CN219010439U

CN219010439U - Metal cooling structure plate and metal cooling structure plate group

Info

Publication number: CN219010439U
Application number: CN202222609033.9U
Authority: CN
Inventors: 柴田尚宪
Original assignee: Keihin Lemeng Metal Technology Suzhou Co ltd
Current assignee: Keihin Lemeng Metal Technology Suzhou Co ltd
Priority date: 2022-09-30
Filing date: 2022-09-30
Publication date: 2023-05-12
Anticipated expiration: 2032-09-30

Abstract

The metal cooling structure plate of the present utility model includes a metal plate-like body having a first main surface and a second main surface and having a groove formed so as to open toward the first main surface, and a metal cover body, the metal plate-like body being constituted by a plurality of plate-like members arranged so that end surfaces of adjacent plate-like members abut against each other, thereby forming a flat plate-like shape constituting the first main surface and the second main surface as a whole, the plurality of plate-like members being friction-stir-joined from the main surface of either one or both of the first main surface or the second main surface along the abutting portion so as to be joined to each other, thereby forming a joined portion, the groove being formed by the abutting portion, and the abutting portion exposed in the groove being sealed by the joined portion, so that the inside of the groove and the outside of the metal plate-like body are not communicated.

Description

Metal cooling structure plate and metal cooling structure plate group

Technical Field

The present utility model relates to a metal cooling structure plate and a metal cooling structure plate group.

Background

The metal cooling structure plate as a conventional example includes a metal plate-like body and a metal cover. A lid groove is formed in the metal plate-like body. A groove is also formed in the bottom surface of the cover groove of the metal plate-like body. The metal cover body is embedded with the cover groove. At the periphery of the lid groove, a metal plate-like body and a metal lid body are joined. Thereby, the space surrounded by the groove and the metal cover becomes an internal space. The interior space can serve as a flow path for a fluid. The metal cooling structure plate is disposed in contact with or in close proximity to an object to be subjected to heat exchange, heating, or cooling, for example. For example, when heat is released from the object, the cooling medium is caused to flow through the flow path. This allows heat to be transferred from the object to the metal cooling structure plate and the cooling medium. As a result, the heat of the object can be released.

Japanese patent application laid-open publication No. 2014-240706 discloses a technique of joining a metal lid body and a metal plate body at the periphery of a lid groove by friction stir joining with respect to a metal cooling structure plate.

Disclosure of Invention

The metal cooling structure plate is used in, for example, a sputtering apparatus for film formation in the fields of liquid crystal, semiconductor, photovoltaic device (solar cell), organic EL light emitting device, and the like. In this case, a metal cooling structure plate is attached to the back side of the target material as a film forming material, and plays a role of cooling the target material and sputtering an electrode. Therefore, as the original performance, high sealability and cooling capability are required. In addition, in recent years, the substrate to be processed on which film formation is performed has become larger, and with the enlargement of the substrate to be processed, there has been a demand for an enlargement of the metal cooling structure plate. On the other hand, in the film formation process, it is necessary to maintain uniformity of film formation. Therefore, the metal cooling structure plate requires high flatness. In addition, the replacement of the metal cooling structure plate requires much time and effort, and thus frequent replacement of the metal cooling structure plate may result in low manufacturing efficiency. Therefore, the metal cooling structure plate is required to have a long life. Thus, the metal cooling structure plate is expected to satisfy the large-scale, high flatness and long life in addition to having high sealability and cooling capacity.

The utility model provides a metal cooling structure plate and a metal cooling structure plate group which have high sealing performance and cooling capacity and can meet the requirements of large size, high flatness and long service life.

The present utility model may adopt the following configuration.

(1) A metal cooling structure plate is characterized in that,

the metal cooling structure plate comprises a metal plate-shaped body and a metal cover body which are made of metal materials which are softened by friction heat of friction stirring and can flow plastically,

the metal plate-like body has a first main surface and a second main surface, and has at least a groove formed so as to open toward the first main surface,

the metal cover is configured to vertically overlap the metal plate-like body so as to cover the groove of the metal plate-like body,

the metal plate-like body is composed of a plurality of plate-like members,

the plurality of plate-like members having the same or substantially the same thickness as each other and being arranged such that end surfaces of the adjacent plate-like members abut each other, thereby forming a flat plate-like shape constituting the first main surface and the second main surface as a whole,

the plurality of plate-like members are friction stir-joined to each other along the abutting portion from one or both of the first main surface or the second main surface so as to include the abutting portion of the adjacent plate-like members, thereby forming a joined portion,

The groove is formed to pass through the abutting portion, and the abutting portion exposed into the groove is sealed by the engaging portion so that the inside of the groove and the outside of the metal plate-like body do not communicate via the abutting portion,

the metal plate-like body and the metal cover are joined to each other by friction stir welding in a state of overlapping in the vertical direction so that an internal space corresponding to at least a part of the space in the groove is provided between the metal plate-like body and the metal cover.

In the above (1), the plurality of plate-like members are bonded to each other by friction stir welding, thereby forming a metal plate-like body. By friction stir welding, hardness and mechanical strength can be maintained. As a result, occurrence of deformation occurring when the metal cooling structure plate is manufactured or used can be suppressed. The metal plate-like body is formed with a groove that opens toward the first main surface. Since the hardness and mechanical strength are maintained, deformation due to the formation of grooves can be suppressed or prevented. The grooves pass through the abutment portions of the adjacent plate-like members. However, the abutting portion exposed to the inside of the groove is sealed by the engaging portion so that the inside of the groove and the outside of the metal plate-like body are not communicated. That is, the abutting portion exposed to the groove is sealed by friction stir welding performed when the plurality of plate-like members are joined. Thereby, high sealability can be achieved and deformation can be suppressed or prevented. Therefore, according to the above (1), it is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life. In addition, "substantially the same thickness" means a tolerance in allowing design and an error in manufacturing. In addition, the vertical direction is synonymous with the thickness direction of the metal cooling structure plate.

(2) The metal cooling structure plate according to (1), characterized in that,

the metal cooling structure plate has a rectangular outer shape in plan view, and has an opening or does not have an opening in a central portion, one or both of a length and a width of the outer shape of the metal cooling structure plate are formed so as to satisfy a rectangular size condition, the length of the rectangular outer shape is longer than or the same as the width of the rectangular outer shape,

regarding the length, the rectangular size condition is that the length of the metal cooling structure plate is 400mm or more and 3100mm or less,

regarding the width, the rectangular size condition is that the width of the metal cooling structure plate is 200mm or more and 2900mm or less.

According to the above (2), the enlargement can be more effectively handled. That is, the above (2) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In the rectangular plate-like member, the length in the long side direction corresponds to "length", and the length in the short side direction corresponds to "width". In the case where the long-side direction and the short-side direction cannot be distinguished (in the case where the lengths are the same), the long-side direction and the short-side direction can be arbitrarily set.

(3) The metal cooling structure plate according to (2), characterized in that,

regarding the length, the rectangular size condition is that the length of the metal cooling structure plate is 700mm or more and 2800mm or less,

regarding the width, the rectangular size condition is that the width of the metal cooling structure plate is 500mm or more and 2600mm or less.

