operation buttons 21 can be installed on the outer part of the machine shell 2, different operation buttons can have different functions, and an operator touches the different operation buttons to control the dicing saw to execute different functions. The display can display the working parameters of the dicing saw in the current state, and an operator can input operation instructions from the display interface to control the dicing saw to perform corresponding work.

In the utility model, a casing 2 is provided with an inner cavity, a rack and other parts are arranged in the inner cavity, a machine door 1 is arranged at the position of the inner cavity opening, the machine door 1 can open or close the inner cavity opening of the casing 2, a display 13 is arranged on the machine door 1, and specifically, the display 13 is arranged on the machine door 1 through a display mounting frame 12.

The door 1 of the present utility model includes a door body 11, a door lock 14, and a display mounting frame 12 for mounting a display 13.

The door 11 is determined according to the shape of the cavity opening of the housing 2, the door 11 may be made of a metal material, and the use strength of the metal material is relatively high, and of course, the door 11 may also be made of a non-metal material, so long as the use requirement can be met.

The door 11 of the present utility model has a housing space 11a, the housing space 11a has a window formed on an outer surface of the door 11, and the display mounting frame 12 is provided at a window position and can open or close the window; in order to make the appearance of the door 1 more attractive, the size of the window can be adapted to the display mounting frame 12, i.e. the size of the display mounting frame 12 is determined according to the size of the display, the display is fixedly mounted on the display mounting frame 12 to form a display assembly, the display assembly is mounted on the window of the door body 11 through the display mounting frame 12, the display mounting frame 12 can be rotatably connected with the door body 11, for example, the display mounting frame 12 is pivoted with the door body 11, and the display mounting frame 12 can rotate around the pivot shaft relative to the door body 11 to open or close the window. Of course the display mounting frame 12 and door 11 may be slid or otherwise connected to effect opening or closing of the window.

In the present utility model, the door lock 14 is used for locking or unlocking the door body 11 and the casing 2, and at least the unlocking portion 141 of the door lock 14 is located inside the accommodating space 11 a. The unlocking portion 141 may be a button, a turning handle, or a fingerprint operation portion. The operator operates the unlocking portion 141 to place the door lock 14 at a position to open the inner cavity of the housing 2 of the door body 11.

Compared with the current door lock of which the switch is directly exposed to the outside of the machine door 1, the unlocking part 141 of the door lock 14 is positioned in the accommodating space 11a, and the window position of the accommodating space 11a on the door body 11 is provided with the display mounting frame 12, so that when the display mounting frame 12 is in a window closing state, the display mounted on the display mounting frame 12 can play a role of shielding the unlocking part 141, and the position of the door lock 14 is not easy to find for unfamiliar equipment operation or non-professional, so that the machine door 1 can not be easily opened, thereby improving the use safety of the dicing machine and avoiding danger caused by unauthorized opening of non-operators.

The operator can operate the unlocking part 141 by opening the display mounting frame 12, and then open the door 1 to operate, maintain or repair the components in the casing 2.

In one example, a side wall of the display mounting frame 12 is rotatably connected to the door body 11, when the display mounting frame 12 closes the window, at least part of the display is located inside the accommodating space 11a, that is, the accommodating space 11a may be an accommodating cavity of the display, and all or part of the display may be located in the accommodating space 11a, so that the display protrudes out of the outer surface of the door body 11 as far as possible, occupation of an external space of the casing 2 is reduced, and the whole machine is beneficial to compact structure.

As described above, the display mounting frame 12 and the door body 11 may be pivoted, for example, the door body 11 is provided with a pivot shaft, the display mounting frame 12 and the door body 11 are pivoted by the pivot shaft, and the pivot shaft is vertically disposed, the display mounting frame 12 may be horizontally rotated, so that an operator can conveniently observe the interface on the display while viewing the running condition inside the dicing saw, the display rotates inside the vertical plane, the operator does not need to overcome the gravity work of the display and the display mounting frame 12, and the opening and closing are relatively labor-saving.

Of course, it is not excluded that the pivot shaft may be disposed horizontally, so as to meet the environmental requirements.

In the utility model, the center of the display is overlapped with the center of the display frame, so that the display is convenient for operators to observe, and the machine door 1 has higher appearance aesthetic property.

Of course, the center of the display and the center of the display frame may not be completely coincident, and both may be offset.

The display mounting frame 12 can be locked or unlocked with the door body 11 through the auxiliary door lock 16, that is, the auxiliary door lock 16 can be mounted on the display mounting frame 12, when the auxiliary door lock is locked with the door body 11, the display mounting frame 12 is locked with the door body 11, and the display mounting frame 12 cannot be opened at will, so that the use safety of the device is improved. When the sub door lock is opened, the display mounting frame 12 can move relative to the door body 11 to open the window, so that an operator can operate the unlocking part 141 or other parts located in the accommodating space 11 a.

In order to improve the closing of the display mounting frame 12, a magnetic attraction member 17 is further disposed in the accommodating space 11a, and the free end of the display mounting frame 12 away from the rotation axis can be magnetically attracted to the door body 11 through the magnetic attraction member 17. The fixing mode can realize the magnetic attraction fixation between the display mounting frame 12 and the door body 11 under the condition of basically not occupying too much space, and when the door body is required to be opened, only the external force is required to be larger than the magnetic attraction force, so that the operation is convenient.

