CN218989390U - Dust removal structure of magnetron sputtering coating machine - Google Patents

Dust removal structure of magnetron sputtering coating machine Download PDF

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Publication number
CN218989390U
CN218989390U CN202320075165.XU CN202320075165U CN218989390U CN 218989390 U CN218989390 U CN 218989390U CN 202320075165 U CN202320075165 U CN 202320075165U CN 218989390 U CN218989390 U CN 218989390U
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China
Prior art keywords
ion wind
magnetron sputtering
coating machine
sputtering coating
roller
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CN202320075165.XU
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Chinese (zh)
Inventor
王爱民
凌大新
郑必福
徐文明
罗睿睿
陈建平
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Yeshili New Material Co ltd
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Yeshili New Material Co ltd
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Abstract

The utility model provides a dust removing structure of a magnetron sputtering coating machine, and belongs to the technical field of magnetron sputtering coating machines. It has solved the lower problem of dust removal efficiency of current coating machine. This dust removal structure of magnetron sputtering coating machine, magnetron sputtering coating machine is including setting up the mounting bracket in the casing, is equipped with a plurality of horizontal settings and supplies base film winding conveying roller and the chill roll that is located conveying roller below on the mounting bracket, and this dust removal structure is including setting up at least one ion wind stick on the mounting bracket, and ion wind stick sets up between chill roll and conveying roller, and ion wind stick just sets up with one of them conveying roller. The dust removing structure of the magnetron sputtering coating machine can continuously work along with the movement of the base film in the forming process of the base film, and removes dust on the surface of the moving base film, so that the dust removing efficiency of the base film is better.