According to the above (3), the enlargement can be more effectively handled. That is, the above (3) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(4) The metal cooling structure plate according to (2) or (3), characterized in that,

the groove is formed through all of the plurality of plate-like members, the groove has a length portion extending in a direction of the length of the outer shape and a width portion extending in the width of the outer shape, and of the length portion and the width portion, both or only the length portion is formed through the engaging portion.

According to the above (4), the enlargement can be more effectively handled. In particular, the above (4) can further improve sealability and increase in size.

(5) The metallic cooling structure panel as recited in any one of (1) to (4), wherein,

the metal cooling structure plate has a rectangular ring shape formed of four sides so as to have an opening on the inner side in a plan view, and one, two, three, or four sides are formed so as to satisfy a rectangular side dimension condition, the width of the side being a length in a direction orthogonal to a direction in which the side extends, and the rectangular side dimension condition being that the width of the side is 30mm or more and 600mm or less.

According to the above (5), the enlargement can be more effectively handled. That is, the above (5) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(6) The metal cooling structure plate according to (5), characterized in that,

the rectangular side portion has a width of 50mm or more and 500mm or less.

According to the above (6), the enlargement can be more effectively handled. That is, the above (6) can provide a metal cooling structure plate which has high sealability and cooling capacity and satisfies the large-scale, high flatness and long life at a higher level.

(7) The metallic cooling structure panel as recited in any one of (2) to (6), wherein,

all or a part of the plurality of plate-like members have a rectangular shape in plan view, one or both of the length and the width of the plate-like members are formed so as to satisfy a first dimensional condition, the length of the plate-like members is longer than the width of the plate-like members,

with respect to the length, the first dimensional condition is that the length of the plate-like member is 200mm or more and 2900mm or less,

with respect to the width, the first dimensional condition is that the width of the plate-like member exceeds 30mm and 600mm or less.

According to the above (7), the enlargement can be more effectively handled. That is, the above (7) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(8) The metal cooling structure plate according to (7), characterized in that,

with respect to the length, the first dimensional condition is that the length of the plate-like member is 500mm or more and 2600mm or less,

regarding the width, the first dimensional condition is that the width of the plate-like member is 50mm or more and 500mm or less.

According to the above (8), the enlargement can be more effectively handled. That is, the above (8) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(9) The metallic cooling structure panel as recited in any one of (2) to (8), wherein,

the metal cooling structure plate has a thickness of 5mm to 60 mm.

According to the above (9), the enlargement can be more effectively handled. That is, the above (9) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(10) The metallic cooling structure panel as recited in any one of (2) to (9), wherein,

the grooves have a depth of 2mm or more and 25mm or less,

the depth is a distance from a bottom of the groove in the vertical direction to a surface of the metal-made cooling structure plate located in a direction of the groove opening.

According to the above (10), the cooling efficiency can be further improved. That is, the above (10) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(11) The metal cooling structure plate according to (1), characterized in that,

the metal cooling structure plate has three sides each including one connecting side and two projecting sides projecting from one side of the one connecting side so as to form a rectangular U-shape in plan view, one or both of a length and a width of an outer shape of the metal cooling structure plate is formed so as to satisfy a U-shape size condition, the length of the outer shape of the metal cooling structure plate is a length of the metal cooling structure plate in a projecting direction of the two projecting sides, the width of the outer shape of the metal cooling structure plate is a width in a direction orthogonal to the projecting direction,

the length is set in such a way that the length of the metal cooling structure plate is 290mm or more and 4000mm or less,

the U-shaped dimension is defined as a width of the metal cooling structure plate being 200mm or more and 3300mm or less.

According to the above (11), the enlargement can be more effectively handled. By combining two metal cooling structure plates, a larger rectangular annular metal cooling structure plate can be formed. Accordingly, the above (11) can provide a metal cooling structure plate which can have high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, regarding the length of the metal cooling structure plate, the lengths of the two overhanging edges need not necessarily be the same, but may also be different from each other.

(12) The metal cooling structure plate according to (11), characterized in that,

the length is set so that the length of the metal cooling structure plate is 590mm or more and 3700mm or less,

the U-shaped dimension is defined as the width of the metal cooling structure plate being 500mm or more and 3000mm or less.

According to the above (12), the enlargement can be more effectively handled. That is, the above (12) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(13) The metal cooling structure plate according to (11) or (12), characterized in that,

the metal plate-like body further has a groove formed to open toward the second main surface,

the grooves formed so as to open toward the first main surface and the grooves formed so as to open toward the second main surface are formed so as to pass through all of the plurality of plate-like members,

the grooves of one or both of the grooves have a length portion extending in a direction of the length of the outer shape and a width portion extending in the width of the outer shape, and at least a longer one of the length portion and the width portion is formed to pass through the engagement portion.

According to the above (13), the cooling efficiency can be further improved. The above (13) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(14) The metal cooling structure plate according to (13), characterized in that,

the groove formed so as to open toward the first main surface communicates with the groove formed so as to open toward the second main surface in the vertical direction at a position other than the joint portion.

According to the above (14), the cooling efficiency can be further improved. The above (14) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(15) The metal cooling structure plate according to any one of (1), (11) to (14), characterized in that,

the metal cooling structure plate has three sides constituted by one connecting side and two overhanging sides protruding from one side surface of the one connecting side in a manner of forming a rectangular U-shape in a plan view, one, two or three sides are formed to satisfy a U-shape side dimension condition, the width of the side is a direction orthogonal to a direction in which the side extends,

The U-shaped edge has a width of 50mm to 900 mm.

According to the above (15), the enlargement can be more effectively handled. That is, the above (15) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(16) The metal cooling structure plate according to (15), wherein,

the U-shaped edge has a width of 70mm to 800 mm.

According to the above (16), the enlargement can be more effectively handled. That is, the above (16) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(17) The metallic cooling structure panel as recited in any one of (11) to (16), wherein,

all or a part of the plurality of plate-like members have a rectangular shape in plan view, one or both of the length and the width of the plate-like members are formed so as to satisfy a second dimensional condition, the length of the plate-like members is longer than the width of the plate-like members,

with respect to the length, the second dimensional condition is that the length of the plate-like member is 200mm or more and 3300mm or less,

Regarding the width, the second dimensional condition is that the width of the plate-like member is 50mm or more and 900mm or less.

According to the above (17), the enlargement can be more effectively handled. That is, the above (17) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(18) The metal cooling structure plate according to (17), wherein,

with respect to the length, the second dimensional condition is that the length of the plate-like member is 500mm or more and 3000mm or less,

regarding the width, the second dimensional condition is that the width of the plate-like member is 70mm or more and 800mm or less.

According to the above (18), the enlargement can be more effectively handled. That is, the above (18) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(19) The metallic cooling structure panel as recited in any one of (11) to (18), wherein,

the metal cooling structure plate has a thickness of 5mm to 115 mm.