In the present utility model, the accommodating space 11a of each of the above embodiments is recessed toward the inside of the housing 2, and the side wall of the accommodating space 11a includes a first wall 111 disposed opposite to the window, and the door lock 14 is located on a side of the first wall 111 facing the window. Specifically, the accommodating space 11a may be a groove structure, where the groove structure includes a first wall 111 and a side wall connected to a circumference of the first wall 111, the first wall 111 is connected to the door body 11 through a circumference side wall, the first wall 111 is a bottom wall of the groove structure, and the door lock 14 is located on the bottom wall, and the circumference side wall forms a window.

In the above embodiment, the accommodating space 11a may be completely located on the back side of the outer surface of the door 11, and does not protrude from the outer surface of the door 11, so as to reduce the occupation of the outer space of the door 11.

In the above example, each groove wall of the groove structure may be integrally formed with the door body 11, and may be fixed to the door body 11 by welding or mechanical connection.

The present utility model gives a specific example of the unlocking portion 141 in which the unlocking portion 141 includes a handle rotatably mounted to the first wall 111, and when the handle is rotated to the first position, the door lock 14 is in a locked state with the housing 2; when the handle is turned to the second position, the door lock 14 is in an unlocked state unlocked from the housing 2.

And a telescopic member 15, wherein one end of the telescopic member 15 is connected to a side wall of the accommodating space 11a, for example, one end of the telescopic member 15 may be hinged to a bottom wall of the groove structure, and the other end of the telescopic member is connected to the display mounting frame 12, and when the display mounting frame 12 rotates around the door body 11, the telescopic member 15 is extended or shortened to be capable of positioning the display mounting frame 12 at an opening angle. During the rotation of the display mounting frame 12 relative to the door body 11, the length of the telescopic member 15 is changed, and the telescopic member 15 can play a role in supporting and positioning, so that the display mounting frame 12 can be kept at a certain unfolding angle for the operator to observe.

The telescopic member 15 may take various forms, such as a telescopic cylinder, for example a telescopic cylinder or a telescopic cylinder, although the telescopic member 15 may also be a telescopic link with damping or other structure, not illustrated herein. Wherein the size of the telescopic member 15 may be determined according to the size of the specific accommodating space.

Although the specific structure of the telescopic member 15 is not shown in the drawings, those skilled in the art will be fully able to understand and practice the technical solutions described herein without any obstacle to understanding and practice, by means of the disclosure herein.

The door body 11 has a rotation mechanism on a first side for rotation connection to the cabinet 2, and the door lock 14 is provided on the opposite side of the first side.

Since the door 1 has the above technical effects, the dicing saw having the door 1 has similar technical effects, and thus will not be described herein.

The foregoing is merely a preferred embodiment of the present utility model and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present utility model, which are intended to be comprehended within the scope of the present utility model.

Claims (11)

1. The machine door is used for opening or closing the inner cavity of a machine shell of the dicing saw and is characterized by comprising a door body, a door lock and a display mounting frame for mounting a display;

the door body is provided with an accommodating space, a window is formed in the outer surface of the door body in the accommodating space, and the display mounting frame is arranged at the position of the window and can open or close the window;

the door lock is used for locking or unlocking the door body and the shell, and an unlocking part of the door lock is positioned in the accommodating space.

2. The door of claim 1, wherein a side wall of the display mounting frame is rotatably connected to the door body, and wherein at least a portion of the display is positioned within the receiving space when the display mounting frame closes the window.

3. The door as claimed in claim 2, wherein the door body is provided with a pivot shaft, the display mounting frame is pivoted with the door body through the pivot shaft, and the pivot shaft is vertically provided.

4. The door of claim 2, wherein a center of the display is coincident with a center of the display frame.

5. The door according to any one of claims 2 to 4, wherein a magnetic attraction member is further provided inside the housing space, and a free end of the display mounting frame away from the rotation shaft can be magnetically attracted to the door body through the magnetic attraction member.

6. The door of any one of claims 1 to 4, wherein the receiving space is recessed toward the interior of the housing, the side wall of the receiving space including a first wall disposed opposite the window, the door lock being located on a side of the first wall facing the window.

7. The door of claim 6, wherein the unlocking portion includes a handle rotatably mounted to the first wall, the door lock being in a locked state with the housing when the handle is rotated to a first position; when the handle is rotated to the second position, the door lock is in an unlocked state unlocked from the housing.

8. The door of claim 6, further comprising a telescoping member having one end secured to a side wall of the receiving space and the other end secured to a frame of the display assembly, the telescoping member extending or shortening to enable positioning of the display assembly at an open angle as the display assembly rotates about the door body.

9. The door of claim 8, wherein the telescoping component comprises a telescoping cylinder or a telescoping link with damping.

10. A door according to any one of claims 1 to 3, wherein a first side of the door body has a rotation mechanism for rotation connection to the housing, the door lock being provided on an opposite side of the first side.

11. A dicing saw comprising a housing, characterized in that it comprises a door according to any one of the preceding claims 1 to 10, said door being locked or unlocked to said housing by means of said door lock.

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