CN218989463U - Heat insulation and preservation piece for crystal growth device and crystal growth device - Google Patents
Heat insulation and preservation piece for crystal growth device and crystal growth device Download PDFInfo
- Publication number
- CN218989463U CN218989463U CN202223449334.6U CN202223449334U CN218989463U CN 218989463 U CN218989463 U CN 218989463U CN 202223449334 U CN202223449334 U CN 202223449334U CN 218989463 U CN218989463 U CN 218989463U
- Authority
- CN
- China
- Prior art keywords
- crucible
- insulating member
- heat
- heat insulating
- crystal growing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model discloses a heat-insulating part for a crystal growing device and the crystal growing device, the crystal growing device comprises a crucible, the heat-insulating part for the crystal growing device is arranged outside the crucible and extends along the circumferential direction of the crucible, the heat-insulating part for the crystal growing device comprises: the heat insulation piece comprises a vertical section and an upper section, one end of the upper section is connected with the upper end of the vertical section, and the other end of the upper section extends inwards or outwards along the radial direction of the crucible; the heat preservation piece is arranged in a lamination mode with the vertical section in the radial direction of the crucible, the heat preservation piece and the upper section are located on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is located below the upper section. According to the heat insulation part for the crystal growth device, the heat insulation effect is good, and the heat radiation of the side heater to the lower part of the crucible is blocked, so that the heat radiation area of the side heater to the crucible is reduced, and the oxygen content of the single crystal rod is reduced.
Description
Technical Field
The utility model relates to the technical field of crystal growth, in particular to a heat insulation part for a crystal growth device and the crystal growth device.
Background
Oxygen element in Czochralski silicon single crystal is one of the most main impurities, oxygen element in a thermal field mainly comes from a crucible, and oxygen atoms in the crucible can be separated out at high temperature, so that the oxygen content of the single crystal rod can be effectively reduced by reducing the heating area of the crucible. The current way of reducing the oxygen content is to reduce the oxygen content mainly by shortening the width of the side heater and reducing the area of the high temperature zone of the crucible. The radiant heat generated in this way still contributes to the evolution of oxygen in the crucible.
Disclosure of Invention
The present utility model aims to solve at least one of the technical problems existing in the prior art. Therefore, the utility model provides the heat insulation and preservation piece for the crystal growth device, which has good heat insulation effect and can block the heat radiation of the side heater to the lower part of the crucible, thereby reducing the heat radiation area of the side heater to the crucible and further reducing the oxygen content of the single crystal rod.
The utility model also provides a crystal growth device, which comprises the heat insulation part for the crystal growth device
According to an embodiment of the present utility model, a thermal insulating member for a crystal growing apparatus includes a crucible, the thermal insulating member for a crystal growing apparatus being provided outside the crucible and extending in a circumferential direction of the crucible, the thermal insulating member for a crystal growing apparatus including: the heat insulation piece comprises a vertical section and an upper section, one end of the upper section is connected with the upper end of the vertical section, and the other end of the upper section extends inwards or outwards along the radial direction of the crucible; the heat preservation piece is arranged in a lamination mode with the vertical section in the radial direction of the crucible, the heat preservation piece and the upper section are located on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is located below the upper section.
According to the heat insulation part for the crystal growth device, the heat insulation part and the heat insulation part are arranged, the heat insulation part is overlapped with the vertical section in the radial direction of the crucible, the heat insulation part and the upper section are positioned on the same side of the vertical section along the radial direction of the crucible, and the heat insulation part is positioned below the upper section. The heat preservation piece and the heat insulation piece are matched with each other, the heat insulation effect is good, and the heat radiation of the side heater to the lower part of the crucible is blocked, so that the heat radiation area of the side heater to the crucible is reduced, and the oxygen content of the single crystal rod is reduced.
In some embodiments of the utility model, the insulation further comprises: and one end of the lower section is connected with the lower end of the vertical section, the other end of the lower section extends inwards or outwards along the radial direction of the crucible, the lower section and the upper section are positioned on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is positioned between the upper section and the lower section.
