CN218971712U - Damping device - Google Patents

Abstract

The utility model relates to the technical field of molecular pump buffering and damping, and aims to provide a damping device which does not influence the work of an instrument during vacuumizing, prevents a molecular pump from falling off, and is safe and reliable. The damping device comprises a first connecting piece and a second connecting piece which are connected, at least two groups of damping components are arranged between the first connecting piece and the second connecting piece at intervals, each damping component comprises a first damping piece and a second damping piece, one end of each first damping piece is connected with one of the first connecting piece and the second connecting piece, the other end of each first damping piece is inserted into the second damping piece, an elastic buffer material is arranged between the first damping piece and the second damping piece, and one end, far away from the first damping piece, of each second damping piece is connected with the other one of the first connecting piece and the second connecting piece. The utility model solves the problems that the damping device in the prior art generates larger displacement in the vacuumizing process, influences the operation of an instrument, cannot offset the torque generated by the molecular pump when the molecular pump fails, and has potential safety hazard.

Description

Damping device

Technical Field

The utility model relates to the technical field of molecular pump buffering and damping, in particular to a damping device.

Background

When the molecular pump is in a high-rotation-speed state in operation, the unbalance amount can be generated due to slight uneven mass of the internal rotor, so that vibration is generated, and when the molecular pump is connected with some high-precision instruments, the vibration of the molecular pump can greatly influence the performances of the instruments, so that a damping device is required to be configured to slow down the vibration.

The current common damping device is a damping device with two flanges and similar to a bellows structure, the two flanges of the damping device are respectively connected with a molecular pump and an instrument, and vibration is relieved through the bellows structure, but in the vacuumizing process, the bellows can generate larger displacement and can influence the operation of the instrument. In addition, can lose the balance when the molecular pump breaks down, produce great moment of torsion, the damping device of current bellows structure can't offset the moment of torsion that the molecular pump produced, and the molecular pump can drop from equipment, can cause certain injury to staff around, has the potential safety hazard.

Disclosure of Invention

Therefore, the technical problem to be solved by the utility model is to overcome the defects that the damping device in the prior art has larger displacement in the vacuumizing process, influences the work of an instrument, cannot offset the torque generated by the molecular pump when the molecular pump fails, and has potential safety hazard, so that the damping device which can not influence the work of the instrument, can effectively prevent the molecular pump from falling off and is safe and reliable is provided.

In order to solve the above problems, the present utility model provides a damping device, including a first connecting member and a second connecting member connected to each other, at least two sets of damping members disposed at intervals are disposed between the first connecting member and the second connecting member, the damping members include a first damping member and a second damping member, one end of the first damping member is connected to one of the first connecting member and the second connecting member, the other end is inserted into the second damping member, an elastic buffer material is disposed between the first damping member and the second damping member, and one end of the second damping member away from the first damping member is connected to the other one of the first connecting member and the second connecting member.

Optionally, the second shock absorbing member has a hollow cavity, one end of the first shock absorbing member, which is close to the second connecting member, is inserted into the hollow cavity, and the space between the portion of the first shock absorbing member inserted into the second shock absorbing member and the bottom and the inner wall of the hollow cavity is filled with the elastic buffer material.

Optionally, a through hole is formed in one end, far away from the second connecting piece, of the second shock absorbing piece, the diameter of the through hole is smaller than the inner diameter of the hollow cavity, and the first shock absorbing piece penetrates through the through hole and is inserted into the hollow cavity.

Optionally, the outer diameter of the portion of the first shock absorbing member near the second connecting member is larger than the outer diameter of the portion far from the second connecting member.

Optionally, a plurality of groups of damping components are arranged between the first connecting piece and the second connecting piece, and the plurality of groups of damping components are uniformly arranged at intervals along the circumference of the first connecting piece and the second connecting piece.

Optionally, a sealing component is disposed between the first connector and the second connector.

Optionally, the sealing assembly includes a sealing ring, one end of the sealing ring is connected with the first connecting piece, and the other end of the sealing ring is connected with the second connecting piece.

Optionally, the outer wall of sealing ring is close to the position of first connecting piece is provided with first seal groove, the outer wall of sealing ring is close to the position of second connecting piece is provided with the second seal groove, first seal groove with be provided with the sealing washer in the second seal groove.