According to the above (19), the enlargement can be more effectively handled. That is, the above (19) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(20) The metallic cooling structure panel as recited in any one of (11) to (19), wherein,

the grooves formed so as to open toward the first main surface and the grooves formed so as to open toward the second main surface have a depth of 2mm or more and 25mm or less,

According to the above (20), the cooling efficiency can be further improved. The above (20) can provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(21) The metallic cooling structure panel as recited in any one of (1) to (20), wherein,

the metal plate-like body has a plurality of the joint portions, and the groove is formed to pass through a part or all of one or more than two and less than all of the plurality of joint portions.

According to the above (21), the cooling efficiency can be further improved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(22) The metallic cooling structure panel as recited in any one of (1) to (21), wherein,

the plurality of plate-like members are all composed of the same or substantially the same metallic material.

According to the above (22), deformation can be more effectively suppressed or prevented. The sealability and flatness can be further improved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, "substantially the same metallic material" means that predetermined composition tolerances and composition errors caused by manufacturing are allowed.

(23) The metallic cooling structure panel as recited in any one of (1) to (22), wherein,

the metal plate-like body has a plurality of the abutting portions, and depths of the grooves included in the joint portions are the same or substantially the same among the abutting portions.

According to the above (23), deformation can be more effectively suppressed or prevented. The sealability and flatness can be further improved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, "the depths of the grooves are substantially the same" means that tolerance in design and errors in manufacturing are allowed.

(24) The metallic cooling structure panel as recited in any one of (1) to (23), wherein,

the number of the plurality of plate-like members is two, three, four, five, six, seven, eight, nine or ten, and the groove is formed through all of the plurality of plate-like members.

According to the above (24), the cooling capacity can be improved while achieving an increase in size. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(25) The metallic cooling structure panel as recited in any one of (1) to (24), wherein,

one or both of the first main surface and the second main surface has a flat or substantially flat surface so that no step or substantially step is generated between the abutting portion, the joining portion, and portions other than them.

According to the above (25), higher flatness can be achieved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. As used herein, "without substantial steps" and "substantially flat" means that tolerances in design and errors in manufacture are permitted.

(26) The metallic cooling structure panel as recited in any one of (1) to (25), wherein,

the joining portion is formed to have the same or substantially the same thickness as that of a portion adjacent to the joining portion in the metal plate-like body, whereby the first main surface and the second main surface are respectively flat or substantially flat and parallel or substantially parallel to each other.

According to the above (26), higher flatness can be achieved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. As used herein, "substantially the same thickness", "substantially flat" and "substantially parallel" mean allowing for design tolerances and manufacturing tolerances.

(27) The metallic cooling structure panel as recited in any one of (1) to (26), wherein,

the metal plate-like body has a plurality of the joint portions having the same or substantially the same thickness as each other, whereby the first main surface and the second main surface are respectively flat or substantially flat and parallel or substantially parallel to each other.

According to the above (27), higher flatness can be achieved. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. As used herein, "substantially the same thickness", "substantially flat" and "substantially parallel" mean allowing for design tolerances and manufacturing tolerances.

(28) The metallic cooling structure panel as recited in any one of (1) to (27), wherein,

the metal plate-like body has a plurality of the joint portions, and a part or all of the plurality of joint portions extend in directions parallel or substantially parallel to each other in a plan view, and the part means two or more and less than all.

According to the above (28), deformation can be suppressed or prevented more effectively. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. As used herein, "substantially parallel" means allowing for design tolerances and manufacturing tolerances.

(29) The metallic cooling structure panel as recited in any one of (1) to (28), wherein,

The metal plate-like body has a lid groove formed so as to surround the periphery of the groove, the groove is formed on a bottom surface of the lid groove, the lid groove passes through the abutting portion,

the metal cover is configured to be fitted into the cover groove so as to cover the groove of the metal plate, thereby overlapping the metal plate in a vertical direction,

the metal plate-like body and the metal cover body are joined to each other by friction stir joining in a state where the metal cover body is fitted into the cover groove such that an internal space corresponding to at least a part of a space in the groove is provided between the metal plate-like body and the metal cover body.

According to the above (29), deformation can be more effectively suppressed or prevented. It is possible to provide a metal cooling structure plate which has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(30) The metallic cooling structure panel as recited in any one of (1) to (29), wherein,

the metal cover is composed of a plurality of plate-like members made of a metal material that is softened by friction heat of friction stirring and is capable of plastic flow,

The plurality of plate-like members are arranged so that end surfaces of the adjacent plate-like members are brought into contact with each other, thereby forming a flat plate as a whole,

the plurality of plate-like members are friction stir bonded along the abutting portion so as to be bonded to each other in a manner including the abutting portion.

The metal cooling structure plate of (30) can more effectively cope with an increase in size. The metal cooling structure plate of the above (30) has high sealing property and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(31) The cooling structure plate made of metal according to (30), characterized in that,

(31-1) the metal cover having a plurality of the abutting portions, the groove overlapping with a part or all of the plurality of abutting portions of the metal cover, the part being one or more than two and less than all,

(31-2) in the metal cover, the plurality of plate-like members are all composed of the same or substantially the same metal material,

(31-3) in the metal cover, the number of the plurality of plate-like members is two, three, four, five, six, seven, eight, nine or ten, the grooves at least partially overlapping all of the plurality of plate-like members when viewed in the vertical direction,

(31-4) the joining portion in the metal cover is formed to have the same or substantially the same thickness as that of a portion adjacent to the joining portion in the metal cover,

(31-5) the metal cover having a plurality of the engaging portions, the thicknesses of the plurality of engaging portions in the metal cover being the same or substantially the same as each other.

The metal cooling structure plate of the above (31-1) can further improve the cooling efficiency. The metal-made cooling structure plate of the above (31-1) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

The metal cooling structure plate of the above (31-2) can more effectively suppress or prevent deformation. The sealability and flatness can be further improved. The metal-made cooling structure plate of the above (31-2) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, "substantially the same metallic material" means that predetermined composition tolerances and composition errors caused by manufacturing are allowed.

The metal cooling structure plate of the above (31-3) can be made large in size and can improve the cooling capacity. The metal-made cooling structure plate of the above (31-3) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

The metal cooling structure plate of the above (31-4) can achieve higher flatness. The metal-made cooling structure plate of the above (31-4) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

The metal cooling structure plate of the above (31-5) can achieve higher flatness. The metal-made cooling structure plate of the above (31-5) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, "the thicknesses of the joint portions are substantially the same" means that tolerance in design and errors in manufacturing are allowed.

(32) The metallic cooling structure panel as recited in any one of (1) to (31), wherein,

(32-1) the metal cover having an inner surface that abuts the metal plate-like body so as to cover the groove and an outer surface opposite to the inner surface, only the outer surface, or both the inner surface and the outer surface having a flat or substantially flat surface,

(32-2) the metal cover having at least one through hole that communicates the inside of the inner space with the outside of the metal cooling structure plate so that refrigerant can flow between the inside of the inner space and the outside of the metal cooling structure plate, the at least one through hole being formed at a position other than a joint portion produced by friction stirring joining as viewed in the vertical direction,

(32-3) the number of plate-like members constituting the metal plate-like body is equal to or greater than the number of plate-like members constituting the metal cover.