In some embodiments of the utility model, the ends of the upper and lower sections remote from the vertical section each extend outwardly in a radial direction of the crucible, and the insulating member is provided radially outwardly of the vertical section in the radial direction of the crucible.
In some embodiments of the present utility model, the crystal growth apparatus further includes a heat insulation barrel disposed outside the crucible, the heat insulation member for the crystal growth apparatus is disposed inside the heat insulation barrel, the heat insulation member is provided with a mounting hole for connecting with the heat insulation barrel, and the heat insulation barrel is provided with a connecting hole matched with the mounting hole.
In some embodiments of the present utility model, the mounting hole is a circular hole or the mounting hole is a bar-shaped hole extending in an up-down direction; and/or the connecting hole is a strip-shaped hole extending along the up-down direction.
In some embodiments of the utility model, the thermal insulation member is a carbon member or a graphite member.
In some embodiments of the utility model, the insulation is a solidified mat.
In some embodiments of the utility model, the insulation and the insulation are both annular.
In some embodiments of the utility model, the heat insulating members are a plurality of sections spaced apart along the circumferential direction of the crucible, and the plurality of sections of heat insulating members are in one-to-one correspondence with the plurality of sections of heat insulating members.
The crystal growth apparatus according to the embodiment of the utility model comprises the heat insulation member for the crystal growth apparatus.
According to the crystal growth device provided by the embodiment of the utility model, the heat insulation and preservation piece for the crystal growth device is arranged, and the heat insulation piece and the preservation piece are arranged in a lamination manner with the vertical section in the radial direction of the crucible, the heat preservation piece and the upper section are positioned on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is positioned below the upper section. The heat preservation piece and the heat insulation piece are matched with each other, the heat insulation effect is good, and the heat radiation of the side heater to the lower part of the crucible is blocked, so that the heat radiation area of the side heater to the crucible is reduced, and the oxygen content of the single crystal rod is reduced.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
The foregoing and/or additional aspects and advantages of the utility model will become apparent and may be better understood from the following description of embodiments taken in conjunction with the accompanying drawings in which:
FIG. 1 is a cross-sectional view of a crystal growing apparatus according to an embodiment of the present utility model, wherein a crucible is not shown;
FIG. 2 is a perspective view of an insulating thermal barrier for a crystal growing apparatus according to an embodiment of the present utility model;
FIG. 3 is a perspective view of an insulating member of the thermal insulating member for a crystal growing apparatus according to an embodiment of the present utility model;
FIG. 4 is a perspective view of a heat shield having a circular hole for mounting a heat shield for a crystal growing apparatus according to an embodiment of the present utility model;
FIG. 5 is a perspective view of a thermal shield having a mounting hole in the form of a bar for a thermal shield for a crystal growing apparatus according to an embodiment of the present utility model;
fig. 6 is a cross-sectional view of a crystal growing apparatus according to an embodiment of the present utility model, wherein an insulating member for the crystal growing apparatus is not shown.
Reference numerals:
100. a crystal growth apparatus;
10. a thermal insulation member for a crystal growing apparatus;
1. a heat insulating member; 11. an upper section; 12. a lower section; 13. a vertical section; 14. a mounting hole; 2. a thermal insulation member;
20. a heat-preserving barrel;
30. a side heater; 310. side heater feet;
40. and a crucible.
Detailed Description
Embodiments of the present utility model are described in detail below, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to like or similar elements or elements having like or similar functions throughout. The embodiments described below by referring to the drawings are illustrative only and are not to be construed as limiting the utility model.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model. Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
An insulating member 10 for a crystal growing apparatus according to an embodiment of the present utility model is described below with reference to fig. 1 to 6.
As shown in fig. 1 and 6, the crystal growing apparatus 100 includes a crucible 40, and a heat insulating member 10 for the crystal growing apparatus is provided outside the crucible 40 and extends in a circumferential direction of the crucible 40, and the heat insulating member 10 for the crystal growing apparatus serves to block heat radiation of the side heater 30 to a lower portion of the crucible 40, thereby reducing a heat radiation area of the side heater 30 to the crucible 40, thereby reducing an oxygen content of the single crystal rod.