Description

Dust removal structure of magnetron sputtering coating machine
Technical Field
The utility model belongs to the technical field of magnetron sputtering coating machines, and relates to a dust removing structure of a magnetron sputtering coating machine.
Background
Magnetron sputtering is one of physical vapor deposition, and a general sputtering method can be used for preparing various materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large coating area, strong adhesive force and the like. The magnetic control detection production line needs to be transmitted through a long-distance roller way before post-treatment, the existing vertical magnetic control sputtering production line generates static electricity because glass rubs with a rubber driving wheel in the transmission process, the static electricity has great potential safety hazard, the existing ion fan static electricity removing device needs to be installed on a transportation track, the production cost is high, and the energy consumption is high.
Aiming at the problems, various dust removing structures of the magnetron sputtering coating machine are developed:
as disclosed in chinese patent application CN 208776820U, a particulate cleaning system for vacuum coating is disclosed, which at least comprises an ion wind bar and an ion generator connected to the ion wind bar, wherein the ion wind bar is installed at the inlet of the chamber of the vacuum coating apparatus.
According to the structure, the ion wind rod is directly arranged at the inlet of the chamber of the vacuum coating equipment, and the ion wind rod is arranged at the inlet of the chamber, so that static electricity and fine particles on the substrate to be coated are removed before the substrate to be coated enters the vacuum coating equipment, but not the substrate in production is removed, and the substrate to be coated is wound on the substrate to be coated, so that the stretched substrate is not further removed, and the overall dust removing effect is poor.
Disclosure of Invention
The utility model aims at solving the problems in the prior art, and provides a dust removing structure of a magnetron sputtering coating machine, which aims at solving the technical problems that: how to solve the problem of lower dust removal efficiency of the existing coating machine.
The aim of the utility model can be achieved by the following technical scheme:
the utility model provides a dust removal structure of magnetron sputtering coating machine, magnetron sputtering coating machine is including setting up the mounting bracket in the casing, be equipped with a plurality of horizontal settings and can supply the winding conveying roller of base film and the chill roll that is located the conveying roller below on the mounting bracket, its characterized in that, this dust removal structure is including setting up at least one ion wind stick on the mounting bracket, ion wind stick sets up between chill roll and conveying roller, ion wind stick just sets up with one of them conveying roller.
Working principle: the ion wind stick is directly arranged on the mounting frame, so that the ion wind stick can be started simultaneously in the forming process of the base film, static electricity and fine particles on the base film can be removed in the forming process of the base film, local dust free is realized, the surface of the base film entering into the cooling roller is cleaner, the ion wind stick belongs to the prior art, the prior ion wind stick can be directly arranged at the corresponding position of the mounting frame, local dust removal of the base film can be realized, the ion wind stick also continuously works along with the movement of the base film in the forming process of the base film, and the surface of the moving base film is dust removed, so that the dust removal efficiency of the base film is better.
In the dust removing structure of the magnetron sputtering coating machine, two ion wind bars are arranged, and the two ion wind bars are respectively positioned at the left side and the right side of the cooling roller.
Through being provided with two ion wind bars for the moulded die after the basal lamina of roll-in chill roll and chill roll shaping can all carry out local dust removal through the ion wind bar, has not only promoted the dust removal effect of basal lamina before the shaping, and the moulded die after the shaping also can further realize removing dust, further promotion dust removal structure's whole dust removal effect.
In the dust removing structure of the magnetron sputtering coating machine, the ion wind bars are positioned between the two conveying rollers, and the ion wind bars and the two conveying rollers are mutually perpendicular.
Through all setting up the ion wind stick between two conveying rollers, the setting of ion wind stick can not cause the influence to the setting of conveying roller this moment to can increase the time that ion wind stick acted on base film or shaping membrane, and then make the dust removal effect of base film or moulded die better.
In the dust removing structure of the magnetron sputtering coating machine, the ion wind bars and the conveying rollers are arranged in parallel, and the vertical distance between the ion wind bars and the two conveying rollers close to the ion wind bars is 1-7 cm.
By setting the vertical distance, the distance between the ion wind bar and the conveying roller can exactly remove dust from the base film or the forming film on the conveying roller, and the operation of the conveying roller is not affected.
The optimal distance is 3.5cm.
In the dust removing structure of the magnetron sputtering coating machine, the mounting frame comprises a sliding seat capable of sliding transversely and a mounting plate which is transversely opposite to the sliding seat, the conveying rollers are arranged between the sliding seat and the mounting plate, and two ends of the conveying rollers are connected with the sliding seat and the mounting plate respectively.
The sliding seat can transversely slide, so that the sliding seat can drive the mounting plate to synchronously slide out when the machine is stopped, the ion wind rod can be conveniently arranged on the mounting frame, and the follow-up maintenance and detection are also convenient.
In the dust removing structure of the magnetron sputtering coating machine, the mounting frame is respectively provided with an unreeling roller capable of conveying the base film to the cooling roller through a plurality of conveying rollers and a winding roller capable of collecting the formed forming die on the cooling roller, wherein one ion wind bar is positioned at the outer side of the unreeling roller, and the other ion wind bar is positioned at the outer side of the winding roller.
The positions of the two ion wind bars are set, so that the dust removal effect of the ion wind bars is better.
Compared with the prior art, the utility model has the advantages that: the ion wind stick is directly installed in the corresponding position of the installation frame, so that local dust removal of the base film can be realized, and in the forming process of the base film, the ion wind stick also continuously works along with the movement of the base film, and the surface of the moving base film is removed, so that the dust removal efficiency of the base film is better.
Drawings
FIG. 1 is a schematic view of a portion of the assembled structure of the present utility model.
Fig. 2 is a partial top view of the assembled utility model.
Fig. 3 is a cross-sectional view of A-A in fig. 2.
In the figure, 1, a mounting rack; 11. a sliding seat; 12. a mounting plate; 2. a conveying roller; 3. a base film; 4. forming a film; 5. an ion wind bar; 6. an unreeling roller; 7. a wind-up roll; 8. and (5) cooling the roller.
Detailed Description
The following are specific embodiments of the present utility model and the technical solutions of the present utility model will be further described with reference to the accompanying drawings, but the present utility model is not limited to these embodiments.
As shown in fig. 1, the dust removing structure of the magnetron sputtering coating machine comprises a mounting frame 1 arranged in a machine shell, wherein a plurality of conveying rollers 2 which are transversely arranged and can be used for winding a base film 3 and cooling rollers 8 positioned below the conveying rollers 2 are arranged on the mounting frame 1.
Specifically, as shown in fig. 1-3, the dust removing structure comprises two ion wind bars 5 arranged on a mounting frame 1, wherein the ion wind bars 5 are arranged between a cooling roller 8 and a conveying roller 2, the two ion wind bars 5 are respectively positioned on the left side and the right side of the cooling roller 8, the ion wind bars 5 are opposite to one conveying roller 2, the ion wind bars 5 are both positioned between the two conveying rollers 2, the ion wind bars 5 and the two conveying rollers 2 are mutually perpendicular, the ion wind bars 5 and the conveying rollers 2 are both arranged in parallel, the vertical distance between the ion wind bars 5 and the two conveying rollers 2 close to the ion wind bars 5 is 1-7 cm, and the optimal vertical distance is 3.5cm.
Working principle: the ion wind stick 5 is directly arranged on the mounting frame 1, so that the ion wind stick 5 can be started simultaneously in the forming process of the base film 3, the ion wind stick 5 can remove static electricity and fine particles on the base film 3 in the forming process of the base film 3, thereby realizing local dust free, the surface of the base film 3 entering into the cooling roller 8 and the forming film 4 moving out of the cooling roller 8 are cleaner, the ion wind stick 5 belongs to the prior art, the prior ion wind stick 5 can be directly arranged at the corresponding position of the mounting frame 1, the local dust removal of the base film 3 can be realized, the base film 3 can continuously work along with the movement of the base film 3 in the forming process, and the surface of the moving base film 3 is dust removed, so that the dust removal efficiency of the base film 3 is better.
As shown in fig. 1-3, the mounting frame 1 comprises a sliding seat 11 capable of sliding along the transverse direction and a mounting plate 12 which is arranged opposite to the sliding seat 11 in the transverse direction, the conveying rollers 2 are arranged between the sliding seat 11 and the mounting plate 12, two ends of the conveying rollers 2 are respectively connected with the sliding seat 11 and the mounting plate 12, one side of the cooling roller 8 is provided with an unreeling roller 6 capable of conveying a base film 3 onto the cooling roller 8 through a plurality of conveying rollers 2 and a reeling roller 7 capable of collecting a forming die formed on the cooling roller 8, one ion wind bar 5 is positioned on the outer side of the unreeling roller 6, and the other ion wind bar 5 is positioned on the outer side of the reeling roller 7.
The specific embodiments described herein are offered by way of example only to illustrate the spirit of the utility model. Those skilled in the art may make various modifications or additions to the described embodiments or substitutions thereof without departing from the spirit of the utility model or exceeding the scope of the utility model as defined in the accompanying claims.

Claims (6)

1. The utility model provides a dust removal structure of magnetron sputtering coating machine, magnetron sputtering coating machine is including setting up mounting bracket (1) in the casing, be equipped with a plurality of horizontal settings and can supply base film (3) winding conveying roller (2) and be located conveying roller (8) below on mounting bracket (1), its characterized in that, this dust removal structure is including setting up at least one ion wind stick (5) on mounting bracket (1), ion wind stick (5) set up between cooling roller (8) and conveying roller (2), ion wind stick (5) just set up with one of them conveying roller (2).
2. The dust removing structure of the magnetron sputtering coating machine according to claim 1, wherein two ion wind bars (5) are arranged, and the two ion wind bars (5) are respectively positioned at the left side and the right side of the cooling roller (8).
3. The dust removing structure of the magnetron sputtering coating machine according to claim 2, wherein the ion wind bars (5) are positioned between the two conveying rollers (2), and the ion wind bars (5) are mutually perpendicular to the two conveying rollers (2).
4. A dust removing structure of a magnetron sputtering coating machine according to claim 1, 2 or 3, wherein the ion wind bars (5) and the conveying rollers (2) are arranged in parallel, and the vertical distance between the ion wind bars (5) and the two conveying rollers (2) close to the ion wind bars (5) is 1-7 cm.
5. A dust removing structure of a magnetron sputtering coating machine according to claim 1, 2 or 3, wherein the mounting frame (1) comprises a sliding seat (11) capable of sliding transversely and a mounting plate (12) arranged transversely opposite to the sliding seat (11), the conveying rollers (2) are arranged between the sliding seat (11) and the mounting plate (12), and two ends of the conveying rollers (2) are respectively connected with the sliding seat (11) and the mounting plate (12).
6. A dust removing structure of a magnetron sputtering coating machine according to claim 2 or 3, wherein the mounting frame (1) is respectively provided with an unreeling roller (6) capable of conveying the base film (3) to the cooling roller (8) through a plurality of conveying rollers (2) and a reeling roller (7) capable of collecting forming molds formed on the cooling roller (8) at two sides of the cooling roller (8), one ion wind bar (5) is positioned at the outer side of the unreeling roller (6), and the other ion wind bar (5) is positioned at the outer side of the reeling roller (7).
CN202320075165.XU 2023-01-10 2023-01-10 Dust removal structure of magnetron sputtering coating machine Active CN218989390U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320075165.XU CN218989390U (en) 2023-01-10 2023-01-10 Dust removal structure of magnetron sputtering coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320075165.XU CN218989390U (en) 2023-01-10 2023-01-10 Dust removal structure of magnetron sputtering coating machine

Publications (1)

Publication Number Publication Date
CN218989390U true CN218989390U (en) 2023-05-09

Family

ID=86216464

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320075165.XU Active CN218989390U (en) 2023-01-10 2023-01-10 Dust removal structure of magnetron sputtering coating machine

Country Status (1)

Country Link
CN (1) CN218989390U (en)

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