The metal cooling structure plate of the above (32-1) can achieve higher flatness. The metal cooling structure plate of the above (32-1) has high sealing property and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level. In addition, "substantially flat" means that tolerances in design and errors in manufacturing are allowed.

The metal cooling structure plate of the above (32-2) can achieve high sealability. The metal-made cooling structure plate of the above (32-2) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

The metal cooling structure plate of (32-3) can more effectively cope with an increase in size. The metal-made cooling structure plate of the above (32-3) has high sealability and cooling capacity and can satisfy the large-scale, high flatness and long life at a higher level.

(33) A metal cooling structure plate group is characterized in that,

the metal cooling structure plate group comprises two metal cooling structure plates and one or more fixing plates,

The two metal-made cooling structure plates are each the metal-made cooling structure plate according to any one of (11) to (14), and have a rectangular U-shape in plan view,

the two metal cooling structure plates are configured to be capable of being arranged to form a rectangular ring shape as a whole,

the one or more fixing plates are configured to be fixed to the two metal cooling structure plates while being overlapped with both of the two metal cooling structure plates.

The metal cooling structure plate group of the above (33) can cope with an increase in size more effectively. The metal cooling structure plate group of the above (33) has high sealability and cooling capacity and can satisfy high flatness and long life at a higher level and realize enlargement.

Drawings

Fig. 1 (a) is a perspective view schematically showing a metal cooling structure plate according to the first embodiment, fig. 1 (b) is an X-ray sectional view of fig. 1 (a), and fig. 1 (c) is a plan view of fig. 1 (a).

Fig. 2 (a) is a plan view schematically showing a metal cooling structure plate according to a second embodiment, and fig. 2 (b) is a sectional view taken along line A-A in fig. 2 (a).

Fig. 3 (a) is a plan view schematically showing a metal cooling structure plate according to a third embodiment, fig. 3 (b) is a Z-Z sectional view, and fig. 3 (c) is a Y-Y sectional view.

Fig. 4 (a) is a plan view schematically showing a metal cooling structure plate group of the fourth embodiment, and fig. 4 (b) is a plan view and a side view schematically showing a fixing plate.

Fig. 5 (a) is a sectional view schematically showing a metal cooling structure plate of the fifth embodiment, and fig. 5 (b) is a sectional view schematically showing a metal cooling structure plate of the sixth embodiment.

Fig. 6 (a) to 6 (c) are perspective views schematically showing an example of a method for manufacturing a metal cooling structure plate.

Description of the reference numerals

10. Metal cooling structure plate

11. An opening

12. Edge portion

12P connecting edge

Side surface of 12PS connecting side 12P

12Q overhanging edge portion

14. Cover joint

20. Metal plate-like body

21. First main surface

22. Second main surface

23. Groove(s)

23B bottom of groove 23

23L length part

23W width part

23P passing portion

23R meter groove

23S inner groove

23Z communicating portion

24. Interior space

25. Abutment portion

26. Joint portion

27. Cover groove

28. Through hole

28A first through hole

28B second through hole

29. Plate-like member

30. Metal cover

39. Plate-like member

40. Metal cooling structure plate group

41. Fastening hole

50. Fixing plate

51. Fastening hole

T ₁₀ Thickness of metal cooling structure plate 10

V vertical direction

L ₁₀ Length of metal cooling structure plate 10

W ₁₀ Width of metal cooling structure plate 10

W ₁₂ Width of the edge 12

Direction of opening of OD groove 23

Detailed Description

< first embodiment >

Fig. 1 (a) is a perspective view schematically showing a metal cooling structure plate according to a first embodiment. Fig. 1 (b) is an X-ray sectional view thereof. Fig. 1 (c) is a top view of fig. 1 (a).

The metal cooling structure plate 10 includes a metal plate-like body 20 and a metal cover body 30. The metal plate-like body 20 and the metal cover 30 are each made of a metal material such as copper, aluminum, or an alloy containing at least one of them, which is softened by friction heat of friction stirring and is capable of plastic flow. The plurality of plate-like members 29 constituting the metal plate-like body 20 are all made of, for example, the same or substantially the same metal material, but may be made of different metal materials.

As shown in fig. 1 (c), the metal cooling structure plate 10 has a rectangular outer shape in a plan view. The metal cooling structure plate 10 has an opening 11 at a central portion in a plan view. However, the metal cooling structure plate 10 may have no opening at the central portion. The metal cooling structure plate 10 is formed to have a length L of the outer shape of the metal cooling structure plate 10 ₁₀ And width W ₁₀ One or both of them satisfies the rectangular size condition. Regarding length L ₁₀ The rectangular size condition is the length L of the metal cooling structure plate 10 ₁₀ 400mm to 3100 mm. Regarding the width W ₁₀ The rectangular size condition is the width W of the metal cooling structure plate 10 ₁₀ 200mm to 2900 mm. In addition, length L ₁₀ Specific width W ₁₀ Length or width W ₁₀ The same applies. Length L ₁₀ It may be 700mm to 2800 mm. Width W ₁₀ It may be 500mm to 2600 mm.

The metal cooling structure plate 10 has a rectangular ring shape formed by four side portions 12 so as to have an opening 11 on the inner side in a plan view. At the position ofIn the present embodiment, four sides 12 are formed so as to satisfy the rectangular side size condition. The rectangular side dimension condition is the width W of the side 12 ₁₂ Is 30mm to 600 mm. Width W ₁₂ Is the length in the direction orthogonal to the direction in which the side 12 extends. In addition, the number of the sides 12 satisfying the rectangular side size condition may be any one of one, two, three, or four. Width W of edge 12 ₁₂ It may be 50mm to 500 mm.

< Metal plate body >)

The metal plate-like body 20 is a flat plate having a rectangular ring shape in plan view. The metal plate-like body 20 has a first main surface 21 and a second main surface 22. The metal plate-like body 20 is composed of a plurality of plate-like members 29. Specifically, in the present embodiment, the metal plate-like body 20 is configured to include eight plate-like members 29.

In the present embodiment, all of the plurality of plate-like members 29 have a rectangular shape in plan view. However, only a part of the plurality of plate-like members 29 may have a rectangular shape. The rectangular plate-like member 29 is formed so as to satisfy a first dimensional condition with respect to one or both of the length L29 and the width W29 thereof. Regarding the length L29, the first dimensional condition is that the length L29 of the plate-like member 29 is 200mm or more and 2900mm or less. Regarding the width W29, the first dimensional condition is that the width W29 of the plate-like member 29 exceeds 30mm and 600mm or less. The length L29 of the plate-like member 29 is longer than the width W29 of the plate-like member 29 or is the same as the width W29. The length L29 of the plate-like member 29 may be 500mm or more and 2600mm or less. The width W29 of the plate-like member 29 may be 50mm or more and 500mm or less. The number of the plate-like members 29 is not particularly limited. As the number of the plate-like members 29, for example, two, three, four, five, six, seven, eight, nine, or ten are cited.