Specifically, referring to fig. 1 and 2, a thermal insulating member 10 for a crystal growing apparatus includes a thermal insulating member 1 and a thermal insulating member 2. The heat insulating member 1 includes a vertical section 13 and an upper section 11, one end of the upper section 11 is connected to an upper end of the vertical section 13, and the other end of the upper section 11 extends inward or outward in a radial direction of the crucible 40, and in the example shown in fig. 4 and 5, the other end of the upper section 11 extends outward in a radial direction of the crucible 40, although the present utility model is not limited thereto, and the other end of the upper section 11 may extend inward in a radial direction of the crucible 40. The heat insulator 1 serves to block heat radiation of the side heater 30 to the lower portion of the crucible 40.
The insulating member 2 is arranged to be laminated with the vertical section 13 in the radial direction of the crucible 40, the insulating member 2 and the upper section 11 are positioned on the same side of the vertical section 13 in the radial direction of the crucible 40, and the insulating member 2 is positioned below the upper section 11. The insulating member 2 serves to further block heat radiation of the side heater 30 to the lower portion of the crucible 40, and to enhance the heat insulating effect of the heat insulating member 10 for a crystal growing apparatus.
According to the heat insulating member 10 for a crystal growing apparatus of the embodiment of the utility model, by providing the heat insulating member 1 and the heat insulating member 2, the heat insulating member 2 is laminated with the vertical section 13 in the radial direction of the crucible 40, the heat insulating member 2 and the upper section 11 are positioned on the same side of the vertical section 13 in the radial direction of the crucible 40, and the heat insulating member 2 is positioned below the upper section 11. The heat preservation member 2 and the heat insulation member 1 are matched with each other, so that the heat insulation effect is good, and the heat radiation of the side heater 30 to the lower part of the crucible 40 is blocked, so that the heat radiation area of the side heater 30 to the crucible 40 is reduced, and the oxygen content of the single crystal rod is reduced.
In some embodiments of the present utility model, as shown in fig. 4 and 5, the heat insulating member 1 further includes a lower section 12, one end of the lower section 12 is connected to the lower end of the vertical section 13, the other end extends inward or outward in the radial direction of the crucible 40, the lower section 12 and the upper section 11 are located on the same side of the vertical section 13 in the radial direction of the crucible 40, and the heat insulating member 2 is located between the upper section 11 and the lower section 12.
It will be appreciated that the upper, lower and vertical sections 11, 12, 13 of the insulating element 1 define a recess therebetween which is recessed inwardly or outwardly in the radial direction of the crucible 40 for receiving the insulating element 2 and for retaining the insulating element 2 and the insulating element 1 in the axial direction of the crucible 40.
In some embodiments of the utility model, as shown in fig. 4 and 5, the ends of the upper and lower sections 11, 12 remote from the vertical section 13 each extend outwardly in the radial direction of the crucible 40, and the insulating member 2 is disposed radially outwardly of the vertical section 13 in the radial direction of the crucible 40. Since the insulating member 2 is provided on the radially outer side of the vertical section 13 in the radial direction of the crucible 40, the loading and unloading of the insulating member 2 is facilitated with respect to the radially inner side of the vertical section 13 in the radial direction of the crucible 40.
In some embodiments of the present utility model, as shown in fig. 1, the crystal growing apparatus 100 further includes a heat insulating barrel 20 provided outside the crucible 40, the heat insulating member 10 for the crystal growing apparatus is provided inside the heat insulating barrel 20, and the heat insulating barrel 20 blocks heat loss in the crucible 40, so that the crystal growing apparatus 100 operates normally.
Further, the heat insulating member 1 is provided with a mounting hole 14 for connecting with the heat insulating barrel 20, and the heat insulating barrel 20 is provided with a connecting hole matched with the mounting hole 14. So that the heat insulating member 10 for the crystal growing apparatus and the heat insulating tub 20 can be connected and fixed through the mounting hole 14 and the connection hole.