Optionally, the sealing ring, the first damping member and the elastic buffer material between the second damping member are integrally connected through the filler between the first connecting member and the second connecting member.

Optionally, the first connecting piece is a first flange, and the second connecting piece is a second flange.

The utility model has the following advantages:

1. the damping device provided by the utility model comprises a first connecting piece and a second connecting piece which are connected, wherein the first connecting piece and the second connecting piece are respectively connected with a molecular pump and an instrument. A damping component is arranged between the first connecting piece and the second connecting piece, the damping component comprises a first damping piece and a second damping piece, one end of the first damping piece is inserted into the second damping piece, and an elastic buffer material is arranged between the first damping piece and the second damping piece. Vibration generated by the molecular pump during vacuumizing can be weakened and buffered through the elastic buffer material, so that the influence on the normal operation of the instrument caused by excessive vibration is avoided. And first damping part and second damping part are connected with one of them respectively, make damping device and molecular pump be connected as an organic wholely, and joint strength is high, produces great moment of torsion when preventing that the molecular pump breaks down, drops from first connecting piece, causes the incident. The damping device has simple structure and remarkable damping effect, can buffer vibration generated by the molecular pump, ensure the normal operation of the instrument, prevent the molecular pump from falling off, and eliminate potential safety hazards.

2. According to the damping device provided by the utility model, the through hole is formed in one end, far away from the second connecting piece, of the second damping piece, so that the first damping piece is conveniently inserted into the second damping piece, the second damping piece is provided with the hollow cavity, the elastic buffer material is filled between the part, inserted into the second damping piece, of the first damping piece and the bottom and the inner wall of the hollow cavity, and the accommodating space of the elastic buffer material is increased by arranging the hollow cavity, so that the damping effect is enhanced.

3. The damping device provided by the utility model is characterized in that a sealing assembly is arranged between a first connecting piece and a second connecting piece, the sealing assembly comprises a sealing ring, one end of the sealing ring is connected with the first connecting piece, the other end of the sealing ring is connected with the second connecting piece, a first sealing groove is arranged on the outer wall of the sealing ring at a position close to the first connecting piece, a second sealing groove is arranged at a position close to the second connecting piece, and sealing rings are arranged in the first sealing groove and the second sealing groove. The sealing ring is sealed with the junction of the first connecting piece and the second connecting piece through the sealing ring, so that the molecular pump is prevented from air entering and exiting from the junction when vacuuming, and the working efficiency of the molecular pump vacuuming and the normal operation of equipment are not affected by air leakage.

4. According to the damping device provided by the utility model, the plurality of groups of damping components are arranged between the first connecting piece and the second connecting piece, the damping components are uniformly arranged at intervals along the axial direction of the first connecting piece and the second connecting piece, and the elastic damping materials between the sealing ring and the first damping piece and the second damping piece are connected into a whole through the filler between the first connecting piece and the second connecting piece, so that the damping capacity of the damping device for damping vibration is increased. Moreover, the elastic buffer material is convenient to fill, the mold can be used for uniform filling, the filling time is saved, the operation is simple and convenient, and the working efficiency is improved.

Drawings

In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present utility model, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic view of a shock absorbing device according to the present utility model.

Reference numerals illustrate:

1. a first connector; 2. a second connector; 3. a damper assembly 301, a first damper member 302, a second damper member 303, and a nut; 4. an elastic buffer material; 5. seal assembly 501, seal ring, 502, first seal groove, 503, second seal groove, 504, seal ring.

Detailed Description

The following description of the embodiments of the present utility model will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the utility model are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In addition, the technical features of the different embodiments of the present utility model described below may be combined with each other as long as they do not collide with each other.

As shown in fig. 1, in the preferred embodiment of the damping device of the utility model, the molecular pump provided with the damping device can not influence the operation of the instrument due to vibration when vacuuming, and can prevent the molecular pump from falling off the damping device after failure, thereby being safe and reliable.

The damping device comprises a first connecting piece 1 and a second connecting piece 2 which are connected, wherein one of the first connecting piece 1 and the second connecting piece 2 is connected with a molecular pump, the other is connected with an instrument, and the connected instrument is a precision instrument such as an electron microscope. Specifically, in this embodiment, the first connecting piece 1 is a first flange, the second connecting piece 2 is a second flange, the first flange and the second flange have the same structure and are both provided with hollow cavities, the first flange and the second flange are coaxially arranged, and the first flange and the second flange are arranged in mirror symmetry along the direction perpendicular to the axial direction. One end of the first flange, which is far away from the second flange, is connected with the molecular pump, and one end of the second flange, which is far away from the first flange, is connected with the electron microscope.

Further, at least two groups of damper assemblies 3 are arranged between the first connecting piece 1 and the second connecting piece 2 at intervals, the damper assemblies 3 comprise a first damper member 301 and a second damper member 302, one end of the first damper member 301 is connected with one of the first connecting piece 1 and the second connecting piece 2, the other end is inserted into the second damper member 302, and an elastic buffer material 4 is arranged between the first damper member 301 and the second damper member 302. One end of the second damper member 302 remote from the first damper member 301 is connected to the other of the first connector 1 and the second connector 2.

Specifically, in this embodiment, six groups of damper assemblies 3 are disposed between the first connecting member 1 and the second connecting member 2, and the six groups of damper assemblies 3 are disposed at uniform intervals along the circumferential directions of the first connecting member 1 and the second connecting member 2, the first damper member 301 is connected to the first connecting member 1, and the second damper member 302 is connected to the second connecting member 2.

The first shock absorbing member 301 is a cylindrical rod body, and the outer diameter of the portion of the first shock absorbing member 301 close to the second connecting member 2 is larger than the outer diameter of the portion far from the second connecting member 2. In this embodiment, the first damper 301 is preferably a screw, one end of which is inserted into the second damper 302, and the other end of which is fixedly connected to the first connector 1 by a nut 303. The outer diameter of the end of the screw inserted into the second damper 302 is larger than the outer diameter of the end connected to the first connector 1, so that the contact area between the screw and the elastic buffer material 4 can be increased, thereby improving the damping performance of the damper. In addition, under the fastening action of the screw and the nut 303, the torque generated when the molecular pump fails can be counteracted, the molecular pump is prevented from falling off, and the personal safety of surrounding staff is ensured.

The second damping member 302 has a hollow cavity, and a through hole is formed at one end of the second damping member 302 away from the second connecting member 2, where the diameter of the through hole is smaller than the inner diameter of the hollow cavity. The first damper 301 is inserted into the hollow cavity through the through hole, and the elastic buffer material 4 is filled between the portion of the first damper 301 inserted into the second damper 302 and the bottom and inner wall of the hollow cavity. Specifically, the elastic buffer material 4 in this embodiment is rubber, which is easy to obtain and process and has a certain elasticity, so that a good shock absorption and buffer effect can be achieved.

A sealing assembly 5 is provided between the first connector 1 and the second connector 2. Specifically, the sealing assembly 5 includes a sealing ring 501, the sealing ring 501 also has a hollow cavity, the sealing ring 501 is coaxially disposed with the first connector 1 and the second connector 2, and the cavity of the sealing ring 501 is in communication with the cavities of the first connector 1 and the second connector 2. One end of the seal ring 501 is connected to the first connector 1, and the other end is connected to the second connector 2. The outer wall of the sealing ring 501 is provided with a first sealing groove 502 near the position of the first connecting piece 1, the outer wall of the sealing ring 501 is provided with a second sealing groove 503 near the position of the second connecting piece 2, and sealing rings 504 are arranged in the first sealing groove 502 and the second sealing groove 503. The sealing ring 504 can seal the joint of the sealing ring 501 and the first connecting piece 1 and the second connecting piece 2, so that gas is prevented from entering and exiting from the joint, and the vacuumizing effect of the molecular pump is prevented from being influenced.

The sealing ring 504 is integrally connected with the elastic buffer material 4 between the first damper 301 and the second damper 302 through the filler between the first connector 1 and the second connector 2. Further, the filler is also an elastic buffer material, that is, an elastic buffer material 4 is also disposed between the sealing ring 504 and the first connecting member 1 and the second connecting member 2, and the elastic buffer material 4 between the sealing ring 504 and the first shock absorbing member 301 and the second shock absorbing member 302 is integrally connected with the filler between the first connecting member 1 and the second connecting member 2. In particular, the filler between the first connector 1 and the second connector 2 is also rubber. When filling rubber, can make a cylindric frock in advance, frock inner wall and the laminating of the outer wall of first connecting piece 1 and second connecting piece 2 to cover and establish in the outside of sealing ring 501, then pour into rubber from the reservation mouth on the frock into, until rubber is full of between first connecting piece 1 and the second connecting piece 2 (including between first shock-absorbing member 301 and the second shock-absorbing member 302), after rubber solidifies, tear the frock open.

The following describes the working principle of the damping device provided in this embodiment as follows:

first, be connected first connecting piece 1 with the molecular pump, second connecting piece 2 is connected with the electron microscope, after the molecular pump starts, can produce the vibration, and the vibration can be buffered and weaken by filler (rubber) between first connecting piece 1 and the second connecting piece 2 to the vibration that transmits to the electron microscope will be attenuated very little, can not influence the normal work of electron microscope. And even if the molecular pump malfunctions, a larger torque is generated, and the molecular pump cannot fall off under the fastening action of the screw rod and the nut 303, so that a safety accident is caused.

In other embodiments, the shock absorbing assemblies 3 may be arranged in four groups, eight groups, etc.; the first damper 301 may be connected to the second connector 2, and the second damper 302 may be connected to the first connector 1.

It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.

Claims (10)

1. The utility model provides a damping device, its characterized in that, including first connecting piece (1) and second connecting piece (2) that are connected, first connecting piece (1) with be provided with damping module (3) that two sets of intervals set up between second connecting piece (2), damping module (3) include first damping piece (301) and second damping piece (302), one end of first damping piece (301) with one of them be connected of first connecting piece (1) and second connecting piece (2), the other end inserts in second damping piece (302), first damping piece (301) with have elastic buffer material (4) between second damping piece (302), one end that second damping piece (302) kept away from first damping piece (301) with one of them other of first connecting piece (1) and second connecting piece (2) are connected.

2. Damping device according to claim 1, characterized in that the second damping member (302) has a hollow cavity in which the first damping member (301) is inserted near one end of the second connecting member (2), the portion of the first damping member (301) inserted into the second damping member (302) and the bottom and inner wall of the hollow cavity being filled with the elastic damping material (4).

3. The shock absorbing device according to claim 2, wherein a through hole is provided at an end of the second shock absorbing member (302) remote from the second connecting member (2), the diameter of the through hole is smaller than the inner diameter of the hollow cavity, and the first shock absorbing member (301) is inserted into the hollow cavity through the through hole.

4. Damping device according to claim 2, characterized in that the outer diameter of the portion of the first damping element (301) close to the second connecting element (2) is larger than the outer diameter of the portion remote from the second connecting element (2).

5. Damping device according to claim 1, characterized in that a plurality of groups of damping members (3) are arranged between the first connecting member (1) and the second connecting member (2), the plurality of groups of damping members (3) being arranged at regular intervals along the circumference of the first connecting member (1) and the second connecting member (2).

6. Damping device according to claim 1, characterized in that a sealing assembly (5) is arranged between the first connection piece (1) and the second connection piece (2).

7. The shock absorbing device according to claim 6, wherein the sealing assembly (5) comprises a sealing ring (501), one end of the sealing ring (501) being connected to the first connecting member (1) and the other end being connected to the second connecting member (2).

8. The damping device according to claim 7, characterized in that a first sealing groove (502) is arranged at a position, close to the first connecting piece (1), of the outer wall of the sealing ring (501), a second sealing groove (503) is arranged at a position, close to the second connecting piece (2), of the outer wall of the sealing ring (501), and sealing rings (504) are arranged in the first sealing groove (502) and the second sealing groove (503).

9. Damping device according to claim 8, characterized in that the sealing ring is integrally connected with the elastic cushioning material (4) between the first damping member (301) and the second damping member (302) by means of a filler between the first connecting member (1) and the second connecting member (2).

10. Damping device according to any one of claims 1-9, characterized in that the first connection element (1) is a first flange and the second connection element (2) is a second flange.

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