The plurality of plate-like members 29 have the same or substantially the same thickness T as each other ₁₀ . The adjacent plate-like members 29 are brought into contact with each other at their end surfaces. Thus, the abutting portion 25 is formed between the adjacent plate-like members 29. Thickness T of metal cooling structure plate 10 ₁₀ Is 5mm to 60 mm. The groove 23 has a diameter of 2mDepth D of m or more and 25mm or less ₂₃ 。

The abutting portion 25 is a portion constituted by surfaces of the adjacent two plate-like members 29 abutting each other. As a result, the plurality of plate-like members 29 are arranged as a whole to form a flat plate-like shape constituting the first main surface 21 and the second main surface 22. The plurality of plate-like members 29 are friction stir welded along the abutting portion 25 from one or both of the first main surface 21 and the second main surface 22 so as to include the abutting portion 25 of the adjacent plate-like members 29. Adjacent plate-like members 29 are joined to each other. Thereby, the engaging portion 26 is formed between the adjacent plate-like members 29. The joint portion 26 is a portion to be friction stir welded and may be visually specified or may not be visually specified. The joint portion 26 can be determined, for example, from differences in properties of the joint portion 26 and adjacent portions.

The metal plate-like body 20 is composed of a plurality of plate-like members 29, and thus has a plurality of abutting portions 25. Friction stir welding is performed at each of the plurality of abutting portions 25. Thereby, the engaging portions 26 are formed at the plurality of abutting portions 25, respectively. Depth D of groove 23 included in each engagement portion 26 ₂₃ Are identical or substantially identical to each other. As shown in fig. 1 (a), the metal cooling structure plate 10 has eight joint portions 26. Of the eight engaging portions 26, six engaging portions 26 extend in the left-right direction in the drawing in plan view and are parallel to each other. The two engaging portions 26 extend in the up-down direction in the drawing and are parallel to each other.

In the present embodiment, the first main plane 21 has a flat or substantially flat surface. No step or substantial step is generated between the abutment portion 25, the engagement portion 26, and the other portions.

< groove >

The metal plate-like body 20 has at least a groove 23 formed so as to open toward the first main surface 21. The groove 23 has a rectangular C-shape in plan view (an upwardly open rectangular C-shape in fig. 1 (C)). As shown in fig. 1 (b), the metal plate-like body 20 has a cover groove 27 formed so as to surround the periphery of the groove 23. A groove 23 is formed at the bottom surface of the cover groove 27. Depth D of groove 23 ₂₃ Is the distance from the bottom 23B of the groove 23 in the vertical direction V to the surface of the metal cooling structure plate 10 in the direction OD in which the groove 23 opens. In the present embodiment, this surface is the first main surface 21. However, the grooves may be formed at both the first main surface 21 and the second main surface 22.

The groove 23 is formed through the abutment portion 25. The grooves 23 are formed to pass through all plate-like members 29 constituting the metal plate-like body 20. The abutting portion 25 exposed to the inside of the groove 23 is sealed by the engaging portion 26 so that the inside of the groove 23 and the outside of the metal plate-like body 20 do not communicate via the abutting portion 25. The metal plate-like body 20 and the metal cover 30 are joined to each other by friction stir welding in a state of overlapping in the vertical direction V so that the inner space 24 is provided between the metal plate-like body 20 and the metal cover 30. The inner space 24 corresponds to at least a part of the inner space of the groove 23.

The groove 23 has a length L along the profile ₁₀ Length portion 23L extending in the direction of (a) and width W along the outline ₁₀ An extended width portion 23W. The groove 23 is formed such that only the length portion 23L of the length portion 23L and the width portion 23W passes through the engaging portion 26. In the figure, a portion of the groove 23 passing through the engaging portion 26 is indicated by a portion 23P. The groove 23 has a plurality of passing portions 23P. All of the plurality of passing portions 23P are located at the length portion 23L. In addition, both the length portion 23L and the width portion 23W may also pass through the joint portion 26. In this case, the pass-through portions 23P are located at the length portions 23L and the width portions 23W, respectively.

The groove 23 passes through all of the abutment portions 25 and the cover groove 27 is disposed around the groove 23. Thus, the cover groove 27 also passes through the abutment portion 25. An engagement portion 26 is formed at the abutment portion 25. Thus, the groove 23 and the cover groove 27 pass through all of the engaging portions 26. The groove 23 and the cover groove 27 may also be formed through a part of the engaging portion 26.

< Metal cover >

The metal cover 30 is configured to overlap the metal plate 20 in the vertical direction V so as to cover the groove 23 of the metal plate 20. More specifically, the metal cover 30 is fitted into the cover groove 27 so as to cover the groove 23, thereby overlapping the metal plate-like body 20 in the vertical direction V.

The metal cover 30 is composed of a plurality of plate-like members 39, and the plurality of plate-like members 39 are composed of a metal material that is softened by friction heat of friction stirring and is capable of plastic flow. The plurality of plate-like members 39 are arranged such that end surfaces of adjacent plate-like members 39 are brought into contact with each other, thereby forming a flat plate as a whole. The plurality of plate-like members 39 are joined to each other by friction stir joining along the abutting portion in a manner including the abutting portion.

The metal cover 30 has an inner surface that contacts the metal plate-like body 20 so as to cover the groove 23, and an outer surface opposite to the inner surface. In this embodiment, both the inner surface and the outer surface have flat or substantially flat surfaces. However, it is also possible that only the inner surface or only the outer surface has a flat or substantially flat surface. The metal cover 30 has a through hole 28. The through hole 28 is configured to communicate the inside of the internal space 24 with the outside of the metal cooling structure plate 10. The through hole 28 communicates the inside of the internal space 24 with the outside of the metal cooling structure plate 10. Thus, the through-holes 28 allow the refrigerant to flow between the inside of the internal space 24 and the outside of the metal cooling structure plate 10. In the present embodiment, two through holes 28 (28A, 28B) are formed. The first through hole 28A is formed at one end of the rectangular C-shaped groove 23. The second through hole 28B is formed at the other end. The refrigerant is supplied to the interior of the internal space 24 through the first through hole 28A, flows in the tank 23, and is discharged from the second through hole 28B. However, the number of the through holes 28 is not particularly limited. In the present embodiment, the number of plate members 29 constituting the metal plate-like body 20 is 8, which is the same as the number of plate members 39 constituting the metal cover 30. Preferably, the number of plate members 29 constituting the metal plate-like body 20 is equal to or greater than the number of plate members 39 constituting the metal cover 30.

< second embodiment >

Fig. 2 (a) is a plan view schematically showing a metal cooling structure plate according to a second embodiment, and fig. 2 (b) is a sectional view taken along line A-A in fig. 2 (a). In the second embodiment, the same or corresponding structures as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description of the structures thereof is omitted.

In the metal cooling structure plate 10 of the second embodiment, the metal plate-like body 20 is constituted by four plate-like members 29. The metal cover 30 is composed of four plate-like members 39. The groove 23 has a rectangular ring shape. Two through holes 28 (28A, 28B) are formed at diagonal positions of the rectangular annular groove 23. The refrigerant is supplied to the interior of the internal space 24 through the first through hole 28A, flows in two parts in the tank 23, and is discharged from the second through hole 28B.

< third embodiment >

Fig. 3 (a) is a plan view schematically showing a metal cooling structure plate according to a third embodiment. Fig. 3 (b) is a Z-Z sectional view. Fig. 3 (c) is a Y-Y sectional view. In the third embodiment, the same or corresponding structures as those in the first embodiment are denoted by the same reference numerals as those in the first embodiment, and the description of the structures thereof is omitted.

Fig. 3 (a) shows two metal cooling structure plates 10 (10L, 10R). Two metal cooling structure plates 10 are paired. In the drawing, two metal cooling structure plates 10 are arranged in bilateral symmetry with respect to a center line W-W between the two metal cooling structure plates 10. As shown in fig. 3 (a), the two metal cooling structure plates 10 each have a rectangular U-shape in plan view. Specifically, in the drawing, the metal cooling structure plate 10L located on the left side has a rectangular U-shape opening toward the right side. The metal cooling structure plate 10R located on the right side has a rectangular U-shape opening toward the left side. As shown in fig. 3 (a), the pair of metal cooling structure plates 10 are arranged with the opening portions facing each other, thereby substantially having one opening 11 between the pair of metal cooling structure plates 10. Hereinafter, the two metal cooling structure plates 10 will be collectively described as long as the metal cooling structure plates 10L and 10R are not distinguished from each other.

The metal cooling structure plate 10 has three side portions 12. The three side portions 12 are constituted by one connecting side portion 12P and two overhanging side portions 12Q. Three side portions 12 are respectively provided withThere is a plate-like member 29. The two overhanging edges 12Q are each configured to protrude from one side surface 12PS of the connecting edge 12P. In the present embodiment, the length L of the outer shape of the metal cooling structure plate 10 ₁₀ And width W ₁₀ One or both of them are formed so as to satisfy the U-word size condition. Regarding length L ₁₀ The U-shape is provided by the length L of the metal cooling structure plate 10 ₁₀ Is 290mm to 4000 mm. Regarding the width, the U-shaped dimension condition is the width W of the metal cooling structure plate 10 ₁₀ Is 200mm to 3300 mm. In addition, the length L of the outer shape of the metal cooling structure plate 10 ₁₀ Is the length of the metal cooling structure plate 10 in the protruding direction PD of the two overhanging edge portions 12Q. Width W of outer shape of metal cooling structure plate 10 ₁₀ Is the width in the direction orthogonal to the protruding direction PD. In the drawing, the protruding direction PD of the metal cooling structure plate 10L is the right direction. In the drawing, the protruding direction PD of the metal cooling structure plate 10R is the left direction. In addition, the U-shaped size condition may be the length L of the metal cooling structure plate 10 ₁₀ Is 590mm to 3700 mm. The U-shaped size condition can also be the width W of the metal cooling structure plate 10 ₁₀ 500mm to 3000 mm.

The metal cooling structure plate 10 has grooves 23. The grooves 23 include a front groove 23R formed to open toward the first main surface (the surface on the near front side in fig. 3 (a)) and a rear groove 23S formed to open toward the second main surface. However, the groove 23 may be constituted by only the surface groove 23R. Both the front groove 23R and the rear groove 23S are formed to pass through all of the plurality of plate-like members 29. However, only the surface groove 23R may pass through all of the plurality of plate-like members 29.

Both the front groove 23R and the rear groove 23S have a length portion 23L and a width portion 23W. The length portion 23L extends in the direction of the length of the outline. The length direction of the outline is parallel to the protruding direction PD. The width direction of the outline is perpendicular to the protruding direction PD. In the present embodiment, of the length portion 23L and the width portion 23W, only the length portion 23L is formed to pass through the engaging portion 26. However, both the length portion 23L and the width portion 23W may be formed to pass through the engaging portion 26.

The joint portion 26 is formed to have a thickness T of a portion adjacent to the joint portion 26 in the metal plate-like body 20 ₁₀ The same or substantially the same thickness. Further, the thicknesses of the plurality of engaging portions 26 are the same or substantially the same as each other. As a result, the first and second

main surfaces

21 and 22 are respectively flat or substantially flat, and parallel or substantially parallel to each other.

The surface groove 23R has a communication portion 23Z. The communication portion 23Z is a portion that communicates with the inner groove 23S in the vertical direction V at a position other than the engaging portion 26.

In the present embodiment, three sides 12 are formed so as to satisfy the U-shaped side dimension condition. The U-shaped edge dimension condition is the width W of the edge 12 ₁₂ Is 50mm to 900 mm. The number of the sides 12 satisfying the U-shaped side size condition may be any one of 1, 2, or 3. In addition, the width W of the edge 12 ₁₂ Is the direction orthogonal to the direction in which the side 12 extends. The U-shaped edge size condition may be the width W of the edge 12 ₁₂ 70mm to 800 mm.

In the present embodiment, the metal plate-like body 20 is constituted by a plurality of plate-like members 29 so that the metal cooling structure plate 10 has a rectangular U-shape. All of the plurality of plate-like members 29 have a rectangular shape in plan view. However, a part of the plurality of plate-like members 29 may have a rectangular shape. Both the length L29 and the width W29 of the rectangular plate-like member 29 are formed so as to satisfy the second dimensional condition. However, only one of the length L29 and the width W29 may satisfy the second size condition. The second dimensional condition is that the length L29 of the plate-like member 29 is 200mm or more and 3300mm or less. The second dimensional condition is that the width of the plate-like member is 50mm or more and 900mm or less. The length L29 of the plate-like member 29 is longer than the width W29 of the plate-like member 29 or is the same as the width W29. The second dimension may be such that the length L29 of the plate-like member 29 is 500mm or more and 3000mm or less. The second dimension may be such that the width W29 of the plate-like member 29 is 70mm or more and 800mm or less.

In the present embodiment, the metal cooling structure plate 10 has a thickness of 5mm or more and 11Thickness T of 5mm or less ₁₀ 。

The metal plate-like body 20 has a front groove 23R and a rear groove 23S. In the present embodiment, both the front groove 23R and the rear groove 23S have a depth D of 2mm to 25mm ₂₃ . In addition, depth D ₂₃ Is the distance from the bottom 23B of the groove 23 in the vertical direction V to the surface of the metal plate-like body 20 located in the direction in which the groove 23 opens. Specifically, depth D of the gauge groove 23R ₂₃ Is the distance from the bottom 23B to the first main surface 21 in the vertical direction V. Depth D of inner groove 23S ₂₃ Is the distance in the vertical direction V from the bottom 23B to the second main surface 22.

< fourth embodiment >

Fig. 4 (a) is a plan view schematically showing a metal cooling structure plate group of the fourth embodiment. Fig. 4 (b) is a top view and a side view schematically showing the fixing plate. In the fourth embodiment, the same or corresponding structures as those in the third embodiment are denoted by the same reference numerals as those in the third embodiment, and the description of the structures thereof is omitted.

The metal cooling structure plate group 40 includes two metal cooling structure plates 10 (10L, 10R) and two fixing plates 50. The number of the fixing plates 50 is not particularly limited, and may be one or a plurality. The two metal cooling structure plates 10 each have a rectangular U-shape in plan view. As each metal cooling structure plate 10, for example, a plate according to the third embodiment can be used. As shown in (b) of fig. 4, the fixing plate 50 has a plurality of (e.g., two) fastening holes 51. The fixing plate 50 is made of stainless steel, for example. The metal cooling structure plate group 40 is mounted on a target device, for example, in the following steps. First, a metal cooling structure plate 10 (10L) is mounted to the apparatus. Next, another metal cooling structure plate 10 (10R) is mounted to the apparatus. At this time, the two metal cooling structure plates 10 as a whole are mounted to the apparatus in a manner forming a figure of a mouth. The installation of the device is performed by installing a fastening tool (not shown) such as a bolt in the fastening hole 41 formed in the metal cooling structure plate 10. Next, the fixing plate 50 is placed on the metal cooling structure plate 10 (10L, 10R). The fixing plate 50 is placed on the metal cooling structure plates 10 (10L, 10R) such that a part (for example, one) of the plurality of fastening holes 51 overlaps one metal cooling structure plate 10 (10L) and the remaining (for example, one) fastening hole overlaps the other metal cooling structure plate 10 (10R). In this state, a fastening tool (not shown) such as a bolt is provided in the fastening hole 51. Through the above steps, the metal cooling structure plate group 40 is mounted to the apparatus.

< fifth embodiment >

Fig. 5 (a) is a sectional view schematically showing a metal cooling structure plate of the fifth embodiment. In the fifth embodiment, the same or corresponding structures as those in the third embodiment are denoted by the same reference numerals as in the third embodiment, and the description of the structures thereof is omitted.

In the metal cooling structure plate 10 of the fifth embodiment, the grooves 23 are formed at both the first main surface 21 and the second main surface 22. A surface groove 23R is formed at the first main surface 21. A back groove 23S is formed at the second main surface 22. The watch groove 23R has a plurality of parallel portions. The plurality of parallel portions are formed in parallel with each other. The inner groove 23S is also the same as the outer groove 23R. Further, the front groove 23R and the rear groove 23S are formed to have portions overlapping each other in the thickness direction of the metal cooling structure plate 10. That is, in (a) in fig. 5, the plurality of parallel portions in the front groove 23R and the plurality of parallel portions in the rear groove 23S overlap each other in the thickness direction of the metal cooling structure plate 10. The front groove 23R and the rear groove 23S communicate with each other via a communication portion 23Z. In addition, the communication portion 23Z is provided at a portion other than the joint portion 26. Metal covers 30 are provided at a plurality of parallel portions in the watch groove 23R, respectively. Each metal cover 30 is joined to the metal plate-like body 20 by friction stir welding. Accordingly, the lid joint portions 14 are formed on both sides of each metal lid body 30.

< sixth embodiment >

Fig. 5 (b) is a cross-sectional view schematically showing a metal cooling structure plate according to a sixth embodiment. In the sixth embodiment, the same or corresponding structures as those in the fifth embodiment are denoted by the same reference numerals as in the fifth embodiment, and the description of the structures thereof is omitted.

In the metal cooling structure plate 10 of the sixth embodiment, one metal cover 30 is provided at a plurality of parallel portions in the gauge groove 23R so as to entirely cover the plurality of parallel portions. The inner groove 23S is also the same as the outer groove 23R. The metal cover 30 is bonded to the metal plate-like body 20 by friction stir bonding so that the boundary between the metal cover 30 and the metal plate-like body 20 is bonded to each other at a portion exposed to the first main surface 21 or the second main surface 22. Further, between the plurality of parallel portions adjacent to each other, the metal cover body 30 and the metal plate-like body 20 are joined to each other by friction stir joining in the thickness direction of the metal cooling structure plate 10. Thus, there is a cover joint 14 between the parallel portions adjacent to each other. The cover engagement portion 14 is common to a plurality of parallel portions adjacent to one another.

< manufacturing method >

Fig. 6 (a) to 6 (c) are perspective views schematically showing an example of a method for manufacturing a metal cooling structure plate. First, a plurality of plate-like members 29 are prepared. Each plate-like member 29 has a rectangular shape in plan view. Next, the plurality of plate-like members 29 are arranged in a rectangular ring shape as a whole in a plan view. The plurality of plate-like members 29 are arranged with their side surfaces abutting each other. The boundary of the plurality of plate-like members 29 adjacent to each other becomes the abutting portion 25. Next, the plurality of plate-like members 29 are fixed by a jig (not shown) so that the plurality of plate-like members 29 are fixed in this state. Then, the friction stir welding tool 5 is inserted while being rotated from one side (upper surface) of the plate member 29 so that the abutting portion 25 is friction stir welded. The tool 5 is moved along the abutting portion 25 (refer to (a) in fig. 6). In addition, the tool 5 has a cylindrical shape. The tool 5 has a front end portion 5a at its front end. The tip portion 5a has a truncated cone shape with a diameter smaller than that of the tool 5. The front end portion 5a of the tool 5 is inserted into the plate-like member 29. As described above, by performing friction stir welding on each abutting portion 25, a large plate-like member having a rectangular annular shape in plan view is obtained as a whole. The friction stir welding may be performed from only one side of the plurality of plate-like members 29, or from both sides of the plurality of plate-like members 29. In the case of friction stir welding from both sides, after friction stir welding is performed from one surface of the plurality of plate-like members 29, the plurality of plate-like members 29 are turned over, and then friction stir welding is performed from the other surface of the plurality of plate-like members 29.

Next, a lid groove 27 is formed in a large plate-like member having a rectangular annular shape in plan view. In addition, a groove 23 is formed at the bottom of the cover groove 27. The cover groove 27 and the groove 23 are formed by, for example, conventionally known cutting means. As a result, the metal plate-like body 20 is formed. Next, the metal lid 30 is fitted into the lid groove 27 (see fig. 6 (b)).

Next, the friction stir welding tool 5 is inserted into the boundary portion between the metal plate-like body 20 and the metal lid body 30 while rotating from the first main surface 21 (upper surface) of the metal plate-like body 20. Next, the tool 5 is rotated and moved along the boundary portion between the metal plate-like body 20 and the metal cover 30. Thereby, the metal cooling structure plate 10 is manufactured. The method for manufacturing the metal cooling structure plate 10 may have steps other than the above steps. Examples of such a step include a through-hole forming step, a temporary bonding step, and a planarization step. The through-hole forming step is performed to form the through-hole 28 for supplying and/or discharging the refrigerant. The temporary joining step is a step of friction stir joining in a broken line before friction stir joining in a solid line. The flattening step is a step for removing burrs generated by friction stir welding.