In some embodiments of the present utility model, as shown in fig. 4 and 5, the mounting hole 14 is a circular hole or the mounting hole 14 is a bar-shaped hole extending in the up-down direction. Meanwhile, the heat preservation piece 2 is also provided with a mounting hole 14 corresponding to the mounting hole 14 on the heat insulation piece 1, and the mounting hole 14 is a round hole.
It will be appreciated that the mounting holes 14 in the insulating element 1 are circular holes, which improves the accuracy of the mounting between the insulating element 2 and the insulating element 1. The mounting holes 14 on the heat insulating member 1 are bar-shaped holes, so that the mounting success rate with the heat insulating member 2 can be improved, and the heat insulating member is convenient to mount.
Further, the heat insulating member 1, the heat insulating member 2, and the heat insulating tub 20 are fixed by fasteners, such as carbon-carbon screws and nuts. Of course, the present utility model is not limited thereto, and the heat insulator 1, the heat insulator 2, and the heat insulating tub 20 may be fixed by means of a snap or a pin, etc.
Further, the connection hole of the heat insulation tub 20 is a bar-shaped hole extending in the up-down direction, so that the distance between the heat insulation member 1 and the side heater 30 can be adjusted to meet different needs by adjusting the up-down connection positions of the heat insulation member 1 and the bar-shaped hole of the heat insulation tub 20.
In some embodiments of the present utility model, the heat insulating member 1 is a carbon member or a graphite member, so that the heat insulating member 1 is resistant to high temperature and corrosion, and the service life of the heat insulating member 1 is prolonged. At the same time, the thermal conductivity of the carbon piece or the graphite piece is greatly reduced at high temperature, and the heat insulation effect of the heat insulation piece 1 is better improved.
In the related art, the heat radiation of the side heater is blocked by the semicircular barrel curing felt arranged around the middle lower part of the heat preservation barrel, the curing felt is easy to pulverize, the service life is low, and the area of the curing felt which is required to be arranged is semicircular barrel, so that the area is larger, and the cost is higher. In this application, because the heat insulating member 1 is a carbon member or a graphite member, the service life of the heat insulating member 10 for the crystal growing apparatus is long, and the setting area of the heat insulating member 10 for the crystal growing apparatus does not need to be a half drum, and the area is small and the cost is low.
In some embodiments of the present utility model, the insulating member 2 is a solidified felt, so that the insulating property and heat insulation property of the insulating member 2 are good, and the heat insulation property of the heat insulating member 10 for a crystal growing apparatus is improved.
In some embodiments of the utility model, both the insulation 1 and the insulation 2 are annular. Because the heat preservation barrel 20 is cylindrical, the heat insulation part 1 and the heat preservation part 2 are annular, the heat insulation part 1 and the heat preservation part 2 are convenient to be arranged on the inner side of the heat preservation barrel 20, the matching degree of the heat insulation part 10 for the crystal growth device and the heat preservation barrel 20 is improved, and the gap between the heat insulation part 10 for the crystal growth device and the inner wall of the heat preservation barrel 20 is reduced, so that the heat insulation effect of the heat insulation part 10 for the crystal growth device is improved. In addition, since the side heater anchor 310 also has heat radiation, when the heat insulating member 1 and the heat insulating member 2 are both ring-shaped, the side heater anchor 310 may be located radially outside the heat insulating member 10 for a crystal growing apparatus, so that the heat insulating member 1 and the heat insulating member 2 block the heat radiation of the side heater anchor 310 to the lower portion of the crucible 40, and further the area of the lower portion of the crucible 40 receiving the heat radiation is reduced.
In some embodiments of the present utility model, as shown in fig. 2 and 3, the heat insulating members 1 are multi-stage spaced apart in the circumferential direction of the crucible 40, the heat insulating members 2 are multi-stage spaced apart in the circumferential direction of the crucible 40, and the multi-stage heat insulating members 2 are in one-to-one correspondence with the multi-stage heat insulating members 1. So that a gap is formed between two adjacent heat insulating members 1, the side heater anchor 310 can be conveniently arranged at the lower end of the heat insulating barrel 20 through the gap, and the installation interference between the side heater anchor 310 and the heat insulating member 10 for the crystal growing device is reduced.
In the example shown in fig. 2, the heat insulating member 1 is two sections spaced apart in the circumferential direction of the crucible 40, and the heat insulating member 2 is also two corresponding sections spaced apart in the circumferential direction of the crucible 40, but the present utility model is not limited thereto, and the heat insulating member 1 may be more sections spaced apart in the circumferential direction of the crucible 40, and the heat insulating member 2 is also more corresponding sections spaced apart in the circumferential direction of the crucible 40, such as 3 sections, 4 sections, 5 sections, or 6 sections, or the like.
A crystal growth apparatus 100 according to an embodiment of the present utility model is described below with reference to fig. 1.
As shown in fig. 1, a crystal growth apparatus 100 according to an embodiment of the present utility model includes the above-described heat insulating member 10 for a crystal growth apparatus.
According to the crystal growth apparatus 100 of the embodiment of the present utility model, by providing the above-described heat insulating member 10 for a crystal growth apparatus, by providing the heat insulating member 1 and the heat insulating member 2, the heat insulating member 2 is provided in a stacked manner with the vertical section 13 in the radial direction of the crucible 40, the heat insulating member 2 and the upper section 11 are located on the same side of the vertical section 13 in the radial direction of the crucible 40, and the heat insulating member 2 is located below the upper section 11. The heat preservation member 2 and the heat insulation member 1 are matched with each other, so that the heat insulation effect is good, and the heat radiation of the side heater 30 to the lower part of the crucible 40 is blocked, so that the heat radiation area of the side heater 30 to the crucible 40 is reduced, and the oxygen content of the single crystal rod is reduced.
Other configurations of the crystal growing apparatus 100, such as the side heater 30 and the crucible 40, and the like, and the operation thereof according to embodiments of the present utility model are known to those of ordinary skill in the art and will not be described in detail herein.
In the description of the present specification, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the present utility model have been shown and described, it will be understood by those of ordinary skill in the art that: many changes, modifications, substitutions and variations may be made to the embodiments without departing from the spirit and principles of the utility model, the scope of which is defined by the claims and their equivalents.
Claims (10)
1. A thermal insulating member for a crystal growing apparatus, the crystal growing apparatus comprising a crucible, the thermal insulating member for a crystal growing apparatus being provided outside the crucible and extending in a circumferential direction of the crucible, the thermal insulating member for a crystal growing apparatus comprising:
the heat insulation piece comprises a vertical section and an upper section, one end of the upper section is connected with the upper end of the vertical section, and the other end of the upper section extends inwards or outwards along the radial direction of the crucible;
the heat preservation piece is arranged in a lamination mode with the vertical section in the radial direction of the crucible, the heat preservation piece and the upper section are located on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is located below the upper section.
2. The thermal shield for a crystal growing apparatus of claim 1, further comprising:
and one end of the lower section is connected with the lower end of the vertical section, the other end of the lower section extends inwards or outwards along the radial direction of the crucible, the lower section and the upper section are positioned on the same side of the vertical section along the radial direction of the crucible, and the heat preservation piece is positioned between the upper section and the lower section.
3. The heat insulating member for a crystal growing apparatus according to claim 2, wherein the ends of the upper and lower sections remote from the vertical section each extend outwardly in a radial direction of the crucible, the heat insulating member being provided radially outwardly of the vertical section in the radial direction of the crucible.
4. The heat insulating member for a crystal growing apparatus according to claim 1, wherein the crystal growing apparatus further comprises a heat insulating barrel provided outside the crucible, the heat insulating member for a crystal growing apparatus is provided inside the heat insulating barrel, a mounting hole for connecting with the heat insulating barrel is provided on the heat insulating member, and a connecting hole fitted with the mounting hole is provided on the heat insulating barrel.