A metal cooling structure plate may be preferably used as a backing plate, for example. In this case, as the cooling target, for example, a sputtering target is cited. A metal cooling structure plate having a rectangular ring shape, a plurality of metal cooling structure plates formed in a rectangular ring shape (in a shape of a Chinese character 'kou') as a whole, and a metal cooling structure plate group including such a plurality of metal cooling structure plates can be preferably used as a mask water cooling plate, for example. The mask water-cooling plate is used for hiding the parts which do not need to be formed when forming a film on the glass substrate and cooling the mask. The numerical values, materials, structures, shapes, and the like listed in the above embodiments and examples are merely examples, and numerical values, materials, structures, shapes, and the like different from those may be used as needed.

Claims

1. A metal cooling structure plate is characterized in that,

the metal plate-like body is composed of a plurality of plate-like members,

the groove is formed to pass through the abutting portion, and the abutting portion exposed in the groove is sealed by the engaging portion so that the inside of the groove and the outside of the metal plate-like body are not communicated via the abutting portion,

2. A cooling structure plate made of metal according to claim 1, wherein,

the metal cooling structure plate has a rectangular outer shape in a plan view, and has an opening or does not have an opening in a central portion, one or both of a length and a width of the outer shape of the metal cooling structure plate are formed so as to satisfy a rectangular size condition, the length of the rectangular outer shape is longer than or equal to the width of the rectangular outer shape,

3. A metal cooling structure plate according to claim 2, wherein,

4. A metal cooling structure plate according to claim 2 or 3, wherein,

The grooves are formed through all of the plurality of plate-like members,

the groove has a length portion extending in a direction of the length of the outline and a width portion extending in the width of the outline, and both or only the length portion and the width portion are formed to pass through the engaging portion.

5. A metal cooling structure plate according to any one of claim 1 to 3, wherein,

the metal cooling structure plate has a rectangular ring shape having four sides in which one, two, three, or four sides are formed so as to satisfy a rectangular side dimension condition that the width of the side is a length in a direction orthogonal to a direction in which the side extends, and the rectangular side dimension condition that the width of the side is 30mm or more and 600mm or less.

6. A cooling structure plate made of metal according to claim 5, wherein,

the rectangular side portion has a width of 50mm or more and 500mm or less.

7. A metal cooling structure plate according to claim 2, 3 or 6, wherein,

all or a part of the plurality of plate-like members have a rectangular shape in a plan view, one or both of the length and the width of the plate-like members are formed so as to satisfy a first dimensional condition, the length of the plate-like members is longer than or equal to the width of the plate-like members,

8. A metal cooling structure plate according to claim 7, wherein,

9. A metal cooling structure plate according to claim 2, 3, 6 or 8, wherein,

the metal cooling structure plate has a thickness of 5mm to 60 mm.

10. A metal cooling structure plate according to claim 2, 3, 6 or 8, wherein,

the grooves have a depth of 2mm or more and 25mm or less,

11. A cooling structure plate made of metal according to claim 1, wherein,

The metal cooling structure plate has three sides each including one connecting side and two projecting sides projecting from one side surface of the one connecting side so as to form a rectangular U-shape in plan view, one or both of a length and a width of an outer shape of the metal cooling structure plate is formed so as to satisfy a U-shape size condition, the length of the outer shape of the metal cooling structure plate is a length of the metal cooling structure plate in a projecting direction of the two projecting sides, the width of the outer shape of the metal cooling structure plate is a width in a direction orthogonal to the projecting direction,

12. The cooling structure plate made of metal according to claim 11, wherein,

13. A metal cooling structure plate according to claim 11 or 12, wherein,

the grooves of one or both of the grooves have a length portion extending in a direction of the length of the outer shape and a width portion extending in the width of the outer shape, and both or only the length portion of the length portion and the width portion are formed to pass through the engagement portion.

14. A metal cooling structure plate according to claim 13, wherein,

15. The metallic cooling structure plate as recited in claim 1, 11, 12 or 14, wherein,

the metal cooling structure plate has three sides formed by one connecting side and two overhanging sides protruding from one side surface of the connecting side in a mode of forming a rectangular U shape in a plan view, one, two or three sides are formed to meet the U-shaped side dimension condition, the width of the sides is a direction orthogonal to the extending direction of the sides,

The U-shaped edge has a width of 50mm to 900 mm.

16. The cooling structure plate of claim 15, wherein,

the U-shaped edge has a width of 70mm to 800 mm.

17. The metallic cooling structure plate as recited in claim 11, 12, 14 or 16, wherein,

all or a part of the plurality of plate-like members have a rectangular shape in a plan view, one or both of the length and the width of the plate-like members are formed so as to satisfy a second dimensional condition, the length of the plate-like members is longer than or equal to the width of the plate-like members,

18. The cooling structure plate of claim 17, wherein,

19. A metal cooling structure plate according to claim 11, 12, 14, 16 or 18,

the metal cooling structure plate has a thickness of 5mm to 115 mm.

20. A metal cooling structure plate according to claim 11, 12, 14, 16 or 18,

21. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

22. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

23. A metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18, wherein the metal plate-like body has a plurality of the abutting portions in which depths of the grooves included in the joining portions are the same or substantially the same as each other.

24. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

25. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

26. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

27. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

28. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

the metal plate-like body has a plurality of the joint portions, and a part or all of the plurality of joint portions extend in a direction parallel or substantially parallel to each other in a plan view, and the part means two or more and less than all.

29. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

30. The metal cooling structure plate according to claim 1, 2, 3, 6, 8, 11, 12, 14, 16 or 18,

31. The cooling structure plate of claim 30, wherein,

the metal cover has a plurality of the abutting portions, and the groove overlaps with a part or all of the plurality of abutting portions of the metal cover, the part being one or more than two and less than all,

in the metal cover, the plurality of plate-like members are all composed of the same or substantially the same metal material,

in the metal cover, the number of the plurality of plate-like members is two, three, four, five, six, seven, eight, nine or ten, and the grooves at least partially coincide with all of the plurality of plate-like members when viewed in the vertical direction,

the engaging portion in the metal cover is formed to have the same or substantially the same thickness as that of a portion adjacent to the engaging portion in the metal cover,

the metal cover has a plurality of the engaging portions, and thicknesses of the plurality of engaging portions in the metal cover are the same or substantially the same as each other.

32. The metallic cooling structure plate as recited in claim 1, 2, 3, 6, 8, 11, 12, 14, 16, 18 or 31, wherein,

the metal cover body has an inner surface that contacts the metal plate-like body so as to cover the groove and an outer surface opposite to the inner surface, and either the inner surface alone, the outer surface alone, or both the inner surface and the outer surface have a flat or substantially flat surface,

the metal cover body has at least one through hole that communicates the inside of the inner space with the outside of the metal cooling structure plate so that refrigerant can flow between the inside of the inner space and the outside of the metal cooling structure plate, the at least one through hole being formed at a position other than a joint portion generated by friction stirring joining as viewed in the vertical direction,

the number of plate-like members constituting the metal plate-like body is equal to or greater than the number of plate-like members constituting the metal cover.

33. A metal cooling structure plate group is characterized in that,

The two metal-made cooling structure plates are each the metal-made cooling structure plate according to any one of claims 11 to 14, and have a rectangular U-shape in plan view,