5. The heat insulating member for a crystal growing apparatus according to claim 4, wherein the mounting hole is a circular hole or a bar-shaped hole extending in an up-down direction;
and/or the connecting hole is a strip-shaped hole extending along the up-down direction.
6. The thermal insulating member for a crystal growing apparatus according to claim 1, wherein the thermal insulating member is a carbon member or a graphite member.
7. The thermal insulating member for a crystal growing apparatus according to claim 1, wherein the thermal insulating member is a solidified felt.
8. The thermal insulating member for a crystal growing apparatus according to claim 1, wherein the thermal insulating member and the thermal insulating member are each annular.
9. The heat insulating member for a crystal growing apparatus according to claim 1, wherein the heat insulating member is a plurality of segments spaced apart in a circumferential direction of the crucible, the heat insulating member is a plurality of segments spaced apart in the circumferential direction of the crucible, and the plurality of segments of the heat insulating member are in one-to-one correspondence with the plurality of segments of the heat insulating member.
10. Crystal growth apparatus, characterized by comprising a thermal insulation element according to any one of claims 1-9 for a crystal growth apparatus.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223449334.6U CN218989463U (en) | 2022-12-22 | 2022-12-22 | Heat insulation and preservation piece for crystal growth device and crystal growth device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223449334.6U CN218989463U (en) | 2022-12-22 | 2022-12-22 | Heat insulation and preservation piece for crystal growth device and crystal growth device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218989463U true CN218989463U (en) | 2023-05-09 |
Family
ID=86222454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223449334.6U Active CN218989463U (en) | 2022-12-22 | 2022-12-22 | Heat insulation and preservation piece for crystal growth device and crystal growth device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218989463U (en) |
-
2022
- 2022-12-22 CN CN202223449334.6U patent/CN218989463U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN218989463U (en) | Heat insulation and preservation piece for crystal growth device and crystal growth device | |
| CN218989462U (en) | Oxygen reduction device and single crystal furnace thermal field with same | |
| JP2024533738A (en) | Heater assembly and single crystal furnace | |
| CN104498906A (en) | MOCVD reactor | |
| CN212955309U (en) | Heater strip winding assembly and evaporation device | |
| KR20130009636A (en) | Ring-shaped resistance heater for supplying heat to a growing single crystal | |
| CN218561603U (en) | Tubular heating furnace body and PECVD equipment | |
| CN219010517U (en) | Oxygen reduction device for single crystal furnace and single crystal furnace | |
| CN211509321U (en) | Novel wire winding structure's round silk electric pottery dish | |
| CN219653176U (en) | Oxygen reduction device for single crystal furnace and single crystal furnace | |
| CN207512310U (en) | The integral type insulating sheath of polycrystalline ingot furnace | |
| CN221678113U (en) | Ceramic electrode | |
| CN212628470U (en) | Radio frequency antenna and cooking equipment | |
| CN219603764U (en) | Oxygen reduction assembly and thermal field for single crystal furnace | |
| CN220827493U (en) | Bottom heat preservation device for single crystal furnace and single crystal furnace with same | |
| CN219372626U (en) | Electrode device of sintering furnace | |
| CN220012891U (en) | Electrode assembly and ingot furnace with same | |
| CN215899443U (en) | Heating device and cooking equipment | |
| CN221103592U (en) | Heat insulation structure and induction cooker | |
| CN212618485U (en) | Multi-zone heating electric ceramic disc and mounting structure thereof | |
| CN212806545U (en) | Electrode heat preservation structure | |
| CN217239186U (en) | Ion trap permanent magnet device and nuclear magnetic resonance system | |
| KR102686996B1 (en) | Apparatus for growing silicon carbide single crystal | |
| CN218634581U (en) | Detector cabin with heat preservation performance | |
| CN220827489U (en) | Electrode sheath, bottom heat preservation assembly and single crystal furnace |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |